Abstract: An index value is calculated for rating an eyeglass with respect to protection against UV hazard. The index value is based on an integrated UV transmission value through the eyeglass and an integrated UV reflection value related to a back face of the eyeglass. Thus, the index value takes into account actual wearing conditions where UV eye exposure is due either to transmission through the eyeglass or reflection on the eyeglass back face. Respective index values obtained for a set of eyeglasses allow easy sorting of the eyeglasses with respect to UV protection efficiency.

Abstract: A method for locally resolved measurement of a radiation distribution (24) produced using a lithography mask (16) comprises providing a radiation converter (31, 131) having an at least two-dimensional arrangement of converter elements (32, 132) which can respectively be put in an active and a passive state, and are configured to convert incoming radiation in respect of its wavelength in the active state. The method further includes: manipulating the radiation converter (31, 131) several times such that respectively only a fraction of the converter elements (32, 132) adopts the active state, irradiating the radiation converter (31, 131) with the radiation distribution (24) after every manipulation of the radiation converter (31, 131) so that the active converter elements (32, 132) emit wavelength-converted is measuring radiation (34), recording respective places of origin (54) of the measuring radiation at every irradiation with the radiation distribution (24).

Abstract: A system for diverting wide angle incident electromagnetic radiation to parallel to an optical axis of a wide FOV lens. The system includes a wide FOV lens system including at least one wide FOV lens and an electromagnetic radiation sensitive device. The wide FOV lens system includes at least one wide FOV lens, the wide FOV lens includes a smooth outer surface that is transparent to the incident electromagnetic radiation. The wide FOV lens system is superposed over an outer surface of the electromagnetic radiation sensitive device, the electromagnetic radiation sensitive device is capable of interacting with the incident electromagnetic radiation.

Abstract: A photometric device (18) for quantifying a nucleic acid in a sample (518) in a tube (58), comprises a light emission unit (28), a sample obtaining unit (38) for holding the tube (58) with the nucleic acid sample (518) and a detection unit (48) wherein the sample obtaining unit (38) is arranged in between the light emission unit (28) and the detection unit (48) in particular, the light emission unit (28) and the detection unit (48) are arranged to provide light through the sample obtaining unit (38) such that light of a first wavelength of about 230 nanometers and light of a second wavelength of about 260 nanometers are simultaneously detectable within the detection unit (48). The photometric device (18) allows for efficiently analysing the nucleic acid sample by only considering invisible light.

Abstract: An evaluation method for evaluating the ultraviolet protection effect of a measurement sample applied on a substrate includes measuring, at predetermined wavelength intervals, a change over time of a spectral transmission spectrum of the measurement sample within a predetermined wavelength range by irradiating light from a light source that includes ultraviolet light, visible light, and infrared light under a predetermined irradiation condition; establishing, based on the change over time of the spectral transmission spectrum, a correlation between a light irradiation time and an erythema effective dose per unit time, which is obtained by dividing an erythema effective dose of the measurement sample by an erythema effective dose per 1 MED; and calculating an in vitro rSPF predictive value for the measurement sample on the basis of a time until a cumulative erythema effective dose, which is obtained through time integration based on the correlation, reaches 1 MED.

Abstract: Provided are: a method of measuring the total concentration of oxidizing agents, by which the total concentration can be determined in a single measurement with simple operations even in an evaluation solution containing multiple components such as persulfuric acid, perosulfate and hydrogen peroxide; a simple and inexpensive concentration meter for measuring the total concentration of oxidizing agents; and a sulfuric acid electrolysis device comprising the concentration meter. The method according to the present invention is a method of measuring the total concentration of oxidizing agent(s) in an evaluation solution containing at least one oxidizing agent. The method comprises at least the steps of: heat-treating the evaluation solution at 50 to 135° C.; and detecting hydrogen peroxide in the thus heat-treated evaluation solution.

Abstract: Improved laser systems and associated techniques generate an ultra-violet (UV) wavelength of approximately 193.368 nm from a fundamental vacuum wavelength near 1064 nm. Preferred embodiments separate out an unconsumed portion of an input wavelength to at least one stage and redirect that unconsumed portion for use in another stage. The improved laser systems and associated techniques result in less expensive, longer life lasers than those currently being used in the industry. These laser systems can be constructed with readily-available, relatively inexpensive components.

