With Imaging Patents (Class 250/559.05)
  • Publication number: 20100006785
    Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic illumination source. The source forms on the thin film a continuous illuminated line. Discrete sampled points located on the illuminated line are imaged onto a two dimensional optical switch. A concordance look-up-table between the coordinates of the above sampled points on the thin film and their coordinates on the two dimensional optical switch are generated. The spectral composition of the illumination reflected by the sampled points is determined and photovoltaic thin film parameters applicable to the quality control are derived from the spectral composition of reflected or transmitted by the photovoltaic thin film illumination.
    Type: Application
    Filed: March 25, 2009
    Publication date: January 14, 2010
    Inventor: Moshe Finarov
  • Patent number: 7627435
    Abstract: Methods for evaluating a pixel signal produced during scanning of a chemical array are provided. In general, the subject methods involve identifying a set of conformant digital signals for a pixel, and integrating those signals. Also provided are systems and programming for performing the subject methods, and an array scanner containing these systems and programming.
    Type: Grant
    Filed: August 4, 2004
    Date of Patent: December 1, 2009
    Assignee: Agilent Technologies, Inc.
    Inventors: John F. Corson, Kenneth L. Staton
  • Patent number: 7602505
    Abstract: A method for the automatic parameterization of measuring systems for the measurement of objects transported by means of a transport device, in particular volume measurement systems, wherein at least one image, which is at least one-dimensional and comprises picture elements, of a test object known at least in part to the measuring system with respect to its dimensions and located in the measuring zone of the measuring system is detected by at least one sensor for electromagnetic radiation, in particular a laser scanner, and the system parameters required for the measurement of the objects are determined from the image and the known dimensions of the test object.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: October 13, 2009
    Assignee: Sick AG
    Inventor: Thomas Kaltenbach
  • Patent number: 7560680
    Abstract: In a matrix of light detectors forming a part of a three-dimensional measurement sensor, outputs of light detectors belonging to a same row are connected to a common signal line. An output of each light detector is read, through scanning by the horizontal scan circuit, to the signal line from left to right in order, during a horizontal scan period which is sufficiently short such that slit light of a light-sectioning method can be assumed to be substantially stationary. A position detector determines a time from start of the horizontal scan period until detection of a maximum peak of a signal in the signal line. The time indicates a distance from an end of the row from which scanning is started to the light detector detecting the peak of the slit light. A recording processor records a value of a distance determined by the position detector in correspondence to a value of a counter indicating a projection angle of the slit angle.
    Type: Grant
    Filed: October 13, 2005
    Date of Patent: July 14, 2009
    Assignees: Japan Science and Technology Agency, Spacevision, Inc.
    Inventors: Yukio Sato, Susumu Shibata
  • Patent number: 7514702
    Abstract: A scan engine (15) includes illumination sources (48, 50) for projecting a light beam (40) upon a target object, a focusing lens (44) that receives a reflected light (34) of the target object and focuses a reflected image (35) as it passes through the focusing lens (44) along an optical axis (A-A), and a linear sensor (46) that receives the reflected image (35) from the focusing lens (44). The linear sensor (46) provides a signal (59) representing the reflected image (34). A circuit board (16) is integrally connected to the illumination sources (48, 50) and the linear sensor (46).
    Type: Grant
    Filed: January 31, 2007
    Date of Patent: April 7, 2009
    Assignee: Symbol Technologies, Inc.
    Inventors: Edward D. Barkan, Mark Drzymala
  • Patent number: 7432492
    Abstract: An image reading apparatus includes a light source with a first luminescent portion that outputs light with a first wavelength range and a second luminescent portion that outputs light with a second wavelength range, the wavelength ranges being different from each other; a light-receiving portion that receives light reflected from an original irradiated by the light source; a scanning portion that shifts a reading position of the original in a vertical scanning direction by changing a relative position between the original and the light-receiving portion; a switching portion that alternately turns on the first and second luminescent portions when the scanning portion shifts the reading position, wherein a vertical scanning resolution for a first data obtained when the first luminescent portion is turned on is independently set from a vertical scanning resolution for a second data obtained when the second luminescent portion is turned on.
