Radiation Controlling Means Patents (Class 250/505.1)
  • Patent number: 7109506
    Abstract: “A micro beam collimator for compressing beams is described, where the collimator has channel means for providing a channel having a cross section and guiding the beams from an entrance end to an exit end of the channel. The invention provides a micro beam collimator for compressing beams which allows easy adjustment of the width of the cross section of the beams while making it possible at the same time to adjust the length of the cross section of the beams. The invention forms the channel means by at least three rod members each of which having at least one bordering surface for bordering the cross section, wherein the rod members are moveable against each other along the bordering surfaces so that the geometry of the cross action is variable.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: September 19, 2006
    Assignee: Euratom
    Inventors: Dimitrios Papaioannou, Christos Papaioannou, Heinz Stutz
  • Patent number: 7106832
    Abstract: Particles emitted by a radiation source, and moving from the radiation source towards a processing system for processing the radiation from the radiation source, are filtered out of radiation propagating through a predetermined cross section of the radiation as emitted by the radiation source by a filter system. The filter system includes a plurality of foils and a transporter for transporting the foils along a trajectory which extends within the beam so that the foils intercept the particles within the beam. The transporter is arranged to transport the foils by a substantially translatory movement of the foils along at least a part of the trajectory.
    Type: Grant
    Filed: January 10, 2005
    Date of Patent: September 12, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Derk Jan Wilfred Klunder, Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen
  • Patent number: 7094451
    Abstract: A method using irradiation with optical light in the presence of a chemical dissolved in a solvent which chemical reacts with the surface in the presence of the irradiation to modify the surface (12A, 104A, 202A, 304A, 402A, 502A) of a substrate (12, 104, 202, 304, 402, 502) is described. The light can be pulsed or continuous. The method is significantly enhanced by the presence of water (14, 124, 204, 308, 410, 508) as the solvent containing the dissolved chemical on the surface. The treated surfaces are more paintable and bondable.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: August 22, 2006
    Assignee: Board of Trustees of Michigan State University
    Inventors: Lawrence T. Drzal, Praveen Tummala
  • Patent number: 7075073
    Abstract: An apparatus for detecting properties of a sample. An electron beam generator produces an electron beam and directs the electron beam at a desired point on the sample. The sample thereby emits characteristic x-rays at takeoff angles. A collimator receives and parallelizes the x-rays and converts the takeoff angles of the x-rays to positional differences between the parallelized x-rays. A diffractor receives and deflects the x-rays. A position sensitive detector receives the deflected x-rays and detects the positional differences between the x-rays, and generates signals that are characteristic of the received x-rays. An analyzer receives the signals from the detector and determines the properties of the sample based at least in part on the positional differences between the x-rays.
    Type: Grant
    Filed: May 21, 2004
    Date of Patent: July 11, 2006
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Gary R. Janik, Jeffrey A. Moore, Edward M. James
  • Patent number: 7070328
    Abstract: A method is for the compensation of image disturbances in the course of a radiation image recording caused by a defocusing of an antiscatter grid, arranged in the beam path between a beam source and a digital radiation image receiver and focused with respect to a specific distance from the focus of the beam source. Such image disturbances are caused by a defocusing-dictated attenuation of the primary radiation incident on the radiation image receiver. A solid-state image detector includes radiation-sensitive pixels arranged in matrix form and a device for pixelwise amplification of the radiation-dependent signals. In the method, at least some of the signals supplied in pixelwise fashion are amplified by an amplifying device in a manner dependent on the actual distance of the antiscatter grid from the focus.
    Type: Grant
    Filed: March 19, 2004
    Date of Patent: July 4, 2006
    Assignee: Siemens Aktiengesellschaft
    Inventors: Bernhard Geiger, Sigrid Joite-Barfuss, Claudius Molz, Gudrun Roth-Ganter
  • Patent number: 7064324
    Abstract: The charged particle beams is provided, which can analyze contamination of the inner wall of the system without being disassembled and supply information on appropriate maintenance timing. The contamination level of the inner wall of the system is identified by measuring the spectrum of the X-rays emitted from the inner wall due to irradiation of a charged particle beam or a recoil electron.
    Type: Grant
    Filed: July 30, 2004
    Date of Patent: June 20, 2006
    Assignee: Hitachi, Ltd.
