Abstract: The invention provides a linear and/or plane heating element, and a thawing mat, and a hot mat comprising the linear and/or plane heating element that provides necessary heat quantity at low electric power without burning fossil fuel and the like. A heating element is provided produced by coating laminated polyester on a plane painted by paint that adds nickel-indium compound oxide to the upper surface of polyester film to solderlessly connect electrodes to both ends to connect a power supply to the electrodes. The present invention provides a thawing mat and hot mat that entirely and uniformly coat the heating element having high conductivity and heating efficiency by adding nickel-indium compound oxide having high conductivity and heating efficiency to thermally deposit. Thus, maintenance cost and electricity expense can be saved, and both high quality and social cost can be achieved.

Abstract: A fixing heater includes a substrate, a relatively narrow first heating resistor strip formed on the substrate, and a relatively wide second heating resistor strip formed on the substrate substantially in parallel to the first heating resistor strip. The second heating resistor strip is formed with a plurality of slits extending longitudinally of the strip.

Abstract: The invention relates to a device for depositing especially crystalline layers on especially crystalline substrates by means of reaction gases fed to a heated process chamber. Said process chamber is formed by the cavity of an especially multi-part graphite tube arranged in a reactor housing that especially comprises quartz walls. Said reactor housing, in the area of the process chamber, is enclosed by a high-frequency coil and the space between the reactor housing wall and the graphite tube is filled with a graphite foam sleeve. In order to improve heat insulation, the graphite foam sleeve is fully slit. The slot is wider than the maximum thermal elongation of the graphite foam sleeve in the peripheral direction to be expected when the device is heated up to process temperature.

Abstract: Electrically resistive heating element, with metal strip electrodes secured thereto, and with electrical wires secured to said metal strip electrodes, is encapsulated with thermoset-molding compound.

Abstract: A heating device at least having an electrically insulating film formed on a surface of a substrate, a heating member formed on the electrically insulating film, and a protection film formed over the electrically insulating film and the heating member, the electrically insulating film and the protection film containing a silicon nitride film having a silicon cont ent in excess of an elemental ratio of silicon to nitrogen of 3:4.

Abstract: To provide a glow plug capable of speedily increasing the temperature, a glow plug mounting structure, and a process for manufacturing the glow plug. In the invention, the glow plug (1) comprises: a cylindrical sheath tube (3) closed at its front end 3S) and opened at its base end (3K); a cylindrical metal shell (5) covering the side of the base end (3K); a heating coil (7) arranged in the sheath tube (3) along the axis thereof and connected at its front end portion (7S) to the front end (3S) of the sheath tube (3); and insulating powder (11) packed in the sheath tube (3). The front end side portion (7H) of the heating coil (7) farther than the foremost end (9T) of the lead member (9) has a coil length not larger than 15 mm in the axial direction from the front end (3S) of the sheath tube (3). The sheath front end portion (3C) enclosing the front end side portion (7H) has an outer diameter not larger than 4.4 mm.

Abstract: A cloth heater and method for using the heater are provided. The heater utilizes a horizontally disposed surface, a heated glass panel, and support members. The horizontally disposed surface may comprise the top edge or surface of the heated glass panel, or a surface on a separate rack that is above and vertically inline with the top edge of the heated glass panel. The heated glass panel also has two opposing major surfaces. The support members physically support the heated glass panel and have electrical leads that communicate electrical power to the heated glass panel, thus heating the heated glass panel. When a cloth is placed across the horizontally disposed surface, the horizontally disposed surface supports the cloth, and the cloth makes contact with the two opposing major surfaces of the heated glass panel, thus heating the cloth at both opposing major surfaces.

Abstract: The invention relates to a heater for an electric central buffer coupling in which at least one heating element (3) is placed in a recess of the coupling head (1) and is covered toward the outside. To improve the transfer of heat from the heating element (3) into the coupling head (1) and to reduce the expense of assembling and dismantling the heating element (3), the recess is precision fitted to the diameter of the heating element (3) and the recess is constructed in such a way that after completion of the recess the heating element (3), including its seal to the front side, can be introduced into the recess and is to be removably affixed to the coupling head (1).

