Measuring Position Patents (Class 250/559.29)
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Patent number: 12055165Abstract: A method is provided for detecting and quantifying obstructions in a gas network under pressure or vacuum. The gas network may be provided with a sensor(s) capable of recording the status of a source(s), consumers, or consumer areas. The method includes: a possible start-up phase; a baseline or zero phase; and an operational phase. The operational phase includes: reading out the first group and second group of sensors; re-estimating, determining or calculating the physical model or mathematical relationship on the basis of the read measurements from the sensors; determining or calculating of the existence of an obstruction in the system based on the difference and/or its derivatives between the parameters of the physical model or mathematical relationship as determined during the baseline or zero phase and the operational phase; generating an alarm and/or generating a degree of obstruction and/or generating the corresponding obstruction if an obstruction is detected.Type: GrantFiled: November 28, 2019Date of Patent: August 6, 2024Assignee: ATLAS COPCO AIRPOWER, NAAMLOZE VENNOOTSCHAPInventors: Philippe Geuens, Ebrahim Louarroudi
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Patent number: 11945114Abstract: The method for increasing the accuracy of grasping an object can include: labelling an image based on an attempted object grasp by a robot and generating a trained graspability network using the labelled images. The method can additionally or alternatively include determining a grasp point using the trained graspability network; executing an object grasp at the grasp point S400; and/or any other suitable elements.Type: GrantFiled: December 9, 2022Date of Patent: April 2, 2024Assignee: Intrinsic Innovation LLCInventors: Ahmad Humayun, Michael Stark, Nan Rong, Bhaskara Mannar Marthi, Aravind Sivakumar
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Patent number: 11495482Abstract: There is provided a method of automatically supervising a transfer operation of a transfer device including an optical sensor, the optical sensor having a light emitting part and a light receiving part provided in a head of a holding part for holding a substrate, the method including: acquiring a change in intensity of a first reflected light reflected off a first object by radiating a light from the light emitting part toward the first object below the holding part and receiving the first reflected light reflected off the first object by the light receiving part, while horizontally moving the holding part; and specifying an end position of the first object based on the change in intensity of the first reflected light.Type: GrantFiled: June 14, 2019Date of Patent: November 8, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Yoichi Amano, Kota Tanabe
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Patent number: 11473135Abstract: Disclosed herein is a multiplexed design with three-dimensional plasmonic nanofocusing and confinement of light, demonstration of reproducible and robust single-molecule optical fingerprints using two complementary vibrational spectroscopy techniques (infrared and Raman spectroscopy), identification of respective vibrational modes which uniquely fingerprint the biomolecular species, and facile differentiation of respective fingerprints in DNA mixtures, as well as epigenetic modifications. While the nanometer scale mode volumes still prevent single letter identification of DNA sequence, we show an alternative method for identifying A, T, G, C DNA nucleotides in “k-mers” using sequences of these blocks as a unique and high-throughput alternative to single letter sequences (similar to binary and hexadecimal systems). Furthermore, additivity shown in single-molecule DNA mixtures and robust optical signatures can also be used in a raster-type step scan to identify single letter sequences.Type: GrantFiled: December 6, 2018Date of Patent: October 18, 2022Assignee: THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATEInventors: Prashant Nagpal, Manjunatha Sagar Dodderi
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Patent number: 11370633Abstract: A sheet sorting apparatus includes a first tray detachable from an apparatus main body, a second tray arranged below the first tray, a discharge unit to discharge a sheet to the first or second tray, a tray detecting unit to detect that the first tray is detached from the apparatus main body, a full stack detecting unit to detect a fully stacked condition of the first tray, and a control unit to control the discharge unit. In a case where the tray detecting unit detects that the first tray is detached from the apparatus main body, the control unit controls the discharge unit not to discharge a sheet to the second tray when a number of sheets discharged to the second tray reaches a threshold number of sheets, even though the full stack detecting unit does not detect the fully stacked condition.Type: GrantFiled: April 17, 2020Date of Patent: June 28, 2022Assignee: Canon Kabushiki KaishaInventors: Kazuhisa Sato, Genki Takahashi