Abstract: A system for measuring a parameter of a medium with a vehicle moving in a traveling direction through the medium includes four detecting portions and a calculating portion. The four detecting portions respectively detect first through fourth values of the parameter from first through fourth lines-of-sight in first through fourth directions at first through fourth positions of the vehicle at first through fourth times. The first line-of-sight and the third line-of-sight are in a first plane and intersect at a first intersection, while the second line-of-sight and the fourth line-of-sight are in a second plane and intersect at a second intersection. The calculating portion calculates the parameter based on the first through fourth values and the first and second intersections.

Abstract: The ultraviolet ray sensor measures the intensity of ultraviolet rays irradiated to the ultraviolet ray receiving surface. The CPU performs control to measure ultraviolet intensity in a case in which the ultraviolet ray receiving surface of the ultraviolet ray sensor faces in a predetermined direction.

Abstract: The monitoring of UV radiation has received increased attention recently due to the hazards of accelerated skin ageing and even cancer following excessive exposure. Personalized monitoring gives a more accurate reading than crude weather forecasts of the ‘UV index’. This invention answers both these needs in a personal UV monitor that is incorporated into an existing display. Minimal processing changes are made to an existing display in order to achieve this added functionality, which is therefore achieved at little additional cost.

Abstract: A 3D ultraviolet (UV) imaging LADAR system includes a UV source configured to generate a UV interrogation beam, a sensor configured to receive a UV return beam reflected from a target and to produce an electrical signal, and an imaging module coupled to the sensor and configured to receive the electrical signal and to generate a corresponding 3D image of the target. In one example, the sensor includes a down-shifting device configured to down-shift the UV return beam to a down-shifted light beam of a different wavelength, for example, in the visible or SWIR wavelength ranges.

Abstract: Field balancing may be performed with an irradiation system including a plurality of adjustable radiant-energy emitters. The irradiation system powers the radiant-energy emitters from a power source and radiant energy is emitted from the radiant-energy emitters, where an amount of radiant energy emitted from each emitter is capable of being varied based on power received from the power source. A plurality of radiant-energy sensors detects an amount of radiant energy which includes radiant energy created directly by at least one of the radiant-energy emitters. The amount of radiant energy detected at at least two of the radiant-energy sensors is compared, and at least one of the radiant-energy emitters is adjusted by varying the power received from the power source so that the amount of radiant energy detected at each of the radiant-energy sensors tends towards becoming approximately equal.

Abstract: A self-referencing radiation detector to test the radiochemical purity of a sample radiopharmaceutical solution. In some embodiments, the self-referencing radiation detector measures the radioactivity of a sample radiopharmaceutical solution before the sample radiopharmaceutical solution is passed through a high performance liquid chromatography column. The radiation detector then measures the radioactivity of each separated molecularly distinct species from the high performance liquid chromatography column. The radiochemical purity of the sample radiopharmaceutical solution is calculated by comparing the measured radioactivity of separated molecularly distinct species from said high performance liquid chromatography column to the measured radioactivity of the sample radiopharmaceutical solution before the sample radiopharmaceutical solution is passed through the high performance liquid chromatography column.

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-? stage to further reduce the footprint.

Abstract: An attenuation optical system is in a beam path of a light beam traveling through a regenerative ring resonator. The attenuation optical system includes an actuator configured to receive an electromagnetic signal; and a plate mounted to the actuator to be moveable between a plurality of positions, with each position placing an attenuation region in the beam path such that the beam profile is covered by the attenuation region and each attenuation region representing an attenuation factor applied to the light beam as determined by a geometry of the attenuation region. At least one attenuation region includes a plurality of evenly-spaced elongated openings between solid energy-reflecting surfaces and at least one attenuation region includes an open area that is larger than the beam profile of the light beam.

Abstract: A method for synchronizing sample stage motion with a time delay integration (TDI) charge-couple device (CCD) in a semiconductor inspection tool, including: measuring a lateral position of a stage holding a sample being inspected; measuring a vertical position of the stage; determining a corrected lateral position of an imaged pixel of the sample based on the measured lateral and vertical positions; and synchronizing charge transfer of the TDI CCD with the corrected lateral position of the imaged pixel.

