Photocell Controls Its Own Optical Systems Patents (Class 250/201.1)
  • Patent number: 11228156
    Abstract: A laser system according to the present disclosure includes: a laser apparatus configured to emit a laser beam; a transmission optical system disposed on a path between the laser apparatus and a target supplied into an EUV chamber in which EUV light is generated; a reflection optical system configured to reflect, toward the target, the laser beam from the transmission optical system; a first sensor configured to detect the laser beam traveling from the laser apparatus toward the reflection optical system; a second sensor configured to detect return light of the laser beam reflected by the reflection optical system and traveling backward to the laser apparatus; and a control unit configured to determine that the reflection optical system is damaged when no anomaly of the laser beam is detected and a light amount of the return light exceeds a predetermined light amount value.
    Type: Grant
    Filed: August 7, 2019
    Date of Patent: January 18, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Yoshifumi Ueno, Yuta Takashima
  • Patent number: 11197735
    Abstract: Provided herein are systems and methods for simultaneous imaging and stimulation using a microscope system. The microscope system can have a relatively small size compared to an average microscope system. The microscope can comprise in part an imaging light source and a stimulation light source. Light from the imaging light source and the stimulation light source can be spectrally separated to reduce cross talk between the stimulation light and the imaging light.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: December 14, 2021
    Assignee: Inscopix, Inc.
    Inventors: Mark O. Trulson, Alice Stamatakis, Koen Visscher
  • Patent number: 11175180
    Abstract: The present invention relates to an optical energy meter. Illustrative embodiments of the present disclosure include a system controller, temperature sensing system, vibration sensing system, torque sensing system, graphical display system, climate control system, and vibration control system. The invention measures the radiation pressure of incident high power electromagnetic radiation. The measurement of radiation pressure can be used to determine the power of the radiation; that is, the purposes of the invention are to measure, with high precision and accuracy, and survive the power of an incident high power electromagnetic beam while minimizing size, weight, and power requirements.
    Type: Grant
    Filed: June 14, 2018
    Date of Patent: November 16, 2021
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Joseph A. Fiordilino, Subrata Sanyal
  • Patent number: 11163324
    Abstract: An optical probe includes an optical source that generates an optical beam that propagates from a proximal end to a distal end of an optical fiber that imparts a transformation of a spatial profile of the optical beam. An optical control device imparts a compensating spatial profile on the optical beam that at least partially compensates for the transformation of the spatial profile of the optical beam imparted by the optical fiber in response to a control signal from a signal processor. A distal optical source generates a calibration light that propagates through the one or more optical waveguides from the distal end to the proximal end of the optical fiber. An optical detector detects the calibration light and generates electrical signals in response to the detected calibration light.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: November 2, 2021
    Assignee: OFS FITEL, LLC
    Inventors: Eric Swanson, Tristan Kremp, Paul S Westbrook, David J DiGiovanni
  • Patent number: 11150495
    Abstract: A technique is described to deterministically tune the emission frequency of individual semiconductor photon sources, for example quantum dots. A focused laser is directed at a film of material that changes form when heated (for example, a phase change material that undergoes change between crystal and amorphous forms) overlaid on a photonic membrane that includes the photon sources. The laser causes a localized change in form in the film, resulting in a change in emission frequency of a photon source.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: October 19, 2021
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Joel Q. Grim, Allan S. Bracker, Samuel Carter, Daniel Gammon
  • Patent number: 11143499
    Abstract: The 3D information generating device includes a light source unit configured to irradiate light onto a target object, a coordinate mechanism unit disposed between the target object and the light source unit and including a plurality of inclined projections reflecting the light, a camera unit configured to output an image obtained by simultaneously photographing the coordinate mechanism unit and the target object, and an information processing unit configured to check a projection plane formed by the light of the light source unit and, by using the projection plane, generate 3D information about the target object while calibrating an error. Accordingly, an unskilled user may easily perform a 3D scan operation by using the coordinate mechanism unit, and moreover, since a coordinate mechanism is not installed in the outside, the 3D information generating device may easily move and may be easily maintained and managed.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: October 12, 2021
