Abstract: A resistance heating element 33 for heating a wafer W is embedded within a ceramic heater 22 that forms a susceptor for a semiconductor wafer W to be processed, and power lines 35 from the resistance heating element 33 extend out of the processing chamber 20. A sheathing bellows 38 that houses the power lines 35 in an insulated state is interposed between the ceramic heater 22 and a base plate 24 of the processing chamber 20, and an end piece 39 of the sheathing bellows 38 is connected by screws 40 to the ceramic heater 22 to provide a space 50 therebetween. The screws 40 are such as to permit the thermal expansion of the sheathing bellows 38. This configuration makes it possible to make the temperature distribution in the surface of the semiconductor wafer uniform and thus improve the uniformity of film formation, and also prevent corrosion of components such as the power lines and terminals, and suppress the generation of particles.

Abstract: A resistance heating element 33 for heating a wafer W is embedded within a ceramic heater 22 that forms a susceptor for a semiconductor wafer W to be processed, and power lines 35 from the resistance heating element 33 extend out of the processing chamber 20. A sheathing bellows 38 that houses the power lines 35 in an insulated state is interposed between the ceramic heater 22 and a base plate 24 of the processing chamber 20, and an end piece 39 of the sheathing bellows 38 is connected by screws 40 to the ceramic heater 22 to provide a space 50 therebetween. The screws 40 are such as to permit the thermal expansion of the sheathing bellows 38. This configuration makes it possible to make the temperature distribution in the surface of the semiconductor wafer uniform and thus improve the uniformity of film formation, and also prevent corrosion of components such as the power lines and terminals, and suppress the generation of particles.

Abstract: An efficient cooking range system for maximizing the contact between the heating element of a cooking range and a cooking pot or pan being heated by the heating element. The efficient cooking range system includes a cooking range with a cook top having a cooking well therein. The cooking well has an interior base wall and an interior perimeter side wall upwardly extending around the interior base wall of the cooking well. An insulating layer is provided on the interior base wall and the interior perimeter side wall of the cooking well. A drop basin is provided in the cooking well. The drop basin has a bottom wall and a side wall upwardly extending around the bottom wall. A coiled heating element is provided in the cooking well beneath the bottom wall of the drop basin.

Abstract: A device for warming and illuminating pre-packaged, pre-wetted disposable towels is provided. The unit also secures a plastic canister of disposable towels so that the towels may be dispensed with one hand. A cup sized to enclose the canister in an upper sector has a supporting dish, upon the upper surface of which is provided a series of lips to engage various diameter plastic canisters containing the towels. The dish has a recessed bowl at its center in which one or more small incandescent light bulbs are mounted to warm the fluid pool within the canister and to provide illumination through a translucent window portion of the cup. The top of the dispenser is capped to retain the container from above, while the dish is spring mounted within the cup to assure a snug vertical fit of the container within the cup. A dispenser opening is provided in the cap of the unit, through which the towels from the container are pulled out.

Abstract: An electric heating apparatus for preventing recrystallization or to dissolve existing crystals of pharmaceutical compositions, such as mannitol, which tend to recrystallize during storage. Single dose sealed vials of the pharmaceutical are received in a receptacle having an open top, closed bottom and reflective inner surfaces. A light bulb is supported in the receptacle above the vials and the radiant energy therefrom reflected from the inner surfaces of the receptacle heats the vials.The light bulb and support therefor are of such dimension that visual observation of the vials through the open top is not obstructed. The support for the light bulb includes a swivel joint permitting horizontal movement of the light bulb to provide access to the interior of the receptacle for removal of the vials. The temperature within the receptacle is controlled by a control means, such as a thermostat, in circuit with the light bulb.

Abstract: An adjustable temperature warming plate for an electric coffee maker in which a fixedly positioned metal hot plate has an electric heating element disposed beneath and adjacent the hot plate with the supporting means for the electric heating element permitting the heating element to pivot about a contact point near the edge of the hot plate for varying the thermal coupling of the heating element to the hot plate by changing the spacing between the heating element and the hot plate. A pressure element is provided to urge the heater toward the contact point and a setting element is provided to adjust the spacing between the heating element and the hot plate. This provides a simple and reliable means for varying the thermal coupling of the heating element to the hot plate and consequently the temperature of the warming plate. The heating element includes a tube unitary therewith forming a continuous flow water heating tube for the coffee maker.