Abstract: An image processing device includes: first and second illumination units that emit light to a subject in different directions; an image capturing unit that captures first and second images in a state where the first and second illumination units emit the light, respectively; and an image correction unit that compares a first luminance value of a first pixel configuring the first image with a second luminance value of a second pixel configuring the second image for each corresponding pixel, and generates a corrected image by performing correction processing to a synthesized image of the first and second images. The image correction unit calculates a difference between the first and second luminance values, and calculates a luminance correcting value based on the difference and a function which monotonically increases as the difference increases and whose increase rate gradually decreases, and generates the corrected image using the luminance correcting value.

Abstract: An imaging system including a dichroic beamsplitter configured to be angled at least at a first angle and a second angle wherein when angled at the first angle imaging at a broad band wavelength spectrum and at least one of laser designation and laser ranging performed with a laser beam occurs with the dichroic beamsplitter and when angled at the second angle the imaging at the broad band wavelength spectrum and laser spot tracking performed with a laser beam occurs through the dichroic beamsplitter. Another system and method are also disclosed.

Abstract: The present invention relates to the method and device to determination of the properties of gemstones and more particularly evolution of gemstone by detection of internal and external structure of gemstone. In particular, the present invention methods and device is used to identify the size, location of impurities/defects in raw gemstone with the help of optimize spectroscopy scanning. The present invention method and device is used for precise automatic evolution of gemstones and possibilities (estimation) of final value of planned gemstone after remaining gemstone processing cycle.

Abstract: A scanning electron microscope of the present invention performs scanning by changing a scanning line density in accordance with a sample when an image of a scanned region is formed by scanning a two-dimensional region on the sample with an electron beam or is provided with a GUI having sample information input means which inputs information relating to the sample and display means which displays a recommended scanning conditioHn according to the input and performs scanning with a scanning line density according to the sample by selecting the recommended scanning condition. As a result, in observation using a scanning electron microscope, a suitable scanning device which can improve contrast of a profile of a two-dimensional pattern and suppress shading by suppressing the influence of charging caused by primary charged particle radiation and by improving a detection rate of secondary electrons and a scanning method are provided.

Abstract: An event filtering device and a motion recognition device using thereof are provided. The motion recognition device includes an emitter configured to emit an infrared ray in a pattern; a detector configured to detect events in a visible ray area and an infrared ray area; a filter configured to determine whether at least one portion of the detected events is detected using the infrared ray in the pattern, and filter the detected events based on a result of the determination; and a motion recognizer configured to perform motion recognition based on a detected event accepted by the filter.

Abstract: A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member having first reflective surfaces, and a light receiving system has a light receiving prism member having second reflective surfaces arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.

Abstract: Technologies are generally provided to establish imaging through an optical fiber to enhance optical coupling between an optoelectronic device and the optical fiber. Imaging may be established by determining transmission properties of the optical fiber based on an observed light pattern, and applying a phase mask to input light based on the transmission properties to produce a focused light at the output end of the optical fiber. The focused light may be employed to determine a position and orientation of the optoelectronic device relative to the optical fiber by scanning the focused light and collecting light reflected from the scanning of the optoelectronic device at a charge-coupled device (CCD) camera and generating an image of the optoelectronic device. The position and orientation of the target device may be adjusted employing precision alignment tools to enhance alignment of the target device with the optical fiber for optimal coupling.

Abstract: A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.

Abstract: In general, techniques are described for performing an interpolation with respect to decomposed versions of a sound field. A device comprising one or more processors may be configured to perform the techniques. The processors may be configured to obtain decomposed interpolated spherical harmonic coefficients for a time segment by, at least in part, performing an interpolation with respect to a first decomposition of a first plurality of spherical harmonic coefficients and a second decomposition of a second plurality of spherical harmonic coefficients.

Abstract: An optical observation system includes a spatial light modulator displaying a Fresnel type kinoform on a phase modulation plane, and modulating light L1 in phase to irradiate an observation object with modulated light L2, an imaging optical system imaging observation target light L3 from the observation object, an optical system moving mechanism moving the imaging optical system in an optical axis direction of the observation target light L3, and a control section controlling the optical system moving mechanism such that the focal position of the imaging optical system changes in response to a change in the light condensing position of the modulated light L2 by the Fresnel type kinoform.

Abstract: Optical detection system and method for particles. In exemplary embodiments, the system may comprise a channel, a light source configured to generate light, and one or more optical elements configured to focus a beam of the light on an irradiation zone within the channel. The system also may comprise a mask operatively disposed in an optical path between the light source and the channel. The mask may be configured to block a portion of the beam, thereby producing a shadow region. The system further may comprise a detector configured to detect light deflected from the beam into the shadow region by interaction with a particle passing through the irradiation zone.