    Type: Grant
    Filed: July 6, 2006
    Date of Patent: October 7, 2008
    Assignee: Fuji Xerox Co., Ltd.
    Inventor: Michio Kikuchi
  • Patent number: 7427767
    Abstract: An apparatus for identifying the condition of a conveyor belt (6) has a capturing device (12) which can be used to capture two-dimensional images (B) of successive belt sections (15) of the conveyor belt (6) during operation of the conveyor belt (6). The capturing device (12) and the evaluation device (13) have a data-processing connection, so that the captured images (B) can be transmitted to the evaluation device (13). The evaluation device (13) compares the images (B) transmitted to it with two-dimensional reference images (R) which are associated with the belt sections (15), determines at least one statement about the condition of the belt on the basis of the comparison, and outputs the statement about the condition of the belt.
    Type: Grant
    Filed: November 22, 2006
    Date of Patent: September 23, 2008
    Assignee: Siemens Aktiengesellschaft
    Inventor: Jean-Claude Kemp
  • Patent number: 7375360
    Abstract: There is disclosed a light device for arranging a thin film pattern sensor array where a sensor array used for inspecting a thin film pattern is made to be arranged without a separate correction pattern film in accordance with an inspection subject. In the light device for arranging the thin film pattern sensor array, a shutter controls a width of a light beam which progresses from a light emitting element array to a sensor array. A correction pattern sled is installed in any one of a fixed location of an upper part of the shutter and a surface of the shutter to be transferable.
    Type: Grant
    Filed: January 9, 2006
    Date of Patent: May 20, 2008
    Assignee: LG Electronics Inc.
    Inventor: Kyung Gu Kim
  • Patent number: 7365310
    Abstract: The invention provides a method of producing an in-focus image of an area on a sample plate for an ion source, e.g., a matrix-based ion source or any other type of ion source that employs a sample plate onto which samples are deposited. The method generally includes: a) positioning an area of the sample plate in the field of view of an imaging device; b) producing a plurality of images of the area having different in-focus regions; and c) generating an in-focus image of the area using the plurality of images. The in-focus image may be two-dimensional or three-dimensional. Systems and programming for performing the methods are also provided.
    Type: Grant
    Filed: June 27, 2005
    Date of Patent: April 29, 2008
    Assignee: Agilent Technologies, Inc.
    Inventors: Jean-Luc Truche, Gregor Overney
  • Patent number: 7321108
    Abstract: A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: January 22, 2008
    Assignee: Rudolph Technology, Inc.
    Inventors: Cory Watkins, Mark Harless, David Vaughnn, Pat Simpkins, Shaileshkumar Goyal, Gerald Brown, Brian Delsey
  • Patent number: 7285767
    Abstract: A method for inspecting an object using a structured light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, polarizing each of a plurality of different wavelengths of the light emitted from the light source at different polarization angles, projecting light emitted from the light source onto a surface of an object, receiving light reflected from the object surface with the imaging sensor, and analyzing the light received by the imaging sensor to facilitate inspecting at least a portion of the object.
    Type: Grant
    Filed: October 24, 2005
    Date of Patent: October 23, 2007
    Assignee: General Electric Company
    Inventor: Kevin George Harding
  • Patent number: 7196300
    Abstract: A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: March 27, 2007
    Assignee: Rudolph Technologies, Inc.
    Inventors: Cory Watkins, Mark Harless, David Vaughnn, Pat Simpkins, Shaileshkumar Goyal, Gerald Brown, Brian Delsey
  • Patent number: 7176433
    Abstract: A method and apparatus for improving system resolution for a defect line scanner while not increasing aliasing effects, or alternatively to maintain system resolution for a defect scanner while decreasing aliasing effects. This is accomplished by decreasing effective pixel size for a CCD array defect line scanner while not decreasing signal-to-noise ratio, with minimal changes to the current machine. The method utilizes a sampling phase shift between successive lines of a multi-line sensor array during scanning.
