Abstract: A method for measuring the deformation of a reflective surface of an object is provided. The measuring device includes a lighting pattern containing spots of light, a camera and an image-analyzing device, the lighting pattern and the camera being arranged so that, in the measurement position, the virtual or real image of the lighting pattern is visible to the detector of the camera via the surface, the image being representative of the deformation of the lit region. The method comprises the following steps: measuring a distance between the images of two spots of light; computing the ratio between this measured distance and a reference distance; computing, from this ratio, the enlargement in a defined direction; computing the deformation of the reflective surface in the defined direction.

Abstract: A method includes generating a primary radiation beam from a radiation source; splitting the primary beam into a first radiation beam and a second radiation beam; directing the first radiation beam onto a front side of a wafer; directing the second radiation beam onto a back side of a wafer; generating an image of the front side of the wafer by receiving a reflection of the first radiation beam reflected from the wafer; and generating an image of the back side of the wafer by receiving a reflection of the second radiation beam reflected from the wafer.

Abstract: When a liquid surface is detected based on a detection signal from a photodetector during the approaching operation, a photodetector movement processor moves the photodetector to a position where reflected light from a cantilever is incident with the cantilever being in liquid. When the reflected light from the cantilever is incident on the photodetector during the approaching operation continued after the movement of the photodetector by the photodetector movement processor, an optical axis adjustment processor adjusts an optical axis of the reflected light incident on the photodetector. When a surface of a solid sample is detected based on a detection signal from the photodetector during the approaching operation continued after the adjustment of the optical axis by the optical axis adjustment processor, an approaching processor stops the approaching operation.

Abstract: Various embodiments include approaches for controlling an additive manufacturing (AM) process. In some cases, an AM system includes: a process chamber for additively manufacturing a component, the process chamber at least partially housing a plurality of distinct melting beam scanners, each of the distinct melting beam scanners configured to emit a melting beam, wherein each of the distinct melting beam scanners is independently physically movable within a corresponding region of the process chamber; and a control system coupled with the plurality of distinct melting beam scanners, the control system configured to control movement of at least one of the plurality of distinct melting beam scanners within the corresponding region based upon a geometry of the component.

Abstract: A method performed by a boundary estimation system for estimating a boundary of a road on which a vehicle is positioned and which comprises at least a first lane marking. The system monitors surroundings of the vehicle, detects one or more positions of the at least first lane marking, and approximates a geometrical representation of the at least first lane marking based on one or more of the detected positions of the at least first lane marking. The system further detects one or more positions of a road boundary of the road, approximates a relative lateral offset between the geometrical representation of the at least first lane marking and the detected road boundary, and defines a fictive outer boundary of at least a section of the road based on laterally shifting at least a section of the geometrical representation of the at least first lane marking the relative lateral offset.

Abstract: In a method for calibrating an interferometer (100) having a beam path for a measuring beam (112), wherein at least one plane (320) that at least partially reflects the measuring beam (112) has been introduced into the beam path, and wherein a normal to a first plane (320) is inclined at a first angle to a measuring beam (112) incident on the first plane (320), the following steps are carried out: interferometric measurement of a first axial spacing of a first point on the first plane (320) with the measuring beam (112), and interferometric measurement of a second axial spacing of a second point on one of the at least one plane (320) with the measuring beam (112), wherein the second point is spaced apart from the first point.

Abstract: A system and a method for validating states of one or more components of a vehicle are provided. The system includes circuitry that receives an event, determines associated priority level based on first mapping. The circuitry identifies the one or more components associated with the priority level based on a second mapping. The circuitry identifies one or more parameters associated with each of the one or more components, and generates a query message. The query message is a function of either the one or more components or the one or more parameters. The circuitry transmits the query message to the vehicle, and receives the values of the one or more parameters from the vehicle. The circuitry validates the state of one or more components by matching the values of the one or more parameters to corresponding stored values of the one or more parameters.