Abstract: A method for correcting an exposure pattern on a substrate includes obtaining, based on the exposure pattern, displacement adjustment parameters for adjusting displacements of a worktable supporting the substrate in each of a first direction and a second direction, a rotation angle adjustment parameter for adjusting a rotation angle of the worktable in a rotation direction, and a gap adjustment parameter for adjusting a gap between the worktable and a mask plate. The first direction and the second direction are perpendicular to each other in a horizontal plane. The rotation direction is a direction in which the worktable rotates around a central axis of a base table supporting the mask plate. The method further includes moving the worktable based on the displacement adjustment parameters, the rotation angle adjustment parameter and the gap adjustment parameter.

Abstract: A system for substrate tilt and focus control in an inspection system includes a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate; a tilt-height detection system including: a height detection sub-system and a tilt detection sub-system. The system further includes a first actuator configured to selectably actuate the substrate along a direction perpendicular to the surface of the substrate at a location of the substrate stage assembly; and an additional actuator configured to selectably actuate the substrate along a direction substantially perpendicular to the surface of the substrate at an additional location of the substrate stage assembly; and a MIMO tilt-focus controller communicatively coupled to the height detection sub-system, the tilt detection sub-system, the first actuator and the additional actuator.

Abstract: A method for detecting and controlling supply of an immersion medium into an immersion film region between the front lens of a microscope objective and a preparation, particularly in automated microscopes, using a light source which is reflected into the microscope beam path by means of a beam splitter. The state of the immersion film region is recorded and evaluated in a detection unit of the microscope or a detection unit of the autofocus device through an autofocus signal of the light source and/or a reflection of a modulation object arranged in the intermediate image plane of an incident light illumination, and is transmitted to a control unit for the purpose of a change or an error treatment of the immersion process.

Abstract: Systems for performing machine vision using diffuse structured light comprising: a linear diffuser having an axis of diffusion; a light source that projects an illumination pattern through the linear diffuser and onto a scene, wherein the illumination pattern has transiationai symmetry in a. direction of translation that is aligned with the axis of diffusion; and an image sensor that detects tight reflecting from the scene and that outputs signals corresponding to the detected light. Methods for performing machine vision using diffuse structured light comprising: projecting an illumination pattern from a light source through a linear diffuser and onto a scene, wherein the linear diffuser has an axis of diffusion and the illumination pattern has transiationai symmetry in a direction of translation that is aligned with the axis of diffusion; and detecting light reflecting from, the scene using an image sensor that outputs signals corresponding to the detected light.

Abstract: Methods and devices for a remote control device for a display device are disclosed. In one embodiment, the remote control device may comprise a plurality of light sources that each has a light profile angled in a predetermined degree different from other light sources. In another embodiment, the remote control device may comprise a controller; and a plurality of optical detectors coupled to the controller. Each optical detector may generate a pair of electrical signals in response to incident light from a plurality of light sources located on a display device and the controller may calculate the position of the remote control device based on the electrical signals.

Abstract: A device and method for three-dimensional (3-D) imaging using a defocusing technique is disclosed. The device comprises a lens, a central aperture located along an optical axis for projecting an entire image of a target object, at least one defocusing aperture located off of the optical axis, a sensor operable for capturing electromagnetic radiation transmitted from an object through the lens and the central aperture and the at least one defocusing aperture, and a processor communicatively connected with the sensor for processing the sensor information and producing a 3-D image of the object. Different optical filters can be used for the central aperture and the defocusing apertures respectively, whereby a background image produced by the central aperture can be easily distinguished from defocused images produced by the defocusing apertures.

Abstract: An optical coherence tomography (OCT) measurement system for precision measurement of a translucent sample is provided.

Abstract: A lithographic apparatus is provided and configured to project a patterned beam of radiation onto a substrate. The apparatus has a measurement system to provide measurement data related to a thickness of a resist layer on the substrate, and a controller to control the operation of the lithographic apparatus such that a radiation intensity level in the patterned beam to be projected onto the substrate is controlled based on the measurement data.

Abstract: A computer determines one or more brightness levels associated with a first set of pixels within a light source in an image. The computer determines a brightness effect on a second set of pixels in the image based on the one or more brightness levels associated with the first set of pixels within the light source. The computer receives input to alter at least one of the one or more brightness levels associated with the first set of pixels within the light source. The computer alters one or more brightness levels associated with the second set of pixels in the image based on the received input and the determined brightness effect.