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Patent number: 11358283Abstract: Provided is a robot calibration method for calibrating a position of an arm tip of a robot, the method including measuring a relative positional relationship between a first link and a second link on opposite ends of at least three links which are connected to each other so as to execute collective calibration for at least two joint axes between the at least three links, measuring a relative positional relationship between a base and a link connected to the base to execute independent calibration for a joint axis between the base and the link, or measuring a relative positional relationship between the first link and another link as to execute independent calibration for a joint axis between the first link and the other link, and calibrating the position of the arm tip based on the collective and the independent calibrations.Type: GrantFiled: February 6, 2020Date of Patent: June 14, 2022Assignee: FANUC CORPORATIONInventor: Jiang Hangjie
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Patent number: 11344022Abstract: Plant eradication and stressing of plants using illumination signaling where a short-time dual component, low energy, unnatural set of irradiances is applied, with no mutagenic or high radiative energy transfers in any wavelength for eradication by substantial high temperature thermally-induced leaf and plant component failure or incineration. An Indigo Region Illumination Distribution of wavelength 300 nm to 550 nm is directed to plant foliage and/or a plant root crown, while infrared radiation that is substantially Medium Wavelength Infrared radiation of 2-20 microns wavelength, 2.4-8.0 microns preferred, is directed to a plant root crown and/or soil immediately adjacent the root crown. The Indigo Region Illumination Distribution can pass through the MWIR emitter to form a compact illuminator. The MWIR emitter can comprise borosilicate glass at 400° F. to 1000° F.Type: GrantFiled: October 21, 2018Date of Patent: May 31, 2022Assignee: Global Neighbor, Inc.Inventors: Jonathan A Jackson, Christopher Hoffman, Norman Novotney, Joseph Carroll, Patrick A Jackson, Mark J Elting
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Patent number: 11232595Abstract: Implementations facilitate the calibration of cameras in a live action scene. In some implementations, a system includes a base, where the base is configured to removably couple to a camera in the live action scene. The system further includes a plurality of extensions coupled to the base, where the plurality of extensions extends outwardly away from the base. The system further includes a plurality of reference points identifiable by a sensor, where the reference points are coupled to ends of corresponding extensions of the plurality of extensions, and where the plurality of extensions positions the plurality of reference points in a three-dimensional arrangement. Distances between pairs of reference points are based on one or more aspects of the extensions, and the distances between the pairs of reference points are used to compute reference point data generated from a performance capture system.Type: GrantFiled: August 30, 2021Date of Patent: January 25, 2022Assignee: WETA DIGITAL LIMITEDInventors: Dejan Momcilovic, Jake Botting
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Patent number: 11204549Abstract: An apparatus may include a superstrate. The superstrate may have a body with a first side, a second side opposite the first side, and a first diameter. The superstrate may also include a mesa on the first side of the body. The mesa may have a second diameter. The center point of the body can be different from the center point of the mesa.Type: GrantFiled: October 26, 2018Date of Patent: December 21, 2021Assignee: CANON KABUSHIKI KAISHAInventor: Steven C. Shackleton
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Patent number: 11137124Abstract: An anti-glare headlamp for a motor vehicle, including a large number of light units, each of the light units having: a light source element, which is configured to emit light along a first optical axis in the direction of a space; a projection optic, which is disposed behind the light source element in the direction of the emitted light and is configured to project the light emitted by the light source element into the space at a solid angle; and a photodetector, which is situated in front of the projection optic in the direction of the emitted light and is configured to detect the light projected into the space by the projection optic and reflected from an object in the space, along a second optical axis back to the projection optic.Type: GrantFiled: September 10, 2020Date of Patent: October 5, 2021Assignee: Hella GmbH & Co. KGaAInventors: Christian Haase, Julien Hansen
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Patent number: 11117174Abstract: The invention relates to a positionable robotic cell for placement at a bending machine. The robotic cell comprises a frame for receiving the robot and a receiving device for a workpiece as well as a positioning device for repositioning the robotic cell. Moreover, a first sensor device is provided for recognizing the position of the robotic cell relative to the manufacturing device. The invention furthermore relates to a production facility with a bending machine and with such a robotic cell as well as a method for operating such a robotic cell at a bending machine.Type: GrantFiled: October 18, 2017Date of Patent: September 14, 2021Assignee: BYSTRONIC LASER AGInventor: Christian Stein
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Patent number: 11100659Abstract: One exemplary implementation facilitates object detection using multiple scans of an object in different conditions. For example, a first scan of the object can be created by capturing images of the object by moving an image sensor on a first path in a first condition, e.g., bright lighting. A second scan of the object can then be created by capturing additional images of the object by moving the image sensor on a second path in a second condition, e.g., dim lighting. Implementations determine a transform that associates the scan data from these multiple scans to one another and use the transforms to generate a 3D model of the object in a single coordinate system. Augmented content can be positioned relative to that object in the single coordinate system and thus will be displayed in the appropriate location regardless of the condition in which the physical object is later detected.Type: GrantFiled: July 1, 2019Date of Patent: August 24, 2021Assignee: Apple Inc.Inventors: Vincent Chapdelaine-Couture, Mohamed Selim Ben Himane