    Type: Grant
    Filed: November 17, 2004
    Date of Patent: February 13, 2007
    Assignee: KLA-Teacor Technologies Corporation
    Inventor: Eliezer Rosengaus
  • Patent number: 7164145
    Abstract: An image-based technique that measures the orientation of fibers in a moving web of nonwoven material. At least four light spots on one side of the web are illuminated essentially simultaneously with at least four plane-polarized incident substantially perpendicular light beams having different polarization characteristics. Dispersion of the excident light spots is measured on the opposite side of the web along at least one linear section which is at a known angle relative to the plane of polarization of the corresponding plane-polarized incident light beam, wherein at least one such linear section lies substantially across the center of the transmitted excident light spot and extends substantially across the width of the transmitted excident light spot. Variations in the dispersion of the transmitted excident light spot for the at least four plane-polarized light beams are calculated, and the fiber orientation is estimated from the variations.
    Type: Grant
    Filed: May 12, 2005
    Date of Patent: January 16, 2007
    Assignee: Honeywell International Inc.
    Inventor: John F. Shakespeare
  • Patent number: 7101461
    Abstract: A system and process for measuring paper formation characteristics in real time is disclosed. The system comprises apparatus used in a papermaking process, and includes a rotating forming fabric having an upper and lower surface. A paper slurry is deposited upon the upper surface of the moving forming fabric to prepare a wet paper web. The wet paper web typically moves at a high rate of speed as it rides along upon the surface of the forming fabric. Light is transmitted from a light source to the surface of the wet paper web, and then reflected from the surface of the wet paper web to a camera. An image is formed corresponding to the pattern of the reflected light, and in some instances data generated from the reflected light may be compared to other values to provide a feedback loop to adjust the parameters of the papermaking process in real time.
    Type: Grant
    Filed: January 29, 2001
    Date of Patent: September 5, 2006
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Peter J. Allen, Scott H. Delzer, Lindsay M. Brewster
  • Patent number: 6985622
    Abstract: A system and method for color correcting electronically captured input images utilizes a correlation between the input images and a set of reference images of different media types to determine the media type of the input images. In an exemplary embodiment, the correlation is performed using a media correlation matrix, which includes media characteristic data from the different media types. The media type information of the input images is used to customize the color correction procedure being performed on the input images. The customization of the color correction procedure ensures that the final images are accurate reproduction of the input images with respect calorimetric or perceptual match.
    Type: Grant
    Filed: September 21, 2001
    Date of Patent: January 10, 2006
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventor: Paul M. Hubel
  • Patent number: 6858858
    Abstract: A hand-held or tool integrated measurement device is provided for quickly and accurately performing non-contact measurements of dimensions and/or angles associated with various objects in a home or commercial work area. The measurement device generally includes at least one user input element, a non-contact sensor, an image processor and a display element packaged in a portable housing assembly. In operation, a user initiates the measurement by activating the user input element associated with the measurement device. The non-contact sensor receives a trigger signal from the user input element and is operative to collect image data representative of at least a portion of the surface of a measured object. The image processor in turn receives the image data from the non-contact sensor and is operative to convert the image data into measurement data for the measured object. The display element is operable to visually display the measurement data to the user.
    Type: Grant
    Filed: May 27, 2003
    Date of Patent: February 22, 2005
    Assignee: Perceptron, Inc.
    Inventor: Alfred A. Pease
  • Patent number: 6768104
    Abstract: Sheets carrying imprinted materials are counted using a rotating counting disk that carries at least a receiver connected to a sensor. During counting of the sheets, a location of the imprinted materials on the sheets can also be determined.
    Type: Grant
    Filed: February 20, 2002
    Date of Patent: July 27, 2004
    Assignee: Koenig & Bauer Aktiengesellschaft
    Inventors: Hartmut Karl Sauer, Johannes Georg Schaede
  • Patent number: 6747697
    Abstract: An adaptive median filter (40) provides dynamic detection and correction of digital image defects which are caused by defective or malfunctioning elements of a radiation detector array (20). The adaptive median filter receives (100) lines of pixel values of a digital image that may have defects and a user-defined defect threshold. The lines of pixel values are scanned on a pixel-by-pixel basis using a kernel of n×n pixels, where the kernel contains the candidate pixel being examined (120). Each kernel is numerically reordered (130) and a median value is calculated (140). A defect threshold value is calculated by multiplying the user-defined defect threshold criteria and the candidate pixel value (150). A reference value is calculated by subtracting the candidate pixel value and the median value (160). The reference value is compared to the defect threshold value (170).
