Abstract: The present disclosure relates to devices, light detection and ranging (lidar) systems, and vehicles involving solid-state, single photon detectors. An example device includes a substrate defining a primary plane and a plurality of photodetector cells disposed along the primary plane. The plurality of photodetector cells includes at least one large-area cell and at least one small-area cell. The large-area cell has a first area and the small-area cell has a second area and the first area is greater than the second area. The device also includes read out circuitry coupled to the plurality of photodetector cells. The read out circuitry is configured to provide an output signal based on incident light detected by the plurality of photodetector cells.

Abstract: System and technique for inspecting a moving film by measuring the levels of light transmission through a thickness dimension of the film are described. The system includes a light source configured to provide light including a particular wavelength, or a particular range of wavelengths. The light from the light source is directed toward a first surface of the film, and an image capturing device is located adjacent to the light source on a second side of the film opposite the first surface, the image capturing device configured to measure the levels of light intensity exiting a second surface of the film. Measurements of the level of the light intensity passing through the film may be spatially synchronized to physical positions along the film to generated at least one roll map indicative of light transmission characteristics of the film over the imaged portions of the film.

Abstract: The present invention is a signal processing device that efficiently removes multiple types of interference waves mixed in with a received signal. This signal processing device is provided with: a first extraction unit that performs deconvolution with respect to a cross-correlation of a reference signal and a received signal and to an autocorrelation of the reference signal, and extracts a channel response to the reference signal; a second extraction unit that extracts a main channel response corresponding to the reference signal from the channel response; and a removal unit that restores a signal by performing convolution with respect to the reference signal and the main channel response, and removes the restored signal from the received signal.

Abstract: A strain measurement method includes disposing a 3D camera module at a first measurement position; using the 3D camera module to acquire a first 3D image of a to-be-measured object at a first to-be-measured position; acquiring a second 3D image of the to-be-measured object at the first to-be-measured position; and splicing the first and second 3D images to obtain an initial 3D image. The method still includes: moving the 3D camera module from the first measurement position to a second measurement position; using the 3D camera module to acquire a third 3D image of the to-be-measured object at a second to-be-measured position; acquiring a fourth 3D image of the to-be-measured object at the second to-be-measured position; and splicing the third and fourth 3D images to obtain a deformed 3D image. The method further includes comparing the initial 3D image and the deformed 3D image to output 3D deformation information.

Abstract: A camera system includes an imager unit for recording image data and converting the image data into a digital image signal, and a video processing unit operatively connected to the imager unit for receiving the digital image signal from the imager unit and for generating a corrected video output signal. The video processing unit has a dead pixel correction unit and a subsequent non-uniform offset error correction unit. The dead pixel correction unit is configured for correcting the signal of confirmed dead pixels, which are referenced in a map of confirmed dead pixels associated to the dead pixel correction unit. The non-uniform offset error correction unit is configured for correcting readout amplifier non-uniformity and pixel level non-uniformity in the digital image signal. The non-uniform offset error correction unit is further configured for new dead pixel detection simultaneously to the pixel level non-uniformity correction.

Abstract: A method of and device for testing and a scale for evaluating a textile for use in an article of clothing constructed of the textile. The method comprises positioning a textile sample within a path of a generated beam of light and measuring the amount of photons absorbed when the light is transmitted through the sample. The amount of light transmitted through the sample is compared to a standardized scale for evaluating the amount of coverage provided by the sample for the textiles fitness for use in the article of clothing. The articles of clothing may be articles of swimwear, athletic wear, or athleisure wear.

Abstract: A patterned optoelectronic tweezers (p-OET) device is provided. The p-OET device includes a top and a bottom electrode arranged in a parallel spaced apart relationship. A patterned photoconductor layer is provided on the bottom electrode, and forms a pattern comprising at least one raised region where the bottom electrode is coated by a photoconductor material and at least one hollow region where the bottom electrode is exposed. The pattern includes one or more boundaries between the raised and hollow regions. In some implementations, the boundaries of the patterned photoconductive layer define a permanent trap feature.

Abstract: According to an aspect of the present invention, there is provided a pattern structure inspection method including irradiating a wave from a wave source onto a sample including a pattern region in which a structure having a certain pattern is provided on a substrate, collecting speckle data generated due to multiple scattering of the wave in the pattern region, by using a data collector, and analyzing whether the structure of the pattern region has a defect, by comparing the collected speckle data to reference speckle data.