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Jae Hean Kim, Hyun Kang, Chang Joon Park, Jin Sung Choi
  • Patent number: 11094836
    Abstract: A charge avalanche photodetector system (CAPD system) is provided comprising a charge avalanche photodetector based on the charge avalanche principle and amplifier electronics, where the amplifier electronics are electrically connected downstream of the charge avalanche photodetector, with the charge avalanche photodetector being able to be selectively operated with a voltage bias Vbias or without the voltage bias Vbias.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: August 17, 2021
    Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventor: Ines Frese
  • Patent number: 11079578
    Abstract: A telescope includes a primary mirror, a secondary mirror configured to move along a first axis, and a tertiary mirror configured to move along a second axis. The secondary and tertiary mirrors are configured to move along respective axes in a synchronized manner to focus a beam of electromagnetic radiation from the primary mirror. The telescope further may include an anamorphic deformable mirror configured to achieve wavefront control and correction of optical aberrations. The telescope further may include a first linear actuator configured to move the secondary mirror along the first axis and a second linear actuator configured to move the tertiary mirror along the second axis.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: August 3, 2021
    Assignee: RAYTHEON COMPANY
    Inventors: Aaron Stonely, Stephen Felix Sagan, Brian M. Graue
  • Patent number: 11061338
    Abstract: A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: July 13, 2021
    Inventors: Jonathan Kyle Wells, Paul Derek Coon, Matthew D. Rosa, Johnathan Marquez, Michael B. Binnard, Steven Douglas Slonaker, Daniel Gene Smith, Stephen P. Renwick, Brett Herr
  • Patent number: 11054664
    Abstract: A method for projection includes projecting a pattern of structured light with a given average intensity onto a scene. A sequence of images is captured of the scene while projecting the pattern. At least one captured image in the sequence is processed in order to extract a depth map of the scene. A condition is identified in the depth map indicative of a fault in projection of the pattern. Responsively to the identified condition, the average intensity of the projection of the pattern is reduced.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: July 6, 2021
    Assignee: APPLE INC.
    Inventors: Alon Yasovsky, Ronen Deitch, Yohai Zmora
  • Patent number: 10996485
    Abstract: A laser pointer may include a laser light emitter that emits a laser beam, a housing accommodating the laser light emitter; a vibration detection sensor that detects a vibration produced in the housing, a shake correction mechanism that changes a direction of the laser beam emitted by the laser light emitter, and a controller that controls the direction of the laser beam, which is changed by the shake correction mechanism, into a direction so as to offset the vibration detected by the vibration detection sensor. The controller may be configured to calculate a frequency of the vibration; calculate a movement amount of the vibration; determine whether a vibration applied to the housing is caused by a hand-shake based on the frequency of the vibration and the movement amount of the vibration; and activate the shake correction mechanism in response to a determination that the vibration is caused by a hand-shake.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: May 4, 2021
    Assignee: NIDEC SANKYO CORPORATION
    Inventors: Takeshi Sue, Masato Gomyo, Ryoji Komatsu
  • Patent number: 10969271
    Abstract: An illuminance calibrating device includes a reference light source and an illuminance detection device. The reference light source, which generates light with a specific wavelength and a source illuminance, adjusts the source illuminance to be a first illuminance according to a control signal. The illuminance detection device includes a shading plate, an illuminance detector, and a controller. The shading plate is configured to lower the first illuminance to a first shading illuminance. The illuminance detector detects the first shading illuminance to generate a detection signal. The controller generates the control signal and calculates a ratio of the first illuminance to the first shading illuminance according to the detection signal.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: April 6, 2021
    Assignee: QUANTA COMPUTER INC.
    Inventor: Hsin-Liang Lin
  • Patent number: 10965089
    Abstract: A laser device, including multiple laser modules, includes a plurality of drive power units that drive the laser modules, a plurality of output detection units that detect laser outputs from the laser modules, and output detected values as first output signals, a coupled output detection unit that detects a total laser output after coupling of a plurality of the laser outputs, and outputs a detected value as a second output signal, a computing unit that sets multiple output correction factors for correspondingly controlling the laser modules using the plurality of first output signals and the second output signal, and a control unit that controls the plurality of drive power units using the multiple output correction factors. The multiple output correction factors are each set to allow the total laser output to be maintained at a constant value.