Abstract: A method for determining a location of a vehicle feature of a vehicle relative to an environmental feature located in an environmental zone of the vehicle feature includes: arranging a camera at the vehicle with a fixed orientation relative to the vehicle such that the vehicle feature and an environmental zone of the vehicle feature are disposed in the field of view of the camera; generating an index in the environmental zone of the vehicle feature for determining the location of the vehicle feature relative to an environmental feature located in the environmental zone; taking a measurement image that includes the vehicle feature, the index and an environmental feature located in the environmental zone of the vehicle feature; and determining the location of the vehicle feature relative to the environmental feature with reference to the position of the environmental feature relative to the index in the measurement image.

Abstract: A terminal device includes: an acquiring unit that acquires image information; a displaying unit that displays the image information acquired by the acquiring unit; a receiving unit that receives an analysis position of image-quality unevenness from the image information displayed by the displaying unit; a detecting unit that detects pitch information by performing frequency analysis of the image information received by the receiving unit; a controlling unit that controls the displaying unit to display the pitch information detected by the detecting unit; and a storing unit that stores, as history information, the image information and the pitch information in association with the analysis position. The controlling unit controls the displaying unit to display the analysis position stored in the storing unit.

Abstract: An apparatus and method for making a three-dimensional object from a solidifiable material using a linear solidification device is shown and described. In certain examples, the linear solidification device includes a laser diode that projects light onto a scanning device, such as a rotating polygonal mirror or a linear scanning micromirror, which then deflects the light onto a photohardenable resin. As a result, the linear solidification device scans a line of solidification energy in a direction that is substantially orthogonal to the direction of travel of the laser diode. In other examples, the linear solidification device is a laser device array or light emitting diode array that extends in a direction substantially orthogonal to the direction of travel of the array.

Abstract: An apparatus and method for making a three-dimensional object from a solidifiable material using a linear solidification device is shown and described. In certain examples, the linear solidification device includes a laser diode that projects light onto a scanning device, such as a rotating polygonal mirror or a laser scanning micromirror, which then deflects the light onto a photohardenable resin. As a result, the linear solidification device scans a line of solidification energy in a direction that is substantially orthogonal to the direction of travel of the laser diode. In other examples, the linear solidification device is a laser device array or light emitting diode array that extends in a direction substantially orthogonal to the direction of travel of the array.

Abstract: The present invention relates to a technology of controlling a vehicle using vehicle communication, and more particularly, to a technology of receiving, from an object vehicle or an infrastructure device, object vehicle surrounding information or infrastructure device surrounding information including lane information from the viewpoint of the object vehicle or lane information from the viewpoint of the infrastructure device, and then detecting the object vehicle on the basis of the received object vehicle surrounding information and the received infrastructure device surrounding information, thereby performing vehicle controls such as lane change assistance and lane change control.

Abstract: Provided are a method and apparatus for automatically determining defective equipment by using a sample defect map showing defect distribution in each cell of a defective sample and production history information of each product, wherein the defective sample is a set of products, each being divided into a plurality of cells. According to this invention, the method of determining defective equipment is provided.

Abstract: Methods and systems for detecting and reconstructing environments to facilitate robotic interaction with such environments are described. An example method may involve determining a three-dimensional (3D) virtual environment representative of a physical environment of the robotic manipulator including a plurality of 3D virtual objects corresponding to respective physical objects in the physical environment. The method may then involve determining two-dimensional (2D) images of the virtual environment including 2D depth maps. The method may then involve determining portions of the 2D images that correspond to a given one or more physical objects. The method may then involve determining, based on the portions and the 2D depth maps, 3D models corresponding to the portions. The method may then involve, based on the 3D models, selecting a physical object from the given one or more physical objects. The method may then involve providing an instruction to the robotic manipulator to move that object.

Abstract: Provided is a laser processing device capable of performing high-power laser processing while preventing reduction of life duration of a light source for excitation light. By collecting the light emitted from single emitters of a plurality of single emitter LDs onto one end face of an optical fiber cable, high-power excitation light is transmitted to a marking head through the optical fiber cable. Excitation light emitted from the other end face of the optical fiber cable is separated into first excitation light and second excitation light. The first excitation light excites a first laser medium to generate laser light. The generated laser light enters a second laser medium. The second excitation light enters the second laser medium. With this, the second laser medium is excited, and the laser light that has entered the second laser medium from the first laser medium is amplified.