Abstract: The luggage insurance photo service machine is configured for use with a bailment. The luggage insurance photo service machine: 1) captures one or more images of bail associated with the bailment; 2) registers the captured one or more images with a registrar; and, 3) upon successful registration of the bail provides to the bailor physical documentation of the registration. The luggage insurance photo service machine comprises a housing, a recording device, a commercially provided and publically available network, and a registrar. The recording device is contained within the housing. The commercially provided and publically available network provides communication service between the recording device and the registrar. The bail is placed within the housing to allow the recording device to capture the one or more images of the bail.

Abstract: A surgical navigation system and method for identifying positions on a patient, including a processor, and a tracking system for tracking a pointer tool. The processor is programmed to initialize a surface trace acquisition, continuously record the positions of the pointer tool during the surface, conduct trace acquisition, combine the positions recorded during the surface trace acquisition into a surface trace, receive a patient image of the patient, extract a surface from the patient image, compute a registration transform between the surface traces and the surface for patient registration, segment the patient image into a regions where each region contains an anatomical landmark, determine a spatial distribution of surface traces among the regions; determine whether the spatial distribution in relation to each region minimizes deviance below a threshold, and if the determination is exceeding the threshold, provide information relating to such region.

Abstract: An apparatus and method is provided to efficiently and more precisely inspect reticles for contamination. The inspection system is used to image the reticle back-side and pellicle-side separately by transferring the reticle while maintaining desired demagnification. An inspection system is disclosed that includes a reticle support to support the reticle at a first position and an illumination source to illuminate a first surface of the reticle at the first position. The inspection system further includes a first sensor to receive light from the illuminated first surface of the reticle when the reticle is at the first position and a second sensor to receive light from an illuminated second surface of the reticle when the reticle is at a second position.

Abstract: The present disclosure is directed to a method for designing an aperture in a mask for inspecting a wafer. The method includes the steps of scanning a collection plane of the wafer at a plurality of points and collecting data for at least a part of the wafer. The method also includes the step of mapping the data. A further step of the method includes configuring the aperture based on the mapped data.

Abstract: Methods of fixing defective pixels are described wherein a predicted value for a target pixel in a target color channel is determined based on the values of nearby pixels, wherein the target pixel value can be selectively replaced with the predicted value. The predicted value is determined by determining a candidate value for each of a plurality of directions using: (i) a gradient of pixel values in one color channel along the respective direction and (ii) a pixel value of a pixel in the target color channel which is aligned with the target pixel along the respective direction. Using gradients can provide better predicted values than averaging nearby pixel values since rates of change of pixel values are taken into account. The median of the candidate values may be used in order to reduce the impact of other defective pixels on the predicted value for the target pixel.

Abstract: A method for improving computation efficiency for diffraction signals in optical metrology is described. The method includes simulating a set of diffraction orders for a three-dimensional structure. The diffraction orders within the set of diffraction orders are then prioritized. The set of diffraction orders is truncated to provide a truncated set of diffraction orders based on the prioritizing. Finally, a simulated spectrum is provided based on the truncated set of diffraction orders.

Abstract: The present invention provides a method for measuring an end portion shape of a threaded pipe or tube P, the method including: a thread axis detection step; a laser light positioning step; a laser light image capture step; and a shape calculation step. In the laser light positioning step, the light source 1 and the image capture device 2 are moved together so that: the optical axis LA of the light source is located so as to pass through a measurement point D (X1, Y1, Z1) on the thread axis A, the measurement point being located in the measurement target region within a plane NP including the thread axis; and the laser light L extends in a slit-like form within the plane.

Abstract: An apparatus for detecting the position of application of a sealing strip of heat-seal plastic material onto a multilayer web of packaging material for food products advanced along a predetermined path and including at least one base layer for stiffness and strength and one or more heat-seal plastic layers; the sealing strip has a first longitudinal portion, applied onto a longitudinal edge of the web, and a second longitudinal portion projecting laterally from the longitudinal edge. The apparatus comprises a light source for irradiating a transversal portion of the web during movement thereof along its path, and a sensor detecting a quantity related to different behavior of the materials forming the web and the sealing strip to light exposure and generating an output signal related to the width of the second portion of the sealing strip in a direction orthogonal to the web travelling direction and parallel to said web.

