Abstract: A device (10) for pasteurizing and/or sterilizing particulate material. The device (10) includes: an outer housing (40); a material inlet (43); a material outlet (44); a material guide channel (41) for guiding the material through the device (10) to the material outlet (44); at least one electron source (20) for generating an electron beam; and a treatment zone (19), located in the material guide channel (41), for pasteurizing and/or sterilizing while the material is free falling. The device (10) has at least one inner shielding section (51, 52) disposed within the outer housing (40) and enclosing the material guide channel (41) for shielding off radiation produced during treatment. A method for pasteurizing and/or sterilizing particulate material using such a device (10) is also disclosed which includes: a) generating an electron beam, and b) pasteurizing and/or sterilizing the material, while the material is free falling in the treatment zone (19).

Abstract: In certain aspects and embodiments, the present invention provides a radiolytic polymerization/gelation method for the synthesis of gels and their subsequent activated carbon derivatives. In certain exemplary embodiments, resorcinol-formaldehyde gels are produced from resorcinol and formaldehyde without additives, catalysts, buffers, initiators or other species. In certain embodiments, ionizing ?-type radiation from 60Co is used as a radiation source in the gel crosslinking process. Different compositions of resorcinol/formaldehyde and a wide range of irradiation doses were examined. Various techniques are used to characterize the outcome product, either the gels or their derived carbon gels or activated carbon.

Abstract: The invention comprises a method and apparatus for tuning a charged particle beam path of a charged particle beam system used to treat a tumor of a patient, comprising the steps of: positioning a two-dimensional charged particle detector in a beam line downstream from a magnet pair; operating windings of the magnet pair at a first power level to generate a first magnetic field; measuring a beam position with the first two-dimensional charged particle detector; adjusting a correction magnetic field by driving voltage of a correction coil at a second power level, the second power level less than five percent of the first power level, where the first magnetic field and the correction magnetic field combine to yield an operational magnetic field; and the steps of measuring and adjusting the correction magnetic field changing the operational magnetic field to adjust a measured beam position toward a target beam position.

Abstract: A terahertz device includes a terahertz element, a sealing resin, a wiring layer and a frame-shaped member. The terahertz element that performs conversion between terahertz waves and electric energy. The terahertz element has an element front surface and an element back surface spaced apart from each other in a first direction. The sealing resin covers the terahertz element. The wiring layer is electrically connected to the terahertz element. A frame-shaped member is made of a conductive material and arranged around the terahertz element as viewed in the first direction. The frame-shaped member has a reflective surface capable of reflecting the terahertz waves.

Abstract: Sealed containers for radioactive material are presented herein. A sealed container forms an interior envelope for housing a radioactive material and prevents escape of the radioactive material into a surrounding environment. The sealed container provides a diffusion window for gaseous decay products to escape at a particular diffusion rate. In one example, an apparatus, comprises a container forming a sealed interior envelope for a radioactive material. The container has an aperture covered by a window material, and properties of the window material are selected to provide for diffusion of at least one gas produced by radioactive decay of the radioactive material.

Abstract: An extraction cleaning machine includes a housing with a bottom portion that is adapted to rest on a surface to be cleaned, a fluid delivery system including a fluid distributor, a fluid extraction system including a suction nozzle, at least one carriage assembly mounting an agitation assembly to the housing for movement with respect thereto and with respect to the surface to be cleaned, and an ultraviolet light mounted on at least one of the housing and the carriage assembly to emit ultraviolet light onto the surface to be cleaned.

Abstract: A hand-held nonlethal weapon comprises a body and a battery coupled to the body. The hand-held nonlethal weapon further comprises a power supply operably coupled to the battery. The hand-held nonlethal weapon further comprises a power amplifier operably coupled to the power supply. The power amplifier is operable to produce a nonlethal beam of energy. The hand-held nonlethal weapon further comprises a beamformer operably coupled to the power amplifier, the beamformer being operable to shape and direct a nonlethal beam of energy. The hand-held nonlethal weapon further comprises a trigger coupled to the body and operably coupled to the power amplifier and to the beamformer, wherein the trigger is operable to be activated and wherein activating the trigger is operable to initiate the formation of a nonlethal beam of energy and wherein the nonlethal beam of energy is operable to be projected from the body.