Abstract: A solid-state image pickup device which is configured not to require transfer of signal charges between pixels performs TDI. An output control section 5 sequentially assigns a pixel signal output processing period to each pixel array group 10 in the order of the vertical direction at an interval of one horizontal processing period H obtained by dividing one frame period T into three. The one frame period T is a period when each pixel array 100 is moved in the vertical direction. An adder 50 sums up a pixel signal held in a signal holding portion 41_X, and a pixel signals held in a signal holding portion 41_R, 41_G, 41_B corresponding to the pixel signal under the control of the output control section 5, and outputs the summation result to an A/D converter 60.

Abstract: A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.

Abstract: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.

Abstract: A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established.

Abstract: The invention provides a laser scanner, comprising a main unit and a rotating unit rotatably mounted on the main unit, wherein the rotating unit has a deflection member for projecting the pulsed beams by deflecting the beams perpendicularly to center axis of the rotating unit. The main unit comprises a plurality of light emitting sources disposed in a two-dimensional arrangement for emitting a plurality of pulsed beams, an optical system for projecting and receiving the pulsed beams, a rotation angle detecting unit, a plurality of photodetectors for receiving a reflection light from an object via the deflection member and being disposed respectively at positions conjugate to the light emitting sources, a distance measuring unit for measuring a distance based on a photodetection signal from the photodetector, and a control arithmetic unit for calculating projecting directions of the pulsed laser beams projected from the deflection member.

Abstract: A verifier apparatus including a linear imaging unit for an iterative capturing and collecting of data sample sets of linear image data, along with a position value that is associated with each collected data sample set. A preferred method calls for a post processing of collected data sample sets and position values to yield imaging data representing a plurality of evenly spaced and parallel imaging lines, which may then be processed to determine one or more print quality attributes. This abstract is provided to comply with rules requiring abstracts, and is submitted with the intention that it will not be used to interpret or limit the scope and meaning of the claims.

Abstract: The object of the invention included in the present application is to automatically prevent the deterioration of the image even when the image quality of the projected image is deteriorated due to the replacement of the light source or the like. The following light beam scanning image projection apparatus is one means for achieving the object.

Abstract: The invention relates to a sensor arrangement for scanning a scanning area (16, 36) comprising a scanner (10, 30, 42, 54) that generates a scanning field (12) which is defined between two legs spaced from each other by a scanning angle (A), and which scanner is adapted to control at least one blocking means (18, 38, 50) for a passageway (32, 56), said passageway (32, 56) being delimited at least in its horizontal extension. The invention is characterized in that a scanner (10, 30, 42, 54) is mounted at a distance, as viewed in the passage direction (14), from the passageway (32, 56) and thus also from the controlled blocking means (18, 38, 50), and that the scanning field (12) is directed towards the passageway and extends through the passageway (32, 56).

Abstract: A system detects an object contour with an image acquisition assembly, the object moving relative to the assembly. A line detector scans the surface line by line during a scan cycle, the line being transverse to the relative motion direction. During active periods, a light source emits light synchronized with the scan cycle, allowing the line detector to acquire a first group of at least one lit scan line. A second group of unlit scan line(s) is acquired during non-emitting idle periods. The object passes between the line detector and the light source. A processor receives and analyzes acquired scan lines. For each lit scan line group and a successive second unlit scan line group, the processor identifies a token pattern with a lit segment adjoining an unlit segment. The processor searches the first and second groups for the token pattern ending or reappearing to produce an object contour.

Abstract: An image forming apparatus includes a sensor having a light emitting section for irradiating a detection area and a light receiving section for outputting a light sensitive signal indicative of the amount of the light received from the detection area. A sensor adjustment section adjusts the sensitivity of the sensor by varying the set value of an adjustable characteristic value associated with the sensitivity, based on explorative measurement of the adjustable characteristic value corresponding to a predetermined reference level of the light sensitive signal. If an estimation section estimates that the amount of a leakage current generated on the light receiving section is larger than a reference amount, a mitigation section mitigates the influence of the leakage current on the explorative measurement, by at least one of adjustment of the light receiving section for reduction of the leakage current and modification of the predetermined reference level.

Abstract: One aspect of the invention provides a substrate position detecting method for charged particle beam photolithography apparatus in order to be able to measure accurately and simply a substrate position on a stage.