Abstract: A heater including: a rod-shaped ceramic heater including: a ceramic heater body extending in an axial direction and having a heating-element at its leading end portion for generating heat when energized; and first and second energizing lead terminals extending from the heating element and exposed to an outer circumference of a trailing end side of the ceramic heater body; a cylindrical outer cylinder for holding the ceramic heater while protruding a leading end portion and a trailing end portion of the ceramic heater; and a core rod arranged on said trailing end side of the ceramic heater in an axial direction and connected electrically with the first lead terminal, wherein the heater further includes: a ring member including: a ring leading end portion fixed by a tight fitting on an outer circumference of a trailing end side of the ceramic heater and connected electrically with the first lead terminal; and a ring trailing end portion protruding backward from a trailing end of the ceramic heater; and a metal

Abstract: A heated delivery system for pizza and the like including a thermally insulated receptacle, an electrical resistance heating unit having a heat storing shell molded from thermosetting resin, and an electrical resistance heating member within the shell, the member having the capacity of being heated and maintained at a desired temperature. The heating member may be silicone rubber containing resistance heating elements, and its temperature may be regulated by a suitable temperature control, such as a thermostat or other means.

Abstract: Susceptor designs are provided for controlling damage to wafers, particularly during cold wafer drops-off on a hot susceptor. The designs include axisymmetric grid designs, such that thermal gradients are symmetrical in the circumferential (?) direction and the same traversing any particular radial line. The grids are preferably arcuate and each have the same surface area. In one embodiment an outer zone is asymmetrically designed to induce predictable wafer curling in a saddle shape.

Abstract: A self-regulating positive temperature coefficient (PTC) heater assembly and a method of manufacturing the heater assembly are disclosed. The PTC heater assembly includes at least one PTC heating element and a pair of spaced electrodes. Each electrode includes a first side, the first sides of the pair of electrodes being spaced from one another, wherein the at least one PTC element is located between, supported by and energized by the pair of electrodes. The at least one PTC element is oriented approximately transverse to a longitudinal axis of the pair of spaced electrodes. An electrically insulative and thermally conductive interface pad is interposed between and contiguous to the first side of at least one of the pair of electrodes and a wall of the PTC element. A pair of power leads, one being connected to each of the pair of electrodes, energizes the pair of electrodes.

Abstract: A surface mountable PTC device includes a PTC layer, first and second electrodes formed on the PTC layer, first and second insulating layers formed respectively on the first and second electrodes, and first and second terminals connected respectively and electrically to the first and second electrodes. Each of the first and second electrodes is formed with a hole. Each of the first and second insulating layers fills the electrode hole in the respective one of the first and second electrodes and is formed with an insulating hole surrounded by the electrode hole. Each of the first and second terminals extends through the insulating hole in the respective one of the first and second insulating layers.

Abstract: A semiconductor wafer susceptor for batch substrate processing. The susceptor includes a central region in a primary plane and a plurality of flat annular extensions extending below the central region in a secondary plane. The primary and secondary planes are parallel to each other. An edge of the substrate overhangs the central region allowing no contact of the susceptor with the substrate edge.

Abstract: In a heater in which an electrically insulating material (4) including an oxide is filled between a heating element (2) made of metal including chromium and aluminum and a cover (3, 5, 6) for sealing the heating element (2), and in which a lead wire (7, 8) of the heating element (2) extends through a portion (5, 6) of an electrical insulator of the cover (3, 5, 6) in order to enable the heater to be used at temperatures higher than the prior art, an oxide film including aluminum oxide is formed on the surface of the heating element (2). The portion of the cover (3, 5, 6) excluding the portion (5, 6) serving as an electrical insulator is a metal pipe (3) that serves as a sheath and includes nickel and chromium, and an oxide film is formed on the surface of the metal pipe (3). Therefore, the heater can be used in dies for plastic forming or the like.

Abstract: A heated steering wheel with a preformed heating member, having an inner rim portion; a cushion layer disposed about the inner rim portion; and a preformed heating element disposed about the cushion layer; wherein the cushion layer is applied using a molding process and the preformed heating element and the inner rim portion are inserted in a mold used for the molding process prior to the application of said cushion layer therein.

Abstract: A cartridge heater for mounting in the bore hole of a device to heat the device, having an improved release coating to facilitate the removal of the cartridge heater from the bore hole subsequent to operation at elevated temperatures, wherein the release coating is a fast-drying, graphite-based solid film lubricant that bonds to the heater.

