Abstract: In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.

Abstract: A method and an apparatus for transferring a substantially flat and substantially circular objects, such as wafers, from a pick-up position to a delivery position, the apparatus comprising, a manipulator, at least one source for emitting a source signal, at least one sensor for sensing said source signal and for providing a sensor signal, a computing device arranged for processing at least one sensor signal to obtain data on the position of said object, the manipulator being arranged for simultaneously transferring a first and a second object along a path in a substantially parallel orientation, spaced apart from each other, and substantially co-axially whereby the central axis of each object may be displaced radially, a said source and a said sensor are connected by a virtual line, whereby the virtual line includes an angle with the central axes of the first and second objects.

Abstract: A pattern shape evaluation method for deciding whether a pair of patterns are disconnected or connected. The method includes extracting a plurality of pattern contour points that make up a contour of a pattern in a measurement region, and creating two pattern contour point sequences based on the plurality of pattern contour points. Each of the two pattern contour point sequences includes a set of the pattern contour points. In the pattern contour point sequence, each of distances between neighboring pattern contour points is equal to or smaller than a predetermined value. The method includes calculating an angle between a line passing through two of the pattern contour points which provide a shortest distance between the two pattern contour point sequences and a reference line arbitrarily defined with respect to the measurement region. The method further includes deciding whether the patterns are disconnected or connected, based on the angle.

Abstract: A method for determining a position of a mechanical edge of a reference edge of a sheet of recording media relative to a first edge of a drum slot in a cylindrical surface of an imaging drum, the method includes mounting the sheet of recording media on the imaging drum in an orientation wherein the reference edge extends along the cylindrical surface of the imaging drum in a substantially axial direction and wherein the reference edge extends over the first edge of the drum slot; establishing at least one acute apex diffuse light source in the slot; capturing at least one digital camera image of the reference edge and the at least one acute apex diffuse light source; and determining from the at least one digital camera image a location of at least one point on the mechanical edge.

Abstract: An apparatus for measuring erosion of an edge of an aerofoil portion of a fan blade includes a laser source to direct light at a position on the edge of the fan blade. A detector detects light reflected from the position on the edge of the fan blade. A computer measures the distance from the laser source to points on the edge of the fan blade to produce a profile of the edge in terms of x and z coordinates. The computer calculates the distances of points on the edge of the fan blade from a centroid of the profile. The computer detects peaks in the distance of points from the centroid of the profile. The computer selects two peaks with the greatest distance therebetween. The computer determines the distance between the two peaks and compares the determined distance and a predetermined distance to determine if there is unacceptable erosion.

Abstract: It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.

Abstract: An apparatus and method for detecting a difference in width of a strip of material from a desired width of material. The apparatus may comprise a light source, a light detector, an alarm, a first fiber optic cable coupled with the light source, a second fiber optic cable coupled with the light detector, and a housing. The housing may comprise a material slot for passing the strip of material therethrough such that edges of the strip of material may at least partially intersect a plurality of light fields directed from the first fiber optic cable to the second fiber optic cable. The amount of light detected by the light detector is dependant on the amount of light blocked by the strip of material. If the amount of light received is outside of a range of tolerance from the desired width of material, the alarm may be actuated.

Abstract: A system for detecting the alignment of a top plate placed on a plate pallet. The alignment is detected relative to predetermined coordinates of the system. The system will generally include the following components: An illumination source configured to illuminate light on at least one edge of the top plate; a scanner for acquiring scanning results of the top plate edges. The scanning result will be analyzed by an analyzing component, in order to align the top plate correctly before it is loaded into the CTP imaging device.

Abstract: A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.

Abstract: A web edge sensor is disclosed. The web edge sensor has a light source directing light incident to an edge of a web. The edge of the web scatters the light and a sensor array that detects a first portion of the light scattered from the edge of the web and rejects a second portion to determine a position of the web edge.

Abstract: A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.

Abstract: An electrophotographic image forming apparatus fuses an image to a recording medium by heat and pressure. To ensure that the recording medium does not stick to the fusing roller, a non-printable margin is normally reserved at the leading edge of the recording medium. When the recording medium has sufficient stiffness, however, as determined from its thickness and other factors such as its width or orientation, marginless printing is permitted. The setting of an unnecessary margin is thereby avoided.

