Methods Including Separation Or Nonradiant Treatment Of Test Materials Patents (Class 250/304)
  • Patent number: 10684209
    Abstract: An apparatus for collection and detection of airborne particles includes an optical imaging system having an exposure time, a particle inspection zone, and a flexible substrate with an adhesive coating. The flexible substrate passes through the particle inspection zone. The flexible substrate alternates between an advancing state of moving through the particle inspection zone and an imaging state of not moving through the particle inspection zone. In the imaging state the flexible substrate is so tensioned so that a portion of the flexible substrate in the particle inspection zone moves at most a small distance during the exposure time.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: June 16, 2020
    Assignee: Scanit Technologies, Inc.
    Inventor: Pedro Manautou
  • Patent number: 10533935
    Abstract: Aspects of the present disclosure include methods for detecting events in a flow cytometer. Also provided are methods of detecting cells in a flow cytometer. Other aspects of the present disclosure include methods for determining a level of contamination in a flow cell. Computer-readable media and systems, e.g., for practicing the methods summarized above, are also provided.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: January 14, 2020
    Assignee: Abbott Laboratories
    Inventors: Amish P. Shah, Frederic M. Hulett, III
  • Patent number: 10436697
    Abstract: A system, method, and apparatus are provided for flow cytometry. In one example, the flow cytometry system includes dual laser devices and dual scatter channels to measure velocity of particles in a core stream of sample fluid. The total flow rate of the sample fluid and the sheath fluid around the sample fluid is controlled, and thus held constant, by a feedback control system controlling a vacuum pump based on differential pressure across ends of a flow channel in the flow cell.
    Type: Grant
    Filed: November 19, 2017
    Date of Patent: October 8, 2019
    Assignee: Cytek Biosciences, Inc.
    Inventor: David Vrane
  • Patent number: 10217603
    Abstract: A loading station (100, 200) for translocating a frozen sample for electron microscopy, encompassing a chamber (104, 204), open toward the top, that is fillable at least partly with a coolant, the chamber (104, 204) comprising in its side wall at least two ports (101a, 102a, 103a) each for different sample transfer devices (101, 102, 103), the ports (101a, 102a, 103a) permitting introduction of a frozen sample into the chamber (104, 204) via a selected sample transfer device and withdrawal of a frozen sample from the chamber via a respective different sample transfer device; and wherein a receptacle (108, 208) for at least two differently configured sample holders (109, 110) is arranged in the chamber (104, 204), the at least two sample holders (109, 110) being detachably fastenable to at least one of the sample transfer devices (101) for introduction of the frozen sample into the chamber (104, 204) and for withdrawal of the frozen sample from the chamber (104, 204).
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: February 26, 2019
    Assignee: Leica Mikrosysteme GmbH
    Inventors: Reinhard Lihl, Leander Gaechter
  • Patent number: 10113967
    Abstract: The present invention provides systems and methods for analyzing the excitation spectra of fluorescent particles in a flowing stream. The system uses a white light laser and color separation optics to provide a spatially-distributed, continuous color-spectrum excitation light system that is used to illuminate a region of a flowing stream. A particle that passes through the detection region traverses the full dispersed spectrum of excitation light, and the fluorescence emissions from the particle are continuously measured as it passes through the detection region. The measured fluorescence emissions at each wavelength of excitation light, which changes through full spectrum of the excitation light as the particle passes through the detection region, provides the excitation spectrum of the particle.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: October 30, 2018
    Assignee: BECTON, DICKINSON AND COMPANY
    Inventors: Pierce O. Norton, Yong Qin Chen
  • Patent number: 9922737
    Abstract: A reactor internals component having a sensor insert for monitoring reactor internals components, supported within the reactor internals. The sensor insert has a hollow internal cavity that houses a number of compartmentalized, self-contained, passive environmental sensors. The sensor inserts are provided with a tracking code that can be employed to identify their location and orientation.
