Abstract: An optical apparatus is provided with illuminating means provided on one side of an objective optical system having a pupil substantially at infinity, that is, telecentric, with a first object interposed therebetween for illuminating a first pattern on the first object, detecting means provided on the other side of the objective optical system with a second object interposed therebetween for outputting the information regarding the aligned state of the image of the first pattern by the objective optical system and a second pattern on the second object, light changing-over means provided at a position between the illuminating means and the detecting means and conjugate with the pupil for selectively changing over light passing through a plurality of substantially different areas on the pupil and directing the light to the detecting means, adjusting means for varying the length of the optical path between the first object and the second object, and control means for varying the length of the optical path by a p

Abstract: The method and apparatus are utilized for quickly and accurately positioning a workpiece, which is situated on a movable platform and which has at least one indicia mark thereon having a different sensitivity to a sensing means than an adjacent contrast area, to a position where the indicia mark is in registry with a registration axis.

Abstract: A registration system is provided for maintaining accurate correspondence between an image on a moving substrate and the action of an operating element with respect to the substrate. A comparison optical device is mounted such that the timing marks pass in correspondence with the comparison optical device when the substrate is moving. A detector senses the intensity of radiation reflected from the substrate through the comparison optical device and generates a firing signal based on the reflected radiation intensity. The firing signal is provided to the operating element to activate it in correspondence to the passage of the timing marks.

Abstract: A color mark sensor utilizing the cumulative chromatic aberration in an extended planar gradient-index (GRIN) lens to provide unambiguous primary color separation in a continuum along the lens axis. An appropriately chosen GRIN lens length provides separation and focus of any primary color from the general polychromatic background.

Abstract: An alignment system usable in a semiconductor device manufacturing exposure apparatus for superimposingly transferring a circuit pattern of a reticle onto each of patterns formed on individual portions of a semiconductor wafer, for sequentially aligning the individual portions of the wafer with respect to the reticle by use of alignment marks formed in or on scribe lines defined between the individual portions of the wafer. An optical system for detecting the alignment marks is disposed outside the path of light used for the sake of pattern transfer.

Abstract: A registration controller for sensing the presence and location of registration marks on a web as the web passes a scanner, and for generating a signal for use in controlling downstream operations such as cutting and/or printing operations. The controller includes a light source located remotely from the scanner. Light from the source is directed to the scanner and onto the web. The web reflects the light, the amount and intensity of the reflection depending upon the color and reflectivity of the particular area of the web on which the light is being currently directed. The reflected light is directed to a photo receptor which converts the reflected light to an analog electric signal, the level of the signal being determined by the amount and intensity of reflected light, within a particular predetermined range. This analog electric signal is then amplified, processed and converted to a digital signal for use in controlling the aforementioned downstream operations.

Abstract: A multi-wavelength optical apparatus for laser processing, alignment and observation employs dichroic mirrors, which, by virtue of their wavelength characteristics, affect a processing laser beam differently from alignment and observation light. A projection optical system and a dichroic mirror form first and second images of an aperture on an object disposed on a movable stage from processing light and alignment light, respectively. The position of the second image relative to a reference is determined and automatically provides the position of the first image relative to the reference. The apparatus is used to repair microdefects in semiconductor circuit elements, for example.

Abstract: A card reader includes an opaque arm movable in response to the insertion of a credit card. The arm, when moved, interrupts a light path signalling the presence of the card thus permitting write or read operations on a magnetic stripe on the card. The use of arm permits highly reliable operation due to the location of the light path defining devices in a place where they are protected from contaminants. In addition, the light path is always interrupted with an obstruction of known opacity.

Abstract: A method of determining the position of a particular frame on a film being moved in its longitudinal direction, the film having blip marks provided thereon for respective frames in advance. In this method, no detection of blip marks is effected during a period of time which begins immediately after the leading end edge of a blip mark has been detected and which ends slightly before the time at which the leading end edge of a subsequent blip mark is expected to be detected. Accordingly, there is no fear of dust attached to the film being misjudged to be a blip mark. Also disclosed is an apparatus which may suitably be employed to carry out the above-described method.