Abstract: Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a plane-parallel plate after light of unnecessary wavelength is removed by a filter. The plane-parallel plate is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

Abstract: An autofocus mechanism includes a light source emitting light through an objective lens at a work piece; a first detector detecting a portion of light reflected by the work piece and generating a first signal; a second detector detecting a portion of the reflected light and generating a second signal; a first amplifier amplifying the first signal and generating a first amplified signal; a second amplifier amplifying the second signal and generating a second amplified signal; an amplification rate definer defining an amplification rate of each of the first amplifier and the second amplifier based on the first amplified signal and the second amplified signal, respectively; and a calculator identifying a focal position of the objective lens based on the first amplified signal and the second amplified signal.

Abstract: The image capture device includes an image capture element which is formed of a plurality of pixels and acquires a captured image by detecting light from a subject and converting the light into an electric signal, an optical path changing unit which changes an optical path of light incident on an image capture element and displaces a position of light incident on the image capture element, a state change determining unit which obtains a deviation of a brightness value per pixel in a captured image, determines whether or not a subject temporally changes its state based on the deviation, and outputs an optical path change instruction to an optical path changing unit when it is determined that the subject does not change its state, a correction value calculating unit which performs a predetermined correction value calculating process on captured images of the same subject before and after a state change by an image capture element and calculates a noise image contained in the captured image as a correction value

Abstract: Methods and systems for autofocusing of an imaging system are presented. Provided is an imaging system and an optical interferometry system for generating one or more images corresponding to a target region in a subject. The method provides calibration information that identifies a focal position of the optical interferometry system corresponding to a determined focal position of the imaging system. A subsequent focal position of the imaging system is determined for generating a desired image corresponding to at least one of another target region in the subject and another position of the target region relative to the imaging system based on the calibration information.

Abstract: A distance detecting device includes a distance calculation unit configured to calculate a distance to a target of imaging based on a first signal corresponding to a luminous flux having passed through a first pupil region of an exit pupil in an imaging optical system, and a second signal corresponding to a luminous flux having passed through a second pupil region different from the first pupil region, and a signal processing unit configured to perform a filtering process on at least one of the first signal and the second signal by using a band pass filter having a lower number of cells in a first direction than a number of cells in a second direction perpendicular to the first direction, and a filter for phase correction having a higher number of cells in the first direction than the number of cells in the second direction.

Abstract: A bending imaging apparatus provided with an imaging optical system, a bending optical element, an image sensor positioned on a post-bending optical axis of the bending optical element, and a housing, includes an inclination adjusting body having a mounting plate portion, onto which the image sensor is mounted, and an inclination-adjusting bent plate portion extending toward an underside of the bending optical element from the mounting plate portion; a swing pivot portion formed between the inclination-adjusting bent plate portion and the housing to pivotally support the inclination adjusting body; and an inclination adjusting portion positioned between the inclination-adjusting bent plate portion and the housing to overlap the bending optical element with respect to the post-bending optical axis direction and swings the inclination adjusting body about the swing pivot portion to adjust an inclination of the inclination adjusting body.

Abstract: An inspection apparatus comprising, a focal position detector that detects a reference focal position of an image plane of a sample from a variation of an output value in optical image data of the sample, the output value being acquired by changing a distance between a first lens and the sample, and detects an optimum focal position of an inspection from the reference focal position, an image processor that obtains at least one of either an average gradation value in each predetermined unit region or a variation of a gradation value in the unit region with respect to the optical image data obtained at the optimum focal position, and a defect detector that detects a defect of the sample based on at least one of either the average gradation value or the variation of the gradation value.

Abstract: There is provided with an information processing apparatus. Location information indicating an approximate location of a measurement target relative to a projection apparatus is obtained. The projection apparatus projects, onto the measurement target, projection light of a predetermined pattern composed of light rays travelling in respective directions. For respective travelling directions, incident regions of the measurement target on which the projection light is incident are estimated in accordance with the location information. Amounts of the projection light toward the respective travelling directions are determined such that light amounts of reflected light from the estimated incident regions toward an image capturing apparatus fall within a predetermined range. The image capturing apparatus captures an image of the measurement target onto which the projection light has been projected.

Abstract: An endoscope apparatus includes an imaging section that includes a phase difference detection element for implementing phase detection autofocus, and acquires a captured image, a phase difference calculation section that calculates a phase difference based on a signal output from the phase difference detection element, a lens position selection section that selects a lens position that is either a near point-side lens position or a far point-side lens position based on the phase difference, the near point-side lens position and the far point-side lens position being discrete lens positions set in advance, and a driver section that changes a lens position of the imaging section to the lens position selected by the lens position selection section.