    Type: Grant
    Filed: March 11, 2014
    Date of Patent: March 20, 2018
    Assignee: Westinghouse Electric Company LLC
    Inventors: Arnold H. Fero, Joel A. Kulesza
  • Patent number: 9885696
    Abstract: An analyzer system (10) for measuring the mercury content of samples includes a mercury vapor analyzer (12) for generating and detecting analytical beams. A furnace (24) is mounted to a measurement cell (22). A sample boat (30) containing a sample is adapted to be disposed within the furnace to release heated sample effluent gas from the sample into the measurement cell. An optical bench (16) mounted to the mercury vapor analyzer (12) into which the measurement cell (22) is positioned in a path traveled by the analytical beams projected out of the vapor analyzer whereby the analytical beams traverse the measurement cell, interact with the sample effluent gas and return back to the vapor analyzer (12) where the amount of mercury in the heated sample effluent gas can be determined. A pump station (56) to draw the sample effluent gas from the measurement cell.
    Type: Grant
    Filed: June 19, 2014
    Date of Patent: February 6, 2018
    Inventor: Philip J. Dufresne
  • Patent number: 9829413
    Abstract: An emissions test apparatus is provided and may include a filter housing having at least one of a first RFID tag and a first bar code identifying the filter housing. A filter media may be selectively disposed within the filter housing and may include at least one of a second RFID tag and a second bar code identifying the filter media. A controller may link the filter housing and the filter media when the filter media is disposed within the filter housing based on information provided by the at least one of the first RFID tag and the first bar code and the at least one of the second RFID tag and the second bar code.
    Type: Grant
    Filed: June 25, 2013
    Date of Patent: November 28, 2017
    Assignee: AVL TEST SYSTEMS, INC.
    Inventors: Gerald Marek, Ali Ganjidoost, Colin Chisholm
  • Patent number: 9816973
    Abstract: A system and method for compositional analysis of a process stream in an industrial process transports a liquid process stream through an absorption/desorption packed column (A/D column), along with a carrier gas. A gas phase combination of the carrier gas and one or more solutes from the liquid process stream is passed out of the A/D column to a flow cell for analysis by an analyzer to determine presence and concentration of the one or more solutes within the gas phase. A processor uses the concentration of the solutes within the gas phase to perform a headspace analysis to determine the concentration of the solutes in the process stream.
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: November 14, 2017
    Assignee: Nova Engineering Ltd.
    Inventors: Nathaniel J. Peterson, Yoav Barshad
  • Patent number: 9786469
    Abstract: A grid assembly for cryo-electron microscopy may be fabricated using standard nanofabrication processes. The grid assembly may comprise two support members, each support member comprising a silicon substrate coated with an electron-transparent silicon nitride layer. These two support members are positioned together with the silicon nitride layers facing each other with a rigid spacer layer disposed therebetween. The rigid spacer layer defines one or more chambers in which a biological sample may be provided and fast frozen with a high degree of control of the ice thickness.
    Type: Grant
    Filed: August 10, 2016
    Date of Patent: October 10, 2017
    Assignee: University of Washington
    Inventor: Liguo Wang
  • Patent number: 9671324
    Abstract: An apparatus and method are presented for the analysis of materials. The apparatus includes two or more similar analyzers, with the output of the analyzers combined to provide improved measurements. The apparatus may be, for example, a differential photometric analyzer, such as the AETHALOMETER®. The apparatus includes a processor programmed to accept an instrument constant determined at low filter loadings and use the constant to compensate for non-linear instrument responses. A method is also presented for conditioning filters before use.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: June 6, 2017
    Assignee: AEROSOL D.O.O.
    Inventors: Luka Drinovec, Grisa Mocnik, Anthony D. A. Hansen
  • Patent number: 9349573
    Abstract: A substrate located in an energetic-beam instrument has a region of interest to be extracted as a sample for further analysis. Cuts are made in the substrate to define a sample, and a stress-buffer layer is formed over the region of interest or adjacent to it. An isolating cut is made to separate the portion of the substrate containing the region of interest from the bulk substrate; however, the isolated area remains attached to the stress-buffer layer. An end-effector, such as the probe of a nano-manipulator, is attached to the stress-buffer layer, and the stress-buffer layer is cut to free the sample. The sample may then be attached to a holder by attachment of the stress-buffer layer thereto. Thus the sample is never at the same time connected directly and rigidly to two different objects that may move relatively to one another, creating undesirable stresses in the sample.
    Type: Grant
    Filed: July 11, 2015
    Date of Patent: May 24, 2016
    Assignee: Omniprobe, Inc.