Abstract: A photographic printer according to the present invention can automatically print films of an arbitrary size by directly and automatically detecting image data of a film negative to discriminate whether the firm negative is of a full or half size, and switches the conveying direction of the film based upon the result of the above discrimination, and adjusts the aperture of the mask at a printing unit. The method according to the present invention can detect and position frames at a high speed and high accuracy and yet with a simple structure which includes the steps of detecting image data of an original film, and determining a feeding length with the size data and edge detection of the original film and positioning imaged frames.

Abstract: An alignment method and apparatus for reduction projection type aligner in which the rough detection of reticle position in the reticle alignment process at the time of mounting a reticle and the fine detection of reticle position in the wafer alignment for the alignment between a wafer and the reticle are performed automatically by the same reticle alignment pattern and the same optical alignment detection system. A plurality of one- or two-dimensional Fresnel zone plates having different shapes of diffraction patterns formed outside of a reticle circuit pattern and arranged at a position outward of the entrance pupil of the reduction projection lens are used as a reticle alignment pattern to detect the absolute position of the reticle. The detection field of view of the optical alignment detection system is thus effectively widened to make pattern detection possible with high magnification for an improved detection accuracy.

Abstract: In a mark position-detecting apparatus, a rectangular reference mark is performed on a workpiece or photomask. The apparatus includes a movable table for supporting the photomask, a stationary light source for radiating light for forming a light spot on the photomask, a photodetector for detecting a change in light component transmitted through the mask, and a computer control section. The table moves forwardly and reversely in a Y-direction so that the photodetector scans two opposite edges of the reference mark in opposite directions in the Y-direction. The table is then moved forwardly and reversely in a X-direction so that the photodetector scans other two opposite mark edges. The signal detector thus produces edge position data representing the four mark edge scanned. The computer control section computes the coordinates of the mark center based on the edge position data.

Abstract: A method and apparatus for controlling the lateral position of a moving web in a dual control mode system. The control system ordinarily operates in a precise, highly-sensitive fine mode but is automatically switched into a less precise but rapidly responding coarse mode in response to loss of control in the fine mode. After control is reestablished in the coarse mode, the coarse mode control is terminated and the fine mode control is resumed.

Abstract: A photoelectric perforation sensor for accurately detecting a perforation in a moving web. The sensor comprises two large photodiodes in a bi-cell configuration. The photodiodes lie in the direction of web travel. As the perforation begins to pass between an LED source and the bi-cell, light from the LED illuminates one photodiode but not the other. As the perforation becomes centered over the photodiodes, both photodiodes receive equal amounts of illumination and a signal is generated indicating location of the perforation.

Abstract: A measuring head for detecting the location of an object such as a moving sheet of paper is disclosed. An elongated sensor having multiple light-sensitive elements is located perpendicular to the path of the object. A source of light is directed at the sensor, and those light-sensitive elements which are not in the shadow of the object produce a high output, while those in the shadow produce a low output. Circuit means are provided to provide a count of the elements and to store the count corresponding to the transition between the high and low values. This stored count, which represents the location of the object, is then displayed.

Abstract: A position detecting device including a photodetector having a plurality of light-receiving sections. For the position detection, an appropriate one or ones of the light-receiving sections are selectable, whereby an alignment accuracy and an alignment speed relative to two objects having alignment marks.

Abstract: In a position detecting method, a light beam is radiated onto an object on which a position detecting mark is formed; the reflected beam is detected by a beam detector through a slit; the slit is vibrated, and at the same time a detection signal outputted from the beam detector is detected synchronously with the vibration of the slit; thereby detecting the position of the object. A fundamental wave component a.sub.f and a second harmonic component a.sub.2f of the detection signal are fetched due to the synchronous detection and these components a.sub.f and a.sub.2f are subjected to the conversions for eliminating the variation in output level in association with the variation in input level while the corresponding relation between the peak point of the fundamental wave component a.sub.f and the zero point of the second harmonic component a.sub.2f is held. For example, as these conversions, the following conversions are performed: ##EQU1## The output components a.sub.f * and a.sub.