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Patent number: 11086232Abstract: A resonant amplitude grating mark has a periodic structure configured to scatter radiation incident on a surface plane of the alignment mark. The scattering is mainly by excitation of a resonant mode in the periodic structure parallel to the surface plane. The effective refractive indexes and lengths of portions of the periodic structure are configured to provide an optical path length of the unit cell in the direction of periodicity that equals an integer multiple of a wavelength present in the spectrum of the radiation. The effective refractive indexes and lengths of the portions are also configured to provide an optical path length of the second portion in the direction of periodicity that is equal to half of the wavelength present in the spectrum of the radiation.Type: GrantFiled: August 23, 2018Date of Patent: August 10, 2021Assignee: ASML Netherlands B.V.Inventors: Beniamino Sciacca, Sanjaysingh Lalbahadoersing, Jia Wang
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Patent number: 11031266Abstract: A method includes disposing a wafer carrier onto a load port; detecting, by a first sensor in the wafer carrier, an elevation of a slot in the wafer carrier; adjusting an elevation of a wafer transferring device according to the detected elevation of the slot; and moving, at the adjusted elevation of the wafer transferring device, a wafer to the slot by the wafer transferring device.Type: GrantFiled: June 21, 2019Date of Patent: June 8, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Hung Liao, Shiao-Ching Wu, Jun-Xiu Liu
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Patent number: 10923377Abstract: There is provided a load port provided to a loading/unloading port of a semiconductor-processing apparatus to transfer a semiconductor wafer, including: a FOUP support configured to support a FOUP that includes a FOUP lid and move the FOUP in a front-rear direction with respect to the loading/unloading port; a lid configured to open and close the loading/unloading port; a FOUP lid sensor provided to perform a detection operation between a position of the lid in a closed state and a position of the FOUP lid when unloading is normally completed by retreating the FOUP by a predetermined distance with respect to the loading/unloading port; and an observer configured to observe that the FOUP lid sensor has performed the detection operation after the unloading is completed.Type: GrantFiled: October 3, 2019Date of Patent: February 16, 2021Assignee: Sinfonia Technology Co., Ltd.Inventor: Toshimitsu Morihana
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Patent number: 10895449Abstract: A shape measuring device includes a holding unit which holds a measuring target of which a shape is to be measured, a first measurement unit which measures relative coordinates of a plurality of measurement points on a first surface of the measurement target with respect to a defined point, a second measurement unit which operates independently from the first measurement unit and measures relative coordinates of a plurality of measurement points on a second surface of the measurement target, which is a reverse surface of the first surface, with respect to the defined point, and a calculation unit which calculates a shape of the measurement target on the basis of results measured by the first measurement unit and the second measurement unit.Type: GrantFiled: October 15, 2019Date of Patent: January 19, 2021Assignee: Mitutoyo CorporationInventors: Kentaro Nemoto, Masaoki Yamagata, Ryohei Kanno, Hiroaki Kawata
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Patent number: 10879101Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.Type: GrantFiled: December 5, 2016Date of Patent: December 29, 2020Assignee: Brooks Automation, Inc.Inventor: Leigh F. Sharrock
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Patent number: 10853645Abstract: A method for remote visual inspection of a target surface of a structure, comprising positioning an inspection unit at a fixed location, the inspection unit comprising a combination of dynamic digital video cameras and an optic supported by a pitch axis of a multi-axis assembly comprising three moveable axis, including a vertical axis, a roll axis connected to the vertical axis, and the pitch axis, the pitch axis being connected to the roll axis; and a controller connected to the combination and the multi-axis assembly; adjusting the positioned inspection relative to the target surface; calibrating a target surface of the structure; taking images of the calibrated surface of the structure, each image including at least position data of the target surface and angular data of the inspection unit; and detecting, in the images, defects on the target surface, and, from the position data and angular data, positioning the defects on the target surface and determining the dimensions of the defects.Type: GrantFiled: May 16, 2019Date of Patent: December 1, 2020Inventors: Guillaume Lambert, Matias Arbeleche, Jean-Christophe Demers, Nicolas Morency, Germain Bélanger, Guillaume Huet