Abstract: A method for scanning and measuring points of an object is provided. The method includes: (a) selecting a measuring start point and a measuring end point from an image of the object; (b) controlling a laser to move and scan the object from the measuring start point to the measuring end point with a predetermined distance according to X-axis coordinate values and Y-axis coordinate values of the measuring start point and the measuring end point to obtain scanned measuring points; (c) obtaining a vertical distance between each of the scanned measuring points and the laser; and (d) computing measuring results, namely computing a Z-axis coordinate value of each of the scanned measuring points according to the corresponding vertical distance. A related system is also provided.

Abstract: A scanning beam overlay projection system displays an image on a projection surface by scanning a light beam in a raster pattern. Reflective spots on the projection surface reflect light back to the projection system when illuminated by the light beam. A photodetector in the projection system detects the reflected light, and timing circuits determine where in the raster pattern the reflective spots are located. The image can be scaled and warped to correlate tagged points within the image with the locations of the reflective spots on the projection surface.

Abstract: An imaging system includes a two-dimensional detector having a plurality of cells wherein each cell is configured to detect energy or signal passing through an object. The imaging system includes a computer programmed to acquire imaging data for the plurality of cells, identify a cell to be corrected, based on the imaging data, interpolate Ix and Iy for the identified cell based on neighbor cells, and calculate local gradients gx and gy between the identified cell and its neighbor cells based on the interpolation. The computer is further programmed to calculate weighting factors wx and wy based on the local gradients, calculate a corrected final value I(0,0) for the identified cell, and correct the identified cell with the corrected final value.

Abstract: Specimen laser-scanning microscope with raster scanning illumination and detector modules, which illuminates and detects a specimen by raster scanning. A real-time control device (device) performs synchronous reading-out with the raster scanning pixel cycle. A data port serially communicates with the device using a bidirectional high-speed data stream and with the resources via a serial, bidirectional high-speed data stream with a data conversion to/from parallel to serial. The high-speed data stream is made up of data packets with data bits and type bits and no additional header or protocol bits. The data bits contain data from/on the resources and the type bits code the type of data. Type information is stored in the resources as well as the device. The type information defines processing functions for data types coded by the type bits, and the resources and/or the device determine the data type using type bits and process data coded in the data bits.

Abstract: A photo-detector circuit for barcode scanners, endoscopes, and the like, includes a large area PIN photo-diode and an amplifier. Adverse effects associated with a terminal capacitance from the large area PIN diode may be minimized by maintaining a relatively constant voltage across the input terminals of the amplifier. Noise levels may be minimized by the arrangement of the amplifier circuit and the large area PIN diode resulting in an increased signal-to-noise ratio and an increased gain-bandwidth product. Due to the large numerical aperture of the photo-detector, increased resolution and/or lower output power in a reflective imaging system may be obtained with relatively low cost components. Detection area of the large area PIN diode may be larger than approximately 25 mm2 when compared to typical PIN diodes used in photo-detector applications.

Abstract: A pattern generator may include an electromagnetic radiation source and an optical system. The electromagnetic radiation source may emit electromagnetic radiation to create a pattern on a workpiece. The optical system may include an optical path for the electromagnetic radiation emitted from the electromagnetic radiation source and may be configured such that an apodization of the electromagnetic radiation is sufficient to optimize a critical dimension linearity for the created pattern.

Abstract: A focusing method is provided for the high speed digitalization of microscope slides using an imaging device, wherein the slide is divided into fields of view according to the imaging device and focusing is performed. During rough focusing, several images are captured within the focus range using large focus steps. On the basis of this set of images the position of the best contrast is determined. Fine focusing is performed by adjusting the focus according to the focus distance already determined for another field of view and by focusing with fine steps. A slide displacing device is provided, which enables the displacement of a slide parallel to the optical axis. The slide displacing device includes slide holding elements affixed to one side of a supporting member having two parallel sides, which are connected by stiffening elements defining at least two parallel planes.

Abstract: A measuring apparatus for scanning moving, preferably sheet-like, printing materials in a printing material-processing machine, such as a press for processing sheet material. The apparatus has a measuring device which can be moved, at least in the transport direction of the printing materials. The measuring apparatus is set up in such a way that, during a measuring operation, the measuring device is moved over the moving printing material in the transport direction of the printing material with a differential speed relative to the transport speed of the printing material.