    Type: Grant
    Filed: July 12, 2000
    Date of Patent: June 8, 2004
    Assignee: Koninklijke Philips Electronics, N.V.
    Inventors: Zhongmin Steve Lin, David Nicolay, Hung Yuet Wong
  • Patent number: 6743337
    Abstract: Process and apparatus for determining properties of a traveling material web. The process includes simultaneously illuminating a plurality of measuring points on the material web with electromagnetic radiation, and imaging, through at least one optical device, the plurality of measuring points on one detection surface of at least one detector. The device includes at least one radiation source for illuminating a plurality of measuring points on the material web, at least one detector having a detection surface, and at least one optical device for imaging of the measuring points on the detection surface of the at least one detector.
    Type: Grant
    Filed: March 20, 2000
    Date of Patent: June 1, 2004
    Assignee: Voith Sulzer Papiertechnik Patent GmbH
    Inventor: Thomas Ischdonat
  • Patent number: 6724490
    Abstract: An image capturing apparatus for obtaining information regarding a depth of a subject includes: an illumination unit operable to cast a first illumination light beam that mainly contains a first wavelength and has a first intensity distribution on a plane perpendicular to an optical axis of the first illumination light beam and a second illumination light beam mainly containing a second wavelength and a third wavelength and having a second intensity distribution on a plane perpendicular to an optical axis of the second illumination light beam onto the subject, the second and third wavelengths being different from the first wavelength, the second intensity distribution being different from the first intensity distribution; and a depth calculation unit operable to calculate a depth-direction distance to the subject based on outgoing light beams from the subject.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: April 20, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Shuji Ono
  • Patent number: 6563129
    Abstract: The invention relates to a method for measuring the deformation of a specimen without contact with the specimen. The surface of the measured specimen is partly illuminated by a laser light having uniform intensity. A speckle image is produced due to the local quality of the surface and is reproduced via an optical image sent onto a light-sensitive sensor. At least one reference speckle is selected by an evaluator unit from the totality of the speckles of the speckle image. The displacement of the reference speckle on the sensor is evaluated as the measure of the change that occurred in the specimen. In addition, the invention provides a device for performing this method.
    Type: Grant
    Filed: August 22, 2000
    Date of Patent: May 13, 2003
    Assignee: Zwick GmbH & Co
    Inventor: Bruno Knobel
  • Patent number: 6538252
    Abstract: In a method for determining alignment of line formations of a web, a radiation source emitting radiation and a detector with numerous radiation sensors for sensing the radiation are provided. The radiation source and the detector are reciprocated together simultaneously transversely across the web. During reciprocation across the web, at least one measuring location of the web is irradiated by the radiation source and measured values, based on local radiation intensities are measured by the radiation sensors of the detector. The measured values are communicated to a computer. The computer generates, based on the measured values and the relative positions of the radiation sensors to one another, a local structural image of the at least one measuring location of the web.