Abstract: A terahertz light detector includes: a light reception unit that receives terahertz light from a measured object; a pulse laser that generates pulse light; an optical member which the pulse light enters; and a control unit that controls the energy of the pulse light which enters the optical member, wherein the optical member has anomalous dispersion, and the light reception unit outputs a signal that is dependent on an intensity of terahertz light when the pulse light emitted from the optical member enters the light reception unit.

Abstract: A quantum communication system including an emitter of entangled photons, including a source configured in order to generate at least one pair of entangled photons. The at least one pair of entangled photons including a first photon (P1) emitted on a first propagation path (D1) and simultaneously a second photon (P2) emitted on a second propagation path (D2) different to the first propagation path. A first receiver arranged on the first propagation path (D1), including a complex absorber to absorb the photon in a polarization state selected from among the states of at least two different pairs of complementary polarization states. A second receiver arranged on the second propagation path (D2), including an optical amplifier making it possible to multiply the second photon (P2) while preserving its polarization and a measuring instrument making it possible to measure the average polarization of the multiplied photons.

Abstract: A boarding handrail includes: an outer pipe which is supported by a support member provided on a periphery of an entrance of a vehicle and of which one segment is removed to form a non-annular shape; an inner pipe that has a substantially C-shaped cross-section as seen from an axial direction, with the outside diameter smaller than the inside diameter of the outer pipe, and is disposed in the one segment by being suspended across one end and the other end of the outer pipe; a sheet member that continuously covers an outer circumferential surface and an inner circumferential surface of the inner pipe and is capable of being moved in a circumferential direction of the inner pipe by a driving device provided inside the inner pipe; and a disinfecting device that is provided inside the inner pipe and disinfects the sheet member by irradiating it with ultraviolet light.

Abstract: Embodiments described herein relate to methods and apparatus for generating electromagnetic radiation in an electro-optical apparatus.

Abstract: Data relating to an amount of contaminant in a fluid is obtained from a contaminant detection device. Aeration detection raw voltage data output and particle detection raw voltage data output from the contaminate detection device are received at an external data processing system separate and independent from the contaminate detection device. The aeration detection raw voltage data output and particle detection raw voltage data output are analyzed and cleaned to determine real time information on the amount of air bubbles and solid contaminate particles in the fluid, and then supplied to an onboard monitoring and controlling module of a machine for controlling one or more operations onboard the machine based on the determined amount of solid contaminate particles.

Abstract: A light source capable of operating third and fourth reflection mirrors included in a beam splitting device in conjunction with movements of first and second reflection mirrors included in a beam transfer device and an optical assembly, respectively. The third and fourth reflection mirrors are disposed on optical paths of a pre-pulse and a main pulse emitted from first and second pulse generators, respectively. The light source operates the third and fourth reflection mirrors to offset an excessive compensation of the main pulse caused in a process of compensating for an optical path error of the pre-pulse. The light source may be included in an extreme ultraviolet light source system.

Abstract: An extreme ultraviolet radiation (EUV) source, including: a vessel having an inner vessel wall and an intermediate focus (IF) region; an EUV collector disposed inside the vessel, the EUV collector including a reflective surface configured to reflect EUV radiation toward the intermediate focus region, the reflective surface configured to directionally face the IF region of the vessel; a showerhead disposed along at least a portion of the inner vessel wall, the showerhead including a plurality of nozzles configured to introduce gas into the vessel; and one or more exhausts configured to remove gas introduced into the vessel, the one or more exhausts being oriented along at least a portion of the inner vessel wall so that the gas is caused to flow away from the EUV collector.

Abstract: The present invention relates to an EUV light generation device including: a laser beam irradiated on a target material droplet; and a focusing mirror for focusing the EUV light generated through the plasma emitted by means of the irradiation of the laser beam on the droplet, wherein the focusing mirror has a concaved operating surface and a focusing point formed at a position facing the operating surface, and the laser beam and a focusing lens for focusing the laser beam are located at the positions facing the operating surface of the focusing mirror, so that the focusing point, the laser beam, and the focusing lens are located on the positions facing the operating surface, that is, on one side of the operating surface.