    Inventor: Takashi Onishi
  • Patent number: 7060997
    Abstract: A particle therapy system is provided which can simply and quickly correct a beam orbit. In a particle therapy system provided with an irradiation facility comprising a first beam transport system for receiving a beam and transporting the beam to the patient side, and an irradiation nozzle for forming an irradiation field of the beam, the particle therapy system comprises first beam position monitors for detecting a position upstream of the irradiation nozzle at which the beam passes, second beam position monitors for detecting a position downstream of the irradiation nozzle at which the charged-particle beam passes, and first and second steering magnets. Correction bending amounts for causing the beam to be coincident with a predetermined orbit after the correction are determined in accordance with detected results from the first and second beam position monitors, and first and second steering magnets are excited under control so that the determined correction bending amounts are obtained.
    Type: Grant
    Filed: July 21, 2005
    Date of Patent: June 13, 2006
    Assignee: Hitachi, Ltd.
    Inventors: Tetsuro Norimine, Masumi Umezawa, Kazuo Hiramoto
  • Patent number: 7060998
    Abstract: The invention relates to a component support (29) for use in a radioisotope generator, the component support comprising a latching member (5) movable between an engaging position and an open position characterised by further including a bracing member (13) mechanically associated with the latching member and adapted to prevent movement of the latching member to the open position.
    Type: Grant
    Filed: December 11, 2002
    Date of Patent: June 13, 2006
    Assignee: GE Healthcare Limited
    Inventors: Terence Robert Frederick Forrest, Mark Teucher, Philip Walsh
  • Patent number: 7057194
    Abstract: A radiation barrier for shielding a person from radiation emitted from a radiation source. The barrier includes a radiopaque wall extending between opposite lateral edges, wherein the wall is positionable between the radiation source and the person to prevent radiation from traveling directly between the radiation source and the person, and a radiopaque deflector extending from the wall and obliquely angled relative to the wall.
    Type: Grant
    Filed: April 7, 2004
    Date of Patent: June 6, 2006
    Assignee: ECO Cath-Lab Systems, Inc.
    Inventor: James A. Goldstein
  • Patent number: 7053389
    Abstract: The invention provides a charged particle therapy system capable of increasing the number of patients treated. An irradiation filed forming apparatus for irradiating a charged particle beam extracted from a charged particle beam generator to an irradiation target includes an RMW device. The RMW device comprises a housing and an RMW disposed within the housing. A rotary shaft of the RMW is rotatably mounted to the housing. The RMW device is detachably installed in an RMW holding member provided in a casing of the irradiation filed forming apparatus. The housing can be placed in contact with the RMW holding member, and hence positioning of the rotary shaft of the RMW to a predetermined position can be performed in a short time. This contributes to cutting a time required for treatment per patient and increasing the number of patients treated.
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: May 30, 2006
    Assignee: Hitachi, Ltd.
    Inventors: Masaki Yanagisawa, Hiroshi Akiyama, Koji Matsuda, Hisataka Fujimaki
  • Patent number: 7053370
    Abstract: The invention provides a cross section evaluating apparatus capable of analyzing the cross sectional structure in a state where the temperature of the specimen is regulated. There is disclosed an information acquisition apparatus comprising a stage for placing the specimen, temperature regulation means for regulating the temperature of the specimen, exposure means for exposing a surface, of which information is desired, of the specimen, and information acquisition means for acquiring information relating to the surface exposed by the exposure means.
    Type: Grant
    Filed: April 19, 2004
    Date of Patent: May 30, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Taiko Motoi, Rie Ueno
  • Patent number: 7049616
    Abstract: A method of adjusting a beam spot width includes scanning a phantom with an electron beam having a beam spot width to obtain data; and adjusting the beam spot width using the obtained data.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: May 23, 2006
    Assignee: General Electric Company
    Inventors: Souma Sengupta, Erik William Chell, Sanjay Kumar Jha
  • Patent number: 7046768
    Abstract: A shutter-shield system for radiation protection is applied to a an x-ray generator in a shielded station for inspecting products moving through the station on a conveyor. Deployed in a sliding attachment on a collimator housing of the x-ray generator, a shutter plate is made movable by an actuator and is configured with an aperture that, in the absence of power applied to the actuator, is made to align with a fixed aperture of the collimator so as to allow emission of the x-ray beam as required for normal inspection purposes. Whenever an anomaly in the product loading on the conveyer creates a gap that could otherwise cause an increase in environmental radiation levels, powering the actuator moves the shutter plate to an offset location that offsets the apertures to an effectively closed state to initiate a standby condition wherein x-ray radiation is substantially confined to the interior region of the collimator, without having to shut down the x-ray generator itself.