Abstract: A large area heater used, for example, in a laser printer belt fuser or as cooking surface, has an alumina substrate in which two bowed parts of alumina ceramic having opposed concave regions are formed together as a laminate. Electrical resistors are deposited on the laminate. The alumina laminate provides excellent resistance to uneven heating or other thermal stress. Alumina ceramic is readily shaped during manufacture and manufacturing costs and yield are good. A wide variety of large area heaters can usefully employ the laminate.

Abstract: A susceptor supporting construction has a susceptor for heating a member to be processed and a supporting member, in which an inner space is arranged, connected to the susceptor. A chamber having an opening is connected to the supporting member, the opening of the chamber is communicated with the inner space of the supporting member, and the inner space of the supporting member is sealed in an airtight manner with respect to an inner space of the chamber. The supporting member further has a tubular main portion, a diameter extending portion arranged at an end portion thereof to which the susceptor is faced, and one or more continuous round portions arranged between the main portion and the diameter extending portion, when viewed by an outer profile of a longitudinal section of the supporting member.

Abstract: A method for the manufacture of a heat fusion fitting, which comprises i) forming a body (1) comprising at least a first layer of a first cross-linked polymeric material, ii) embedding or partly embedding a ferromagnetic heating element (11, 12) in a second polymeric material (13, 14) to form an insert (7, 8), the ferromagnetic heating element (11, 12) having a Curie temperature equal to or greater than the crystalline melting point or softening point of the second polymeric material (13, 14), and iii) assembling the body and the insert (7, 8) to form the fitting.

Abstract: A heated motorcycle handgrip is securable to a motorcycle handlebar and includes a grip housing that has a first end adapted to receive the handlebar, and a second end opposite the first end. The grip housing includes a heating element that is operable to provide a heat output, and a heater control dial is coupled to the second end of the handgrip to control the heat output of the heating element.

Abstract: A self retaining crankcase heater (10) has a tubular casing (12) of relatively flexible, thermally conductive material in which is received a PTC element (16), sandwiched by semi-cylindrical terminal blocks (14). Spring contacts (18a) are received in grooves (14c) of the terminal blocks and the assembly is potted with heat conductive material (20) and sealed with sealant (22). Locking projections (12d) are formed at open end (12c) of the casing which are lockingly received in an annular recess (24a; 26d) of a well (24; 26) in a compressor housing wall.

Abstract: A thermally efficient resistive heater assembly for heating a source substance for generation of gas has a chamber for containing the source substance, a thin resistive heating element suspended across an aperture and disposed for immersion in the source substance, and conductive traces electrically coupled to the thin resistive heating element. The resistive heater assembly may be fabricated by a specially adapted method including providing a first substrate layer, bonding to it a second substrate layer, the second substrate layer bearing the resistive heating element and conductive traces, bonding to that an optional hydrophobic layer if necessary, and bonding to the previous layer a top layer. At least one of the layers may include manifolding for the gas. All or part of the fabrication method may be performed as a reel-to-reel process.

Abstract: A process for producing a ceramic heater includes forming a resistance heating element on a surface of a ceramic substrate. The resistance heating element is divided into plural sections. Resistivities of the plural sections are measured, respectively. Each of the plural sections is trimmed according to a comparison between the resistivities of the plural sections.

Abstract: A sheathed electrical resistance heater is provided with a metal corrugated resistance heating element located internally within a surrounding metal sheath and separated from the sheath by a compacted insulating material such as magnesium oxide. The preferred corrugated resistance element is a flat strip of metal that has been corrugated such as by passing the strip through the nip of a pair of gears. The corrugated strip resistance element is thicker than a foil and may be used to provide sheathed, electrical resistance heaters where it is too difficult to wind large diameter wires, which are desired for a low resistance ohm of 0.12 ohm/inch or less, on a small arbor to form a coiled wire resistance element. A heater may be formed with a resistance of 0.05 ohm/inch using the corrugated metal ribbon and may be 200 inches in length and have a finned sheath. Preferably, the sheath is compressed in a die to reduce the cross-sectional area of the heater without a substantial elongation of the sheath.

Abstract: A large area heater used, for example, in a laser printer belt fuser or as cooking surface, has an alumina substrate in which two bowed parts of alumina ceramic having opposed concave regions are formed together as a laminate. Electrical resistors are deposited on the laminate. The alumina laminate provides excellent resistance to uneven heating or other thermal stress. Alumina ceramic is readily shaped during manufacture and manufacturing costs and yield are good. A wide variety of large area heaters can usefully employ the laminate.