    Type: Grant
    Filed: May 7, 2018
    Date of Patent: March 30, 2021
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Tomohiro Kyoto, Taira Ogita, Takeshi Morimoto, Hideyasu Machii, Hiroaki Kurokawa
  • Patent number: 10892303
    Abstract: An electronic device and a manufacturing method for the same are provided. The electronic device includes a light-permeable display screen and an optical sensor. The light-permeable display screen has a first surface and a second surface facing away from the first surface. The second surface includes a display area and a black matrix area surrounding the display area. The black matrix area includes a first window region. The optical sensor is disposed opposite to the second surface of the light-permeable display screen, and includes an emitter and a receiver. The emitter is configured to emit an infrared light through the first window region and the receiver is configured to receive the infrared light through the light-permeable display screen.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: January 12, 2021
    Assignee: GUANGDONG OPPO MOBILE TELECOMMUNICATIONS CORP., LTD.
    Inventor: Jie Li
  • Patent number: 10855310
    Abstract: A data translation system (100) for performing a non-linear data translation on a digitized AC signal is provided. The non-linear data translation system (100) includes an input for receiving the digitized AC signal, an output for outputting a non-linearly translated signal, and a processing system (104) coupled to the input and to the output. The processing system (104) is configured to receive the digitized AC signal, non-linearly translate the digitized AC signal using a predetermined transfer function to create the non-linearly translated signal, and transfer the non-linearly translated signal to the output.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: December 1, 2020
    Assignee: Micro Motion, Inc.
    Inventors: Stig Lindemann, Mads Kolding Nielsen
  • Patent number: 10854689
    Abstract: An electronic device and a manufacturing method for the same are provided. The electronic device includes a light-permeable display screen and an optical sensor. The light-permeable display screen has a first surface and a second surface facing away from the first surface. The second surface includes a display area and a black matrix area surrounding the display area. The black matrix area includes a first window region. The optical sensor is disposed opposite to the second surface of the light-permeable display screen, and includes an emitter and a receiver. The emitter is configured to emit an infrared light through the first window region and the receiver is configured to receive the infrared light through the light-permeable display screen.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: December 1, 2020
    Assignee: GUANGDONG OPPO MOBILE TELECOMMUNICATIONS CORP., LTD.
    Inventor: Jie Li
  • Patent number: 10817745
    Abstract: A platform for design of a lighting installation generally includes an automated search engine for retrieving and storing a plurality of lighting objects in a lighting object library and a lighting design environment providing a visual representation of a lighting space containing lighting space objects and lighting objects. The visual representation is based on properties of the lighting space objects and lighting objects obtained from the lighting object library. A plurality of aesthetic filters is configured to permit a designer in a design environment to adjust parameters of the plurality of lighting objects handled in the design environment to provide a desired collective lighting effect using the plurality of lighting objects.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: October 27, 2020
    Assignee: ECOSENSE LIGHTING INC.
    Inventors: Benjamin James Harrison, Shruti Koparkar, Mark Reynoso, Paul Pickard, Raghuram L. V. Petluri, Gary Vick, Andrew Villegas
  • Patent number: 10746606
    Abstract: The present invention relates to an arrangement and to a method for wavefront analysis comprising a radiation source (8) that emits an electromagnetic wavefront of electromagnetic radiation (1) to be analyzed; a spatially resolving detector unit (4, 4a, 4b, 4c) for detecting the electromagnetic wavefront; and an electronic evaluation unit (5, 7) connected to the detector unit (4, 4a, 4b, 4c). The at least one beam guidance unit (3) for guiding the electromagnetic radiation (1), that is only diffractive and/or reflective, has at least one opening (3a, 3b, 3c) and the detector unit (4, 4a, 4b, 4c) is arranged behind the at least one opening (3a, 3b, 3c) of the beam guidance unit (3) in the direction of propagation of the electromagnetic radiation (1) for detecting a diffraction pattern of the electromagnetic radiation (1) diffracted at the at least one opening (3a, 3b, 3c).