    Type: Grant
    Filed: November 10, 2003
    Date of Patent: May 16, 2006
    Assignee: InspX LLC
    Inventor: Alexander I. Gilevich
  • Patent number: 7041512
    Abstract: An electron beam exposure apparatus for exposing a wafer with an electron beam includes a section for generally controlling a wafer exposing system, a first buffer memory for temporarily storing exposure data, a second buffer memory for temporarily storing the exposure data, a first exposing section for irradiating the wafer with an electron beam based on exposure data output from the first buffer memory, and a first comparing section for comparing exposure data output from the first buffer memory with exposure data output from the second buffer memory and notifying the comparison results to the general control section. The exposure data stored in the first buffer memory and the exposure data stored in the second buffer memory are identical to one another when no error is involved. Further, an exposure apparatus and a pattern error detection method for accurately detecting an error of an exposure pattern formed to a wafer is disclosed.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: May 9, 2006
    Assignee: Advantest Corp.
    Inventors: Kouji Fujiyoshi, Masami Takigawa
  • Patent number: 7041995
    Abstract: The invention relates o a lead substitute material for radiation protection purposes. The lead substitute material comprises Sn, Bi and optionally W or compounds of said metals and the composition of the lead-substitute material is a function of the nominal lead equivalent value.
    Type: Grant
    Filed: July 1, 2003
    Date of Patent: May 9, 2006
    Assignee: Mavig GmbH
    Inventor: Heinrich Eder
  • Patent number: 7030398
    Abstract: A system and method of accelerating ions in an accelerator to optimize the energy produced by a light source. Several parameters may be controlled in constructing a target used in the accelerator system to adjust performance of the accelerator system. These parameters include the material, thickness, geometry and surface of the target.
    Type: Grant
    Filed: March 1, 2005
    Date of Patent: April 18, 2006
    Assignee: The Regents of the University of California
    Inventor: Toshiki Tajima
  • Patent number: 7030392
    Abstract: A method and apparatus for genomic or proteomic research to visualize fluorescent labeled DNA, RNA or protein samples that have been separated for documentation and analysis. The apparatus includes a novel radiation source for uniformly irradiating the samples which comprises a grid constructed from a continuous, serpentine shaped ultraviolet light producing tube that is strategically formed to provide a multiplicity of side-by-side, immediately adjacent irradiating segments. In one form of the invention the apparatus also includes a first conversion plate that is carried by the housing at a location intermediate the radiation source and the sample supporting platform for converting the radiation emitted from the source to radiation at a second wavelength.
    Type: Grant
    Filed: December 10, 2003
    Date of Patent: April 18, 2006
    Inventor: Alex Waluszko
  • Patent number: 7030397
    Abstract: A neutron-optical component array in which the beam paths of the individual moderators are combined in a concerted manner so as to create a superimposed neutron beam with an effective mean beam direction. The superimposed neutron beam has a multi spectrum composed of the single spectrums of several moderators, whereby a larger spectral width is obtained, making various applications in different neutron energy fields possible. The multi spectrum can be further improved in terms of the intensity thereof and the beam quality by adding further neutron-optical components, particularly in the form of an energy-depending switching super reflector, and by switching between moderators.
    Type: Grant
    Filed: January 22, 2003
    Date of Patent: April 18, 2006
    Assignee: Hahn-Meitner-Institut Berlin GmbH
    Inventors: Ferenc Mezei, Margarita Russina
  • Patent number: 7015490
    Abstract: A method and apparatus to determine an optimum collimator angle of a multi-leaf collimator having an opening and multiple leaf pairs for closing portions of the opening to form a radiation beam arrangement having multiple radiation beam segments. The method and apparatus include application of a cost function to determine a collimator angle which provides for delivery efficiency and target conformity. The user can preferentially either selectively enhance delivery efficiency of the radiation beam arrangement, reducing a number of radiation beam segments and reducing a number of radiation beam monitor units required for delivery of the desired prescription, or selectively enhance conformity of the radiation beam arrangement to a target shape. The optimum collimator angle is then used for delivery of an optimized radiation beam arrangement to a patient by a radiation delivery device.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: March 21, 2006
    Assignee: Nomos Corporation
    Inventors: Duan Qiang Wang, Robert W. Hill, Simon Chun-pin Lam
  • Patent number: 7012261
    Abstract: A multipole lens producing less magnetic field variations is offered. Also, a charged-particle beam instrument fitted with such multipole lenses is offered. The multipole lens has plural polar elements, an annular holding member, and an annular yoke disposed outside the holding member. Each polar element has a held portion and a base-end portion. The held portions of the polar elements are held by the holding member. The yoke is magnetically coupled to the base-end portions of the polar elements. The yoke is provided with openings extending circumferentially. The base-end portions of the polar elements are positioned in the openings.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: March 14, 2006
    Assignee: JEOL, Ltd.