Abstract: A discrete wavefront measurement device uses a variable transmission filter (VTF) to decouple the dynamic range of tilt angle measurements in the wavefront from the spatial sampling resolution and the measurement sensitivity as regards the physics of the readout. This approach allows the discrete wavefront measurement device to be configured to a specified dynamic range, transverse sampling resolution and measurement sensitivity at low cost.

Abstract: For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants.

Abstract: The invention provides a system for sensing a cigarette filter, comprising: a plurality of rotary conveyance drums (12) delivering a first cigarette filter and second cigarette filters into which the first cigarette filter is divided by a cutter; two sensors (18) disposed adjacent to the rotary conveyance drum (12) to detect the second cigarette filters; an opto coupler connected to the two sensors (18) and operated by AND logic; a HIP connected to the opto coupler, it controlling a device of supplying cigarette filters to reject a cigarette having defects; and, a PLC connected with the HIP, it controlling the device of supplying cigarette filters, wherein the two sensors (18) detect active charcoal filters located at both ends of the second cigarette filters, the HIP controls the device such that the cigarette having defects are rejected when signals sensed by the sensors (18) are different from signals sensed from the normal active charcoal filter, the PLC controls the operation and stop of the device by pe

Abstract: This document relates to a probe inspection apparatus for testing a flat panel display. The probe inspection apparatus comprises a base plate, a stage placed over the base plate and configured to comprise a plurality of back light modules for supplying a rear surface of a substrate with light or heat or both, the substrate being seated in the stage, a probe pin configured to electrically come into contact with circuit patterns formed in the substrate and measure electrical properties of the circuit patterns, a probe head configured to support the probe pin and move in an X or Y axis, and an upper light source unit mounted on one side of the probe head and configured to irradiate light to the circuit patterns.

Abstract: (a) a measurement F0(x, y, ?t) of the signals detected is provided; (b) on the one hand a first value F1(X, y, ?t) is provided, termed the “integration” value and on the other hand a second value F2(x, y, ?t) termed the “count” value is provided; (c) a value Fe(x0, y0, ?t) of a number of signals is estimated from a combination of first F1(X0, y0, ?t) and second F2(x0, y0, ?t) values, on the basis of a criterion of detection in the neighborhood.

Abstract: An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold.

Abstract: An optically-induced dielectrophoresis chip including a substrate, a first electrode layer disposed on the substrate, and an interface modification layer disposed on the first electrode layer. A photo-conductive layer is disposed on the interface modification layer and includes an optical absorbent polymeric material. A barrier layer is disposed on the photo-conductive layer, and a compartment forming layer is disposed on the barrier layer defining a compartment. A second electrode layer covers the compartment forming layer.

Abstract: An image reading device comprises: a light source; a first optical element that focuses light emitted from the light source, the emitted light being reflected by a medium in a first detection area; a first detector that outputs first detection information in response to arrival of light in the first detection area; a second optical element that guides to a second detection area a portion of the light emitted from the light source, which portion does not arrive at the reflective medium in the first detection area; a second detector that outputs second detection information responsive to detection of light at the second detection area; and a generator that generates image data of the medium by revising the first detection information on the basis of the second detection information.

Abstract: In laser welding, the welding area is depicted coaxially in relation to the laser beam (3) through the laser optics (4), wherein not only a triangulation line and a grey or color image of the solidified weld is recorded but also the process radiation of the welding process. From these three image elements, an optimum quality assessment of the welding process and of the weld can be made.

Abstract: A method is disclosed for determining the aesthetic quality of a document page. The method partitions the document page into a plurality of regions according to a predetermined map. Each region is then evaluated to determine whether the region is of acceptable aesthetic quality according to a predetermined profile corresponding to the region and defined by the map. The profile comprises (i) one or more measures of region properties; (ii) an acceptability rule corresponding to each measure; and (iii) a region decision rule (435, 440) based on the results of one or more of the acceptability rules. The method then determines the aesthetic quality for the document page based on the aesthetic quality acceptability of each region and a predetermined page rule defined by the map.

Abstract: An apparatus for optical signal detection may include a housing in which a channel may be defined to receive an optical fiber in a bent configuration. The channel may have a predetermined radius of curvature to cause optical energy to escape from the fiber when an optical signal is being conveyed in the fiber and be detected at a photodetector arranged at the predetermined radius of curvature.

