Abstract: One aspect of the invention provides a substrate position detecting method for charged particle beam photolithography apparatus in order to be able to measure accurately and simply a substrate position on a stage.

Abstract: An apparatus for measuring erosion of an edge of an aerofoil portion of a fan blade includes a laser source to direct light at a position on the edge of the fan blade. A detector detects light reflected from the position on the edge of the fan blade. A computer measures the distance from the laser source to points on the edge of the fan blade to produce a profile of the edge in terms of x and z coordinates. The computer calculates the distances of points on the edge of the fan blade from a centroid of the profile. The computer detects peaks in the distance of points from the centroid of the profile. The computer selects two peaks with the greatest distance therebetween. The computer determines the distance between the two peaks and compares the determined distance and a predetermined distance to determine if there is unacceptable erosion.

Abstract: Disclosed are systems and methods for determining the shape of a glass sheet during and/or after the forming process. In one example, a system for determining the shape of a glass sheet defining an interior bulk can include a light source, an image capture device and a processor that are configured to calculate the location of an energy centroid within a selected portion of the bulk of the glass sheet.

Abstract: A material web attribute detection system with the material web having a first side and a second side. The system includes a radiation source located proximate to the first side of the material web and emitting radiation toward the material web, and a radiation detection array located proximate to the second side of the material web and producing a plurality of signals based on the radiation detected from the radiation source. A processor is included which utilizes the plurality of signals to determine a lateral offset and a gap size of the radiation detection array relative to the radiation source. The processor can then compensate for the radiation detection array and radiation source relative misalignment using the plurality of signals, the lateral offset and the gap size.