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Patent number: 10805492Abstract: An image reading device includes at least one reference portion that is provided in a reading area of a reading unit provided with a moving mechanism, a memory unit that stores, as an initial value, positional data of the reference portion that is read by the reading unit, an acquisition unit that reads the positional data of the reference portion and acquires a displacement amount of the read positional data from the initial value, and an error handling unit that performs error handling when the displacement amount exceeds a predetermined value.Type: GrantFiled: February 12, 2019Date of Patent: October 13, 2020Assignee: FUJI XEROX CO., LTD.Inventors: Masaki Hachisuga, Shota Funaki
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Patent number: 10630920Abstract: An image processing apparatus includes a pixel value acquisition circuit configured to acquire pixel values from image data that is generated by an imaging device including a detection pixel, and a pixel specification circuit configured to specify a flare-affected pixel that is affected by flare.Type: GrantFiled: April 5, 2018Date of Patent: April 21, 2020Assignee: Olympus CorporationInventor: Takuya Matsunaga
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Patent number: 10575906Abstract: Systems and methods that utilize optical sensors and non-optical sensors to determine the position and/or orientation of objects. A navigation system includes an optical sensor for receiving optical signals from markers and a non-optical sensor, such as a gyroscope, for generating non-optical data. A navigation computer determines positions and/or orientations of objects based on optical and non-optical data.Type: GrantFiled: May 19, 2017Date of Patent: March 3, 2020Assignee: Stryker CorporationInventor: Chunwu Wu
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Patent number: 10488761Abstract: According to one embodiment, there is provided an exposure apparatus, including a focus detecting system, a stage, and a controller. On the stage, a substrate is to be mounted. The controller performs focus measurement on an incomplete shot area, part of which is outside a pattern forming area of the substrate, by the focus detecting system. The controller obtains amounts of defocus of a plurality of planes that are candidates for approximating the incomplete shot area according to the result of measuring the incomplete shot area. The controller decides on a plane to approximate the incomplete shot area from among the plurality of planes according to the amounts of defocus of the plurality of planes. The controller drives the stage using a focus-leveling value according to the decided-on plane so as to control a surface position of the incomplete shot area.Type: GrantFiled: March 1, 2018Date of Patent: November 26, 2019Assignee: Toshiba Memory CorporationInventor: Yoshimitsu Kato
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Patent number: 10466422Abstract: An optical device includes a first waveguide having a longitudinal axis and a first end facet inclined at a non-normal angle to the longitudinal axis, and a second waveguide, which has a second end facet and is fixed with the second end facet in proximity to and parallel with the first end facet. An actuator is coupled to move the first end facet of the first waveguide in a direction transverse to the longitudinal axis between a first position in which a distance between the first and second end facets is less than 25 nm, and a second position in which the distance between the first and second end facets is greater than 300 nm.Type: GrantFiled: May 16, 2018Date of Patent: November 5, 2019Assignees: Mellanox Technologies, Ltd., Yissum Research Development Company of the Hebrew University LTD.Inventors: Eran Aharon, Dan Mark Marom, Elad Mentovich
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Patent number: 10420279Abstract: The invention relates to a system for adjusting the height of an agricultural implement, including an arm that can be controlled so as to raise and lower the implement; a height measuring sensor mounted on the arm and positioned in front of the implement in the direction of travel of the vehicle equipped with the arm. A calculator configured to provide a control set point for the height of the arm on the basis of the measurements obtained by the sensor, wherein the sensor is a light screen device formed by an emitter in the form of a column of light sources and a receiver in the form of a column of photoreceptors. The emitter and the receiver are mounted on the arm facing one another and extending along their longitudinal axis, perpendicularly to the ground, in order to measure the height of plants located therebetween.Type: GrantFiled: December 2, 2015Date of Patent: September 24, 2019Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Nolwenn Briquet-Kerestedjian, Frederic Colledani, Baptiste Lelong
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Patent number: 10354138Abstract: A method and a system for remote visual inspection of a target surface of a structure, the system comprising a multi-axis assembly; a combination of dynamic digital video cameras and optic supported by said multi-axis assembly; and a controller connected to the cameras and the multi-axis assembly; wherein the multi-axis assembly comprises a turret along a vertical axis, the turret being connected at a top part thereof to a first arm extending along a roll axis, the first arm being connected to a second arm along a pitch axis, the cameras and optic being carried by the second arm.Type: GrantFiled: June 18, 2013Date of Patent: July 16, 2019Assignees: COLLINEO INC., INNERGEX CARTIER ÉNERGIE SECInventors: Guillaume Lambert, Matias Arbeleche, Jean-Christophe Demers, Nicolas Morency, Germain Bélanger, Guillaume Huet