Abstract: It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.

Abstract: This invention provides a position-detecting mechanism and a position-detecting sensor, the calibration of the sensor easy, the deviation of a web from the reference line of the sensor easy to find. The position-detecting mechanism comprises (i) a light-emitting means 13 to emit a beam of visible light to a subject of measurement and (ii) a regulating means 14 to regulate the beam so that its cross section will be in a certain shape at the place of the subject of measurement and detects the position of the subject of measurement. Because the light-emitting means 13 emits a beam of visible light, the spot lit up by the beam on a subject of measurement is visible to the operator. Accordingly, the operator can judge the position of the subject of measurement by using his eyes alone without using a scale and easily, safely judge its position even while it is running on its production line.

Abstract: The various methods and devices described herein relate to devices which, in at least certain embodiments, may include one or more sensors for providing data relating to user activity and at least one processor for causing the device to respond based on the user activity which was determined, at least in part, through the sensors. The response by the device may include a change of state of the device, and the response may be automatically performed after the user activity is determined.

Abstract: In a sheet detecting sensor, light emitted from a linear light emitting element is blocked by a sheet from entering a light receiving element which is located immediately below the sheet. Only light receiving elements which are not immediately below the sheet, receive light from the linear light emitting element. Light passing through a point in a vicinity of an edge portion of the sheet enters only a light receiving element which is located immediately below that point, but not the other light receiving elements. In addition, even when the position of a sheet varies vertically, the same light receiving element receives light passing through the same point in a vicinity of the edge portion of the sheet. Therefore, even when the position of a sheet varies vertically, the edge position of the sheet can be accurately detected.

Abstract: A document original size detecting device has a plurality of sensors each including a light emitting portion and a light receiving portion and respectively disposed as corresponding to different sizes of document originals to be placed on a transparent document platen and a detecting section which determines a document original size based on outputs of the sensors. The light emitting portion of each of the sensors emits light to illuminate at least two positions on a document placing region of the document platen on which a document original to be subjected to size detection is placed, and the detecting section determines the document original size based on whether or not the light receiving portion of each of the sensors detects the document original blocking the light in at least one of the two positions.

Abstract: An image is recorded of the edge of a moving object, in particular a sheet, in a machine processing printing material. The illumination is carried out with an illuminating device, and an image is recorded of at least one part of the edge with an image recording device. The use of the illuminating device and/or the image recording device is substantially synchronous with the movement of the object and substantially parallel to the direction of movement of the object. A preferred illuminating device has a row or array of light sources which in each case are switched on and off synchronously with the movement of the object. The constant shadow or shadow strip produced by the illumination moves with the object and ensures adequate contrast between the brightly illuminated object and the dark background, so that the object can be segmented reliably, at least in the region of the edge, and its position, orientation and movement can be determined.

Abstract: An exposure apparatus for exposing an object to light. The apparatus includes a camera which captures an image of a mark on the object to obtain image data corresponding to the image, an extraction section which extracts an edge position in the image data obtained by differentiating the image data, a determination section which determines a position of the mark by comparing the extracted edge position with a template, and a control section which changes at least one of a parameter used by the extraction section and a parameter used by the determination section, based on a result of the comparing by the determination section. The object to be exposed is positioned based upon the position of the mark determined by the determination section.

Abstract: An optical sensor (1) with a light beam (7) created by a pulsed primary light source (5), which light beam is reflected at a surface (13) of an object and is recognized by a detector. In order to mask interfering effects, which might develop due to diffused light of the light beam (7), a compensation light source (25) emits a light cone during station breaks in operation of the primary light source (5), which includes the diffused light range of the light beam (7) of the primary light source (5). In this way, objects within the diffused light area create a compensation light portion, which prevents the activation of the sensor output merely by the diffused light of the light beam (7).

Abstract: The apparatus for emitting light according to the present disclosure can include one or more linearly arranged devices for radiating light and one or more optical components which can be inserted into extruded profile. The extruded profile can be configured as hollow in an exemplary embodiment and can have an exit aperture for the egress of light from the extruded profile. The extruded profile can advantageously be configured in one piece, thereby permitting much easier assembly. Finally, the effect can also be achieved that dirt particles are not able to get into the carrier structure as readily, since a one-piece extruded profile has apertures that must be sealed only on one of its long sides and at its ends. The extruded profile can be used for different lighting tasks. The light-radiating devices can be inserted in variable positions in slots inside the extruded profile. In addition, the ideal optical components can be chosen and inserted in positions provided for them.