Abstract: An apparatus includes at least one scanner. Each scanner includes a plurality of sensors, and each sensor is capable of measuring one or more characteristics associated with a portion of a substrate. The substrate has printing produced by a printing system. The apparatus also includes a controller capable of receiving at least some of the measurements from the plurality of sensors and determining a quality of the printing on the substrate using the received measurements. The substrate could represent paper, and the printing system could represent an offset printing system. At least one of the sensors may be in a fixed position and/or at least one of the sensors may be movable over part of a surface of the substrate. The determined quality of the printing could involve density, dot area, dot gain, contour sharpness, doubling, mottling, ghosting, misregister of different colored inks, slur, or improper positioning of the printing.

Abstract: A device that is usable to inspect the surface of a material uses an inspection system which includes an optical unit. That optical unit can register the light which is reflected by the surface to be inspected. An illumination system, that uses at least two light sources, provides the light. The optical unit and the illumination system are connected to a control unit. The at least two light sources are arranged spaced at a distance from each other and both emit light directed to a recording region of the optical unit. The optical unit is oriented toward the surface to be inspected and at least one of the illumination light sources can be subdivided into several individual light sources. The control unit controls at least two of the illumination system light sources that are arranged at a distance from each other or the respective individual light sources of at least one of the illumination sources both selectively and independently of each other.

Abstract: Described herein are single-sided lateral-field optoelectronic tweezers (LOET) devices which use photosensitive electrode arrays to create optically-induced dielectrophoretic forces in an electric field that is parallel to the plane of the device. In addition, phototransistor-based optoelectronic tweezers (PhOET) devices are described that allow for optoelectronic tweezers (OET) operation in high-conductivity physiological buffer and cell culture media.

Abstract: Systems and methods are provided for determining an ensquared energy associated with an imaging system. In one embodiment of the invention, a focal plane array captures an image of a target comprising a plurality of point sources, each point source being associated with a pixel within the focal plane array. An image analysis component estimates an ensquared energy value for the imaging system from respective intensity values of the associated pixels and known relative positions of the plurality of point sources.

Abstract: An object geometry measurement apparatus (10, 20) for the dynamic generation and transmission of geometrical data of objects (14) moved on a conveying device (12) is set forth, wherein the apparatus has a first optoelectronic sensor (10) which is made for the detection of the object geometry in a section of the object (14) with reference to intervals and/or of the remission behavior, as well as a first control (20) which can calculate geometrical data from the object geometry of each section and can output them via a first interface. In this respect, the first control (20) is made to adapt the information density of the output geometrical data to a measure for changes of the object geometry from section to section.

Abstract: An imaging system includes a two-dimensional detector having a plurality of cells wherein each cell is configured to detect energy or signal passing through an object. The imaging system includes a computer programmed to acquire imaging data for the plurality of cells, identify a cell to be corrected, based on the imaging data, interpolate Ix and Iy for the identified cell based on neighbor cells, and calculate local gradients gx and gy between the identified cell and its neighbor cells based on the interpolation. The computer is further programmed to calculate weighting factors wx and wy based on the local gradients, calculate a corrected final value I(0,0) for the identified cell, and correct the identified cell with the corrected final value.

Abstract: An apparatus for measuring the characteristics of an optical fiber is provided. An optical pulse generator generates, from a coherent light, first and second optical pulses having a time interval which is equal to or shorter tan a life time of an acoustic wave in the optical fiber. A detector couples the coherent light with a Brillouin backscattered light which includes first and second Brillouin backscattered lights belonging to the first and second optical pulses respectively, thereby generating an optical signal. The detector further converts the optical signal into an electrical signal. A signal processor takes the sum of the electrical signal and a delay electrical signal which is delayed from the electrical signal by a delay time corresponding to the time interval, thereby generating an interference signal, and finds the characteristics of the optical fiber based on the interference signal.

Abstract: The present invention provides a trolley wire wear measurement device by image processing in which a line sensor is arranged vertically and upward on a roof of an inspection car so that the line sensor looks up to a trolley wire and a lighting means that illuminates the trolley wire is formed by arranging a plurality of point light sources in a straight line in a direction perpendicular to a travelling direction of the inspection car on the inspection car.