    Type: Grant
    Filed: January 26, 2017
    Date of Patent: August 18, 2020
    Assignees: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., WESTSÄCHSISCHE HOCHSCHULE ZWICKAU
    Inventors: Peter Hartmann, Tobias Baselt, Alexander Kabardiadi
  • Patent number: 10746993
    Abstract: Described is a detection device, a head-up display (HUD) and a method for operating a HUD. The detection device, the HUD and the method for operating an HUD are designed to protect an imager of the HUD from damage by incident radiation and to avoid or at least significantly reduce a glare effect of the HUD. The detection device comprises an optical element with a reflecting area and a passband, where the optical transparency of the passband is greater than the optical transparency of the reflecting area. The passband is completely enclosed by the reflecting area, the surface of the passband is smaller than the surface of the reflecting area, and the detection device is optically coupled to the passband. The detection device determines the intensity of a radiation incident on the detection device.
    Type: Grant
    Filed: July 13, 2017
    Date of Patent: August 18, 2020
    Assignee: Jabil Optics Germany GmbH
    Inventors: Oliver Zeh, Thomas Beyer
  • Patent number: 10722987
    Abstract: A joining machine to join work-pieces together comprises a body, at least one scanner disposed on the body and configured to collect data on the work-pieces and convert the data to a scanned image, a guide device and a positioning device. The positioning device is configured to determine a join position according to the scanned image and instruct the guide device to indicate the join position on the work-pieces to an operator of the machine.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: July 28, 2020
    Assignee: Ford Global Technologies LLC
    Inventor: Matthew Lloyd
  • Patent number: 10727648
    Abstract: A light source device includes: a plurality of laser light sources, each configured to emit a light beam; a plurality of collimating lenses, each configured to collimate the light beam emitted from a corresponding one of the laser light sources; a first transmission diffraction grating configured to diffract and combine, in an identical diffraction angle direction, the light beams transmitted through the collimating lenses and incident on a single region at different incident angles; a sensor configured to detect a positional deviation in diffracted light beams that are diffracted and combined by the first transmission diffraction grating; and a plurality of wavelength selecting elements, each disposed on an optical path between a respective one of the collimating lenses and the first transmission diffraction grating and configured to select a wavelength of a corresponding one of the light beams incident on the first transmission diffraction grating.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: July 28, 2020
    Assignee: NICHIA CORPORATION
    Inventor: Norihiro Dejima
  • Patent number: 10721462
    Abstract: Disclosed is a method and apparatus for calibrating parameters of a three-dimensional (3D) display apparatus, the method including acquiring a first captured image of a 3D display apparatus displaying a first pattern image, adjusting a first parameter set of the 3D display apparatus based on the first captured image, acquiring a second captured image of the 3D display apparatus displaying a second pattern image based on the adjusted first parameter set, and adjusting a second parameter set of the 3D display apparatus based on the second captured image.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: July 21, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Juyong Park, Hyoseok Hwang, Dongkyung Nam
  • Patent number: 10711696
    Abstract: Installation of an engine to a support structure includes temporarily attaching first and second alignment structures to the support structure and the engine. One of the alignment structures has a target pattern on its surface. The installation further includes using a machine vision system from the other of the mounting structures to indicate the relative position of the target pattern with respect to a reference. The relative position of the target pattern with respect to the reference provides information about relative position of an engine mounting element (e.g., bolt hole) with respect to a corresponding mounting element (e.g., bolt hole) in the support structure. The relative position of the target pattern with respect to the reference can be used to maneuver the engine in order to align the mounting elements.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: July 14, 2020
    Assignee: The Boeing Company
    Inventors: Gary M. Buckus, Michael J. Tanzini
  • Patent number: 10707351
    Abstract: An operation method and an electronic device are provided. A proximity detection mode is activated in response to deactivating the display during an execution of a call application. In response to activating the proximity detection mode, a proximity distance of an object is identified based on outputting the light through the light emitting unit and receiving the light through the light receiving unit. If the identified proximity distance is larger than a pre-defined proximity recognition distance, the proximity detection mode is deactivated and the display is activated.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: July 7, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seunggoo Kang, Jung-Hoon Park, Bokyung Sim, Jeong Gyu Jo, Dong-Il Son
  • Patent number: 10681295
    Abstract: A time of flight camera includes a light source, a first pixel, a time-to-digital converting, and a controller. The light source is configured to emit light towards an object to be reflected back to the time of flight camera as image light. The first pixel includes a photodetector to detect the image light and to convert the image light into an electric signal. The time-to-digital converter is configured to generate timing signals representative of when the light source emits the light and when the photodetector detects the image light. The controller is coupled to the light source, the first pixel, and the time-to-digital converter. The controller includes logic that when executed causes the time of flight camera to perform operations. The operations include determining a detection window for a round-trip time of the image light based, at least in part, on the timing signals and first pulses of the light.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: June 9, 2020
    Assignee: OmniVision Technologies, Inc.