Abstract: A system for sterilizing at least one surface of an object is provided. The system includes a set of ultraviolet radiation sources and a set of wave guiding structures configured to direct ultraviolet radiation having a set of target attributes to a desired location on at least one surface of the object. The set of wave guiding structures can include at least one ultraviolet reflective surface having an ultraviolet reflection coefficient of at least thirty percent. Furthermore, the system can include a computer system for operating the ultraviolet radiation sources to deliver a target dose of ultraviolet radiation to the at least one target surface of the object.

Abstract: According to one embodiment, an ultraviolet irradiation system that sterilizes, disinfects, and inactivates raw water such as city water or underground water, includes a plurality of ultraviolet irradiation devices connected in series, and a controller configured to control output and non-output of the ultraviolet irradiation devices. The ultraviolet irradiation device includes a water processing vessel through which the raw water flows, an ultraviolet lamp configured to irradiate the raw water in the water processing vessel with ultraviolet rays, and an ultraviolet sensor configured to measure an amount of ultraviolet rays emitted from the ultraviolet lamp.

Abstract: A method and system are presented for use in optical processing of an article by VUV radiation. The method comprises: localizing incident VUV radiation propagation from an optical head assembly towards a processing site on the article outside the optical head assembly and localizing reflected VUV radiation propagation from said processing site towards the optical head assembly by localizing a medium, non-absorbing with respect to VUV radiation, in within the light propagation path in the vicinity of said site outside the optical head assembly. The level of the medium is controlled by measuring the reflected VUV radiation.

Abstract: A reflecting member made from a tube-shaped member has an inner peripheral surface that structures a reflecting surface on an axis of the tube-shaped member. A slope, relative to the axis, of a tangent line of the inner peripheral surface in a cross-sectional plane containing the axis changes monotonically along the axis. In relation to a target facing a smaller opening of the tube-shaped member, at a specific distance therefrom, and having a flat region perpendicular to the axis and axially symmetrical relative to the axis, of an electromagnetic radiation incident along the axis from a larger opening of the tube-shaped member, that radiation reflected at a specific location on the larger opening side is incident on one end side of the flat region, and that radiation reflected at a specific location on the smaller opening side is incident on the other end side of the flat region.

Abstract: A beam regulating apparatus for an EUV illumination beam has a position sensor device and a control/regulating device, which is signal-connected to the position sensor device. Furthermore, at least one beam regulating component which influences the beam path of the illumination beam is signal-connected to the control/regulating device. The position sensor device has at least one diffraction grating for generating at least two reference partial beams from the illumination beam. Furthermore, the position sensor device has a respective position sensor assigned to one of the reference partial beams, for detecting the assigned reference partial beam. This results in a beam regulating apparatus which enables well-controllable illumination in conjunction with a simple construction.

Abstract: A method for locally resolved measurement of a radiation distribution (24) produced using a lithography mask (16) comprises providing a radiation converter (31, 131) having an at least two-dimensional arrangement of converter elements (32, 132) which can respectively be put in an active and a passive state, and are configured to convert incoming radiation in respect of its wavelength in the active state. The method further includes: manipulating the radiation converter (31, 131) several times such that respectively only a fraction of the converter elements (32, 132) adopts the active state, irradiating the radiation converter (31, 131) with the radiation distribution (24) after every manipulation of the radiation converter (31, 131) so that the active converter elements (32, 132) emit wavelength-converted measuring radiation (34), recording respective places of origin (54) of the measuring radiation at every irradiation with the radiation distribution (24).

Abstract: A method and apparatus for absorbance correction in a spectroscopic heating value sensor in which a reference light intensity measurement is made on a non-absorbing reference fluid, a light intensity measurement is made on a sample fluid, and a measured light absorbance of the sample fluid is determined. A corrective light intensity measurement at a non-absorbing wavelength of the sample fluid is made on the sample fluid from which an absorbance correction factor is determined. The absorbance correction factor is then applied to the measured light absorbance of the sample fluid to arrive at a true or accurate absorbance for the sample fluid.

Abstract: A device for collecting EUV light from a plasma generation region includes first and second EUV collector mirrors. The first EUV collector mirror has a first spheroidal reflective surface and arranged such that a first focus of the first spheroidal reflective surface lies in the plasma generation region and a second focus of the first spheroidal reflective surface lies in a predetermined intermediate focus region. The second EUV collector mirror has a second spheroidal reflective surface and arranged such that a third focus of the second spheroidal reflective surface lies in the plasma generation region and a fourth focus of the second spheroidal reflective surface lies in the predetermined intermediate focus region.