    Inventors: Eiji Kawai, Joachim Zach, Klaus Hessenauer
  • Patent number: 7009194
    Abstract: The present invention provides processes and apparatuses for mounting radiation treatment blocks on a radiation treatment block mounting plate, adjusting a radiation treatment block in a radiation treatment beam and forming a radiation treatment block. The present invention provides a method of mounting a radiation treatment block on a radiation treatment block mounting plate that minimizes or eliminates the creation of toxic and hazardous dust and waste and radiation treatment block misalignment problems. The apparatuses and processes of the present invention also provide an adjustable radiation treatment block mounting tray and method for easily and precisely adjusting a radiation treatment block to a radiation beam for the prescribed treatment of a patient.
    Type: Grant
    Filed: October 28, 2003
    Date of Patent: March 7, 2006
    Inventor: Clifford J. Merlo
  • Patent number: 6998620
    Abstract: A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.
    Type: Grant
    Filed: August 12, 2002
    Date of Patent: February 14, 2006
    Assignee: Lambda Physik AG
    Inventor: Guido Schriever
  • Patent number: 6992314
    Abstract: Disclosed is a device for eliminating electromagnetic waves which consists essentially of an electromagnetic-wave trapping means comprising mainly a coil, and a discharge means made on the opposite end to the basement of the trapping means, wherein the coil having a diameter which gradually decreases from the basement to the opposite end of the trapping means.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: January 31, 2006
    Assignee: Kabushiki Kaisha Shunkosha
    Inventors: Kazuya Masaki, Ken Hayashibara
  • Patent number: 6992313
    Abstract: An x-ray or neutron apparatus for the transmission of x-ray or neutron images is described, which includes x-ray- or neutron-three-dimensional (3-D) arrays or mosaics, including a plurality of x-ray or neutron lenses positioned so that they form a two-dimensional (2-D) mosaic of compound refractive lenses to provide a plurality of separate x-ray or neutron paths between an object and an image at an x-ray- or neutron-detector. The apparatus is so constructed that it permits separate parts of an object to be imaged such that a total composite image is formed from these various parts. An imaging apparatus of the detection of carcinoma in breast tissue is formed using such an apparatus. Methods of microscopy and imaging are obtained using this apparatus.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: January 31, 2006
    Assignee: Adelphi Technology Inc.
    Inventor: Melvin A. Piestrup
  • Patent number: 6992307
    Abstract: An electron gun is composed of a hemispherical cathode (1) and a second bias electrode (8) having apertures (9, 7, 11) along an optical axis of an electron beam fired from the electron gun, a first bias electrode (6) and an anode (10), arranged in that order, as well as a controller for variably controlling an electric potential applied to the first and second bias electrodes. The controller, for example, holds the sum of the electric potentials of the first and second bias electrodes relative to the cathode (1) substantially constant. Further, by adding one or more third bias electrode(s) (20) between the first and second bias electrodes (6, 8) as necessary, the intensity of the electron beam discharged from the high-intensity, high-emittance electron gun can be adjusted without affecting the current density angular distribution.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: January 31, 2006
    Assignees: Canon Kabushiki Kaisha, Hitachi High-Technologies Corp.
    Inventors: Yoshikiyo Yui, Hiroya Ohta
  • Patent number: 6984835
    Abstract: An irradiation apparatus has a large irradiation field and is capable of ensuring the uniformity of a dose distribution without strengthening the performance of an irradiation field enlarging device. The irradiation apparatus includes a beam interruption part for performing a plurality of irradiations of a radiation beam, a position control part for controlling a location to be irradiated in such a manner that the entire surface of the target can be irradiated in a plurality of irradiation zones including an overlapping area formed by the plurality of irradiations, and a multileaf collimator control part for providing a slope to a dose distribution in the overlapping area of the respective irradiation zones, so that the dose distribution over the entire surface of the target including the overlapping area is made flat or uniform by the plurality of irradiations of the radiation beam.