Abstract: Video signals representative of photographic images which are stored in a plurality of substantially equally dimensioned frames in horizontal and vertical positions are produced by picking up the images. A first signal indicative of a horizontal/vertical position and a top-bottom orientation of the photographic image stored in any of the frames is entered. The photographic image is rotated relatively in response to the first signal. For a vertically positioned image, a video signal is produced which is representative of the image with a magnification which is smaller than that of a horizontally positioned image. Such a procedure provides a video signal which represents an image in a non-inverted top-bottom orientation without any essential portions of the image being omitted.

Abstract: Photographic images are recorded by picking up a group of photographic images recorded in horizontal and vertical positions in substantially equally dimensioned frames to store in a storage medium video signals representative of the photographic images in the order of the group of photographic images. One of the many frame orientations, including the vertical and the horizontal positions, of the images recorded in the respective frames is selected. Then, out of the group of images, those which are in the selected orientation are selected. For the images in the vertical position, a magnification for forming a video signal which is smaller than that for the images in the horizontal position is set up. The selected photographic image is picked up to store a video signal representative of it in a store position of the storage medium assigned thereto. The selection, pickup and storage are performed on each of the photographic images which are in the selected frame orientation.

Abstract: An alignment apparatus for aligning a semiconductor wafer with an optical mask containing a circuit pattern to be exposed onto the wafer in the fabrication of semiconductor devices by a proximity exposure apparatus.

Abstract: A method and apparatus for sensing moisture changes by utilizing optical fiber technology. One embodiment uses a reflective target at the end of an optical fiber. The reflectance of the target varies with its moisture content and can be detected by a remote unit at the opposite end of the fiber. A second embodiment utilizes changes in light loss along the fiber length. This can be attributed to changes in reflectance of cladding material as a function of its moisture content. It can also be affected by holes or inserts interposed in the cladding material and/or fiber. Changing light levels can also be coupled from one fiber to another in an assembly of fibers as a function of varying moisture content in their overlapping lengths of cladding material.

Abstract: An exposure apparatus for aligning an original, having at least one alignment mark thereon, and radiation sensitive member, having at least one alignment mark thereon and adapted to receive the image of the original, with each other includes a first detecting device including a sensor retractable from the optical path of a light for illuminating the original, the sensor being adapted to sense the original and radiation sensitive member to detect a relative displacement (degree of misalignment) between the original and radiation sensitive member when the sensor is in the optical path; a second detecting device including a sensor set out of the optical path and adapted to detect the position of one of the original and radiation sensitive member in the absolute coordinates of the apparatus; and a driving mechanism for moving one of the original and radiation sensitive member in response to the output of the second detecting device to correct the above mentioned displacement.

Abstract: A pattern detector for precise position measurement of a wafer, used in a mask aligner used in manufacturing a semiconductor device is disclosed. A positioning pattern on the wafer is magnified and projected by a magnifying optical system and the magnified projected image is precisely detected to determine a position of the positioning pattern. As a light to form the magnified projected image, plurality of monochromatic lights of different wavelengths are available through optical filters and the magnifying optical systems are arranged one for each of the monochromatic lights. By selecting one of the optical filters, the magnified projected image of the positioning pattern is formed by the monochromatic light having an optimum wavelength to the wafer and the precise position of the positioning pattern on the wafer can be detected.

Abstract: An orientation and control system for use with robots provides identification, orientation and operating instructions coded indicia on diverse parts, which indicia are viewed by a camera and are digital image processor recognizable, so that the indicia are converted into information for computer control of a robot in utilizing the diverse parts in assembly operations. The present system is useful in assembly operations wherein the parts can be randomly presented, without special orientation or alignment fixtures, to a robot and yet the robot can utilize the parts in a programmed manner to perform the programmed assembly operations.

Abstract: Disclosed is a film frame position judging method in which film densities are detected by a plurality of sensors disposed such as to be orthogonal to the direction in which a developed film is conveyed, and a frame edge is declared when the distance between the positions at which the OR (logical sum) of light/dark binary signals and the AND (logical product) of the binary signals respectively change as the film is conveyed is within a predetermined value, the light/dark binary signals respectively representing the densities at the detecting points on the film. Accordingly, it is possible to judge a frame position by detecting only one of the film frame edges and to increase the degree of accuracy in judging a frame position.