Abstract: The systems and methods disclosed herein address issues of cost and weight that prevent other threat detection systems intended to detect and identify locations of incoming munitions fire such as RPGs, anti-tank missiles, and other such weapons, from being used more broadly. Systems and methods disclosed herein relate, in part, to a portable, optical sensor that has a 360-degree horizontal field of view and a selectable vertical field of view that can cover up to 90 degrees. Variations of systems and methods discussed herein are meant for use and transport by an individual or group of individuals, and do not require significant support electronics or power supplies in excess of a typical car-battery in size and weight. Other embodiments may be vehicle mounted, or may be further enhanced to work with other detection or response systems.

Abstract: The present disclosure relates to a gas sensor, including: a gas collecting chamber including: (a) a nanoporous wall including alumina, on a portion of the gas collecting chamber in the near vicinity of the solid propellant fuel; a micro pump attached to the gas collecting chamber; and a gas analysis device connected to the gas collecting chamber. The gas analysis device measures both type and concentration of gases collected in the gas collecting chamber via the nanoporous wall, the gases measured being selected from the group consisting of CO, CO2, NO, N2O, NO2 and combinations thereof. The present disclosure also relates to a method of sensing propellant degradation in solid fuel and a method of using a gas collecting chamber to sense such degradation.

Abstract: The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.

Abstract: Apparatus are provided for monitoring a condition of a surface based on a measurement of a property of the surface using a sensor. In an example, the property is performed using an apparatus disposed above the tissue, where the apparatus includes at least one coil structure formed from a conductive material, at least one other component, and at least one cross-link structure physically coupling a portion of the at least one coil structure to a portion of the at least one other component, the at least one cross-link structure being formed from a flexible material. The at least one other component can be a sensor component or a processor unit.

Abstract: An exemplary multifunction light transceiver device includes a plurality of light sources. At least one luminescent member is configured to emit visible light responsive to radiation incident on the luminescent member. A controller selectively controls the light sources to achieve multiple functions. The controller controls at least one of the light sources to irradiate the luminescent member to illuminate an area near the device. The controller controls at least one of the light sources to communicate information from the device. The controller also controls at least one of the light sources to emit light toward an object. A detector associated with the controller detects any portion of light that is reflected toward the detector. The controller uses any detected light for making a determination regarding an object from which the detected light reflected.

Abstract: An ultraviolet rays detection apparatus according to the present invention includes a color converting unit including nanocrystal quantum dots and having a color that is changed by irradiation of ultraviolet rays, and a non-color-converting unit disposed closer to the color converting unit and having a color that is not changed by the irradiation of the ultraviolet rays, thereby easily detecting the ultraviolet rays.

Abstract: An ultraviolet irradiation system includes: an ultraviolet irradiation apparatus including a plurality of ultraviolet lamps; a flowmeter configured to measure a flow rate of the water to be treated that passes through the ultraviolet irradiation apparatus; and an ultraviolet-dose monitoring and controlling apparatus configured to monitor an ultraviolet dose of the ultraviolet irradiation apparatus and to control outputs of the ultraviolet lamps. The plurality of ultraviolet lamps include a first ultraviolet lamp and a plurality of second ultraviolet lamps. The ultraviolet irradiation apparatus includes: a first measurement head configured to measure an ultraviolet intensity of the first ultraviolet lamp; and a plurality of second measurement heads configured to respectively measure ultraviolet intensities of the plurality of the ultraviolet lamps. A distance between the first ultraviolet lamp and the first measurement head is set to a determined value.

Abstract: The invention described herein contains two aspects, usable together or separately, that address the needs in the art described above, namely a first aspect that relates to the provision of a transportable water purification system that can be contained on a passenger transport vehicle, and that can use, but does not require, continuous, real-time monitoring, and a second aspect that relates to the use of UV purification of the water as it is uploaded to the passenger transport vehicle after a single pass through the UV chamber.

Abstract: This specification relates to an improved method, process and apparatus for disinfecting and sterilizing all types of surfaces and indoor air and room air contaminated with microorganisms. The improved apparatus consists of a multi-wavelength narrow spectral width UV source that is more effective than mercury based 254 nm germicidal lamps for destroying the DNA and outer shell or membrane of virus, bacteria, spores and cists.