Abstract: Described herein is a decontamination device for use in vehicle applications. The decontamination device includes a device body and an ultraviolet (UV) light. The UV light includes a UV light source, coupled to the device body and configured to move relative to the device body. A plurality of openings is disposed around the UV light source.

Abstract: An extreme ultraviolet light generation system includes a target supply unit configured to supply a target substance to a first predetermined region, a laser system configured to output pulse laser light to be radiated to the target substance in the first predetermined region, a first sensor configured to detect an arrival timing at which the target substance has reached a second predetermined region between the target supply unit and the first predetermined region, an optical adjuster arranged on an optical path of the pulse laser light between the laser system and the first predetermined region, and a processor configured to control transmittance of the pulse laser light through the optical adjuster based on the arrival timing.

Abstract: The present application relates to a device for generating X-ray radiation and particle radiation by means of nuclear fusion, comprising: an anode and a cathode, which are separated from each other by an insulator and are arranged coaxially to each other, wherein the anode and the cathode are arranged at least partially in a reactor chamber and the cathode has a plurality of cathode electrodes a pre-discharge device for generating a pre-discharge that forms a low-impedance bridging across the insulator a gas that is contained in the reactor chamber; an electrical pre-discharge source, especially with high internal resistance that is connected with the pre-discharge device; and an electrical discharge source that is electrically connected to the confined anode and the cathode, wherein a dense, magnetically confined plasmoid is generated in front of the anode as a result of an electrical discharge from the electrical discharge source and one or more ion beams, one or more X-rays or combinations thereof are emit

Abstract: A nail lamp for curing UV-curable nail gel uses light emitting diodes (LEDs) that emit ultraviolet light and are relatively lower power. The nail lamp is powered from an exterior power source, such as a wall socket, or by a rechargeable battery pack. A battery compartment of the nail lamp holds the battery pack, which is removable without disassembling the nail lamp. The nail lamp is easily transportable to different locations and can be used even when a wall socket is unavailable. A curing time of the nail lamp is user-selectable. The nail lamp can also include one or more detection sensors to detect a person's hand or foot in a treatment chamber and automatically turn on or off the LEDs.

Abstract: A method for generating EUV light includes providing a laser beam having a Gaussian distribution. This laser beam can be then modified from a Gaussian distribution to a ring-like distribution. The modified laser beam is provided through an aperture in a collector and interfaces with a moving droplet target, which generates an extreme ultraviolet (EUV) wavelength light. The generated EUV wavelength light is provided to the collector away from the aperture. In some embodiments, a mask element may also be used to modify the laser beam to a shape.

Abstract: Techniques disclosed herein relate to photon sources with high spectral purity and high brightness. In one embodiment, a photon-pair source includes a pump waveguide, a first resonator coupled to the pump waveguide to couple pump photons from the pump waveguide into the first resonator, a second resonator coupled to the first resonator, and an output waveguide coupled to the second resonator. The second resonator is configured to convert the pump photons into photon pairs. The second resonator and the first resonator are configured to cause a coupling-induced resonance splitting in the second resonator or the first resonator. The second resonator and the output waveguide are configured to couple the photon pairs from the second resonator into the output waveguide. In some embodiments, the photo-pair source includes one or more tuners for tuning at least one of the first resonator or the second resonator.

Abstract: A light emitting sealed body includes: a housing containing light-emitting gas in an internal space and formed with an opening on which first light is incident and/or from which second light is emitted, wherein the first light is laser light for maintaining a plasma generated in the light-emitting gas and the second light is light from the plasma; and a window member that transmits the first light and/or the second light at the opening. The window member is joined to the housing by a joining material consisting of a material containing gold.

Abstract: A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.

Abstract: A method of hybridizing an FPA having an IR component and a ROIC component and interconnects between the two components, includes the steps of: providing an IR detector array and a Si ROIC; depositing a dielectric layer on both the IR detector array and on the Si ROIC; patterning the dielectric on both components to create openings to expose contact areas on each of the IR detector array and the Si ROIC; depositing indium to fill the openings on both the IR detector array and the Si ROIC to create indium bumps, the indium bumps electrically connected to the contact areas of the IR detector array and the Si ROIC respectively, exposed on a top surface of the IR detector array and the Si ROIC; activating exposed dielectric layers on the IR detector array and the Si ROIC in a plasma; and closely contacting the indium bumps of the IR detector array and the Si ROIC by bonding together the exposed dielectric surfaces of the IR detector array and the Si ROIC.