    Type: Grant
    Filed: January 23, 2004
    Date of Patent: January 10, 2006
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Hisashi Harada
  • Patent number: 6979822
    Abstract: A charged particle beam system uses an ion generator for charge neutralization. In some embodiments, the ion generator is configured to maintain an adequate gas pressure at the ion generator to generate ions, but a reduced pressure in the remainder of the vacuum chamber, so that another column can operate in the chamber either simultaneously or after an evacuation process that is much shorter than a process that would be required to evacuate the chamber from the full pressure required at the ion generator. The invention is particularly useful for repair of photolithography masks in a dual beam system.
    Type: Grant
    Filed: March 16, 2004
    Date of Patent: December 27, 2005
    Assignee: FEI Company
    Inventors: Diane K. Stewart, W. Ralph Knowles, Brian T. Kimball
  • Patent number: 6977384
    Abstract: The invention adds one or more surface contour(s) to the bombarded area(s) within ion columns to greatly reduce the likelihood that back sputtered material will reach the ion generating source. A number of different surface contours are disclosed including angled surfaces, surfaces defining cups to capture back sputtered material, pre-textured and forested surfaces. The different surfaces can be used in any combination. The reduction in back sputtered material reaching the ion source reduces the time to stability, greatly increases the working stability, and increases the lifespan of the source.
    Type: Grant
    Filed: September 23, 2003
    Date of Patent: December 20, 2005
    Assignee: FEI Company
    Inventors: James B. McGinn, Gregory A. Schwind
  • Patent number: 6977383
    Abstract: A method and apparatus for generating membrane targets for a laser induced plasma is disclosed herein. Membranes are advantageous targets for laser induced plasma because they are very thin and can be readily illuminated by high-power coherent light, such as a laser, and converted into plasma. Membranes are also advantageous because illumination of the membrane with coherent light produces less debris and splashing than illumination of a thicker, solid target. Spherical membranes possess additional advantages in that they can be readily illuminated from variety of directions and because they can be easily placed (i.e. blown) into a target region for illumination by coherent light. Membranes are also advantageous because they can be formed from a liquid or molten phase of the target material. According to another embodiment, membranes can be formed from a solution in which the target materials are solvated.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: December 20, 2005
    Assignee: JMAR Research, Inc.
    Inventors: Harry R. Rieger, I. C. Edmond Turcu, James Morris
  • Patent number: 6967343
    Abstract: Materials and methods of manufacturing radiation shielded enclosures is presented that may replace the use of lead, granite and other undesirable materials and manufacturing methods. The present invention provides a high-density radiation shielding enclosure manufactured using a fiberglass lay-up or pressure spaying process and tungsten powder. The method of manufacture may include applying a tungsten powder in an epoxy, caulking, sealant, adhesive or elastomeric compound to the radiation shielding enclosure in order to seal any cracks, holes, joints or other radiation leaks.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: November 22, 2005
    Assignee: Agilent Technologies, Inc.
    Inventors: Patrick A. Batten, Troy C. Schank
  • Patent number: 6965663
    Abstract: This invention provides an X-ray analysis apparatus and method capable of simply and accurately determining the position of analysis in a sample from an optical image of it without lowering the sensitivity and/or the spatial resolution in light element analysis. The X-ray analysis apparatus of the present invention irradiates a sample with X-rays narrowed down by means of an X-ray guide member from above the sample in which said sample is directly irradiated with X-rays from said X-ray guide member and an optical image of said sample is obtained in the direction coaxial with said X-ray guide member.
    Type: Grant
    Filed: March 25, 2003
    Date of Patent: November 15, 2005
    Assignee: HORIBA, Ltd.
    Inventor: Sumito Ohzawa
  • Patent number: 6963072
    Abstract: The invention makes possible to increase the degree of radiation focusing by the lens, to use particles of higher energies, and to increase the coefficients, depending on these factors, of the devices, the lens is used in. Thus the sublens 18 of the least degree of integration represents a package of the channels 5, which is growing out of joint drawing and forming the capillaries, which are laid in a bundle. The sublens of each higher degree of integration represents a package of sublenses of the previous degree of integration, which is growing out of their joint drawing and forming. The sublenses are growing out of performing the said operations at the pressure of the gaseous medium inside the channels being higher than the pressure in the space between the sublenses of the previous degree of integration and at the temperature of their material softening and splicing the walls.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: November 8, 2005
    Inventor: Muradin Abubekirovich Kumakhov
  • Patent number: 6963073
    Abstract: A radiopharmaceutical pig device that includes two pig sections and two complementary engaging elements that engage each other. One of the two complementary engaging elements in integral with one of the two pig sections. By holding the other of the two complementary engaging elements stationary while the two complementary engaging elements are engaged, the other section of the pig may be removed from the pig without having to grasp the sidewall of the one of the two pig sections. This other of the complementary engaging elements may be part of a pig retainer brace, a shipping container, and L-Block shield or a counter top.