    Inventors: Rocky Kruger, Gonzalo Amador, Cheryl Hartfield
  • Patent number: 9279752
    Abstract: A method and apparatus for preparing thin TEM samples in a manner that reduces or prevents bending and curtaining is realized. Embodiments of the present invention deposit material onto the face of a TEM sample during the process of preparing the sample. In some embodiments, the material can be deposited on a sample face that has already been thinned before the opposite face is thinned, which can serve to reinforce the structural integrity of the sample and refill areas that have been over-thinned due to a curtaining phenomena. In other embodiments, material can also be deposited onto the face being milled, which can serve to reduce or eliminate curtaining on the sample face.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: March 8, 2016
    Assignee: FEI Company
    Inventors: Michael Moriarty, Stacey Stone, Jeffrey Blackwood
  • Patent number: 9228983
    Abstract: A process analytic device has an input to receive a sample of interest. An analytic detector is operably coupled to receive the sample of interest and to provide an analytic output relative to the sample of interest. A heat pipe is thermally coupled to the analytic detector. In one embodiment, the process analytic device is a process gas chromatograph.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: January 5, 2016
    Assignee: Rosemount Analytical Inc.
    Inventors: Edward J. Bailey, Leighton M. Fields
  • Patent number: 9144396
    Abstract: An apparatus and a method of analyzing constituents of gas in an oral cavity and exhaled breath is disclosed. The apparatus for analyzing the constituents of gas in the oral cavity and exhaled breath according to the present invention includes a filter to filter the outside gas by adsorbing polar molecules and non-polar molecules in the outside air and by removing water in the outside air in order to use the outside gas as carrier gas. The apparatus can also include a plurality of solenoid valves for controlling the flow of a carrier gas; a sensor for detecting components of the exhaled breath; a pump to draw the gas in the oral cavity or the exhaled breath and the carrier gas and discharge the gases to the outside; a control unit for controlling the components of the apparatus; and a display device to display results calculated by the control unit.
    Type: Grant
    Filed: August 20, 2008
    Date of Patent: September 29, 2015
    Inventors: Yong Sahm Choe, Chang Sik Lee, Je Young Youn, Young Sun Kang
  • Patent number: 9111720
    Abstract: A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: August 18, 2015
    Assignee: FEI COMPANY
    Inventors: Ronald Kelley, Michael Moriarty, Stacey Stone, Jeffrey Blackwood
  • Patent number: 9040908
    Abstract: A method and apparatus for altering the orientation of a charged particle beam sample is presented. Embodiments of the method includes providing a first work piece on a sample stage having a sample stage plane, the first work piece including a lamella plane in a first orientation. A sample is milled from the first work piece using an ion beam so that the sample is substantially free from the first work piece. A probe is attached to the sample, the probe including a shaft having a shaft axis, the shaft axis oriented at a shaft angle in relation to the sample stage plane, the shaft angle being non-normal to the sample stage plane. The probe is rotated about the shaft axis through a rotational angle so that the lamella plane is in a second orientation. The sample is attached to or placed on the sample on either the first work piece, the first work piece being the work piece from which the sample was milled, or on a second work piece, the second work piece being a work piece from which the sample was not milled.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: May 26, 2015
    Assignee: FEI COMPANY
    Inventor: Richard J. Young
  • Patent number: 9042515
    Abstract: The invention relates to a device (10; 10a;10b; 10c; 50) for checking pharmaceutical products (1), in particular hard gelatin capsules, by means of at least one radiation source (30; 60) preferably embodied as an X-ray source, and a conveying device which conveys the products (1) in a clocked manner in a radiation area (31) of the radiation source (30; 60). The radiation emitted by the radiation source (30; 60) penetrating the products (1) preferably perpendicular to the longitudinal axes thereof (2), and the radiation is captured on the side of the products (1) opposite the radiation source (30) by means of at least one sensor element (35) which is coupled to an evaluation device (36). The invention is characterized in that the conveyor device is embodied as a conveyor wheel (15; 15a; 51) which can rotate in a stepped manner about an axis (12; 52), and the products (1) are arranged, while being conveyed in the radiation area (31), in receiving areas (28; 37; 56) of the conveyor wheel (15; 5a; 51).