    Inventor: Eric A. G. Webster
  • Patent number: 10658515
    Abstract: An operation method and an electronic device are provided. A proximity detection mode is activated in response to deactivating the display during an execution of a call application. In response to activating the proximity detection mode, a proximity distance of an object is identified based on outputting the light through the light emitting unit and receiving the light through the light receiving unit. If the identified proximity distance is larger than a pre-defined proximity recognition distance, the proximity detection mode is deactivated and the display is activated.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: May 19, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seunggoo Kang, Jung-Hoon Park, Bokyung Sim, Jeong Gyu Jo, Dong-Il Son
  • Patent number: 10613269
    Abstract: Disclosed herein is a waveguide stack and associated segmented illumination display. The waveguide stack includes a number of waveguides stacked into an array to direct light from light emitting diode (LED) edge lights to a liquid crystal display (LCD) of a segmented illumination display. The waveguides are stacked with light inhibiting material between the waveguides to inhibit light transmitting through one waveguide from communicating to a second waveguide.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: April 7, 2020
    Assignee: INTEL CORPORATION
    Inventors: Duncan Glendinning, Roland P. Wooster, Zhiming J. Zhuang
  • Patent number: 10585031
    Abstract: Systems for detecting light (e.g., in a flow stream) are described. Light detection systems according to embodiments include two or more photodetector arrays and an optical adjustment component positioned in an optical path between the photodetector arrays. Systems and methods for measuring light emitted by a sample (e.g., in a flow stream) and kits having two or more photodetector arrays and an optical adjustment component are also provided.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: March 10, 2020
    Assignee: BECTON, DICKINSON AND COMPANY
    Inventors: Austin Wu, David Thao Do, Timothy Wayne Petersen, Jianying Cao
  • Patent number: 10461744
    Abstract: An electronic device includes: a display assembly including an electronic display configured to generate an optical image viewable from in front of the electronic device; a proximity sensor coupled to at least a portion of the display assembly, the proximity sensor including a sensing element configured to be responsive to presence of an object in front of the electronic device, the sensing element supported by a support structure having an upper surface facing a frontal direction of the electronic device; and a conductor that electrically connects the sensing element of the proximity sensor and the portion of the display assembly, the conductor including a conductive path extending along the support structure to the upper surface of the support structure.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: October 29, 2019
    Assignee: Google LLC
    Inventors: Brian Jon Hassemer, Paul Lynn Fordham, Mark Daniel Janninck, David Kyungtag Lim
  • Patent number: 10439716
    Abstract: A compact system for active co-boresight measurement includes a detector, a steering mirror, and a controller. The detector detects a portion of a transmission beam emitted by a transceiver and a portion of a received beam that is received from a remote terminal. The controller measures an offset between the detected portion of the received beam and the detected portion of the transmission beam. The controller controls a position of the steering mirror to align the portion of the received beam with a defined position on the detector, the defined position based in part on the offset.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: October 8, 2019
    Assignee: Facebook, Inc.
    Inventors: Eric Douglas Miller, Kevin Michael Birnbaum, Chien-Chung Chen, Andrew Todd Grier
  • Patent number: 10432314
    Abstract: The application discloses a method and apparatus for starting an optical module. The method includes: adjusting temperature of a laser device of the optical module to a first temperature higher than a normal operating temperature of the laser device of the optical module; powering up the laser device of the optical module using a first current lower than a normal operating current of the laser device; and adjusting the temperature of the laser device of the optical module from the first temperature to the normal operating temperature according to a second temperature corresponding to each adjustment, and adjusting the current of the laser device of the optical module from the first current to the normal operating current according to a second current corresponding to each adjustment, for a preset times of adjustment.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: October 1, 2019
    Assignees: Hisense Broadband Multimedia Technologies Co., Ltd., Hisense USA Corporation, Hisense International Co., Ltd.