Abstract: A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member having first reflective surfaces, and a light receiving system has a light receiving prism member having second reflective surfaces arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.

Abstract: An image system comprises a light source, an image sensing device, and a computing apparatus. The light source is configured to illuminate an object comprising at least one portion. The image sensing device is configured to generate a picture comprising an image. The image is produced by the object and comprises at least one part corresponding to the at least one portion of the object. The computing apparatus is configured to determine an intensity value representing the at least one part and to determine at least one distance between the at least one portion and the image sensing device using the intensity value and a dimension of the at least one part of the image.

Abstract: An external endoscope light source system includes light emitting diodes for providing a light output to an endoscope. The light is provided to a fiber optic cable for transmission to the endoscope. A fiber optic receives a portion of the light output and provides the output to a color sensor for sensing color values. The color values are provided to a controller that adjusts power to the various LEDs to provide a white light output. Instead of a color sensor in the light source, the light source can receive a white balance signal from a video camera provided for an endoscope. The white balance signal varies intensity of light output from each of the LEDs to obtain a white light output. The camera also provides shutter speed of a camera image sensor to the light source. The shutter speed is used to pulse or modulate the light output only when the shutter of the camera is open. By modulating the light output by the light source, the amount of heat generated by the light source is minimized.

Abstract: A laser machining apparatus that includes an interferometric height position detection unit, a condensing point position adjustment unit, and a confocal optical height position detection unit. A controller of the laser machining apparatus specifies, as a correction value, the difference between the two height positions of the upper face of the workpiece, one detected by the confocal optical height position detection unit and the other detected by the interferometric height position detection unit. The controller controls the condensing point position adjustment unit based on the height position obtained by correcting the height position of the upper face of the workpiece detected by the interferometric height position detection unit using the correction value.

Abstract: A novel lighting system includes an image capture device, an image processor, and an image projector. In a particular embodiment, the image capture device captures and converts images of a subject into image data, the image processor generates illumination patterns based on the image data, and the image projector projects the illumination patterns onto the subject. Optionally, the lighting system includes a controlled feedback mechanism for periodically updating the illumination pattern. In a more particular embodiment, the lighting system continually updates the illumination pattern to illuminate the subject in real-time.

Abstract: A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.

Abstract: An inverted microscope system includes an objective lens holding unit that holds an objective lens configured to collect at least observation light from a specimen, a tube lens configured to form an image using the observation light collected by the objective lens, a total internal reflection fluorescence microscopy optical system provided between the objective lens and the tube lens and configured to observe the observation light from the specimen using a total reflection illumination, and a disk scanning confocal optical system including a rotary disk on which a confocal opening is formed, the confocal opening being placed at a position substantially conjugate to a focus position of the objective lens. A relative distance between the focus position of the objective lens and the substantially conjugate position is changeable along an optical path of the observation light.

Abstract: An undulation detection device includes a two-dimensional sensor configured to emit a sensing wave for distance measurement in a plurality of directions forming different lateral and vertical angles and to measure respective distances to objects from which the sensing wave is reflected, and a processor performs detecting an undulation of the measurement surface or an obstacle placed on the measurement surface from which the sensing wave is reflected, on the basis of a difference among the distances in the different directions, the difference being measured by the two-dimensional sensor, and outputting an undulation detection report, when an in-plane size of the undulation of the measurement surface or the obstacle placed on the measurement surface is equal to or more than a threshold.

Abstract: A device for three-dimensional measurement of an object, with a stereomicroscope of the telescope type, which has a common objective and a first and a second tube lens, a first image sensor, which is assigned to the first tube lens, a second image sensor (8), which is assigned to the second tube lens, and a control unit, which determines the three-dimensional shape of the object from the images obtained with the two image sensors and carries out a predetermined three-dimensional measurement, wherein the stereomicroscope is designed such that the images are obtained with object-side telecentric conditions of the stereomicroscope.

Abstract: A system and method of treating target tissue in a patient's eye, which includes generating a light beam, deflecting the light beam using a scanner to form first and second treatment patterns, delivering the first treatment pattern to the target tissue to form an incision that provides access to an eye chamber of the patient's eye, and delivering the second treatment pattern to the target tissue to form a relaxation incision along or near limbus tissue or along corneal tissue anterior to the limbus tissue of the patient's eye to reduce astigmatism thereof.

Abstract: An electronic device may have a camera module. The camera module may capture images having an initial depth of field. The electronic device may receive user input selecting a focal plane and an effective f-stop for use in producing a modified image with a reduced depth of field. The electronic device may include image processing circuitry that selectively blurs various regions of a captured image, with each region being blurred to an amount that varies with distance to the user selected focal plane and in response to the user selected effective f-stop (e.g., a user selected level of depth of field).