Abstract: Fabric wrinkles are automatically evaluated using a reliable, accurate, affordable, and efficient system. Two algorithms are used, the facet model algorithm and the plane-cutting algorithm, to extract features for evaluating wrinkles in fabrics. These algorithms eliminate the need for independent evaluation of a fabric specimen by a technician.

Abstract: A scan engine (15) includes illumination sources (48, 50) for projecting a light beam (40) upon a target object, a focusing lens (44) that receives a reflected light (34) of the target object and focuses a reflected image (35) as it passes through the focusing lens (44) along an optical axis (A-A), and a linear sensor (46) that receives the reflected image (35) from the focusing lens (44). The linear sensor (46) provides a signal (59) representing the reflected image (34). A circuit board (16) is integrally connected to the illumination sources (48, 50) and the linear sensor (46).

Abstract: A system for measuring an object and for monitoring the surface of the object. The system comprises at least a first subsystem for determining one or more dimensions of the object and a position of the object within the first subsystem, and at least a second subsystem for determining a surface structure of the object. Further, the system comprises a control unit generating control signals (iii) for operation of the second subsystem as a function of data (i) of the first subsystem with respect to a position of the object in the first subsystem and/or the dimension of the object, and of data (ii) of the second subsystem with respect to a position of the camera device in the second subsystem.

Abstract: An image reading apparatus includes a light source with a first luminescent portion that outputs light with a first wavelength range and a second luminescent portion that outputs light with a second wavelength range, the wavelength ranges being different from each other; a light-receiving portion that receives light reflected from an original irradiated by the light source; a scanning portion that shifts a reading position of the original in a vertical scanning direction by changing a relative position between the original and the light-receiving portion; a switching portion that alternately turns on the first and second luminescent portions when the scanning portion shifts the reading position, wherein a vertical scanning resolution for a first data obtained when the first luminescent portion is turned on is independently set from a vertical scanning resolution for a second data obtained when the second luminescent portion is turned on.

Abstract: A scan engine (15) includes illumination sources (48, 50) for projecting a light beam (40) upon a target object, a focusing lens (44) that receives a reflected light (34) of the target object and focuses a reflected image (35) as it passes through the focusing lens (44) along an optical axis (A-A), and a linear sensor (46) that receives the reflected image (35) from the focusing lens (44). The linear sensor (46) provides a signal (59) representing the reflected image (34). A circuit board (16) is integrally connected to the illumination sources (48, 50) and the linear sensor (46).

Abstract: Apparatus for simultaneously optically inspecting top and bottom surfaces of a workpiece comprise upper and lower test heads, each head comprising at least one laser for providing a laser beam that scans its associated workpiece surface and at least one detector for detecting reflected laser light. The directions of the laser beams are selected so as to reduce or prevent cross-talk interference between the upper and lower test heads.

Abstract: A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical module for providing a light source to scan the wafer edge, a light channel detector for detecting light reflected from the wafer edge, and a processor and memory for converting detected signals to digital form, and for filtering and processing the digital data. The module includes a wafer edge scanning mechanism for projecting a collimated laser beam toward the wafer edge at a predetermined angle of incidence to scan the wafer edge for defects. The light channel detector detects light reflected from the wafer edge to obtain wafer edge data, which are applied to thresholds to determine the location of defects in the wafer edge.

Abstract: A method and apparatus for improving system resolution for a defect line scanner while not increasing aliasing effects, or alternatively to maintain system resolution for a defect scanner while decreasing aliasing effects. This is accomplished by decreasing effective pixel size for a CCD array defect line scanner while not decreasing signal-to-noise ratio, with minimal changes to the current machine. The method utilizes a sampling phase shift between successive lines of a multi-line sensor array during scanning.

Abstract: A system and process for measuring paper formation characteristics in real time is disclosed. The system comprises apparatus used in a papermaking process, and includes a rotating forming fabric having an upper and lower surface. A paper slurry is deposited upon the upper surface of the moving forming fabric to prepare a wet paper web. The wet paper web typically moves at a high rate of speed as it rides along upon the surface of the forming fabric. Light is transmitted from a light source to the surface of the wet paper web, and then reflected from the surface of the wet paper web to a camera. An image is formed corresponding to the pattern of the reflected light, and in some instances data generated from the reflected light may be compared to other values to provide a feedback loop to adjust the parameters of the papermaking process in real time.