Abstract: The present invention includes a first and a second optical path forming member arranged within a path of light beams from a light source; a first mounting table provided such that the edge portion of the substrate is located within an application region of the light beams from an outlet side of the first optical path forming member, and a second mounting table provided such that the edge portion of the substrate is located within an application region of the light beams from an outlet side of the second optical path forming member, each of the mounting tables being configured to be rotatable about a vertical axis while mounting the substrate thereon; and a light blocking means for blocking application of light from each of the first and second optical path forming members.

Abstract: In a method for measuring the size or shape of an edge of a machined work piece or of a cutting edge of a tool, the surface of the edge is illuminated by diffused radiation from several positions in the vicinity to the edge by an illumination arrangement, and a picture of the edge is reproduced by recording reflected radiation from the illuminated edge by means of a picture reproduction unit.

Abstract: The present invention describes a method for an apparatus for examining surface properties. Properties of effect pigments are to be examined in particular. A surface (9) to be examined is examined at different emission and reception angles and any curvature of the effect pigments is deduced on the basis of these different angles.

Abstract: A position detecting apparatus includes a first illuminating unit that radiates light onto a substrate in a direction substantially parallel to the front and the rear surfaces of the substrate from the direction of a lateral face of the substrate; a second illuminating unit that radiates light onto the front surface of the substrate, in a direction substantially perpendicular to the front surface of the substrate; an image pickup unit that takes an image of the substrate from a rear surface side thereof; and an edge-position detecting unit that detects an edge position of the substrate, based on a first image that is taken while the light is being radiated from the first illuminating unit and a second image that is taken while the light is being radiated from the second illuminating unit, respectively.

Abstract: Provided is a paper detection apparatus for detecting the size of a sheet of paper transferred along a paper transfer path, which includes a light source and an optical sensor. A plurality of light emitting optical fibers are located at a first side of the paper transfer path and receive light radiated by the light source and emit the received light to a plurality of positions in a widthwise direction of the paper. A plurality of light receiving optical fibers are located at a second side of the paper transfer path and guide the light emitted by the light emitting optical fibers toward the optical sensor. A determination unit detects the size of the paper based on the amount of light detected by the optical sensor.

Abstract: In a method and an apparatus for controlling reeling used in connection with the making of paper/board/some equivalent web-like material, a reeler is used in the reeling which has a reeling element (2), a reeling core (T), around which the web (W) is reeled to form a reel (3), as well as elements for loading the reeling core (T) and the reeling element (2) against each other in order to bring about a reeling nip (N) in between the reeling element (2) and the reel (3). The reeling is monitored by a detection apparatus, which automatically detects any events differing from normal reeling.

Abstract: An edge detection system that locates the edge of a printing plate on a platesetter includes: first scratches aligned in a first direction on a support surface; a groove machined into the support surface where the groove includes two surfaces. One surface is reflective and has second scratches aligned in a second direction perpendicular to the first direction of the first scratches. The system also includes: an edge detection light source to provide a beam for scanning along a length of the support surface on a path coincident with the groove; a sensor to sense a reflected edge detection beam from the support surface; and a controller to analyze the reflected beam, where the beam reflected from the first scratches is 90 degrees out of phase with the beam reflected from the second scratches and where the beam reflected from the first scratches is high in intensity relative to the beam reflected from the second scratches.

Abstract: A position detecting apparatus includes a first illuminating unit that radiates light onto a substrate in a direction substantially parallel to the front and the rear surfaces of the substrate from the direction of a lateral face of the substrate; a second illuminating unit that radiates light onto the front surface of the substrate, in a direction substantially perpendicular to the front surface of the substrate; an image pickup unit that takes an image of the substrate from a rear surface side thereof; and an edge-position detecting unit that detects an edge position of the substrate, based on a first image that is taken while the light is being radiated from the first illuminating unit and a second image that is taken while the light is being radiated from the second illuminating unit, respectively.