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Patent number: 10337914Abstract: A sensor configured for sensing motion information, illumination information, and proximity information is provided. The sensor includes a light sensing module configured to sense a change in an intensity of light, a filtering module configured to filter light incident to the light sensing module by using a plurality of filters, and a processor configured to process information associated with an intensity of light passing through the filters.Type: GrantFiled: August 17, 2015Date of Patent: July 2, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sung Ho Kim, Junseok Kim, Jun Haeng Lee, Eric Hyunsurk Ryu, Yunjae Suh
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Patent number: 10267725Abstract: Apparatus for measuring surface profiles within passages such as the interiors of pipes, tubing, casing or the like includes an optical scanning system that acquires digital data that directly identifies the surface profiles. A temperature control system facilitates operation in high temperature environments. The optical scanning system may include a camera located between a light source and a conical mirror. Light deflecting elements may guide light from the light source to the conical mirror along a path that reverses direction.Type: GrantFiled: May 23, 2018Date of Patent: April 23, 2019Assignee: Evolution Engineering Inc.Inventors: John Howard Keightley, Adriano Goncalves Cunha
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Patent number: 10228461Abstract: A system for detecting labels arranged on a support and spaced apart from one another by a spacing, the system including a transmitter part including a transmitter arranged to transmit a beam of ultrasonic waves towards the support which carries the labels, a receiver part, separated from the transmitter part, such that the support carrying the labels can pass along a plane located between the transmitter part and the receiver part, the transmitter part or the receiver part being arranged so that the beam of ultrasonic waves transmitted by the transmitter covers, on the support carrying the labels, a total surface area in which the surface area occupied by the spacing between two labels is greater than the surface area occupied by the labels.Type: GrantFiled: November 2, 2016Date of Patent: March 12, 2019Assignee: SCHNEIDER ELECTRIC INDUSTRIES SASInventor: Benoit Laforest
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Patent number: 10228284Abstract: A device, and corresponding method, can include a pump light source configured to be modulated at a pump modulation and to irradiate a target specimen. The device can also include a probe light source arranged to generate a speckle pattern from the target specimen, as well as a sensor configured to detect changes in at least one of position and intensity of one or more speckle lobes of the speckle pattern having correlation with the pump modulation. The device and method can be used for non-contact monitoring and remote sensing of surfaces, gases, liquids, particles, and other target materials by analyzing speckle pattern changes as a function of pump light irradiation. Advantages can include much higher sensitivity than existing methods; the ability to use visible probe wavelengths for uncooled, low-cost visible detectors with high spatial resolution; and the ability to obtain target material properties without detecting infrared light.Type: GrantFiled: June 20, 2016Date of Patent: March 12, 2019Assignee: Massachusetts Institute of TechnologyInventors: Thomas H. Jeys, William D. Herzog, Brian G. Saar, Alexander M. Stolyarov, Ryan Sullenberger, David Crompton, Shawn Michael Redmond
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Patent number: 10222200Abstract: Turbine blade-tip clearance is measured in a fully assembled turbine casing by mounting a probe tip of a non-contact displacement probe in an inspection port of a vane cavity at a known distance relative to the inner circumferential surface of the corresponding ring segment. The displacement probe generates displacement samples that are indicative of probe tip distance from the turbine blade tip. Variations in probe distance data are recorded as the blade circumferentially sweeps the turbine casing. A data processing system correlates the distance data with localized blade-tip clearance gap. In some embodiments, blade rotational position data are collected by a rotational position sensor. In those embodiments, the data processing system correlates the distance and rotational position data with localized blade tip gap at angular positions about the turbine casing circumference.Type: GrantFiled: May 12, 2017Date of Patent: March 5, 2019Assignee: SIEMENS ENERGY, INC.Inventors: Clifford Hatcher, Jr., James P. Williams, Mahmood K. Silieti
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Patent number: 10117385Abstract: Disclosed is a method and apparatus for selective photomorphogenesis of plants by directly illuminating the plant stem or other plant structures using various wavelengths of light and various light sources. The methods and apparatus disclosed can be used in commercial agriculture, plant breeding research programs, genetically engineered plant research and development programs or anytime a plant grower desires to maximize the volumetric efficiency or reduced the height of a plant.Type: GrantFiled: March 1, 2013Date of Patent: November 6, 2018Inventor: Thomas Jenner