Abstract: A mark detecting apparatus for a micro-roll film including one photoelectric element for detecting marks of different sizes provided on one edge portion of a micro-roll film for respective frames of the film, a pulse generating unit which generates pulses by radial slits formed in a disc adapted to be driven for rotation by contacting the micro-roll film, and a mark size judging circuit which counts the pulses produced from the pulse generating unit during the photoelectric element for the mark is detecting the mark of the film for judging the size of the mark by the counted value.

Abstract: Mark detector for detecting marks on a running web distinguished from any printed letter or pattern or any printing smudge. The width of mark segments and the distance between them are determined and, if they are within preset ranges, a mark detection signal is given. A delayed signal generator and a false signal generator are provided.

Abstract: A character and image processing apparatus comprises a scanning section for photoelectrically converting data on a sheet in which character data and image data are mixedly arranged in a free format; an image buffer for storing the photoelectrically converted data; a scanning control circuit for scanning the stored data in the image buffer to detect control marks and for determining a character read mode, an image data output mode or a skip mode according to the control mark; a character recognizing circuit for recognizing characters from the image buffer when the scanning control circuit determines the control marks as the character read mode; a data compression circuit for compressing the image data from the image buffer when the scanning control circuit determines the control marks as the image data output mode; and a data editing circuit for discriminately editing the character data and the image data.

Abstract: An aligning apparatus and method aligns a mask and a wafer stably at their regular positions in spite of the presence of the disturbance of alignment signals by the light interference effect when the printing of a semiconductor circuit pattern is effected with the mask and wafer in proximity to each other and further when the printing is effected with the mask pattern projected to the wafer.

Abstract: The present invention is directed to an improvement in an alignment system for a scanning mask aligner employing a pattern on the mask or the wafer or both in the scribe lines that run in the direction of scanning, the improvement comprising a viewing system having optical grids, a system for moving the patterns across the optical grids in the viewing system, the grids corresponding to the directions and spacings of the patterns so that light transmitted through the grid is strongly modulated, and circuitry for comparing the phase modulation from the mask and wafer alignment targets to obtain alignment error signals; further according to the invention, the same system used to measure alignment can also be used to measure how well the mask is focused on the wafer.

Abstract: Zone plate alignment aids on a mask and semiconductor wafer are used in a projection type system for aligning the wafer and mask prior to transfer of a circuit pattern from the mask to the wafer in an exposure process. The condenser system includes an aperture in the shape of a chevron or other convenient alignment pattern while the viewing system of the device is provided with a complementary shaped pupil stop. The condenser aperture and the viewing system stop cofunction to enhance the image contrast seen through the viewing system.

Abstract: A method and apparatus for adjusting the reference system of a pre-programmable laser device relative to the position of an inscription field of a part to be processed such as a silicon wafer characterized by a laser beam from a laser operating in a continuous wave mode being programmed to travel in various search motions with each motion traversing and passing over an edge of the part. The light which is unblocked by the part is received by a photoelectric element to trigger a position signal for each time the light passes across the edge of the wafer. The precise position of the wafer or part relative to the reference system is calculated from the position signals with the assistance of a computer and subsequently the coordinates of the reference system are corrected to match the precise position of the part.

Abstract: Novel strip chart recorders and strip chart recording paper are provided which are cooperable so that the recorder detects the proximity of a terminal edge of the paper, so that the recorder can signal this occurrence to the user enabling him to insert a new supply of strip chart paper in the recorder to avoid the loss of data. The recorder also cooperates with the strip chart paper to determine when paper is absent from the recorder, for example, when it has been exhausted, thereupon to signal this further occurrence to the user and take steps to avoid damage to the recorder which can result through its operation in the absence of paper in the recorder mechanism.

Abstract: The invention relates to an optical transducer for measuring position, angle, and the time dependence of these quantities in one, two or three dimensions, with at least one fiber optical transducer having light-emitting means which feeds incident light to an object on which the measurement is to be effected, a photo-detector which senses light emanating from the object after said incident light has been influenced by the object and an electronic unit partly for controlling the light-emitting means, and partly for evaluating the output of the photo-detector, the output signal being dependent on the variations in light transmission, light absorption, light reflection and/or photo-luminescence of a pattern on the object.