    Inventors: Shaobo Li, Ping Zhao
  • Patent number: 10401883
    Abstract: An optical probe includes an optical source that generates an optical beam that propagates from a proximal end to a distal end of an optical fiber that imparts a transformation of a spatial profile of the optical beam. An optical control device imparts a compensating spatial profile on the optical beam that at least partially compensates for the transformation of the spatial profile of the optical beam imparted by the optical fiber in response to a control signal from a signal processor. A distal optical source generates a calibration light that propagates through the one or more optical waveguides from the distal end to the proximal end of the optical fiber. An optical detector detects the calibration light and generates electrical signals in response to the detected calibration light.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: September 3, 2019
    Assignees: OFS Fitel, LLC
    Inventors: Eric Swanson, Tristan Kremp, Paul S. Westbrook, David DiGiovanni
  • Patent number: 10365211
    Abstract: Methods and systems for measuring a specimen while actively stabilizing an optical measurement beam subject to changes in polarization by a rotating polarizer element are described herein. Movement of a focused measurement beam spot induced by a rotating polarizer element is compensated by actively controlling the position of an optical element in the beam path based on measurements of the focused measurement beam spot. Both feedback and feedforward control schemes may be employed to reduce beam position error. In one aspect, a measurement system includes a rotating optical polarizer, a beam position sensor, and an active beam compensating element in the illumination beam path, the collection beam path, or both. Beam position errors are detected by the beam position sensor, and control commands are communicated to the active beam compensating element to reduce the measured beam position errors.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: July 30, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Barry Blasenheim, Noam Sapiens, Michael Friedmann
  • Patent number: 10362229
    Abstract: A multi-aperture imaging device includes a one-line array of adjacently arranged optical channels and beam-deflecting unit for deflecting an optical path of the optical channels. The beam-deflecting unit includes a first position and a second position between which the beam-deflecting unit is translationally moveable along a line extension direction of the one-line array. The beam-deflecting unit is configured such that it deflects the optical path of each optical channel into mutually different directions depending on whether it is located in the first position or in the second position.
    Type: Grant
    Filed: February 16, 2018
    Date of Patent: July 23, 2019
    Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
    Inventors: Frank Wippermann, Andreas Brückner, Andreas Bräuer, Alexander Oberdörster
  • Patent number: 10360874
    Abstract: A module circuit (11) comprises a sensor terminal (43) for feeding a sensor signal (SP) and a clock terminal (41) for feeding a pulse width-modulated clock signal (ST) having a first and a second clock phase (A, B). A signal processing circuit (40) of the module circuit (11) is coupled on the input side to the sensor terminal (43) and the clock terminal (41) and is designed to provide an output signal (SAL) dependent on the sensor signal (SP) that can be tapped in the first clock phase (A) and independent of the sensor signal (SP) that can be tapped in the second clock phase (B).
    Type: Grant
    Filed: November 7, 2012
    Date of Patent: July 23, 2019
    Assignee: ams AG
    Inventor: Peter Trattler
  • Patent number: 10350794
    Abstract: In accordance with the purpose(s) of the present disclosure, as embodied and broadly described herein, embodiments of the present disclosure, in one aspect, relate to porous polymer membranes, structures including porous polymer membranes, devices including porous polymer membranes, methods of using porous polymer membranes, methods of making porous polymer membranes, and the like.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: July 16, 2019
    Assignee: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
    Inventors: Yin Fang, Khalid Askar, Blayne M. Phillips, Peng Jiang
  • Patent number: 10353270
    Abstract: A system for generating an optical frequency standard is described. The system is based on a two-color approach and includes a first laser source that generates a first laser output at a first frequency and a second laser source that generates a second laser output at a second frequency corresponding. The first and second laser outputs are then respectively input into first and second harmonic generators to form frequency-doubled first and second laser outputs. The system also includes a two-color stabilization arrangement to stabilize the sum of the frequencies generated by first and second laser sources, including, for example, an interaction region incorporating a laser active material. The interaction region can be a gas reference cell and the laser active material can be Rubidium (in vapor form) having a two-photon transition.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: July 16, 2019
    Assignee: The University of Adelaide
    Inventors: Christopher Perrella, Philip Stephen Light, Andre Nicholas Luiten
  • Patent number: 10339349
    Abstract: A line-scan imaging camera can scan an object at a near field and a far field using a low F-stop value by reading out different rows on an imager. A line LED provides a line illumination over an object. Additionally, the imaging camera captures the illumination portion of the object through an optical path that includes mirrors that allow folded optics. The optical path is longer than the distance between the object and the camera. A mirror is located close to or adjacent to the line LED to provide efficient illumination and to align the initial leg of the optical path with the line illumination.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: July 2, 2019
    Assignee: DATALOGIC USA, INC.