    Type: Grant
    Filed: February 5, 2002
    Date of Patent: November 8, 2005
    Assignee: Biodex Medical Systems, Inc.
    Inventors: Matthew R. Martin, Kenneth Paladino
  • Patent number: 6954257
    Abstract: An optical element of a lithographic projection apparatus includes a Si/Mo multilayer structure, an outer capping layer and an interlayer positioned between the multilayer structure and the outer capping layer. The interlayer has a thickness of between 0.3 and 0.7 times the wavelength of the incident radiation. The interlayer may be C or Mo and has a thickness of between 6.0 and 9.0 nm. The interlayer may include an inner interlayer including Mo next to the multilayer structure and an outer interlayer including C next to the capping layer. The outer interlayer is at least 3.4 nm thick and the capping layer is Ru and at least 2.0 nm thick.
    Type: Grant
    Filed: August 26, 2003
    Date of Patent: October 11, 2005
    Assignees: ASML Netherlands B.V., Carl Zeiss SMT AG
    Inventors: Ralph Kurt, Andrei Evgenuevich Iakchine Yakshin
  • Patent number: 6946663
    Abstract: A method of efficiently fabricating a multipole lens. The multipole lens has plural polar elements and an annular holding member. Each polar element has a held portion. The annular holding member is provided with through-holes for holding the held portions of the polar elements. A resin is injected into the through-holes in the holding member via openings formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: September 20, 2005
    Assignee: Jeol Ltd.
    Inventor: Eiji Kawai
  • Patent number: 6943352
    Abstract: A charged particle detector is provided for use in an electron microscope. The detector has a chamber for receiving charged particles generated by the interaction between a particle beam generated by the microscope and the sample. The chamber is maintained at at least a partial vacuum and contains an impact responsive sensor for detecting particles incident thereon. An accelerating electrode field is set up in the chamber by one or more electrodes, and the chamber is sealed by an electronically conductive barrier so as to prevent gas leaking into the chamber, whilst being sufficiently thin to enable charged particles to travel across the barrier and thereby be detected by the detector. The electrically conductive barrier enables a very large accelerating voltage to be used without causing discharge through any gaseous medium in the microscope sample chamber.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: September 13, 2005
    Assignee: Carl Zeiss SMT Limited
    Inventor: Armin Heinz Hayn
  • Patent number: 6936832
    Abstract: A particle therapy system is provided which can simply and quickly correct a beam orbit. In a particle therapy system provided with an irradiation facility comprising a first beam transport system for receiving a beam and transporting the beam to the patient side, and an irradiation nozzle for forming an irradiation field of the beam, the particle therapy system comprises first beam position monitors for detecting a position upstream of the irradiation nozzle at which the beam passes, second beam position monitors for detecting a position downstream of the irradiation nozzle at which the charged-particle beam passes, and first and second steering magnets. Correction bending amounts for causing the beam to be coincident with a predetermined orbit after the correction are determined in accordance with detected results from the first and second beam position monitors, and first and second steering magnets are excited under control so that the determined correction bending amounts are obtained.
    Type: Grant
    Filed: June 22, 2004
    Date of Patent: August 30, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Tetsuro Norimine, Masumi Umezawa, Kazuo Hiramoto
  • Patent number: 6927407
    Abstract: A radiation shielding arrangement for shielding high-energy neutron radiation and gamma radiation from high-energy particle accelerators or storage rings includes a shielding element made of water-containing material, for example with chemically bound water or water of crystallization, in particular gypsum. The water component of the material preferably makes up at least 5, 10 or 20 percent by weight. The hydrogen nuclei or protons contained therein moderate neutrons in a virtually ideal manner because of the almost identical mass and the maximum pulse transformation associated with this.
    Type: Grant
    Filed: March 18, 2004
    Date of Patent: August 9, 2005
    Assignee: Gesellschaft fur Schwerionenforschung mbH
    Inventors: Willi Brüchle, Georg Fehrenbacher, Torsten Radon, Frank Gutermuth
  • Patent number: 6906338
    Abstract: A system and method of accelerating ions in an accelerator to optimize the energy produced by a light source. Several parameters may be controlled in constructing a target used in the accelerator system to adjust performance of the accelerator system. These parameters include the material, thickness, geometry and surface of the target.