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: May 26, 2015
    Assignee: Robert Bosch GmbH
    Inventors: Werner Runft, Iulian Maga, Jens Schlipf, Martin Vogt
  • Patent number: 9006651
    Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a novel use of a milling pattern allow the creation of S/TEM samples as thin as 50 nm without significant bowing or warping. Preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.
    Type: Grant
    Filed: September 17, 2013
    Date of Patent: April 14, 2015
    Assignee: FEI Company
    Inventors: Jeffrey Blackwood, Stacey Stone
  • Patent number: 8969827
    Abstract: A specimen kit having a tiny chamber is disclosed for a specimen preparation for TEM. The space height of the chamber is far smaller than dimensions of blood cells and therefore is adapted to sort nanoparticles from the blood cells. The specimen prepared under this invention is suitable for TEM observation over a true distribution status of nanoparticles in blood. The extremely tiny space height in Z direction eliminates the possibility of aggregation of the nanoparticles and/or agglomeration in Z direction during drying; therefore, a specimen prepared under this invention is suitable for TEM observation over the dispersion and/or agglomeration of nanoparticles in a blood.
    Type: Grant
    Filed: July 9, 2012
    Date of Patent: March 3, 2015
    Assignees: Materials Analysis Technology (US) Corp., National Health Research Institutes
    Inventors: Yong-Fen Hsieh, Chih-Hsun Chu, Pradeep Sharma, Yu-Feng Ko, Chung-Shi Yang, Lin-Ai Tai, Yu-Ching Chen
  • Patent number: 8969093
    Abstract: Constant calibration methods and apparatuses for analytical devices that are located in remote positions in order to allow for reliable and automated measurements of various contaminants within water or other liquid samples. The proposed calibration systems allow for certain methods to measure total amounts of certain trihalomethane and haloacetic acid contaminants, at least, in drinking water samples from such remote locations, through the utilization of a standard addition introduction of known concentrations of such contaminant compounds within target samples, followed by separation through a capillary membrane sampling device and measurement of such different contaminants via flow injection analysis (FIA). In such a manner, the on-line, remote system provides the necessary reliability for a water utility or like entity on which to base any further needed water treatment activities without having to perform such measurements in a distinct lab setting.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: March 3, 2015
    Assignee: University of Memphis Research Foundation
    Inventors: Gary Lynn Emmert, Paul S. Simone, Jr.
  • Publication number: 20150034816
    Abstract: There is provided an interface for use in sampling ions in a mass spectrometer, the interface being arranged for receiving a quantity of ions from an ion source and forming more than one ion beam therefrom, each ion beam being directed along a respective desired pathway.
    Type: Application
    Filed: March 18, 2013
    Publication date: February 5, 2015
    Inventor: Iouri Kalinitchenko
  • Publication number: 20150021470
    Abstract: The present invention provides an improved method for imaging mass spectrometry using an ionization-assisting matrix of a test sample, wherein the ionization efficiency is high, migration and visual information reduction are inhibited, no interference peaks originating from the matrix occur, and the analysis can be performed at high spatial resolution. Specifically, the present invention provides a method for imaging mass spectrometry using a sample prepared by physical vapor depositing platinum nanoparticles on the surface of a test sample to be subjected to imaging mass spectrometry.
    Type: Application
    Filed: February 13, 2013
    Publication date: January 22, 2015
    Applicants: A SCHOOL CORPORATION KANSAI UNIVERSITY, NISSAN CHEMICAL INDUSTRIES, LTD
    Inventors: Ryuichi Arakawa, Hideya Kawasaki, Tomoyuki Ozawa
  • Patent number: 8890064
    Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.
    Type: Grant
    Filed: February 26, 2013
    Date of Patent: November 18, 2014
    Assignee: FEI Company
    Inventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
  • Patent number: 8837795
    Abstract: A method for the microscopy of samples using optical microscopy and particle beam microscopy provides that the samples are divided into a partial quantity and a residual quantity and the samples of the partial quantity are prepared to contain registration marks. The samples of the partial quantity are imaged using optical microscopy and particle beam microscopy, with the result that a pair of optical microscopy images and particle beam microscopy images is obtained for each sample of the partial quantity. The pairs are position-registered relative to each other using the registration marks. The images of the position-registered pairs are modified by removing the registration marks. A registration algorithm is trained which evaluates the image contents and issues a quality measure for a position registration of each pair. The objects of the residual quantity are imaged. These pairs are position-registered by the trained registration algorithm to maximize the quality measure.