Abstract: An electrical heater utilizes negative temperature coefficient material (NTC) and current imbalance between live and neutral ends of the heater to simultaneously protect the heater from the hot spot and mechanical intrusion into the heating cable. The NTC layer, separating the heating wire and current leakage conductor, becomes electrically conductive at the temperatures above 60° C., thus “leaking” the current to earth. The hot spot is detected by measuring the current imbalance between line and neutral connections of the heating cable. The mechanical intrusion into the heater, such as cable or insulation damage, water or sharp metal object penetration, is also simultaneously measured by the same current imbalance measuring system such as Ground Fault Circuit Interrupter (GFCI). The optional return conductor and metal foil/mesh hot spot detection shields cancel electromagnetic field. The heater may contain positive temperature coefficient (PTC) continuous sensor to control the temperature in the heater.

Abstract: A steel plate splicing facility includes, a steel plate heating apparatus for retrieving and heating a preceding steel plate and a following steel plate, and a shear-joining apparatus for clamping a tail end portion of the preceding steel plate and a leading end portion of the following steel plate in an overlapping condition by a die and a clamp and shearing them with a punch, such that surfaces of the tail end portion and the leading end portion are newly formed and brought in contact with each other in order to them. The shear-joining apparatus joins the preceding and following steel plates at a temperature equal to or higher than 350° C. and at a percentage clearance c/t equal to or lower than 5%, c/t being defined by c/t=D/(t1+t2)×100 where D represents a distance between the punch and the die, and t1 and t2 represent a thickness of respective steel plates.

Abstract: There is disclosed a heating apparatus which has an electrostatic adsorption function and which comprises at least a supporting substrate, an electrode for electrostatic adsorption formed on a surface of one side of the supporting substrate, a heating layer formed on a surface of the other side of the supporting substrate, and an insulating layer formed so that it may cover the electrode for electrostatic adsorption and the heating layer wherein a volume resistivity of the insulating layer is varied in a plane. Thus, there can be provided a heating apparatus which has an electrostatic adsorption function wherein uniformity of a temperature distribution in a plane of the wafer when the wafer is heated can be improved, and the wafer can be heat-treated uniformly.

Abstract: A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra?0.05 ?m and Rmax?0.6 ?m, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

Abstract: A pin heater in a sheathed-element glow plug and a sheathed-element glow plug for internal combustion engines, which have improved electrical and mechanical properties, are described. The pin heater has at least one essentially internal insulating layer and one essentially external first conductive layer, both layers including ceramic composite structures. The pin heater includes a second conductive layer, which also includes a ceramic composite structure. The second conductive layer is bonded to the first conductive layer in the region of a combustion chamber side tip of the pin heater. The second conductive layer runs inside the insulating layer.

Abstract: A carbon heating apparatus utilizing a graphite felt and a method of manufacturing thereof are presented comprising: a carbon heater made of a carbon fiber cut having a preset length and width, being performed heat treatment in a hydrogen gas atmosphere, a pair of terminal parts having a flat portion (31) at one end for connecting to outside power supply lines and clamping brackets (32) with protrusions (33) at opposite end for securely attaching to the carbon heater, and a quartz glass tube (10) with melt-jointing potions (15) for sealing both ends of the carbon heater.

Abstract: An electric heating device that is constructed in a unique fashion that allows it to be drapeable so that its three-dimensional, ‘scoop-like’ shape fits the curvature of a relaxed shoulder, a crooked knee or a crooked elbow, and is held in place by an adjustable strap whose ends are attached to the device. The heating element configuration that is contained within a singular, sealed, water-tight vinyl envelope that is produced as one piece, with the three panels briefly connected at a point where the heating element wiring crosses from one panel to the other.

Abstract: The object of the present invention is to provide an aluminum nitride sintered body which has excellent mechanical strength and in which ceramic particles is prevented from coming off from the surface and/or side thereof and generation of free particles is suppressed. The aluminum nitride sintered body of the present invention is wherein it contains sulfur.

Abstract: A sheathed element glow plug having an ionic current sensor and a method of operating such a sheathed element glow plug are provided. The sheathed element glow plug includes a housing and a rod-shaped heating element arranged in a concentric bore in the housing. The heating element has at least one insulation layer, a first feeder layer, and a second feeder layer, the first feeder layer and the second feeder layer being connected by a web on the combustion chamber-side end of the heating element, the first and second feeder layers and the web being made of an electrically conducting ceramic material, and the insulation layer being made of an electrically insulating ceramic material. The heating element has at least one ionic current detection electrode made of an electrically conducting ceramic material.