Abstract: A radio frequency (RF) screen for a microwave powered ultraviolet (UV) lamp system is disclosed. In one example, a disclosed RF screen includes: a sheet comprising a conductive material; and a frame around edges of the sheet. The conductive material defines a predetermined mesh pattern of individual openings across substantially an operative area of the screen. Each of the individual openings has a triangular shape.

Abstract: In certain embodiments, an imaging system includes an enclosure with an objective aperture opening into an interior space of the enclosure, an optical assembly optically coupling the objective aperture to an imaging sensor within the enclosure, a spatial light modulator (SLM) mounted to the objective aperture for selectively blocking and admitting illumination through the objective aperture into the interior space, and an illuminator mounted to illuminate the interior space of the enclosure.

Abstract: Provided is a UV lamp socket assembly for quickly, easily and safely drawing out a UV lamp without stopping operation of a UV reactor. The UV lamp socket assembly includes a lamp socket part allowing a UV lamp to be fitted thereto, and having a latch formed in a side surface to pivot around; a lamp socket nut part allowing the UV lamp to be inserted therethrough, having an annular latching groove formed in a side surface and provided for attaching and detaching the latch, and allowing a portion of the lamp socket part to be inserted while the latch is latched into the latching groove; and a lamp socket holder part to be fixed to a frame of the UV reactor using a fastening part and to be fastened with the lamp socket nut part to support the lamp socket part.

Abstract: A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion which is provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; a second window portion provided to the housing and from which second light that is light from the plasma is emitted; and a getter portion including a getter material and disposed in an irradiation region of the first light inside the housing.

Abstract: A diffusive layer including a laminate of a plurality of transparent films is provided. At least one of the plurality of transparent films includes a plurality of diffusive elements with a concentration that is less than a percolation threshold. The plurality of diffusive elements are optical elements that diffuse light that is impinging on such element. The plurality of diffusive elements can be diffusively reflective, diffusively transmitting or combination of both. The plurality of diffusive elements can include fibers, grains, domains, and/or the like. The at least one film can also include a powder material for improving the diffusive emission of radiation and a plurality of particles that are fluorescent when exposed to radiation.

Abstract: The present disclosure teaches an article of manufacture using an industrial (or commercial) manufacturing process. The article of manufacture comprises an infrared (IR) luminescent material that emits in the IR wavelength range (e.g., from approximately seven-hundred nanometers (˜700 nm) to approximately one millimeter (˜1 mm)) after being excited by incident wavelengths of between ˜100 nm and ˜750 nm (or visible light). In other words, once the material has been exposed to visible light, the material will continue to emit in the IR wavelength range for a period of time, even when the material is no longer exposed to the visible light.

Abstract: A high-power vacuum electron device source of 10 mm-0.1 mm wavelength radiation is composed of an electron gun joined to a RF vacuum electronic circuit. The electron gun includes a cathode, a focus electrode, and a grid. It generates an electron beam that is injected into the circuit for amplifying RF waves. The circuit is composed of metal circuit plates, e.g., copper alloy, that mate with each other and are shaped to provide a beam tunnel and RF circuit envelopes. Precision alignment pins made of nickel super alloy, are used to mutually align the metal circuit plates using elastic averaging implemented by positioning the precision alignment pins in precision alignment holes in the metal circuit plates. Preferably, the electron gun is aligned with the circuit using quasi-kinematic coupling.

Abstract: The present disclosure provides a magnetic immersion electron gun and a method of generating an electron beam using a magnetic immersion electron gun. The electron gun includes a magnetic lens forming a magnetic field, a cathode tip disposed in the magnetic field, and a multi-filament heater configured to directly heat the cathode tip to emit electrons through the magnetic lens. The multi-filament heater includes a first filament connected at each end to first and second positive terminals of a power source and a second filament connected at each end to first and second negative terminals of the power source. The first positive terminal, the second positive terminal, the first negative terminal, and the second negative terminal are arranged alternately around the cathode tip such that the first filament and the second filament intersect at the cathode tip and a resultant magnetic force applied to the cathode tip is reduced.