Abstract: The invention relates to connection of corresponding points measured by a computer vision system. The points are indicated by an illuminator (LASER), by means of which several points can be illuminated on the surface of the object at the same time. A camera system (CAM1, CAM2) measures the positions of the points. Using a data system (DTE), projection images are generated from a three-dimensional model of the object, in which images the positions of the points are calculated. To locate the actual point in the image perceived by the cameras, a search is performed in an area in the neighborhood of coordinates calculated from the point in the projection image. The point thus located can be connected to the perceptions of the other cameras by the aid of the projection images. After the corresponding points have been found, the actual three-dimensional coordinates of the measured point are calculated.

Abstract: An inspection system to inspect structures on a substrate. A generator directs a primary beam at the substrate along a selectable angle, thereby producing a secondary beam having properties that are characteristic of the structures on the substrate. At least one of the substrate and the primary beam are scanned relative to the other at a selectable speed. A sensor receives the secondary beam and provides analog signals having properties that are characteristic of the secondary beam. An analog to digital converter receives the analog signals and provides digital signals having properties that are characteristic of the analog signals. A controller receives the digital signals and determines the properties of the structures on the substrate based at least in part on the properties of the digital signals.

Abstract: In a picture reading device having a light emitting element that obliquely irradiates the surface of a paper with light, an area sensor that reads its irradiated area as a picture in which information related to a paper is read on the basis of the read results, the light irradiating element is arranged with an angle so as to irradiate the light from a direction oblique to a conveying direction of the paper. As a result, the picture reading device of the present invention eliminates such a problem that the same paper surface is received as a different image depending on the incident direction of the light, and the information related to an object to be read cannot be accurately read.

Abstract: Fabric wrinkles are automatically evaluated using a reliable, accurate, affordable, and efficient system. Two algorithms are used, the facet model algorithm and the plane-cutting algorithm, to extract features for evaluating wrinkles in fabrics. These algorithms eliminate the need for independent evaluation of a fabric specimen by a technician.

Abstract: An adaptive median filter (40) provides dynamic detection and correction of digital image defects which are caused by defective or malfunctioning elements of a radiation detector array (20). The adaptive median filter receives (100) lines of pixel values of a digital image that may have defects and a user-defined defect threshold. The lines of pixel values are scanned on a pixel-by-pixel basis using a kernel of n×n pixels, where the kernel contains the candidate pixel being examined (120). Each kernel is numerically reordered (130) and a median value is calculated (140). A defect threshold value is calculated by multiplying the user-defined defect threshold criteria and the candidate pixel value (150). A reference value is calculated by subtracting the candidate pixel value and the median value (160). The reference value is compared to the defect threshold value (170).

Abstract: In a pattern inspection apparatus inspecting a pattern formed on a device and the like with a plurality of inspection lights, a sensitivity adjustment method in which respective optical systems associated with the inspection lights are efficiently and precisely checked to adjust the sensitivity thereof is attained. The sensitivity adjusting method for adjusting sensitivity of the pattern inspection apparatus performing inspection with a plurality of inspection lights includes the steps of preparing a sensitivity adjusting substrate divided into a plurality of regions to which identical reference patterns are provided, and scanning the reference patterns with the plurality of inspection lights making one of the plurality of inspection lights respectively correspond to one of the reference patterns, after attaching the sensitivity adjusting substrate to the pattern inspection apparatus.

Abstract: The invention relates to a device for sintering, removing material and/or labeling by means of electromagnetically bundled radiation, especially a laser sintering machine and/or a laser surface-processing machine. The device comprises a construction space (3) which is accommodated in a machine housing (2) and in which the following are provided: a scanner (4), into which the beam (5) of a sintering laser (6) is coupled; a vertically displaceable workpiece platform (7); and a material supply device comprising a coater for supplying sintering material in powder, paste or liquid form to the process area above the workpiece platform, from a supply container. Said scanner (4) is arranged on a scanner support (8) which can be displaced by a motor over the workpiece platform (7) in the manner of a cross-slide.