    Inventor: WenLiang Gao
  • Patent number: 10322467
    Abstract: A height position of a surface of a wafer can be detected accurately and stably without being affected by variation in a thin film formed on the surface of the wafer. An AF (autofocus) device irradiates the surface of the wafer W with an AF laser beam, detects reflection light thereof for each wavelength with a detection optical system. An AF signal processing unit outputs a displacement signal indicating displacement of the surface of the wafer to a control unit on the basis of a detection result of the detection optical system. Moreover, the AF device includes a focus optical system disposed in an irradiation optical path which is an optical path from the light source unit to a light converging lens. The focus optical system adjusts a light converging point of the AF laser beam in a wafer thickness direction.
    Type: Grant
    Filed: July 27, 2017
    Date of Patent: June 18, 2019
    Assignee: TOKYO SEIMITSU CO., LTD.
    Inventor: Kazushi Hyakumura
  • Patent number: 10284708
    Abstract: An electronic device includes a housing, a user interface, and one or more processors operable with the user interface. At least one proximity sensor component is operable with the one or more processors and can include an infrared signal receiver to receive an infrared emission from an object external to the housing. The one or more processors can be operable to actuate one or more user interface devices when the infrared signal receiver receives the infrared emission from an object external to the housing. The actuation can be a function of distance, in accordance with a prioritization, or combinations thereof.
    Type: Grant
    Filed: February 6, 2017
    Date of Patent: May 7, 2019
    Assignee: Motorola Mobility LLC
    Inventors: Rachid M Alameh, Patrick J Cauwels, Paul Steuer
  • Patent number: 10215554
    Abstract: Disclosed are an apparatus and a method for non-contact sample analysis using terahertz waves. The apparatus includes an emission unit radiating terahertz waves onto a sample provided with a conductive material layer, and a receiving unit receiving terahertz waves reflected from the sample or terahertz waves passing through the sample.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: February 26, 2019
    Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
    Inventors: Hak-Sung Kim, Wan-Ho Chung, Sung-Hyeon Park, Dong-Hyun Kim
  • Patent number: 10209202
    Abstract: An optical characterization system includes a camera assembly and a workstation. The camera assembly is configured to capture images of different portions of a structured light pattern emitted from a device under test in accordance with imaging instructions. In some embodiments, the device under test may be a diffractive optical element (DOE). The workstation provides the imaging instructions to the camera assembly, and stitch the captured images together to form a pattern image. The pattern image is a single image of the entire structured light pattern. The workstation also characterizes performance of the device under test using the pattern image and a performance metric.
    Type: Grant
    Filed: June 14, 2017
    Date of Patent: February 19, 2019
    Assignee: Facebook Technologies, LLC
    Inventors: Mark Timothy Sullivan, Andrew Matthew Bardagjy, Joseph Duggan, Fei Liu, Simon Morris Shand Weiss
  • Patent number: 10176763
    Abstract: A method of forming a control parameter dependent on ambient light. The method comprises the steps of acquiring light values from an ambient light sensor and acquiring positional status values from a positional status sensor. The control parameter depends on the light values and is filtered in dependence on the positional status values.
    Type: Grant
    Filed: March 16, 2015
    Date of Patent: January 8, 2019
    Assignee: Apical Ltd.