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Patent number: 9989347Abstract: A series of nominally identical workpieces is received from a manufacturing process and measured on a measuring apparatus. They are received at a non-ambient temperature because of heat introduced during the manufacturing process, but they are placed on the measuring apparatus in a repeatable manner, e.g. by a robot, such that their non-ambient temperatures when measured are repeatable. One of the workpieces is measured as a reference workpiece at the non-ambient temperature, and these measurements are compared to calibrated values obtained from an external source, in order to generate an error map or error function. The error map or error function is used to correct measurements of subsequent workpieces of the series which are measured at the repeatable non-ambient temperature.Type: GrantFiled: May 12, 2014Date of Patent: June 5, 2018Assignee: RENISHAW PLCInventors: Kevyn B Jonas, Ingrid M Östin
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Patent number: 9986153Abstract: The technology disclosed relates to adjusting the monitored field of view of a camera and/or a view of a virtual scene from a point of view of a virtual camera based on the distance between tracked objects. For example, if the user's hand is being tracked for gestures, the closer the hand gets to another object, the tighter the frame can become—i.e., the more the camera can zoom in so that the hand and the other object occupy most of the frame. The camera can also be reoriented so that the hand and the other object remain in the center of the field of view. The distance between two objects in a camera's field of view can be determined and a parameter of a motion-capture system adjusted based thereon. In particular, the pan and/or zoom levels of the camera may be adjusted in accordance with the distance.Type: GrantFiled: September 8, 2017Date of Patent: May 29, 2018Assignee: Leap Motion, Inc.Inventor: David S. Holz
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Patent number: 9975255Abstract: The disclosed embodiments are and include at least an apparatus, system and method for providing a vacuum grip for an end effector. The apparatus, system and method may include at least a vacuum draw eyelet connectively associated with a vacuum at a base portion thereof, and having a larger cross-sectional circumference at a topmost portion thereof than at the base portion; an extending cup foam portion including a receiving portion suitable for receiving therewithin the larger cross-sectional circumference of the topmost portion; and a wire clip having two legs inserted along a cross-sectional plane of the extending cup foam portion, the two legs being suitable to compress the receiving portion into frictional contact at two tangent points on a second cross-sectional circumference of the vacuum draw eyelet below the larger cross-sectional circumference.Type: GrantFiled: December 15, 2016Date of Patent: May 22, 2018Assignee: Jabil Inc.Inventors: Jeroen Bosboom, Richard Munro, Tatiana Pankova Major
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Patent number: 9941177Abstract: A pattern accuracy detecting apparatus includes a stage for supporting a substrate, an optical warpage detecting unit that measures a shape of a substrate disposed on the stage, an optical pattern detection unit that detects a position of a pattern on the substrate, and a processing unit that corrects the detected pattern position based on the measured shape of the substrate.Type: GrantFiled: August 31, 2016Date of Patent: April 10, 2018Assignee: Toshiba Memory CorporationInventors: Kentaro Kasa, Kazuya Fukuhara, Kazutaka Ishigo, Manabu Takakuwa, Yoshinori Hagio, Kazuhiro Segawa, Yuki Murasaka, Tetsuya Kugimiya, Yuu Yamayose, Yosuke Okamoto
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Patent number: 9891046Abstract: An absolute encoder includes a light-emitting mechanism including a light-emitting surface and emitting detection light from the light-emitting surface. A light-receiving mechanism including a scale plate having a scale area and receiving at a light-receiving area the detection light emitted from the light-emitting surface and passing through the scale area of the scale plate. The light-emitting mechanism and the light-receiving mechanism are set to a positional relationship that inclines an irradiation axis extending from the light-emitting surface through the scale area to the light-receiving area relative to a rotation axis direction of the scale plate.Type: GrantFiled: August 6, 2015Date of Patent: February 13, 2018Assignee: Kabushiki Kaisha TOPCONInventor: Satoshi Yanobe
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Patent number: 9813674Abstract: A photography system includes: an observation scope inserted into a hole of a case in which a plurality of sets of subject groups, each of which includes a plurality of subjects that are cyclically disposed around a rotary shaft and rotate around the rotary shaft, are housed along with the rotary shaft and a plurality of holes are formed to penetrate through the case and configured to sequentially acquire light from the plurality of subjects included in one set of subject groups among the plurality of sets of subject groups; an imaging section configured to continuously image light acquired by the observation scope to generate an image in a state in which the plurality of sets of subject groups rotate; and a display section configured to display the image generated by the imaging section.Type: GrantFiled: March 4, 2014Date of Patent: November 7, 2017Assignee: OLYMPUS CORPORATIONInventors: Fumio Hori, Eiichi Kobayashi, Yutaka Konomura