    Type: Grant
    Filed: October 18, 2012
    Date of Patent: September 16, 2014
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Torsten Sievers, Michael Kieweg
  • Patent number: 8610109
    Abstract: A triplet light emitting device which has high efficiency and improved stability and which can be fabricated by a simpler process is provided by simplifying the device structure and avoiding use of an unstable material. In a multilayer device structure using no hole blocking layer conventionally used in a triplet light emitting device, that is, a device structure in which on a substrate, there are formed an anode, a hole transporting layer constituted by a hole transporting material, an electron transporting and light emitting layer constituted by an electron transporting material and a dopant capable of triplet light emission, and a cathode, which are laminated in the stated order, the combination of the hole transporting material and the electron transporting material and the combination of the electron transporting material and the dopant material are optimized.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: December 17, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hiroko Yamazaki, Atsushi Tokuda, Tetsuo Tsutsui
  • Patent number: 8610090
    Abstract: Disclosed are embodiments of an ion beam shield for use in an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The ion beam shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
    Type: Grant
    Filed: December 29, 2012
    Date of Patent: December 17, 2013
    Assignee: Gatan Inc.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Publication number: 20130270429
    Abstract: A solution for evaluating a sample gas for a presence of a trace gas, such as ozone, is provided. The solution uses an ultraviolet source and an ultraviolet detector mounted in a chamber. The chamber can include reflecting walls and/or structures configured to guide ultraviolet light. A computer system can operate the ultraviolet source in a high power pulse mode and acquire data corresponding to an intensity of the ultraviolet radiation detected by the ultraviolet detector while a sample gas is present in the chamber. Using the data, the computer system can determine a presence and/or an amount of the trace gas in the sample gas.
    Type: Application
    Filed: April 16, 2013
    Publication date: October 17, 2013
    Applicant: Sensor Electronic Technology, Inc.
    Inventors: Yuri Bilenko, Alexander Dobrinsky, Michael Shur, Remigijus Gaska
  • Patent number: 8536525
    Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a novel use of a milling pattern allow the creation of S/TEM samples as thin as 50 nm without significant bowing or warping. Preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.
    Type: Grant
    Filed: February 27, 2012
    Date of Patent: September 17, 2013
    Assignee: FEI Company
    Inventors: Jeff Blackwood, Stacey Stone
  • Patent number: 8457276
    Abstract: A detection method detects cracks with small thickness and solder voids with small volume in a solder ball. The method immerses a washed solder ball into a high absorption material solution for a first predetermined time period. The immersed solder ball is then dried in a vacuum chamber at a fixed temperature for a second predetermined time period. Materials of the high absorption material solution of the solder ball are removed by a low absorption material solution. An X-ray machine then detects the cracks and the solder voids in the solder ball.
    Type: Grant
    Filed: November 3, 2010
    Date of Patent: June 4, 2013
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Wei-Chiang Lee
  • Patent number: 8455821
    Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.
    Type: Grant
    Filed: October 22, 2007
    Date of Patent: June 4, 2013
    Assignee: FEI Company
    Inventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
  • Patent number: 8440962
    Abstract: A plurality of targeted ion characteristics and a charge reduction amount are received. A subset of ionized molecules of a sample corresponding to each characteristic of the plurality of targeted ion characteristics is transmitted from a first location to a second location, producing a plurality of selected ionized molecules. Reagent ions are transmitted to the second location to reduce the charge state of the selected ionized molecules. The charge state reduction of the selected ionized molecules is stopped at the charge state reduction amount, producing a plurality of parked targeted ions in the second location. The targeted ion characteristics can include mobilities or mass-to-charge ratios. Quantitation information for an analyte can be obtained by performing targeted ion parking on a plurality of standards, developing a calibration function, performing targeted ion parking on a sample and using the calibration function to determine the concentration of the analyte in the sample.
    Type: Grant
    Filed: September 8, 2009
    Date of Patent: May 14, 2013
    Assignee: DH Technologies Development Pte. Ltd.
    Inventor: Yves Le Blanc
  • Patent number: 8384050
    Abstract: Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: February 26, 2013
    Assignee: Gatan, Inc.