Abstract: Disclosed are a terahertz signal generation apparatus and a terahertz signal generation method using the same. The terahertz signal generation apparatus includes first and second resonators configured to respectively output an optical signal of a first resonant frequency and an optical signal of a second resonant frequency from an optical signal input through a gain medium, an optical modulator configured to optically modulate the output optical signal of the second resonant frequency, an optical combiner configured to combine the CW optical signal of the first resonant frequency and the modulated optical signal of the second resonant frequency, and a signal generator configured to generate a terahertz signal using heterodyne beating between the CW optical signal of the first resonant frequency and the modulated optical signal of the second resonant frequency, wherein the first resonant frequency and the second resonant frequency are processed to have a predetermined frequency difference.

Abstract: A method for electro-depositing a radioactive material onto a metal substrate is disclosed. This is particularly well-suited for true random number generators. The method includes (a) at least partially masking the metal substrate to expose a metallic surface on the metal substrate; (b) connecting the metal substrate to a cathode of a current source; (c) submersing the exposed metallic surface into a solution containing radioactive metal ions, wherein the solution is connected to an anode of the current source; (d) removing the exposed metallic surface from the solution; (e) removing the solution from the exposed metallic surface; (f) measuring the amount of radioactivity emitted from the exposed metallic surface; and (g) repeating steps (c) through (f) until the amount of radioactivity measured in step (f) is stabilized relative to a previous measurement.

Abstract: A shopping cart sanitization device, including a main body to receive at a first end at least one shopping cart therein, and a primary sanitization unit disposed within at least at least one portion of an interior of the main body, the primary sanitization unit including a sanitization body to automatically move from a second end of the main body to the first end of the main body in response to the main body receiving the at least one shopping cart, and at least one illumination unit disposed on at least at least one portion of the sanitization body to automatically illuminate UV light on the at least one shopping cart in response to the main body receiving the at least one shopping cart, such that the at least one illumination unit eliminates a pathogen.

Abstract: A transmitting unit of a LIDAR device includes at least two radiation sources for generating and emitting punctiform or linear electromagnetic beams into a scanning range, at least one of the radiation sources including an operating temperature settable as a function of an emission angle of the electromagnetic beams generated by the at least one radiation source. The different operating temperatures can generate beams having angle-dependent emission wavelengths, which can result in an improvement of the signal-to-noise ratio of a LIDAR device.

Abstract: Some implementations herein include a detection circuit and a fast and accurate in-line method for detecting blockage on a droplet generator head of an extreme ultraviolet exposure tool without impacting the flow of droplets of a target material through the droplet generator head. In some implementations described herein, the detection circuit includes a switch circuit that is configured in an open configuration, in which the switch is electrically open between two electrode elements. When an accumulation of the target material occurs across two or more electrode elements on the droplet generator head, the accumulation functions as a switch that closes the detection circuit. A controller may detect closure of the detection circuit.

Abstract: A door handle sanitizing apparatus may include a posterior wall configured to be disposed anterior of and substantially parallel to a door surface and having an inner surface, an arch portion extending in an anterior direction from the posterior wall, the arch portion having an anterior end and an inner surface, a first sanitizing agent source disposed on the posterior wall, and a second sanitizing agent source disposed on the inner surface of the arch portion.

Abstract: An apparatus for intraoral imaging has an illumination source that directs light to an object. An imaging apparatus forms an image at an image sensor array from reflected light from the object, the imaging apparatus having an optical stop along an optical axis. A phase modulator is disposed at or near the optical stop. An image processor conditions data from the image sensor array and provides processed image data of the object.

Abstract: A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.

Abstract: The present disclosure provides an electron source operating method, the electron source including at least one emission site fixed on a tip, the emission site being a reaction product formed by metal atoms of a surface of the tip and gas molecules under an electric field, and the operating method comprises emitting electrons by controlling operating parameters of the electron source.

Abstract: A method and system for generating EUV light includes providing a laser beam having a Gaussian distribution. This laser beam can be then modified from a Gaussian distribution to a ring-like distribution. The modified laser beam is provided through an aperture in a collector and interfaces with a moving droplet target, which generates an extreme ultraviolet (EUV) wavelength light. The generated EUV wavelength light is provided to the collector away from the aperture. In some embodiments, a mask element may also be used to modify the laser beam to a shape.

Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.

Abstract: In a general aspect, quantum electrodynamic (QED) interactions are generated using a parabolic transmission mirror. In some aspects, a system for generating a QED interaction includes an optical pulse generator and a vacuum chamber. The vacuum chamber includes a parabolic transmission mirror in an ultra-high vacuum region within the vacuum chamber. The parabolic transmission mirror is configured to produce the QED interaction in the ultra-high vacuum region based on an optical pulse from the optical pulse generator. The parabolic transmission mirror includes an optical inlet at a first end and an optical outlet at a second, opposite end. The parabolic transmission mirror also includes a parabolic reflective surface about an internal volume of the parabolic transmission mirror between the first and second ends. The parabolic reflective surface extends from the optical inlet to the optical outlet and defines a focal point outside the internal volume of the parabolic transmission mirror.

Abstract: A nail lamp for curing UV-curable nail gel uses light emitting diodes (LEDs) that emit ultraviolet light and are relatively lower power. The nail lamp is powered from an exterior power source, such as a wall socket, or by a rechargeable battery pack. A battery compartment of the nail lamp holds the battery pack, which is removable without disassembling the nail lamp. The nail lamp is easily transportable to different locations and can be used even when a wall socket is unavailable. A curing time of the nail lamp is user-selectable. The nail lamp can also include detection sensors to detect a person's hand or foot in a treatment chamber and automatically turn on or off the LEDs.

Abstract: Systems and method of electrical power generation. The system and method controls the timescale of electron dynamics and makes use of avalanche ionization, electrodynamic flows, magnetic fields, polarization, radiation emissions, shock wave front, impulse pressure, and heat transfer, created by plasma generated by exposing a fluid to an ultrashort wavelength laser pulse from a femtosecond laser, a nanosecond laser combined with a femtosecond laser, or a typical laser enhanced by a discharge barrier, and the fluid guided by a shock reflecting tube, electro-laser wave guide, plasma discharge gap or check valves that create vortexes to resist backflow, through a capacitor. The fluid and plasma being accumulated and recombined in a storage chamber in a compressed state, or recycled for cyclical power generation.

Abstract: A nail lamp for curing UV-curable nail gel uses light emitting diodes (LEDs) that emit ultraviolet light and are relatively lower power. The nail lamp is powered from an exterior power source, such as a wall socket, or by a rechargeable battery pack. A battery compartment of the nail lamp holds the battery pack, which is removable without disassembling the nail lamp. The nail lamp is easily transportable to different locations and can be used even when a wall socket is unavailable. A curing time of the nail lamp is user-selectable. The nail lamp can also include one or more detection sensors to detect a person's hand or foot in a treatment chamber and automatically turn on or off the LEDs.

Abstract: Proposed for cleaning optical elements for the ultraviolet wavelength range having at least one metal-containing layer on a surface is a process that includes: —supplying activated hydrogen to the surface having the metal-containing layer; subsequently supplying inert gas having an H2O volume fraction of below 5 ppm, preferably below 1 ppm, particularly preferably below 0.2 ppm. To this end, an optical system (1) includes a housing (122), a supply line (161) of activated hydrogen, a supply line (162) of inert gas having an H2O volume fraction of below 5 ppm and a discharge line (163) for pumping gas out of the housing.

Abstract: A method for extreme ultraviolet (EUV) lithography includes loading an EUV mask to a lithography system; loading a wafer to the lithography system, wherein the wafer includes a resist layer sensitive to EUV radiation; producing EUV radiation by heating target plumes using a radiation source; and exposing the resist layer to the EUV radiation while monitoring a speed of the target plumes.

Abstract: An example plasma confinement system includes an inner electrode having a rounded first end that is disposed on a longitudinal axis of the plasma confinement system and an outer electrode that at least partially surrounds the inner electrode. The outer electrode includes a solid conductive shell and an electrically conductive material disposed on the solid conductive shell and on the longitudinal axis of the plasma confinement system. The electrically conductive material has a melting point within a range of 170° C. to 800° C. at 1 atmosphere of pressure. Related plasma confinement systems and methods are also disclosed herein.