Abstract: A lithography apparatus includes: a stage configured to hold a substrate on which a mark is formed; an image sensor having an image sensing region; a processor configured to read out data concerning an image of the mark on a row basis to obtain a position of the mark; and a controller configured to position the substrate based on the position of the mark. When the processor obtains a position of a first mark on a first substrate, the controller moves the stage with respect to the image sensor such that an image of the first mark is formed closer to a row, from which the processor starts readout of the data, than an image of a second mark on a second substrate on which the pattern has been formed prior to the first substrate.

Abstract: A portable X-ray fluorescence analyzer comprises a detector of ionizing radiation that is configured to detect radiation from spontaneous radioactive decay within an environment of the portable X-ray fluorescence analyzer and or ionizing radiation that propagates past a front end of the portable X-ray fluorescence analyzer towards its user.

Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.

Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.

Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.

Abstract: An angle-responsive sensor, comprising: a radiation detector adapted to detect ionizing radiation; at least one collimator arranged to block radiation from reaching the detector in a manner dependent on a relative orientation of a radiation source, the detector and the collimator, the detector and the collimator defining an aim for the sensor; and circuitry coupled to the detector and which generates an output signal which varies as a function of the relative orientation, wherein the detector and the collimator are arranged to have a working volume of at least 10 cm in depth and having an angular width, such that the slope of the signal as a function of angle varies by less than a factor of 2 over the working volume.

Abstract: An angle-responsive sensor, comprising: a radiation detector adapted to detect ionizing radiation; at least one radiation absorbing element arranged to block radiation from reaching said detector in a manner dependent on a relative orientation of a radiation source, said detector and said element, said detector and said element defining an aim for said sensor; and circuitry coupled to said detector and which generates an output signal which varies as a function of said relative orientation, wherein said detector and said element are arranged to have a working volume of at least 10 cm in depth and having an angular width, such that said signal defines an accuracy of better than 3 mm within one standard deviation, over said working volume.

Abstract: A medical radiotherapeutic instrument comprising a ray source body, a switch and an end collimation body, a pre-collimation hole and a ray source cavity for placing ray source are defined on the ray source body; the switch is at least one pillar, each pillar is coupled with a drive unit, the pillars are disposed inside the ray source body, a middle collimation hole is defined on each pillar; under the driving of the drive unit, the pillar arise a displacement to move the middle collimation hole into or out of alignment with the pre-collimation hole; the end collimation body is disposed inside the ray source body, and an end collimation hole is defined on the end collimation body, the end collimation hole is connected with the pre-collimation hole through the middle collimation hole to form a therapy path. The present invention is simplified in structure and low in cost, with this structure, it can control the switch separately, and continuously adjust the radiate amount.

Abstract: A radiation emitting source includes a radiation emitter, an emitter switch, a collimator, a rotating mechanism and a shielding enclosure. The collimator has a central axial through-hole portion and a plurality of radial apertures. The through-hole portion receives the radiation emitter therein. The radiation emitter is axially movable in the through-hole portion. The rotating mechanism is coupled to the collimator. The shielding enclosure has an opening and encloses the collimator therein.

Abstract: A filter device with a UVC lamp for filtering fluids, with a lamp housing, which is installed in a flow of the fluid to be filtered and has a principal axis, is characterized by the fact that at least one cleaning element is arranged in contact with a fluid-side surface of the lamp housing and can rotate about an axis of rotation that coincides with the principal axis.

Abstract: The invention relates to an ion guide consisting of RF multipole segments to transfer ions from an ion source into a mass analyzer. The invention consists in having movable RF multipole segments in the ion guide which extend or electrically connect other RF multipole segments along the axis of the ion guide, in which spaces have arisen as a result of a change in configuration of the mass spectrometer, comprising ion source, ion guide and mass analyzer. The moved RF multipole segments bridge the spaces which have arisen between the components of the mass spectrometer and facilitate the transfer of the ions from the ion source to the mass analyzer.