Abstract: A method for positioning an object with patterns being formed thereon, employs a first device for extracting first information relative to patterns in a first region on the object, a second device for extracting second information relative to patterns from a second region including the first region on the object, an operating circuit to calculate a degree of coincidence between the first information and the second information, and a detecting circuit for detecting a position of the first region in the second region, whereby the position of the object can be reproduced with high reproducibility in accordance with the position as detected.

Abstract: Registration in a multi-color printing press is controlled by printing spaced groups of registration marks on a running web, each group comprising a plurality of spaced reference color marks and a plurality of controlled color marks, each being midway between a different pair of reference marks. A computer-based control system produces quantities corresponding to the leading and the trailing edges of each mark, which are averaged to determine the midpoint of the mark, thereby avoiding errors due to differences in reflectance. Registration is determined from other quantities that measure the separations between marks. Data is collected for a predetermined number of successive marks. The collected data is analyzed to determine the start of a group, and the data corresponding to marks of that group is then analyzed to detect registration. After a correction is performed, the system idles until a predetermined length of the web sufficient to enable the effect of the correction to be observed passes the sensor.

Abstract: Device for controlling with adjusting members and a measuring device the lateral position of a web in a web printing machine, the controlling device, for effecting centralized control, having respective optical scanning systems for detecting edges of the web on both sides thereof and the respective positions of the edges and, upon lateral shifting of the web, activating the adjusting members for correcting the position of the web in accordance with a nominal value, including a respective bandpass filter connected to each of the optical scanning systems, and means for detecting a long-term change in the control signal by the bandpass filter of one of the optical scanning systems, the one optical scanning system being in position yet being idle with respect to controlling the lateral position of the web, the other optical scanning system being active with respect to scanning the respective web edge for controlling the lateral position of the web, the detection of the long-term change in the control signal by th

Abstract: An optical thin line-tracking sensor comprises a small member mounting ends of a light source fiber and a pair of receiving fibers which receive reflected light. Reflected light transmitted through the receiving fibers operate photosensors whose outputs are differentially combined to provide a tracking error signal. Augmenting circuits enable operation over a wide range. Means to sense other indicia carried on a web or sheet are disclosed. A line-tracking head which includes a laser-light cutter is also disclosed.

Abstract: An apparatus for processing a signal for aligning a first object having at least one standard mark thereon with a second object having at least one reference mark thereon, includes a first sensor for sensing the standard mark, second sensor for sensing the reference mark through the first object, an illumination source for illuminating the standard mark and the reference mark, a first extracting circuit for extracting a signal concerning the standard mark from the signal stream of the first sensor, a second extracting circuit for extracting a signal concerning the reference mark from the signal stream of the second sensor, and a signal composing circuit for composing the signal concerning the standard mark and the signal concerning the reference mark.

Abstract: The present invention provides a retrieving apparatus for retrieving desired information contained in a film making use of retrieval marks recorded on the film. The retrieving apparatus is useful for many different types of films having retrieval marks recorded in different marking modes. The retrieving apparatus comprises mark detector exchangeable according to the marking mode, a device for generating a coded signal corresponding to the exchange of mark detector and a display for making a display of the type of film usable in the apparatus in the present state of exchange of mark detector in response to the coded signal.

Abstract: A copying machine includes sensors and logic circuitry for determining the size or presence of an original placed thereon. According to the size of the original, the scanning length and the size of the recording medium may be determined.

Abstract: Disclosed is a system to be used with a wafer provided with at least one first alignment mark and a mask provided with a plurality of second alignment marks and which is provided with a detecting device for sensing the first and second alignment marks and putting out detection signals, a signal producing circuit producing a comparison signal, and a signal comparing and producing circuit for comparing the pulse width of the comparison signal with the pulse width of the detection signals and producing a plurality of substitute signals when the pulse width of the detection signal is greater than the pulse width of the comparison signal and wherein when the first and second alignment marks have come close to each other or partly overlapped each other, the respective alignment marks are discriminated.