Abstract: A ceramic joint body including a ceramic substrate and a ceramic body such as a cylindrical body firmly bonded to each other and excellent in corrosion resistance in the ceramic substrate for use for a semiconductor product producing/examining the step. The ceramic bonded body includes a ceramic substrate in which a conductor is provided, and a ceramic body bonded to a bottom face of the ceramic substrate. The ceramic bonded body has a region, where no conductor is formed, in at least a part of a region above a bonding interface between the ceramic substrate and the ceramic body.

Abstract: A sheathed-element glow plug having an ionic-current sensor, as well as a method for operating a sheathed-element glow plug having an ionic-current sensor are described, the sheathed-element glow plug having a housing and a rod-shaped heating element arranged in a concentric bore hole of the housing. The heating element has at least one insulating layer as well as a first lead layer and a second lead layer, the first lead layer and the second lead layer being connected via a bar at the end of the heating element on the combustion chamber side, the first and second lead layers and the bar being made of electroconductive ceramic material, and the insulating layer being made of electrically insulating ceramic material. The heating element has a first electrode for detecting ionic current and a second electrode for detecting ionic current which are embedded in the insulating layer or applied on the insulating layer.

Abstract: Temperature of a heater is controlled by switching an increasing rate of a resistance value of heating unit of the heater. During a period T1 from a time point when heating of the heater is started until the resistance value of the heating unit reaches a reference value, the increasing rate is changed in multiple heating stages. In this manner, the temperature and the resistance value of the heating unit are increased. During a period T2 from a time point when the resistance value of the heating unit reaches the reference value, feedback control is performed such that the resistance value is kept at the reference value as a target value.

Abstract: The present invention provides a ceramic substrate for use in an apparatus for manufacturing and inspecting semiconductors. The ceramic substrate comprises a through-hole having excellent tolerance performance against a drawing stress applied to an external terminal pin. The through-hole is provided with a projection which protrudes into the ceramic substrate made of aluminum nitride as primary component.

Abstract: A heating element for an electric appliance for heating or cooking foods. The heating element is composed of: a tubular metal envelope; and a resistance wire encased in an insulator disposed at the interior of the tubular envelope. The wire is composed of nickel and iron as the two principal elements, and has a temperature coefficient ? greater than 1500 ppm/° C. The wire may be wound in a spiral and the outer diameter of the spiral is greater than 0.7 times the inner diameter of the tubular envelope.

Abstract: There is disclosed a heating apparatus with electrostatic attraction function 1, comprising at least a supporting base 2, an electrode for electrostatic attraction 4 and a heating layer 5 that are formed on the supporting base, and an insulating layer 6 that is formed on the electrode for electrostatic attraction and the heating layer, wherein the electrode for electrostatic attraction and/or the heating layer are/is composed of pyrolytic graphite containing boron and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and the insulating layer has an electric resistivity of 106-1015 ?cm. There is provided a heating apparatus with electrostatic attraction function, which has a high thermal shock resistance, no problem of delamination, a proper resistance value, and a sufficient electrostatic attraction force even in a medium and high temperature range of 500-800° C.

Abstract: An auger type ice-making machine of the present invention comprises an ice-making cylinder which accommodates an auger rotatably in the interior thereof, an ice compression head which supports the upper end portion of the auger rotatably, and which is disposed in the upper portion of the ice-making cylinder, and a cast-in heater which is attached to the outer peripheral surface of an accommodating portion for the ice compression head of the ice-making cylinder. According to the present invention, the use of a cast-in heater enables heat to be reliably transmitted to the ice compression head, whereby the compressed ice can be melted and ice can be discharged smoothly.

Abstract: To provide a wafer heating apparatus that can measure a surface temperature of a wafer accurately and responsively. A front surface of a ceramic plate 2 serves as a mounting surface on which a wafer is placed, and a rear surface or an inner portion of the ceramic plate 2 is formed with a resistance heating element 5. A recess 9 is formed in the rear surface of the ceramic plate 2. A temperature measuring member formed of a temperature sensor 8a and leads 8 is inserted in the recess 9 so as to be held by filling 17. In the wafer heating apparatus, a length along the leads from the front of the protective tube to a point where the leads are exposed from the filling is set to 5 to 30 times an outer diameter of the protective tube.