Abstract: The present disclosure relates to a photolithography system having an ambulatory projection and/or detection gratings that provide for high quality height measurements without the use of an air gauge. In some embodiments, the photolithography system has a level sensor having a projection source that generates a measurement beam that is provided to a semiconductor substrate via a projection grating. A detector is positioned to receive a measurement beam reflected from the semiconductor substrate via a detection grating. An ambulatory element selectively varies an orientation of the projection grating and/or the detection grating to improve the measurement of the level sensor. By selectively varying an orientation of the projection and/or detection gratings, erroneous measurements of the level sensor can be eliminated.

Abstract: The invention relates to a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system. The lithography system comprises a beam source arranged for providing a patterning beam, a final projection system arranged for projecting a pattern on the target surface, a chuck arranged for supporting the target and a mark position system arranged for detecting a position mark on a surface.

Abstract: An auto focus adjustment apparatus includes: a correction unit which corrects a defocus amount detected by a defocus amount detection unit, correspondingly to a focus area selected from a plurality of focus areas; a storage unit which stores a correction value to be used by the correction unit at a time of correcting the defocus amount; and a correction value changing unit configured to change the correction value, wherein the correction value changing unit is arranged to be capable of changing the correction value for a plurality of selected focus areas and at a plurality of zoom positions.

Abstract: An embodiment of an autofocus system is provided, including a height detection module, an image detection module, a movement unit and a processing unit. The height detection module is arranged to output a plurality of detection lights along a Z axis direction, wherein each of the detection lights has different focal lengths and different wavelengths such that the height detection module generates a dispersion region along the Z axis direction. The image detection module is arranged to capture an image of the focus position. The movement unit is arranged to move an object along the Z axis direction, wherein the object has an internal surface and an external surface. The processing unit determines whether the external surface and the internal surface are within the dispersion region according to the quantity of the energy peaks of a reflectance spectrum received by the height detection module.

Abstract: Focus assist systems and methods for imaging devices are provided. The focus assist systems and methods display focus level data to a user. There are a variety of methods of displaying focus level data to a user, including, but not limited to, graphs, highlights, symbols, and varied levels of brightness or color.

Abstract: An autofocus mechanism includes a light source emitting light through an objective lens at a work piece; a first detector detecting a portion of light reflected by the work piece and generating a first signal; a second detector detecting a portion of the reflected light and generating a second signal; a first amplifier amplifying the first signal and generating a first amplified signal; a second amplifier amplifying the second signal and generating a second amplified signal; an amplification rate definer defining an amplification rate of each of the first amplifier and the second amplifier based on the first amplified signal and the second amplified signal, respectively; and a calculator identifying a focal position of the objective lens based on the first amplified signal and the second amplified signal.

Abstract: First and second amplifiers amplify a voltage value of a first signal and generate first and second amplified signals. Third and fourth amplifiers amplify the voltage value of a second signal and generate third and fourth amplified signals. A corrector corrects one of the first amplified signal and the second amplified signal based on a first correction function illustrating a relationship between the voltage value of the first amplified signal and the voltage value of the second amplified signal and generates one of a first corrected signal and a second corrected signal, and corrects one of the third amplified signal and the fourth amplified signal based on a second correction function illustrating a relationship between the voltage value of the third amplified signal and the voltage value of the fourth amplified signal and generates one of a third corrected signal and a fourth corrected signal.

Abstract: A target object has an upper surface including a first surface and a second surface located below the first surface. A method of focusing an optical system includes: measuring a surface position of the first surface; measuring a surface position of the second surface; obtaining, based on a measurement results of the surface position of the first surface, an in-focus condition in which the optical system is focused on the first surface; obtaining information about a step amount between the first surface and the second surface based on the measurement results of the surface positions of the first surface and the second surface; and focusing the optical system on the second surface based on the in-focus condition and the information about the step amount.

Abstract: The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.

Abstract: The present invention relates to an autofocus aperture stop (5, 6) in a triangulating autofocusing device (21) for a microscope (40), wherein the autofocus aperture stop (5, 6) comprises at least one diaphragm opening (3, 4) with which a measuring beam pencil (34) used for the autofocusing and running in the direction of the optical axis (18) of the autofocusing device (21) can be limited in its cross section, wherein the diaphragm opening (3, 4) of the autofocus aperture stop (5, 6) is arranged in a decentred position at a spacing from the optical axis (18) of the autofocusing device (21), wherein a decentred autofocus measuring beam (36) can be generated by the diaphragm opening (3, 4) in one half of the cross section (17) of the measuring beam pencil (34).