Abstract: The invention is directed to a method and an arrangement for plasma-based generation of soft x-radiation, particularly for the generation of extreme ultraviolet (EUV) radiation. The object of the invention, to find a novel possibility for providing a target for a plasma-based radiation source which permits a reduction in the heating and erosion of the nozzle and therefore permits an improved temperature control at the injection device, is met according to the invention in that a closure device is arranged between the target nozzle and the interaction region which interrupts an opening for temporarily passing the target flow by mechanically moving elements, wherein at least a portion of the target flow that is provided in a reproducible manner is separated in order to interact with the energy beam only during those time intervals in which an optical transmission from the interaction region to the target nozzle is prevented by the closure device.

Abstract: A variable wavelength ultraviolet lamp. An apparatus for selectively producing one or more of a plurality of wavelength distributions of light is provided, comprising a primary light source having a primary wavelength distribution, at least one wavelength-transforming material that, in response to illumination by the primary light source produces secondary light having a wavelength distribution different from the primary light wavelength distribution, the wavelength-transforming material being disposed on a substrate external to the primary light source, and a wavelength-transforming material selection mechanism for placing at least a portion of one or more selected wavelength-transforming materials in front of the primary light source, in a selected preferred direction of light emission from the apparatus, such that the selected wavelength-transforming materials emit from the apparatus light having a wavelength distribution different from the primary light wavelength distribution.

Abstract: In a position detection apparatus which detects the position of an alignment mark, the alignment mark is sensed by a low-magnification image sensing system to acquire a rough position, and a stage is aligned based on the acquired rough position. The alignment mark is sensed by a high-magnification image sensing system to acquire an accurate position. The photoelectric conversion elements of the high- and low-magnification image sensing optical systems are elements whose storage times can be set. A controller determines the signal intensity levels of the photoelectric conversion elements on the basis of electrical signals from the photoelectric conversion elements of the high- and low-magnification image sensing optical systems, and sets storage times appropriate for the photoelectric conversion elements. The position of the alignment mark is detected using signals from the photoelectric conversion elements whose storage times are properly set.

Abstract: An infrared light unit for a motor vehicle includes a light source, a reflector having two focal regions and a lens. The light source is in one of the focal regions and produces a pool of reflected light in the other focal region, and the lens converts this pool of light into a beam projected on the road. The light unit includes, between the reflector and the lens, a filter which is opaque to visible light and transparent to infrared light, and which is movable between a position out of the path of light going from the reflector to the lens, and an active position in which all or most of the light going from the reflector to the lens passes through the filter.

Abstract: When an ultraviolet pasteurizer is used in a room free of a person, left and right light shield doors are opened to expose ultraviolet lamps outwardly. When an operation switch on a control panel is then turned on, an operation start timer is actuated, and the ultraviolet lamps are then energized to sterilize surrounding surfaces after elapse of 5 minutes. When the ultraviolet pasteurizer is used in a room occupied by a person, the left and right light shield doors are closed to direct the ultraviolet lamps inwardly until all light shield doors are brought into a substantially triangular prism. When the operation switch on the control panel is then turned on, the ultraviolet lamps and a fan are energized to draw external air from an air inlet. The drawn air passes through an inner radiation chamber defined inwardly of the light shield doors that have been combined into the substantially triangular prism.

Abstract: A radiation shield sheet includes a raw utilizing sheet, which includes a plurality of fibers and a plurality of matrixes reinforced together to define a predetermined crossed structure having a plurality of trapping meshes formed between the fibers and matrixes respectively, and a shielding layer, which is made by a predetermined amount of radiation inadmissible material capable of attenuating an intensity of a predetermined electromagnetic radiation, coated on an exposure surface of the raw utilizing sheet, wherein a portion of the shielding layer is captured in the trapping meshes so as to securely bond the radiation shielding layer on the raw utilizing sheet.

Abstract: A tanning bed formed a plurality of modular components that are integrated in a knock-down fashion that allows easy shipment of tanning beds in less than complete form, but allows the rapid assembly without the need of special training or tools.

Abstract: A method for transporting a source pin in a Positron Emission Tomography (PET) system having a transmission ring includes aligning the transmission ring with a source pin within a storage device having a magnetic force holding the source pin in place, and moving the source pin from the storage device to the transmission ring using a magnetic force greater than the magnetic force of the storage device.