    Type: Grant
    Filed: April 25, 2000
    Date of Patent: March 25, 2003
    Assignee: PLEVA GmbH
    Inventors: Ralf Pleva, Harry Pleva
  • Patent number: 6524871
    Abstract: A defect inspection apparatus enabling more reliable and quicker detection of a defect present in the surface of a stacked film formed on a wafer and enabling reliable and quicker detection of a minute defect even if there is unevenness in the surface of the wafer, including a light source, a light frequency shifter unit for converting light from the light source to a plurality of beams of inspection light and a beam of reference light having close frequencies, an object lens upon which the beams of inspection light are incident and focusing the beams of light on the wafer to form a plurality of different focal points corresponding to the beams of inspection light, a laser scanning unit for making the beams of inspection light scan the wafer, a light detection unit and cofocal pinhole plate 13 for detecting an intensity of a superposed light of the beams of reflected light and the beam of reference light at a cofocal point, and an analyzing unit serving as a contrast waveform generating means for generating a
    Type: Grant
    Filed: January 8, 2002
    Date of Patent: February 25, 2003
    Assignee: Sony Corporation
    Inventor: Kouki Okawauchi
  • Patent number: 6515272
    Abstract: In an image monitoring apparatus, a pulsed-laser signal is modulated at a chosen frequency. The modulated signal is provided to an optical imaging system, the output signal is detected by an aerial image detector, and the signal from the aerial image detector is in turn amplified only at the chosen frequency. The apparatus includes an optical chopper for modulating the pulsed-laser signal, and a lock-in amplifier for amplifying the signal from the aerial image detector.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: February 4, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bruno La Fontaine, Harry Levinson
  • Patent number: 6510734
    Abstract: The invention relates to a method for assessing the effect of yarn defects on textile fabrics, which are to be produced from a given yarn, by simulating an image of the fabric. So that assessment of simulated textile fabrics may be carried out with greater reliability and more easily, a first image (51) of the fabric is generated by simulation based on parameters or measured signals of the given yarn. A second image (52) of the fabric is generated by simulation based on parameters of a reference yarn and finally the first image is compared with the second image.
    Type: Grant
    Filed: December 3, 1998
    Date of Patent: January 28, 2003
    Assignee: Zellweger Luwa AG
    Inventor: Peter Feller
  • Patent number: 6509575
    Abstract: An imaging recording method and an apparatus for its implementation, including applying a light to an image to produce imaged light, passing the imaged light through a filter unit to provide filtered light, and recording the filtered light on an optical detector to produce a recorded image. The filter unit includes a first filter and a second filter. The first filter is polarization selective and the second filter is wavelength selective.
    Type: Grant
    Filed: May 5, 2000
    Date of Patent: January 21, 2003
    Assignee: Impact Imaging, Inc.
    Inventor: Richard A. Nanni
  • Publication number: 20020168116
    Abstract: An image reading apparatus having a visible light source for emitting visible light, an invisible light source for emitting invisible light, an imaging optical system for irradiating a document by these light sources to form optical images of the document, and a CCD for photoelectrically converting the optical images Of the document turns on the visible light source to acquire a visible light image signal by the CCD. Then, the apparatus turns on the invisible light source to acquire an invisible light image signal by the CCD. After the invisible light image signal is acquired, the apparatus turns off the invisible light source, and turns on the visible light source regardless of whether to read the document.
    Type: Application
    Filed: March 13, 2002
    Publication date: November 14, 2002
    Inventors: Tsutomu Takayama, Mitsugu Hanabusa, Atsuko Kashiwazaki, Kengo Kinumura
  • Publication number: 20020131649
    Abstract: In an image processing device which carries out processing for detecting and correcting defective portions of an image, it is possible to pre-emptively prevent the defective portion detecting and correcting processing from causing a deterioration in image quality or an excessive processing requiring time requirement. In cases in which a film type of a photographic film on which the image is recorded is a film type known to have a characteristic that an IR image is also formed at a time of image exposure and recording, and in cases in which a density distribution width of IR data is a predetermined value or more, defect detection-correction processing is cancelled. Further, in cases in which a non-image region is included in the image, either defect detection-correction is carried out only on regions other than the non-image region, or defective portion detection-correction is cancelled.
    Type: Application
    Filed: March 19, 2002
    Publication date: September 19, 2002
    Inventor: Hiroshi Yamaguchi
  • Publication number: 20020131648
    Abstract: An image processing apparatus for processing visible image information and invisible image information obtained from visible light and invisible light directed onto an original and from the original onto an image pick-up element via a focusing optical system. The image processing apparatus includes an infrared light source, a visible light source, a focus correction unit that corrects the focus of the images when the images are formed on the image pick-up element and acquired, and a signal processor that corrects a partial magnification difference between the visible image and the infrared image.