Abstract: A removable and replaceable keying component which is required for operation of a mechanism and which component includes a waveguide having a photochromic portion. A method of controlling operation of a mechanism, preferably a dispenser, having a removable component comprising the steps of measuring electromagnetic radiation passing through a waveguide carrying at least in part on the removable component and permitting operation of the mechanism only when the measured electromagnetic radiation corresponds with one or more pre-selected parameters. Preferably, the method involves directing emitted electromagnetic radiation with pre-selected input parameters selected from a plurality of input parameters.

Abstract: An optical interrogator system including a broad spectrum light source capable of emitting light having a spectral width spanning at least approximately 20 nm, and at least one optical sensor coupled to the broad spectrum light source by at least one multimode optical fiber, wherein the at least one multimode optical fiber is configured to support a plurality of propagation modes, and a method of using the same are disclosed herein.

Abstract: the wavelength detector includes a diffusion element that diffuses the laser beam; a light collection optical system provided downstream from the diffusion element; a member, including an aperture, provided downstream from the light collection optical system; a discharge tube that is provided downstream from the member and that includes a cylindrical anode and a cylindrical cathode that each have a through-hole formed therein, and that is configured so that an electrical property between the anode and the cathode changes due to an opto-galvanic effect when a laser beam having a predetermined wavelength passes through the through-hole of the cathode in a state in which a DC voltage is applied to the anode; and a high-voltage DC power source. The discharge tube is disposed so that the laser beam that passes through the aperture passes through the through-hole of the cathode of the discharge tube without directly irradiating the cathode.

Abstract: Traffic monitors based on non-imaging radiation detectors are described. A traffic monitor includes a non-imaging radiation detector that senses spatially patterned radiation emanating from objects moving in a traffic pattern. The detector generates a time varying output signal based on the sensed radiation. Signal processing circuitry is used to analyze the time varying output signal using time domain analysis to provide the traffic information.

Abstract: An apparatus and method is disclosed which includes or employs an EUV light source comprising a laser device outputting a laser beam, a beam delivery system directing the laser beam to an irradiation site, and a material for interaction with the laser beam at the irradiation site to create an EUV light emitting plasma for use in processing substrates.

Abstract: A sensor system that constantly monitors an irradiance level of a UV lamp and is operated by power from a sensor thereof, wherein the UV lamp is powered by a ballast. The sensor system includes a current sensor, a UV sensor, a voltage comparator, and a display. The current sensor is disposed in the electronic assembly and picks-up current from the ballast, and in response thereto, powers the voltage comparator. The UV sensor is disposed externally to the assembly and picks-up the irradiance from the UV lamp. The voltage comparator is disposed in the electronic assembly, is in electronic communication with the current sensor and the UV sensor, is powered by the current sensor, and compares voltage from the UV sensor to a predetermined value. The display is visible from the electronic assembly, is in electronic communication with the voltage comparator, and indicates result of comparison of the voltage comparator to thereby determine status of the UV lamp.

Abstract: The invention relates to a beam line (30) for a source of extreme ultraviolet (EUV) radiation, wherein a EUV-radiating plasma is generated by irradiating droplets of a suitable target material with a focused laser beam (5) at a plasma generation point, said beam line (30) comprising within a vacuum chamber (7): a beam delivery system (2) comprising a focusing lens and means for cooling and shielding said focusing lens; a EUV mirror collector (1), which collects and focuses the radiated EUV in a EUV beam (6) at an intermediate focus (IF); a beam dump (3) capable of damping at least a portion of the laser beam (5) without imposing a shadow on the collected and focused EUV beam (6); and an intermediate focus module (4) for blocking particles from leaving the vacuum chamber (7) with the EUV beam (6).

Abstract: A flame sensor is provided with a focusing member. Ultraviolet light emitted from a light source is reflected by an inner surface of the focusing member to be focused on an electrode of an electrode pair, to increase the sensitivity.

Abstract: The disclosed water purifier comprises an outer wall, a RAW water inflow section that allows inflow of RAW water from outside said outer wall, a purifying section, an ultraviolet ray sterilizing section that has an ultraviolet ray source, a purified water outflow section that allows purified water that has been purified in said purifying section and sterilized in said ultraviolet ray sterilizing section to flow to the outside of said outer wall, a condition-detecting unit, and a control unit that controls generation of ultraviolet rays from said ultraviolet ray source according to the detection by said condition-detecting unit.