Abstract: An image acquiring method of a scanned image is applying to an image reading apparatus having an automatic sheet-feeding function. The method includes the steps of: acquiring a first image at a scan region of the image reading apparatus by performing a sheet-feeding operation and an image reading operation; analyzing the first image to recognize an effective area and an ineffective area outside the effective area; and adjusting a timing for starting acquiring a second image in relation to size of the ineffective area, so as to reduce the size of the ineffective area in the second image.

Abstract: In a luminescence detecting apparatus and method for analyzing luminescent samples, luminescent samples are placed in a plurality of sample wells in a tray, and the tray is placed in a visible-light impervious chamber containing a charge coupled device camera. In the chamber, light from the luminescent samples pass through a collimator, a Fresnel field lens, an infrared filter, and a camera lens, whereupon a focused image is created by the optics on the camera. The use of an infrared filter suppresses stray IR radiation resulting from plate phosphorescence (which can result in abnormally high backgrounds and/or alteration of the image received by the camera).

Abstract: A method is proved for analyzing frequency distribution of a reflection from a surface of a body to determine a type of body surface. Initially, a plurality of data points from a sensor that senses the reflection of the body's surface are provided. A first series of terms are summed together to provide a first magnitude, each term including a plurality of data points; wherein the plurality of data points being spaced apart by a first spacing. A second series of terms are summed together to provide a second magnitude, each term including a plurality of data points; wherein the plurality of data points being spaced apart by a second spacing. The first magnitude is compared to the second magnitude to determine the type of body surface.

Abstract: An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 ?m or less. The apparatus is referred to as optoelectric tweezers (OET) and provides a number of advantages over conventional optical tweezers, in particular the ability to perform operations in parallel and over a large area without damage to living cells. The OET device generally comprises a planar liquid-filled structure having one or more portions which are photoconductive to convert incoming light to a change in the electric field pattern. The light patterns are dynamically generated to provide a number of manipulation structures that can manipulate single particles and cells or groups of particles/cells. The OET preferably includes a microscopic imaging means to provide feedback for the optical manipulation, such as detecting position and characteristics wherein the light patterns are modulated accordingly.

Abstract: The invention concerns a device for counting series of thin products (2), stacked side by side, and includes a means of illuminating the stack (5) producing one or more light beams covering the whole length of the stack (5), —a detection resource with a detection circuit, including a multiplicity of photosensitive elements, an optical device, associated with the detection circuit, that can be used to focus light rays reflected by the stack (5), —storage resources a separating element (1) included in the stack (5) between two adjacent series of thin products (2), where each separating element (1) has a mark placed on one part of one of its edges where a part of the marking is illuminated by a lighting resource and visible to the detection resource; —processing resources receiving signals coming from the detection circuit and arranged so as to distinguish the visual limit of the thin products (2) as well as the mark on the separating element (1).

Abstract: A method comprises the step of reading multi level data of reference of each of colors from a printed paper on which images are printed to be good. The multi level data of reference are converted into two level data of reference so that two level data of images of reference can be reproduced in a memory from the two level data of reference. The method further comprises the step of reading multi level data of inspection of each of colors from a printed paper which is fed when inspecting. The multi level data of inspection are converted into two level data of inspection so that two level images of inspection can be reproduced in the memory from the two level data of inspection. The method further comprises the step of comparing the two level images of inspection with the two level images of reference for inspection of stained parts and blurred parts.

Abstract: The present invention relates to a sheet-surface analyser (10) including illuminating means (32) for casting shadows on the sheet-surface; capturing means (36) for capturing an image of the shadows; analysing means (40) for analysing the captured image to thereby analyse the sheet surface; and curving means (22) for curving the sheet, wherein the illuminating means and the curving means are configured to enable the illuminating means to cast shadows on a curved part of said sheet-surface, and the capturing means is configured to capture said shadow-image.

Abstract: Spectral, densitometric, or color measured values are detected on sheet printing materials during the printing process in a sheet-fed printing press. The measured values are determined on sheets as they are moving through the printing press and the measured values are used in real-time by a computer to control parameters for controlling the printing process in the sheet-fed printing press.