    Inventors: Steven Thomas Coyle, John Andrew Hunt
  • Patent number: 8304721
    Abstract: A micro cross-section processing method includes the steps of determining a linear cross-section estimated position including an observation object on a surface of the sample, irradiating the focused ion beam to the cross-section estimated position perpendicularly to or at a tilt angle to form a cross-section at a position in front of the cross-section estimated position, irradiating the focused ion beam to both ends of the cross-section to form side cuts extending to a position in rear of the cross-section estimated position, irradiating the focused ion beam to a position on the surface of the cross-section and at a position deeper than the observation object to form a bottom cut extending to a position in rear of the cross-section estimated position, irradiating the focused ion beam along from the side cuts to the cross-section estimated position to form wedges connecting to the bottom cut, and applying impact to a region in front of the cross-section estimated position of the sample to cleave the vicinity
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: November 6, 2012
    Assignee: SII NanoTechnology Inc.
    Inventors: Kouji Iwasaki, Tatsuya Adachi
  • Patent number: 8182767
    Abstract: Instrument-cartridge interfaces for fluidic analyzers that have an instrument and a removable cartridge are disclosed. For example, and in one illustrative embodiment, the instrument may include a needle that is adapted to penetrate a septum on a removable cartridge. In another illustrative embodiment, the instrument may include a plunger that is adapted to deform a deformable membrane on a removable cartridge. In yet another illustrative embodiment, the instrument may include a nozzle that is adapted to mate and seal with a flow channel on a removable cartridge. Techniques for detecting the flow rate in a flow channel on a removable cartridge, as well as the position of fluid in a flow channel of a removable cartridge, are also disclosed.
    Type: Grant
    Filed: December 27, 2005
    Date of Patent: May 22, 2012
    Assignee: Honeywell International Inc.
    Inventors: Aravind Padmanabhan, Tom Rezachek, Ron L. Bardell
  • Patent number: 8134124
    Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a novel use of a milling pattern allow the creation of S/TEM samples as thin as 50 nm without significant bowing or warping. Preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.
    Type: Grant
    Filed: October 22, 2007
    Date of Patent: March 13, 2012
    Assignee: FEI Company
    Inventors: Jeff Blackwood, Stacey Stone
  • Patent number: 7939906
    Abstract: A manufacturing method for an electron tomography specimen with embedded fiducial markers includes the following steps. A chip of wafer is provided. The chip includes at least one inspecting area. At least one trench is produced beside the inspecting area. A liquid with the markers is filled into the trenches. A first protection layer is coated on the chip, and then a second protection layer is deposited on the first protection layer. Therefore, the markers can be embedded into the electron tomography specimen. The embedded markers can improve the alignment process, due to those embedded markers are easily tracked during feature tracking procedure. In addition, our novel invention also successfully provides a modified version of the technique to deposit gold beads onto TEM pillar samples for much improved 3D reconstruction.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: May 10, 2011
    Assignee: Inotera Memories, Inc.
    Inventors: Jian-Shing Luo, Chia-Chi Huang
  • Patent number: 7737437
    Abstract: A triplet light emitting device which has high efficiency and improved stability and which can be fabricated by a simpler process is provided by simplifying the device structure and avoiding use of an unstable material. In a multilayer device structure using no hole blocking layer conventionally used in a triplet light emitting device, that is, a device structure in which on a substrate, there are formed an anode, a hole transporting layer constituted by a hole transporting material, an electron transporting and light emitting layer constituted by an electron transporting material and a dopant capable of triplet light emission, and a cathode, which are laminated in the stated order, the combination of the hole transporting material and the electron transporting material and the combination of the electron transporting material and the dopant material are optimized.
    Type: Grant
    Filed: December 16, 2008
    Date of Patent: June 15, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd
    Inventors: Hiroko Yamazaki, Atsushi Tokuda, Tetsuo Tsutsui
  • Publication number: 20100123076
    Abstract: A method for experimentally optic transmitting information through an optic nerve. The method includes the steps of projecting a laser beam through the pupil, the vitreous body, the ganglion cells of the retina and the afferent nerve fibers to the beginning of the optic chiasm; observing visible luminescence of the eyeball and afferent nerve fibers to the beginning of the optic chiasm with holographic effects; transecting the optic nerve at the beginning of the optic chiasm in order to check the propagation of a laser beam along the efferent fibers of the optic nerve; protecting the eyeball with a metal screen; fixing the metal screen at the exit of the optic nerve from the eyeball, directing the laser beam at the butt end of the optic nerve, observing visible luminescence of the optic nerve with holographic effect; projecting the laser beam in the pupil, and observing visible luminescence of the pupil.