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Patent number: 9786530Abstract: A wafer transfer method includes the following steps. An initial position of a first wafer in a wafer cassette is detected. A picking entry position in the wafer cassette is determined based on the initial position of the first wafer, in which the picking entry position is spaced apart from the initial position of the first wafer. A wafer transfer blade is moved to the picking entry position.Type: GrantFiled: October 20, 2014Date of Patent: October 10, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo
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Patent number: 9774755Abstract: According to exemplary scanning devices herein, a platen has a sheet side and a scanner side, opposite the sheet side. A scanner is located on the scanner side of the transparent platen. The platen has a constant velocity transport (CVT) scanning position at an end of the platen. A portion of the platen, located at the CVT scanning position of the platen has integral transparent electrodes and incorporates a polymer/liquid crystal filler material that is white in a first state and transparent in a second state. A scanner is located on the scanner side of the platen. A controller is electrically connected to the electrodes. The controller controls the state of the polymer/liquid crystal filler material during scanning of a document and during white calibration of the scanner.Type: GrantFiled: April 29, 2016Date of Patent: September 26, 2017Assignee: Xerox CorporationInventors: Sebastian Rodrigo de Echaniz, Michael John Wilsher, Paul Simon Golding, Benjamin Thomas Thurnell
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Patent number: 9713232Abstract: A method of determining a distance from a first luminaire (22) to a second luminaire (22) comprises causing a light source co-located with the second luminaire to emit light directed towards a reflecting surface (A). The method further comprises detecting a level of reflected light from the reflecting surface using a sensor co-located with the first luminaire (22), and accessing a reflectance value determined for the reflecting surface (A). The method further comprises modifying the level of reflected light to take into account the accessed reflectance value, and using the modified measure to provide a measure of a distance between the first and second luminaires.Type: GrantFiled: September 1, 2014Date of Patent: July 18, 2017Assignee: PHILIPS LIGHTING HOLDING B.V.Inventors: Martinus Petrus Creusen, Alexander James
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Patent number: 9595107Abstract: A distance measurement apparatus which outputs a plurality of spot beams in a grid-like pattern from a laser device to a target object and measures a distance to the target object based on image data of the plurality of spot beams, the apparatus includes a distance measurement unit configured to obtain the distance to the target object based on positions of the plurality of spot beams in the image data; and a control unit configured to perform, based on the image data, when a size of each of the spot beams is larger than a reference size, either one or both of a first control operation of reducing a diameter of laser light output from the laser device and a second control operation of increasing a shutter speed of an image sensing device which generates the image data.Type: GrantFiled: October 31, 2013Date of Patent: March 14, 2017Assignee: SOCIONEXT INC.Inventor: Satoshi Nishimura
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Optical touch system, method of touch detection, method of calibration, and computer program product
Patent number: 9569028Abstract: An optical touch system including a reflecting unit, at least one light emitting module, at least one image detecting module, and a processing unit is provided. The reflecting unit, the light emitting module, and the image detecting module are disposed beside a base plane. The light emitting module provides a first detecting light and a second detecting light with different intensities by turns. The first detecting light and the second detecting light are transmitted to the reflecting unit. The image detecting module generates a first signal and a second signal. When an object approaches or touches the base plane, at least a portion of the first detecting light and a portion of the second detecting light are obstructed by the object. The processing unit determines a position of the object. Additionally, a method of touch detection, a method of calibration, and a computer program product are also provided.Type: GrantFiled: October 21, 2013Date of Patent: February 14, 2017Assignee: Wistron CorporationInventor: Yu-Yen Chen -
Patent number: 9551566Abstract: Provided is a coordinate measuring device which can easily perform accurate measurement. A coordinate measuring device is provided with a sub-imaging unit, a display unit, and a probe. The probe includes a stylus. The stylus has a contact part that is brought into contact with a measurement target in order to measure the measurement target. The sub-imaging unit is provided in the probe so as to have constant positional relationships, and captures an image of at least part of the measurement target. The image of the measurement target obtained by the sub-imaging unit is displayed as a captured image on the display unit. Based on calculated positions of the probe and the positional relationships of the sub-imaging unit, an image showing a measurement position on the measurement target, with which the contact part is to be brought into contact, is displayed on the captured image.Type: GrantFiled: April 29, 2015Date of Patent: January 24, 2017Assignee: Keyence CorporationInventor: Tatsuro Wakai