    Type: Application
    Filed: March 12, 2002
    Publication date: September 19, 2002
    Inventor: Tadao Hayashide
  • Publication number: 20020084430
    Abstract: A preferably CMOS-implementable method measures distance and/or brightness by illuminating a target with emitted optical energy having a modulated periodic waveform whose high frequency component may be idealized as S1=cos(&ohgr;·t). A fraction of the emitted optical energy is reflected by a target and detected with at least one in a plurality of semiconductor photodetectors. Photodetector quantum efficiency is modulated to process detected signals to yield data proportional to the distance z separating the target and photodetector. Detection includes measuring phase change between the emitted optical energy and the reflected fraction thereof. Quantum efficiency can be modulated with fixed or variable phase methods and may be enhanced using enhanced photocharge collection, differential modulation, and spatial and temporal multiplexing. System power requirements may be reduced with inductors that resonate with photodetector capacitance at the operating frequency.
    Type: Application
    Filed: December 11, 2001
    Publication date: July 4, 2002
    Applicant: CANESTA, INC.
    Inventors: Cyrus Bamji, Edoardo Charbon
  • Patent number: 6396949
    Abstract: Machine vision methods for segmenting an image include the steps of generating a first image of the background of an object, generating a second image of the object and background, and subtracting the second image from the first image. The methods are characterized in that the second image is generated such that subtraction of it from the first image emphasizes the object with respect to the background.
    Type: Grant
    Filed: June 15, 2000
    Date of Patent: May 28, 2002
    Assignee: Cognex Corporation
    Inventor: Sanjay Nichani
  • Publication number: 20020043632
    Abstract: The invention provides a three dimensional digital scanner which includes a multiple view detector which is responsive to a broad spectrum of visible light. The multiple view detector is operative to develop a plurality of images of a three dimensional object which is being scanned. The plurality of images are taken from a plurality of relative angles with respect to the object, and the plurality of images depict a plurality of surface portions of the object. A digital processor including a computational unit is coupled to the detector and is responsive to the plurality of images so that it develops 3-D coordinate positions and related image information for the plurality of surface portions of the object. A three dimensional image of the object to be scanned is thus developed by the digital processor. The data developed includes both shape and surface image color information.
    Type: Application
    Filed: August 31, 2001
    Publication date: April 18, 2002
    Inventors: John L. Miramonti, Frederick E. Mueller
  • Patent number: 6373966
    Abstract: A printing quality examining apparatus in which image data printing paper is successively taken in by a camera of a detection unit. The image data are compared with a previously taken-in reference data to detect a printing defect so that a decision as to whether printing quality is good or bad is made. The image data is averaged in time to calculate an estimated data, and the estimated data is compared with the previously taken-in reference data. When the estimated data is normal, pixels are determined to be normal. When the estimated data is unusual, the image data from the detection unit is compared with the reference data at next step so that when the image data from the detection is normal, the pixels are determined to be normal and when the image data is unusual, the pixels are determined to be defective and the paper is discharged.
    Type: Grant
    Filed: February 2, 2000
    Date of Patent: April 16, 2002
    Assignee: Mitsubishi Jukogyo Kabushiki Kaisha
    Inventors: Tomohiro Fujii, Norifumi Tasaka, Rieko Kitahara
  • Patent number: 6337488
    Abstract: A defect inspection apparatus enabling more reliable and quicker detection of a defect present in the surface of a stacked film formed on a wafer and enabling reliable and quicker detection of a minute defect even if there is unevenness in the surface of the wafer, including a light source, a light frequency shifter unit for converting light from the light source to a plurality of beams of inspection light and a beam of reference light having close frequencies, an object lens upon which the beams of inspection light are incident and focusing the beams of light on the wafer to form a plurality of different focal points corresponding to the beams of inspection light, a laser scanning unit for making the beams of inspection light scan the wafer, a light detection unit and cofocal pinhole plate 13 for detecting an intensity of a superposed light of the beams of reflected light and the beam of reference light at a cofocal point, and an analyzing unit serving as a contrast waveform generating means for generating a
    Type: Grant
    Filed: February 29, 2000
    Date of Patent: January 8, 2002
    Assignee: Sony Corporation
    Inventor: Kouki Okawauchi
  • Patent number: 6294327
    Abstract: A system and method for imaging a sample labeled with a material having a strong light scattering and reflecting properties are provided. A typical material having strong light scattering and reflecting properties is a metal colloid. The imaging system employs a light scattering and reflecting illumination technique. The sample can be imaged with reflection mode imaging along or with a combination of reflection mode and scatter mode imaging.