Abstract: An apparatus for performing UV light exposure testing of solar panels, also known as PV modules, with superior exposure uniformity, equipment throughput, and floor space requirements, consisting of a chamber including a plurality of UV lamps in a lamp array, at least one target plane, and reflective panels positioned within the chamber to redirect UV light to the target plane(s).

Abstract: The present invention provides a method for inspecting UV illuminance in multi-level UV bake furnace for TFT-LCD manufacturing process and a pickup assembly device for performing the method. The method for inspecting UV illuminance in multi-level UV bake furnace for TFT-LCD manufacturing process includes the following steps: Step 1: providing a multi-level bake furnace for TFT-LCD manufacturing process, a pickup device, an inspection control system, and a sensor for inspecting UV illuminance; Step 2: mounting the sensor on the pickup device; Step 3: connecting the inspection control system and the sensor with communication; Step 4: operating the pickup device to bring the sensor to a site in a level of the multi-level UV bake furnace where inspection of UV illuminance is to be made; and Step 5: sensor collecting data and transmitting the data so collected to the inspection control system to thereby realize inspection.

Abstract: In one an embodiment, there is provided an assembly comprising at least one detector. Each of the at least one detector includes a substrate having a doped region of a first conduction type, a layer of dopant material of a second conduction type located on the substrate, a diffusion layer formed within the substrate and in contact with the layer of dopant material and the doped region of the substrate, wherein a doping profile, which is representative of a doping material concentration of the diffusion layer, increases from the doped region of the substrate to the layer of dopant material, a first electrode connected to the layer of dopant material, and a second electrode connected to the substrate. The diffusion layer is arranged to form a radiation sensitive surface.

Abstract: In general, in one aspect, a method includes determining a critical dimension (CD) distribution on a photomask by measuring deep Ultra-Violet (DUV) transmission across the photomask.

Abstract: A system and method for multipoint assessment of a biological sample, which may comprise a bodily fluid. The sample is irradiated to generate a plurality of interacted photons. These photons are assessed to evaluate a component of the sample. The component may comprise at least one of: a protein, a flavonoid, a keratinoid, a metabolite, an electrolyte, an enzyme, and combinations thereof. The component may also comprise at least one of: a chemical agent, a biological toxin, a microorganism, a bacterium, a protozoan, a virus, and combinations thereof. The evaluation may comprise determining at least one of: a disease state, a disease stage, a metabolic state, a hydration state, an inflammatory state, and combinations thereof.

Abstract: A tracking sensor for a directed infra-red countermeasure (DIRCM) system, the sensor including a first set of image elements in a inner region of the sensor and each having or operable to monitor respective first fields of view; and a second set of image elements in an outer region of the sensor and each having or operable to monitor respective second fields of view. The first fields of view are smaller than the second fields of view or the image elements of the first set provide higher resolution than the image elements of the second set.

Abstract: The pattern defect inspection apparatus and its method of the present invention comprises: a recipe setting unit for setting an inspection recipe and/or a review recipe; an illumination optical system including: a laser light source for emitting ultraviolet laser light; a quantity-of-light adjusting unit for adjusting a quantity of the ultraviolet laser light emitted from the laser light source; and an illumination range forming unit for forming on a sample an illumination range of the ultraviolet laser light; a coherence reducing system; and a detection optical system including: a condensing optical system; a diffracted-light control optical system; and a detecting unit.

Abstract: The present disclosure relates to a method and apparatus for measuring corona discharge of power facilities by a UV sensor with an optical lens. The apparatus includes a UV sensor array receiving UV rays from an analyzing target of a power facility at a location separated a predetermined distance from the target, an optical lens unit focusing the UV rays to the UV sensor array, a signal detector detecting the UV rays in the form of a pulse voltage waveform signal, a UV image processor processing the detected pulse voltage waveform signal into a UV image, a real image measurement unit photographing a real image of the analyzing target, a real image processor displaying a photographed real image; a matching unit combining the photographed real image with the UV image, and an image/data output unit detecting a location of corona discharge based on the combined UV image and real image.