    Type: Application
    Filed: November 19, 2008
    Publication date: May 20, 2010
    Inventor: Victor V. Sevastyanov
  • Patent number: 7663101
    Abstract: A device, method and system for preparing and storing samples for microscopic analysis is disclosed. The device provides a reservoir that can be attached to a displacement pipette thereby filling the reservoir with reagents desired for preparing the samples for microscopic analysis. In some embodiments, the specimen may be contained on a transmission electron microscope (TEM) grid. In other embodiments, the sample may be a light microscope (LM) specimen or a scanning electron microscope (SEM) specimen. In yet another embodiment, the invention provides a method of preparing samples for microscopic examination including a device for preparing TEM grids with, a device for preparing TEM, SEM or LM specimens with and a device for storing both grids and specimens in. In yet another embodiment, the invention provides a system for tracking the preparation, analysis and histological evaluation of multiple samples while also providing for their long term storage.
    Type: Grant
    Filed: May 22, 2007
    Date of Patent: February 16, 2010
    Assignee: Microscopy Innovations
    Inventor: Steven L. Goodman
  • Patent number: 7659506
    Abstract: A system and method for generating a thin sample, the method includes: milling an intermediate section of a thin sample such as to enable an upper portion of the thin sample to tilt in relation to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed. A system and method for inspecting a thin sample, the method includes: A method for inspecting a thin sample, the method comprising: illuminating, by a charged particle beam, a tilted upper portion of a thin sample that is connected, via a milled intermediate section, to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed; and collecting particles and photons resulting from the illumination.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: February 9, 2010
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Michal Avinun-Kalish, Jacob Levin, Dror Shemesh
  • Patent number: 7615745
    Abstract: The invention pertains to a method for separating a minute sample (1) from a work piece (2). Such a method is routinely used in the semiconductor industry to obtain samples from wafers to be inspected in a TEM. It occurred to the inventor that approximately 20% of the obtained samples could not be properly finished (thinned) due to a misalignment of specimen carrier (6) and sample. It turned out that this misalignment is caused by the specimen carrier contacting the sample prior to welding. By not contacting the sample while welding, but leaving a small gap between specimen carrier and sample, this misalignment is avoided. To avoid movement of the specimen carrier during welding, due to e.g. vibration, the specimen carrier can be landed on the wafer on a position (8) close to the sample.
    Type: Grant
    Filed: July 9, 2007
    Date of Patent: November 10, 2009
    Assignee: FEI Company
    Inventors: Rudolf Johannes Peter Gerardus Schampers, Theodorus Adrianus Petrus Verkleij, Hendrik Siewerd Venema
  • Patent number: 7560689
    Abstract: A sample is sliced obliquely with a blade provided with a metal thin film on the surface, and the slice of the sample adhering to the blade surface is subjected to mass spectrometry. As a result, the section of the sliced sample can be analyzed immediately by mass spectrometry with high sensitivity.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: July 14, 2009
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuhiro Ban, Hiroyuki Hashimoto, Manabu Komatsu, Norihiko Utsunomiya, Yohei Murayama
  • Patent number: 7550723
    Abstract: A preliminary processing technology for a sample locally cuts out a sample part of a device to be analyzed and processes it into a needle-like projection, and a technology of realizing SAP analysis on an atomic level by ensuring stabilized ion evaporation sequentially even in the case of a sample of multilayer structure including an element layer of small evaporation electric field. The preliminary processing method for a sample used on atom probe apparatus comprises a step for cutting the desired observing part of the sample into a block using an FIB equipment, a step for transferring the sample block onto a sample substrate and fixing the sample block in place, and a step for processing the sample block fixed onto the sample substrate into a needle-point shape by FIB etching. The sample processed into a needle-point shape is shaped such that the layer direction of the multilayer structure becomes parallel to the longitudinal direction of the needle.