Abstract: The invention provides a method of producing an in-focus image of an area on a sample plate for an ion source, e.g., a matrix-based ion source or any other type of ion source that employs a sample plate onto which samples are deposited. The method generally includes: a) positioning an area of the sample plate in the field of view of an imaging device; b) producing a plurality of images of the area having different in-focus regions; and c) generating an in-focus image of the area using the plurality of images. The in-focus image may be two-dimensional or three-dimensional. Systems and programming for performing the methods are also provided.

Abstract: A system and method for detecting defects in semiconductor wafers in a rapid non-destructive manner. Defects in semiconductor wafers can include micropipes and screw dislocations, stress striations, planer defects, polytype inclusions, and others. When a wafer is illuminated by polarized light, the defects induce birefringence of the polarized light that can be visualized by a polariscope to detect defects in wafers. Defects can cause linearly inputted polarized light to emerge as elliptically polarized light after transmission through a wafer having defects. Placing the wafer between a set of polarizers under the cross poles condition allows for a rapid non-destructive system and method for delineating and locating defects within a semiconductor wafer.

Abstract: An apparatus and method for detecting a relatively narrow predetermined pattern, such as a trigger mark, on a moving printed product uses a plurality of sensor elements arranged linearly in an array and a switching apparatus for selecting a properly located subset of the sensor elements for detecting the predetermined pattern. During the operation of the apparatus, only those signals from sensors in the selected subset are checked continuously for the occurrence of a signal pattern corresponding to the predetermined pattern. Each time the predetermined signal pattern is found in the output signal from a sensor within the selected subset, a detection signal is generated. The lateral shifting of the predetermined pattern over time may be monitored by the selected sensors, and the selection of the subset of sensors for the continuous evaluation may be changed in response to the lateral shifting.

Abstract: An apparatus for inspecting a semiconductor wafer includes a vertically movable chuck plate for holding said semiconductor wafer, a first light source for illuminating an area on the wafer, a main imaging camera for detecting light scattered from the surface of the wafer and a main imaging lens for imaging the illuminated area of the wafer onto the camera. The apparatus additionally includes an auto-focus system for maintaining the wafer within the depth of field of the lens focal point. The auto-focus system comprises a second light source with associated optics, a linear position sensor with associated optics for detecting light from the second light source that is reflected off the illuminated area of the wafer, circuitry for converting the light detected by the sensor into an output voltage which is proportional to the relative vertical position of the illuminated area of the wafer.

Abstract: A method for processing a video data stream including a series of pixel values corresponding to pixel sites in an electronic imaging device includes the step of filtering the video data stream in real time to correct or modify defective pixel values based on a plurality of neighboring pixel values. The filtering of each pixel value uses a current pixel value as part of a data set including the neighboring pixel values in determining whether and/or how to correct or modify the current pixel value. The pixel values which are most severely defective are identified and stored. A first filtering algorithm is applied to those pixels whose locations are not stored, and a second filtering algorithm is applied to the most severely defective pixels whose locations have been stored. The filtering algorithm includes sorting the current pixel value and the neighboring pixel values into a rank order and modifying the current pixel value on the basis of its place in the rank order.

Abstract: The invention concerns a method for evaluating pattern defects on a wafer surface, comprising the following steps: acquiring the surface data of a plurality of individual image fields (4) of a series-produced wafer (1); storing the data in a reference data set and making it available as reference data for the inspection of further wafers of the same series; inspecting, successively in time, the individual image fields (4) on the surface of a wafer (1) presently being examined; retrieving from the reference data set a reference datum corresponding to the respective individual image field (4) presently being inspected; comparing the surface of each individual image field (4) currently being inspected to the corresponding reference datum; if one or more deviations are identified, subsequently classifying the deviations into critical and noncritical defects in terms of the functionality of the chip; and simultaneously updating or adding to the reference data set.

Abstract: An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 ?m or less. The apparatus is referred to as optoelectric tweezers (OET) and provides a number of advantages over conventional optical tweezers, in particular the ability to perform operations in parallel and over a large area without damage to living cells. The OET device generally comprises a planar liquid-filled structure having one or more portions which are photoconductive to convert incoming light to a change in the electric field pattern. The light patterns are dynamically generated to provide a number of manipulation structures that can manipulate single particles and cells or group of particles/cells. The OET preferably includes a microscopic imaging means to provide feedback for the optical manipulation, such as detecting position and characteristics wherein the light patterns are modulated accordingly.