    Type: Grant
    Filed: January 26, 1998
    Date of Patent: September 25, 2001
    Assignee: Affymetrix, Inc.
    Inventors: Ian D. Walton, Mark O. Trulson, Richard P. Rava
  • Patent number: 6259827
    Abstract: Machine vision methods for segmenting an image include the steps of generating a first image of the background of an object, generating a second image of the object and background, and subtracting the second image from the first image. The methods are characterized in that the second image is generated such that subtraction of it from the first image emphasizes the object with respect to the background.
    Type: Grant
    Filed: March 21, 1996
    Date of Patent: July 10, 2001
    Assignee: Cognex Corporation
    Inventor: Sanjay Nichani
  • Patent number: 6236429
    Abstract: A web inspection apparatus (20) and method for use in identifying surface anomalies (26) on a moving material web (21) including a scanning device (22) and data processing circuitry (23) for monitoring and analyzing the output data of the scanning device (22). The scanning device (22) is configured to continuously scan a surface (25) of the moving web (21) and generates output data representative of the surface of the web. The data processing circuitry (23) is responsive to selected output data representing at least one type of surface anomaly (26) such that Region Of Interest (ROI) data are automatically recorded. This ROI data represents the detected anomaly (26) and an immediate surrounding region (27) including the detected anomaly. The hands-free data processing circuitry (23) continuously monitors and analyzes the output data generated by the scanning device (22) while the ROI data is being stored.
    Type: Grant
    Filed: January 23, 1998
    Date of Patent: May 22, 2001
    Assignee: Webview, Inc.
    Inventor: Morris D. Ho
  • Patent number: 6234294
    Abstract: A currency note condition recognition apparatus and method uses a programmed microelectronic CPU to execute program instructions stored in a PROM to read in pixel data from an optical imaging section, including LEDs and photodiodes for generating signals which can be converted to a first image of a currency note being transported along the path of travel. The CPU receives position and skew data detected by external sensors for sensing the position and skew of the note.
    Type: Grant
    Filed: December 22, 1999
    Date of Patent: May 22, 2001
    Assignee: De La Rue International LTD
    Inventors: Michael L. Defeo, Jack Denison, John M. Mikkelsen, Peter Truong, Kenneth W. Maier, Bo Xu, Robert J. Burgert
  • Patent number: 6201559
    Abstract: A method for measuring the quantity of light emitted from an optical write head which drives an array of light shutter elements extending in a main scanning direction individually in accordance with image data. In order to measure the quantity of light outputted from each of the light shutter elements, a photosensor is moved in the main scanning direction at a constant speed while the light shutter elements are driven in such a way that adjacent elements are not driven at a time. While light shutter elements which are in odd numbers in the array are driven, the photosensor is moved forward to measure the quantities of light outputted therefrom, and while light shutter elements which are in even numbers in the array are driven, the photosensor is moved backward to measure the quantities of light outputted therefrom.
    Type: Grant
    Filed: December 18, 1997
    Date of Patent: March 13, 2001
    Assignee: Minolta Co., Ltd.
    Inventors: Kenichi Wada, Tsukasa Yagi, Tomohiko Masuda, Ken Matsubara, Yuji Kamoda, Itaru Saito
  • Patent number: 6177287
    Abstract: A method of reviewing classification data and image data for defects detected in a series of semiconductor manufacturing processes. An inspection wafer is selected from a production lot of wafers and is inspected after the completion of each of the series of semiconductor manufacturing processes. The classification data for each defect is sent to a defect management system and an image for selected defects is sent to an image storage system. Identification data is sent to the defect management system and the image storage system. The image storage system sends a cookie to the defect management system allowing the defect management system to identify defects having an image. A operator controlled review station allows an operator to select defects for review that have an image available for review.
    Type: Grant
    Filed: September 28, 1998
    Date of Patent: January 23, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Paul J. Steffan, Allen S. Yu