Abstract: A glow plug according to one embodiment of the present invention includes a cylindrical metallic shell, an electrode rod disposed in a rear portion of the metallic shell, a heater disposed in a front portion of the metallic shell, and an electric insulator provided between an inner surface of the metallic shell and a circumferential surface of the electrode rod to keep the electrode rod insulated from the metallic shell. The metallic shell has a portion caulked to the electrode rod at a location axially corresponding to the electric insulator so that the circumferential surface of the electrode rod becomes deformed to define therein a recessed portion. The caulked portion is engaged in the recessed portion with the caulked portion with the electric insulator interposed between the caulked portion and the recessed portion, thereby securing the electrode rod in the metallic shell.

Abstract: The present invention is related to an electrically conductive and heating wire containing fabric. The fabric is made of metal yarn and natural fiber. After a yarn covering process (covering metal yarn with short staple yarn), a circular loom is used to weave circular hollow heating wire containing fabric in the desired dimensions (0.1 cm˜5 cm). After that, the heating wire containing fabric is pressed into flat shape. Then, the fabric is covered with natural long fiber or short staple, such as wool and rabbit fur. The wire containing fabric will be made into different types of products according to user demand (like rehabilitation equipment or insulating clothes). Thus, convenience is provided for use of the product and wide range of applications can be found for the present invention.

Abstract: Improvements in the design of a low mass wafer holder are disclosed. The improvements include the use of peripherally located, integral lips to space a wafer or other substrate above the base plate of the wafer holder. A uniform gap is thus provided between the wafer and the base plate, such as will temper rapid heat exchanges, allow gas to flow between the wafer and wafer holder during wafer pick-up, and keep the wafer holder thermally coupled with the wafer. At the same time, thermal disturbance from lip contact with the wafer is reduced. Gas flow during pick-up can be provided through radial channels in a wafer holder upper surface, or through backside gas passages. A thicker ring is provided at the wafer holder perimeter, and is provided in some embodiments as an independent piece to accommodate stresses accompanying thermal gradients. Self-centering mechanisms are provided to keep the wafer holder centered relative to a spider which is subject to differential thermal expansion.

Abstract: The present invention provides a ceramic substrate which can keep a sufficiently large breakdown voltage even if the pore diameter of its maximum pore is 50 ?m or less to be larger than that of conventional ceramic substrates, can give a large fracture toughness value because of the presence of pores, can resist thermal impact, and can give a small warp amount at high temperature. The ceramic substrate of the present invention is a ceramic substrate for a semiconductor-producing/examining device having a conductor formed on a surface of the ceramic substrate or inside the ceramic substrate, wherein: the substrate is made of a non-oxide ceramic containing oxygen; and the pore diameter of the maximum pore thereof is 50 ?m or less.

Abstract: A ceramic heater improving a uniformity of temperature distribution in a work heating face, wherein a resistance heating body formed on a face of a ceramic substrate opposite to the work heating face thereof is such that the scattering of thickness is within ±50% of an average thickness, and a surface roughness of the resistance heating body is a range of 0.05-100 ?m as Rmax and not more than 50% of the average thickness.

Abstract: It is a an object of the present invention to provide a ceramic substrate for a semiconductor producing/examining device which has high fracture toughness value, exellent thermal shock resistivity, high thermal conductivity and an excellent temperature rising and falling properties, and is preferable as a hot plate, an electrostatic chuck, a wafer prober and the like. A ceramic substrate, for a semiconductor producing/examining device, having a conductor formed inside thereof or on the surface thereof of the present invention is the ceramic substrate, wherein said ceramic substrate has been sintered such that a fractured section thereof exhibits intergranular fracture.

Abstract: An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device which is capable of accurately measuring the temperature of an object to be heated and evenly heating the whole body of a silicon wafer by adjusting the heating state of a heating element based on the temperature measurement result, and the ceramic heater for a semiconductor producing/examining device of the present invention is a ceramic heater including a ceramic substrate and a heating element formed on the surface or the inside of the ceramic substrate, wherein a temperature measurement element is formed while being brought into contact with the ceramic substrate and the surface roughness of the ceramic substrate brought into contact with the temperature measurement element is Ra?5 ?m.