Abstract: In order to facilitate the alignment of a mask with a substrate on which the mask is to be imaged, a rectangular window on the mask is projected through a semitransparent mirror and an optical objective upon an area of the substrate carrying a line mark parallel to two edges of the window. The image of the window is retroprojected through the same objective, along with the associated line mark, and is focused via the semitransparent mirror upon a detection plane of an evaluator where the resulting composite image is scanned in a direction perpendicular to the line mark to determine the position of that mark relative to the window edges. The same scan, on traversing each window edge, yields a signal representing sharpness of focus in terms of the time required for passing between two predetermined thresholds of light intensity; the latter signal is used for adjusting the relative distance of the object and image surfaces respectively constituted by the mask and the substrate.

Abstract: A scanner is provided with photosensors and a stationary registration mark placed on each side of the reading window. The registration mark is thus located in the reading field of the photosensors as long as no document is presented for scanning within the reading window. A document which arrives within the reading window is interposed between the registration mark and the photosensors. A comparison circuit coupled with the photosensors delivers a document-reading start signal when the reading signal no longer corresponds to a registration-mark reading signal stored in memory during a preceding reading operation, that is, when the front edge of the document begins to enter the reading window.

Abstract: A web tracking system for a continuous web of material which is transported from a supply to a takeup means along a predetermined path via one or more processing stations and comprises aligned tracking indica along at least one edge of the web. Means are provided to observe the tracking indica as the web is transported along the system path and produce information either indicative of dimensional changes in the length and width of the web due to web shrinkage or expansion or indicative of a particular point along the length of the web useful at one or more of the processing stations in the system.

Abstract: There is disclosed an optical system for reading light-activatable marks on a record medium. The system includes a coupling for connecting a light bulb and a light conductor which allows for relative movement between the light bulb and the light conductor while maintaining light transmitting contact therebetween.

Abstract: An imaging apparatus, for instance a wafer stepper, has an optical system for forming an image of an object such as a reticle and it has a focusing device. The focusing device has detector means for determining deviations between the actual image surface of the optical system and a second surface (surface of the semiconductor wafer) on which the image is to be formed. The focusing device includes two sets of detector means, each said set having means fast with the optical system and constructed to focus a spot of monochromatic light under a large angle of incidence onto said actual image surface and means for collecting the light reflected by said second surface and focusing it on a differential light detector so located that the image of the spot is centered on the detector when the two surfaces coincide and means for summing differential signals supplied by the detectors of both sets, said sets being arranged for the light path in the two sets of detector means to be substantially reverse from each other.

Abstract: An automatic retrieval apparatus for use with an information containing film in a roll form, arranged to control driving of the information containing film by reading document marks or blips provided in the information containing film to correspond with respective frames. The retrieval apparatus includes a detecting circuitry for detecting the document marks to produce detecting signal, a latch circuitry to be set by impression of the detecting signal to it, and a calculation processing circuitry which effects predetermined calculation corresponding to the detection of the document marks when the latch circuitry is in the set state, and which produces signal for resetting the latch circuitry upon completion of the calculation processing.

Abstract: A process for manufacturing optocouplers having an emitter element properly oriented with respect to a receiver element. An emitter element is fastened to an emitter carrier. A receiver element is fastened to a receiver carrier. The emitter and receiver carriers are positioned adjacent one another to bring the emitter and receiver elements into operative relation. The combined operation of the emitter and receiver elements is electrically monitored while the position of the carriers with respect to one another is adjusted. On the basis of the electrical monitoring, a determination is made as to when a proper orientation between the emitter and receiver elements has been achieved. The emitter and receiver carriers may then be permanently bonded together for subsequent final packaging. The process described is particularly well suited to automated manufacturing.

Abstract: A web tracking system for a continuous web of material which is transported from a supply to a takeup means along a predetermined path via one or more processing stations and comprises aligned tracking indicia along at least one edge of the web. Means are provided to observe the tracking indica as the web is transported along the system path and produce information either indicative of dimensional changes in the length and width of the web due to web shrinkage or expansion or indicative of a particular point along the length of the web useful at one or more of the processing stations in the system.