Abstract: The present invention relates to a defect inspection apparatus for inspecting defects in patterns formed on a semiconductor device, on the GUI of which for the confirmation of the inspection results an area is provided for displaying any one of or facing each other the features amount of defects, and the image during inspection or the reacquired image, and on the GUI of which a means is provided for setting the classification class and importance of the defects, and based on the classification class and the importance of the defects information set by this setting means, the classification conditions or the defect judging conditions are automatically or manually set so that the inspection conditions may be set easily.

Abstract: A digital type controller for a punch press or the like which includes a shaft angle encoder for generating control pulses corresponding to specific main shaft angles of the machine, a plurality of sensors for generating signals in response to the operating condition of the machine and process, a plurality of circuits for enabling the reception of said signals at selectable shaft angles of the machine, a plurality of circuits for enabling the reception of said signals in a selectable prescribed order, a plurality of circuits for storing said signals, a plurality of circuits for sampling the stored signals at selectable shaft angles of the machine, a plurality of circuits which detect the presence or absence of the sampled signals, an output circuit for deenergizing the machine Run control circuit when an absence of a sampled signal occurs, a plurality of circuits for energizing and deenergizing external electrical loads at selectable shaft angles of the machine, and a shaft encoder/decoder which provides cont