    Inventor: Michael Tusch
  • Patent number: 10151979
    Abstract: Within area where of four heads installed on a wafer stage, heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the wafer stage is driven based on positional information which is obtained using the first head group, as well as obtain the displacement (displacement of position, rotation, and scaling) between the first and second reference coordinate systems corresponding to the first and second head groups using the positional information obtained using the first and second head groups. By using the results and correcting measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems is calibrated, which allows the measurement errors that come with the displacement between areas on scale plates where each of the four heads face.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: December 11, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10106018
    Abstract: A method, system and computer program product for shielding an operator of a vehicle from light, including determining a position of a light source based on the location of the vehicle and the current date and time. A line of sight between the light source and the eyes of the operator is determined, where the line of sight goes through a windshield of the vehicle that includes a plurality of pixels. One or more pixels in the line of sight are identified; and, one or more physical properties of the pixel(s) in the line of sight are modified.
    Type: Grant
    Filed: October 26, 2016
    Date of Patent: October 23, 2018
    Assignee: International Business Machines Corporation
    Inventors: Holger Martens, Sharathchandra U. Pankanti, Erik Rueger
  • Patent number: 10099365
    Abstract: In a work machine including an articulated robot which is provided with a work head and moves the work head, imaging devices which image at least part of a workpiece or part of the work machine are attached to a distal end of the robot, and a target operation position of the robot is corrected on the basis of position data regarding a plurality of feature points of the workpiece, created on the basis of imaging data obtained through imaging performed by the imaging devices and design data of the workpiece, or position data regarding a plurality of feature points set for the work machine.
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: October 16, 2018
    Assignee: FUJI CORPORATION
    Inventors: Masatoshi Fujita, Seigo Kodama, Ryo Nagata
  • Patent number: 10073345
    Abstract: A position of a substrate-holding movable body is controlled based on positional information measured with a measurement system, and correction information of the positional information of the movable body also is measured with the measurement system. The correction information is measured within a first area in which position measurement of the movable body can be performed with each of a second number of heads provided on the movable body, the first area being of a predetermined area, in the predetermined area the movable body being moved in an exposure operation of the substrate, and the second number of heads being larger in number than a first number of heads used in position control of the movable body.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: September 11, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10054861
    Abstract: An extreme ultraviolet light generating apparatus may include: a chamber, in which extreme ultraviolet light is generated; a target supply unit that outputs a target into the chamber as droplets to supply the target to a plasma generating region; a stage that moves the target supply unit in a direction substantially perpendicular to the trajectory of droplets output from the target supply unit; a droplet detector provided between the target supply unit and the plasma generating region at an inclination of a predetermined angle with respect to a substantially vertical direction, that detects the droplets from a direction inclined at the predetermined angle; and a calculation control unit that controls the irradiation timings of the laser beam at which the laser beam is irradiated onto the droplets within the plasm generating region, by adding delay times to the timings at which the droplets are detected by the droplet detector.
    Type: Grant
    Filed: April 5, 2017
    Date of Patent: August 21, 2018
    Assignee: Gigaphoton Inc.
    Inventor: Takayuki Yabu
  • Patent number: 10055023
    Abstract: A mobile device includes a body, at least one drive wheel coupled with the body, a control structure configured to automatically control rotational movements of the at least one drive wheel so as to selectively control movement of the body, and a motion detection system coupled with the control structure and configured to detect a plurality of different movements of a user. The control structure controls rotational movements of the at least one drive wheel to effect different movements of the body based upon different detected movements of the user.
    Type: Grant
    Filed: May 8, 2017
    Date of Patent: August 21, 2018
    Assignee: Mattel, Inc.
    Inventors: Konstantin Degtyarev, Corey Lynn Juliano, Matthew Lentini, Kevin Voorhees
  • Patent number: 10041789
    Abstract: A workpiece alignment system has a workpiece support to support a workpiece. A first light emitter directs a first light beam toward the workpiece. A first light receiver receives the first light beam. A rotation device rotates the workpiece support about a support axis. A second light emitter directs a second light beam toward a peripheral region of the workpiece. A second light receiver receives the second light beam concurrent with the rotation of the workpiece. A controller determines a transmissivity of the workpiece based on a total initial emittance of the first light beam a transmission of the first light beam through the workpiece. The controller determines a position of the workpiece with respect to the support axis based, at least in part, on a rotational position of the workpiece, a portion of the second light beam received, and the determined transmissivity.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: August 7, 2018
    Assignee: Axcelis Technologies, Inc.
    Inventors: John F. Baggett, Joseph Ferrara