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Patent number: 9536311Abstract: A method and system that include an imaging device configured to capture image data of the vehicle. The vehicle includes one or more components of interest. The method and system include a memory device configured to store an image detection algorithm based on one or more image templates corresponding to the one or more components of interest. The method and system also includes an image processing unit operably coupled to the imaging device in the memory device. The image processing unit is configured to determine one or more shapes of interest of the image data using the image detection algorithm that correspond to the one or more components of interest, and determine one or more locations of the one or more shapes of interest respective to the vehicle.Type: GrantFiled: September 29, 2014Date of Patent: January 3, 2017Assignee: General Electric CompanyInventors: Guiju Song, Charles Burton Theurer, Tai-Peng Tian, Balajee Kannan, Arpit Jain
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Patent number: 9514974Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.Type: GrantFiled: July 8, 2014Date of Patent: December 6, 2016Assignee: Brooks Automation Inc.Inventor: Leigh F. Sharrock
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Patent number: 9499185Abstract: A multimodal guideway vehicle sensor includes a passive sensor, an active sensor and an unique identification (ID) sensor. The passive sensor is configured to receive and detect a first electromagnetic radiation from a guideway vehicle. The active sensor configured to transmit a second electromagnetic radiation and receive and detect the second electromagnetic radiation reflected from the guideway vehicle. The ID sensor that detects an ID associated with the guideway vehicle. The multimodal guideway vehicle sensor also includes a data fusion center that combines signals from the passive sensor, the active sensor and the ID sensor to produce guideway vehicle information about the guideway vehicle.Type: GrantFiled: December 20, 2013Date of Patent: November 22, 2016Assignee: Thales Canada IncInventors: Alon Green, Firth Whitwam
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Patent number: 9470509Abstract: An inner diameter measuring device, comprising a measurement carriage traveled in straight direction, pipe holding frames disposed at front and rear positions and for mounting a pipe to be measured, a measuring head supported at a forward end of a supporting member extended in a direction parallel to advancing direction of the measurement carriage, a first and second laser distance measuring unit disposed in traveling distance of the measurement carriage and for performing distance measurement in two directions perpendicularly crossing to each other, wherein the pipe holding frames can adjust a supporting position of the pipe to be measured, the measuring head measures an inner diameter of the pipe to be measured, the first and second laser distance measuring units measure distance with respect to each of the reference outer peripheral surfaces at the parts, and the supporting position of the pipe to be measured is adjusted.Type: GrantFiled: February 7, 2013Date of Patent: October 18, 2016Assignee: IHI CorporationInventors: Michiko Baba, Kouzou Hasegawa, Norimasa Taga
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Patent number: 9464877Abstract: A calculator includes a first filter, a second filter, and an adding device. The first filter outputs, as a first corrected value, a value in which displacement of a displacement table detected by a scale has been corrected based on first frequency transfer characteristics from a scale to a measured object station. The second filter outputs, as a second corrected value, a value in which the first corrected value is corrected based on second frequency transfer characteristics from a ball tip to a ball tip displacement detector. The adding device adds the second corrected value and displacement of the ball tip detected by the ball tip displacement detector to calculate a measured value.Type: GrantFiled: February 9, 2015Date of Patent: October 11, 2016Assignee: MITUTOYO CORPORATIONInventors: Hideyuki Nakagawa, Nobuhiro Ishikawa
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Patent number: 9429849Abstract: According to one embodiment, a parameter for laser irradiation is adjusted in correspondence with thickness distribution of a substrate of a pattern transferring plate in which a pattern is formed on the substrate to form an altered portion within the substrate.Type: GrantFiled: June 5, 2014Date of Patent: August 30, 2016Assignee: Kabushiki Kaisha ToshibaInventors: Hidenori Sato, Nobuhiro Komine
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Patent number: 9405974Abstract: A system and method for optimizing video-based tracking of an object of interest are provided. A video of a regularized motion environment that comprise multiple video frames is acquired and an initial instance of an object of interest in one of the frames is then detected. An expected size and orientation of the object of interest as a function of the location of the object is then determined. The location of the object of interest is then determined in a next subsequent frame using the expected size and orientation of the object of interest.Type: GrantFiled: November 13, 2013Date of Patent: August 2, 2016Assignee: Xerox CorporationInventors: Edgar A. Bernal, Howard A. Mizes, Robert P. Loce