    Type: Grant
    Filed: January 8, 2001
    Date of Patent: June 14, 2005
    Assignee: The Regents of the University of California
    Inventor: Toshiki Tajima
  • Patent number: 6898258
    Abstract: In the cask, a shape within a cavity of a barrel main body is formed in a shape corresponding to an outer shape of a basket. The basket has a structure obtained by alternately piling up plate-like members vertically. A heat conducting plate is provided on an outer periphery of the plate-like member. Accordingly, since the basket and the cavity are in a state of being in contact state in a wide area, an efficiency of heat conduction is improved.
    Type: Grant
    Filed: February 25, 2002
    Date of Patent: May 24, 2005
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Katsunari Ohsono, Toshihiro Matsuoka, Shinji Ookame
  • Patent number: 6894300
    Abstract: An ion beam facility has a first ion beam system for a first ion type that contains a first ion beam generator and a first ion transport line with at least one first ion switch for one of at least two first irradiation stations and has a second ion beam system for a second ion species with a second ion transport line or is fashioned expandable therewith. At least one of the first irradiation stations also can be operated with the second ion type or the ion transport lines are arranged proceeding essentially parallel to one another. For the expansion, the first ion transport line is conducted along a wall of a building of the ion beam facility and the wall is prepared for openings, so that at least one of the first irradiation stations also can be operated with the second ion type via the subsequently installable, second ion transport line at the other side of the wall, or space is reserved behind the wall for at least the second, subsequently installable ion transport line.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: May 17, 2005
    Assignee: Siemens Aktiengesellschaft
    Inventors: Stefan Reimoser, Michael Solbrig
  • Patent number: 6894298
    Abstract: The invention is directed to a method and an arrangement for generating extreme ultraviolet (EUV) radiation, i.e., radiation of high-energy photons in the wavelength range from 11 to 14 nm, based on a gas discharge. The object of the invention, to find a novel possibility for generating EUV radiation in which an extended life of the system is achieved with stable generation of a dense, hot plasma column, is met according to the invention in that a preionization discharge is ignited between two parallel disk-shaped flat electrodes prior to the main discharge by a surface discharge along the superficies surface of a cylindrical insulator with a plasma column generated through the gas discharge with pulsed direct voltage, which preionization discharge carries out an ionization of the working gas in the discharge chamber by means of fast charged particles.
    Type: Grant
    Filed: October 9, 2002
    Date of Patent: May 17, 2005
    Assignee: Xtreme technologies GmbH
    Inventors: Imtiaz Ahmad, Guido Schriever, Juergen Kleinschmidt
  • Patent number: 6891178
    Abstract: A method is provided for determining the positional accuracy of leaves of a multileaf collimator for delivering doses of radiation to a particular spatial location for treatment purpose. The method could be implemented as routine quality assurance check of the multileaf collimator leaf positioning errors. The method includes producing a first field and producing a second field, which is different from the first field. A dosimeter means is included for measuring a radiation dose difference or ratio between the first field and the second field at at least one spatial location. The dose difference or ratio is then used to determine the positional accuracy of the leaves by comparing with a known relationship between leaf positional errors and relative dosimeter outputs. The method provides a more simplified, accurate, efficient and reliable method over currently used methods.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: May 10, 2005
    Assignee: The Board of Trustees of the Lealand Stanford Junior University
    Inventor: Lei Xing
  • Patent number: 6891177
    Abstract: The invention relates to an ion beam scanning system having an ion source device, an ion acceleration system and an ion beam guidance system comprising an ion beam outlet window for a converging centered ion beam, and a mechanical alignment system for the target volume to be scanned. For that purpose, the ion acceleration system can be set to an acceleration of the ions required to obtain a maximum depth of penetration. The scanning system also has energy absorption means arranged in the path of the ion beam between the target volume and the ion beam outlet window transverse to the center of the ion beam. The energy absorption means can be displaced transverse to the center of the ion beam in order to vary the energy of the ion beam, so enabling, in the target volume, depth modulation of the ion beam, which is effected by means of a linear motor and the transverse displacement of the energy absorption means, with depth-staggered scanning of volume elements of the target volume in rapid succession.