    Type: Grant
    Filed: March 2, 2005
    Date of Patent: June 23, 2009
    Assignee: SII NanoTechnology Inc.
    Inventor: Takashi Kaito
  • Patent number: 7544953
    Abstract: A device, method and system for preparing and storing samples for microscopic analysis is disclosed. The device provides a reservoir that can be attached to a displacement pipette thereby filling the reservoir with reagents desired for preparing the samples for microscopic analysis. In some embodiments, the specimen may be contained on a transmission electron microscope (TEM) grid. In other embodiments, the sample may be a light microscope (LM) specimen or a scanning electron microscope (SEM) specimen. In yet another embodiment, the invention provides a method of preparing samples for microscopic examination including a device for preparing TEM grids with, a device for preparing TEM, SEM or LM specimens with and a device for storing both grids and specimens in. In yet another embodiment, the invention provides a system for tracking the preparation, analysis and histological evaluation of multiple samples while also providing for their long term storage.
    Type: Grant
    Filed: May 23, 2007
    Date of Patent: June 9, 2009
    Assignee: Microscopy Innovations, LLC
    Inventor: Steven L. Goodman
  • Patent number: 7538322
    Abstract: A method of fabricating sample lamella for transmission electron microscopy (TEM) analysis is provided. A waiting-examination sample having an analysis target on the top surface of that is offered, and at least a mark around the analysis target is defined. A covering layer is covered on the top surface of waiting-examination sample. A holder is attached on the covering layer. A backside polishing process is performed to remove a portion of the waiting-examination sample until the mark is visible under the optical microscopy from the bottom surface of waiting-examination sample. An in-situ lift-out step is performed to pick up a thin membrane containing the analysis target and serve as the sample for TEM analysis.
    Type: Grant
    Filed: November 3, 2006
    Date of Patent: May 26, 2009
    Assignee: Inotera Memories, Inc.
    Inventors: Jian-Shing Luo, Lang-Yu Huang
  • Patent number: 7531794
    Abstract: Preparing a thin-film specimen adapted for TEM (transmission electron microscopy) observation. A high-brightness pixel extraction unit extracts high-brightness pixels which form a specimen image taken by an imaging unit. The intensities becoming greater than a given threshold value as the specimen is thinned. A decision unit makes a decision as to whether the high-brightness pixels extracted by the high-brightness pixel extraction unit form a continuous sequence of pixels whose number is in excess of a given number on the specimen image. If the decision is affirmative, the decision unit sends a signal to an ion gun control unit to stop the ion-beam irradiation of the specimen.
    Type: Grant
    Filed: April 21, 2006
    Date of Patent: May 12, 2009
    Assignee: Jeol Ltd.
    Inventors: Tadanori Yoshioka, Kiyoshi Kawatsu, Hirofumi Miyao
  • Patent number: 7525087
    Abstract: According to the present invention, a method for creating a sample for a TEM (Transmission Electron Microscope) observation comprising: forming an observation surface at a specific area of a semiconductor device; forming an amorphous protection film on the observation surface; and thinning a portion of the semiconductor device including at least the protection film.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: April 28, 2009
    Assignee: Oki Semiconductor Co., Ltd.
    Inventor: Satoshi Ikeda
  • Patent number: 7511282
    Abstract: Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.
    Type: Grant
    Filed: May 25, 2006
    Date of Patent: March 31, 2009
    Assignee: FEI Company
    Inventors: Enrique Agorio, Michael Tanguay, Christophe Roudin, Liang Hong, Jay Jordan, Craig Henry, Mark Darus
  • Patent number: 7482586
    Abstract: In an SEM observation in a depth direction of a cross section processed by repeated FIB cross-sectioning and SEM observation to correct a deviation in an observation field of view and a deviation in focus, are corrected, the deviations occurring when a processed cross section moves in the depth direction thereof; information on a height and a tilt of a surface of cross section processing area is calculated before the processing, the above information is used, the deviation in a field of view and the deviation in focus in SEM observation, which correspond to an amount of movement of the cross section at a time of the processing, are predicted, and the SEM is controlled based on the predicted values.
    Type: Grant
    Filed: July 7, 2006
    Date of Patent: January 27, 2009
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tohru Ishitani, Uki Kabasawa, Tsuyoshi Ohnishi