Abstract: A method for transporting a source pin in a Positron Emission Tomography (PET) system having a transmission ring includes aligning the transmission ring with a source pin within a storage device having a magnetic force holding the source pin in place, and moving the source pin from the storage device to the transmission ring using a magnetic force greater than the magnetic force of the storage device.

Abstract: An apparatus, system, and method of storing and transferring a canister of spent nuclear fuel. In one aspect, the apparatus is a lid for a ventilated vertical overpack having a chamber for receiving spent nuclear fuel, the lid having ventilation ducts. In one aspect, the system comprises: a lid for a ventilated vertical overpack having a chamber for receiving spent nuclear fuel, the lid having ventilation ducts; and a ventilated vertical overpack having a cylindrical body including lower ventilation ducts, a bottom, and a chamber formed by the body and the bottom adapted for receiving a canister of spent nuclear fuel.

Abstract: Apparatus and method providing substantially two-dimensionally uniform irradiation of a planar target surface. An irradiation source is within an elliptical reflecting trough, on the major axis of the trough, and spaced from the focal axes of the trough. Edges of the trough define a first plane substantially perpendicular to the major axis of the trough. Reflectors extend substantially equal distances from the longitudinal edges and the ends of the trough to define a target surface plane substantially parallel with the first plane. A translucent reflector is a positioned on the major axis of the trough, outside the trough. The translucent reflector has a first planar portion lying in a plane substantially parallel with the target surface plane, and second and third planar portions extending from the edges of the first planar portion and angled toward the target surface plane.

Abstract: An apparatus for altering the radiation intensity delivered from a radiation source has a plate member for holding a plurality of radiation modulating devices. A frame member is coupled to the radiation source for holding the plate member between the radiation source and a target area. The frame member allows the plate member to rotate within the frame member so different radiation modulating devices may be positioned between the radiation source and the target area to alter the radiation intensity delivered.

Abstract: The invention provides a method and apparatus for facilitating calibration of a nuclear gauge by automating the movement of a source rod between a plurality of source rod positions. The apparatus can include a linearly moveable member, such as a threaded rod, a motorized linear actuator, such as a stepper motor, and a source rod grip attached to the linearly moveable member for affixing the source rod to the member.

Abstract: Disclosed is an electron beam irradiating apparatus including an electron beam source; an accelerating unit for accelerating electrons emitted from the electron beam source; a deflecting unit for deflecting a highly energized electron beam generated by the accelerating unit in a scanning direction; a vacuum vessel accommodating the electron beam source, the accelerating unit, and the deflecting unit in a vacuum environment; a window foil for ejecting the electron beam from the vacuum environment into a gas environment; a crosspiece for adhering to and supporting the window foil; and a cooling block for shielding the crosspiece from the electron beam in areas that the electron beam intersects the crosspiece.

Abstract: The invention provides a method and apparatus for facilitating calibration of a nuclear gauge by automating the movement of a source rod between a plurality of source rod positions. The apparatus can include a linearly moveable member, such as a threaded rod, a motorized linear actuator, such as a stepper motor, and a source rod grip attached to the linearly moveable member for affixing the source rod to the member.

Abstract: An ultraviolet radiation drying oven includes a lamp with a localized opening for radiation to pass through and, associated with the opening, a mask mounted to move between a closed position and an open position, the mask being divided into two shutters and being coaxial with another mask also divided into two shutters.

Abstract: An arrangement of shutter segments each having longitudinally opposed ends, front and back edges, and top and bottom solid surfaces, wherein each segment is adjacent to at least one other segment. The segments are arranged with the front and back edges of each segment in parallel along a first direction, and with one of the front or back edge of each segment overlapping one of the top or bottom surfaces of an adjacent segment. A drive hub is rigidly connected to each segment, respectively. A drive train engages all of the drive hubs, for simultaneously reciprocating the hubs and connected shutter segments rotatively through an actuation angle of no more than approximately 90 degrees (preferably 45 degrees) around respective axes of rotation which are parallel and coplanar along the first direction.