    Type: Grant
    Filed: February 11, 2000
    Date of Patent: May 10, 2005
    Assignee: Gesellschaft fuer Schwerionenforschung mbH
    Inventors: Gerhard Kraft, Ulrich Weber
  • Patent number: 6891179
    Abstract: Materials and methods of manufacturing radiation shielded enclosures is presented that may replace the use of lead, granite and other heavy, expensive, toxic, environmentally unfriendly or otherwise undesirable materials and manufacturing methods. The present invention provides a high-density radiation shielding enclosure manufactured by cold casting a liquid refined iron ore or taconite composite material into a mold of an enclosure of an appropriate shape and size to house an x-ray imaging system. The method of manufacture may include applying an iron ore or tungsten composite caulking compound to the radiation shielding enclosure in order to seal any radiation leaks in the radiation shielding enclosure.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: May 10, 2005
    Assignee: Agilent Technologies, Inc.
    Inventors: Patrick A Batten, James P Wester
  • Patent number: 6881965
    Abstract: The invention provides a miniaturized multi-foil object for use in a laboratory environment and other practical applications that require small or portable and/or disposable high energy radiation optics. Specifically, the invention finds utility in high energy lithographic systems, such as X-ray or EUV lithography, as a condenser optic or in topographic systems. In lithographic systems, the present invention exhibits square symmetry, a relatively large aperture size, and disposability. Additionally, the multi-foil optic of the invention provides a high throughput efficiency.
    Type: Grant
    Filed: July 28, 2003
    Date of Patent: April 19, 2005
    Assignee: Bede Scientific Instruments Ltd.
    Inventors: David Keith Bowen, Ladislav Pina, Adolf Inneman, Rene Hudec, Stephan Menzer
  • Patent number: 6878951
    Abstract: A device for generating helical electron beams that can be used for radiation therapy is disclosed. The device contains a tertiary collimating cone that can be attached to a gantry of a linear accelerator or placed directly below the gantry. The tertiary collimating cone has a dynamic energy compensator and a magnetic electron collimator to modify the energy of electrons and to generate a helical trajectory. A multileaf collimator may be present within the tertiary collimating cone. A computer coordinates the movements of various components. The helical electron beam produced by this device can be targeted to tumors better and safer and reduce the amount of radiation hitting normal tissue than current devices.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: April 12, 2005
    Assignee: University of Maryland
    Inventor: Lijun Ma
  • Patent number: 6873123
    Abstract: The invention concerns a device (10) for regulating the intensity of a beam extracted from a particle accelerator, such as a cyclotron, used for example for protontherapy, said particles being generated from an ion source. The invention is characterized in that it comprises at least: a comparator (90) determining a difference ? between a digital signal IR representing the intensity of the beam measured at the output of the accelerator and a setpoint value IC of the beam intensity: a Smith predictor (80) which determines on the basis of the difference ?, a correct value of the intensity of the beam IP; an inverted correspondence table (40) supplying, on the basis of the corrected value of the intensity of the beam IP, a setpoint value IA for supply arc current from the ion source (20).
    Type: Grant
    Filed: June 3, 2002
    Date of Patent: March 29, 2005
    Assignee: Ion Beam Applications S.A.
    Inventors: Bruno Marchand, Bertrand Bauvir
  • Patent number: 6870174
    Abstract: An object of the present invention is to provide to an electron beam tube and electron beam extraction window capable of generating high output electron beam by effectively releasing heat generated when an electron beam passes through a window whereby temperature rise of the window is controlled and breakage of the window is prevented. The electron beam tube comprises first projections continuously provided on a first surface of the window, and second projections which are continuously formed on a second surface of the window and are located in positions corresponding to areas between the first projections wherein a projection height of the second projection, a projection width of the second projection and a distance between the adjacent second projections are smaller than those of the first projections, respectively.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: March 22, 2005
    Assignees: Ushio Denki Kabushiki Kaisha, Octec, Inc.
    Inventors: Masanori Yamaguchi, Katsuya Okumura
  • Patent number: 6870175
    Abstract: A method and apparatus of dispensing a radiopharmaceutical wherein a source of flushing fluid is connected to a first port of a fluid delivery set; a pressurizing unit of a powered injector system (including a powered injector and the pressurizing unit) is connected to a second port of the fluid delivery set; air is purged from the fluid delivery set; and, after purging air from the fluid delivery set, a third port of the fluid delivery set is connected to a source of the radiopharmaceutical. A valve system is included to control flow of fluid. A syringe is operatively connected with a powered injector. A radioactive shield encloses the syringe during operation to protect personnel from detrimental effects. A dose calibrator measure the radioactivity in the syringe.
    Type: Grant
    Filed: February 3, 2003
    Date of Patent: March 22, 2005
    Assignee: Capintec, Inc.
    Inventors: Mary Anne Dell, Erik Witt