Abstract: Various edge detection arrangements are disclosed, including an edge detection method and arrangement that utilizes outputs of commonly illuminated reference and edge sensors as the inputs for a comparator. The reference sensor is configured to have a wide field of view and the edge sensor is configured to have a narrow, high gain, field of view. Therefore, the reference sensor has a broad signal response to an edge passage and the edge sensor a steep and narrow signal response. When the two signals are biased to cross each other, the comparator output changes state, indicating passage of an edge. Because the reference sensor provides a base signal level directly related to the real time illumination level that the edge sensor also receives, the reference sensor provides a switch point along the transition ramp of the edge sensor that integrates a majority of the random error sources.

Abstract: A method and system for determining the lateral position of an edge of a web are disclosed. The system includes an array of light transmitting elements and a corresponding array of lenses and an array of light receiving elements and a corresponding array of lenses. The light transmitting elements are each paired with a light receiving element and the light transmitting elements each transmit a beam of light energy towards the corresponding receiving element. The beams of light can be occluded by a web passing between the transmitting elements and the receiving elements, thereby reducing the light received by the receiving elements. The receiving elements can generate a signal that is proportional to the amount of they receive, and a controller can be used to determine the lateral position of an edge of the web in response to the signals generated by the receivers. A compensation light beam can be employed to enable the controller to compensate for several factors that can affect measurement accuracy.

Abstract: A system and method of estimating the thickness of the individual sheets in a stack of sheets in a print media sheet input stacking tray before printing with an electronic sensing system for electronically detecting individual sheet edges in the stack thereof and a movement system providing a known traversal distance of the sheet edge sensing system relative to one side of the stack to produce multiple signals corresponding to multiple detected individual sheet edges, and dividing that multiplicity of signals into the known traversal movement to estimate the thickness of the individual print media sheets in the stack and provide a corresponding electrical output can be used for automatic control of sheet feeder, printer or finisher functions. A relatively simple contacting or non-contacting sensor may be used.

Abstract: Various edge detection arrangements are disclosed, including an edge detection method and arrangement that utilizes outputs of commonly illuminated reference and edge sensors as the inputs for a comparator. The reference sensor is configured to have a wide field of view and the edge sensor is configured to have a narrow, high gain, field of view. Therefore, the reference sensor has a broad signal response to an edge passage and the edge sensor a steep and narrow signal response. When the two signals are biased to cross each other, the comparator output changes state, indicating passage of an edge. Because the reference sensor provides a base signal level directly related to the real time illumination level that the edge sensor also receives, the reference sensor provides a switch point along the transition ramp of the edge sensor that integrates a majority of the random error sources.

Abstract: A method and system for determining the lateral position of an edge of a web are disclosed. The system includes a plurality of optical transmitters, a plurality of optical receivers, a plurality of ultrasonic transmitters, a plurality of ultrasonic receivers, and a controller. The controller is used to determine which type of transmitter and receiver should be used in conjunction with the specific web to be processed. The controller activates certain optical transmitters and determines the amount of optical occlusion that results from the web being between the optical transmitters and receivers. The controller also activates certain ultrasonic transmitters and determines the amount of sound occlusion that results from the web passing between the ultrasonic transmitters and receivers. The type of transmitter/receiver that results in the most occlusion can then be selected to determine the position of the edge of the web.

Abstract: A system for measuring a pattern on a sample, including: a data processing system that processes a set of two-dimensional distribution data of intensities from the sample, to calculate: a set of edge points indicative of position of edges of the pattern in a two-dimensional plane from the two-dimensional distribution data; an approximation edge indicative of the edge of the pattern; an edge fluctuation data by calculating a difference between the set of edge points and the approximation edge; and a correlation between a first portion of the edge fluctuation data and a second portion of the edge fluctuation data.

Abstract: A piston-ring inspecting device includes a sensor unit (27) including a light emitting system (27a) that emits slit-like detection light toward an outer peripheral surface (Ps) of a piston (P) and an outer peripheral surface (2c) of a piston ring (2) and a light receiving image system (27b) that receives light reflected from the outer peripheral surfaces so as to form an image; an image calculating means that subjects image information obtained by the sensor unit to numerical processing and that calculates a tilt angle of the outer peripheral surface of the piston ring with respect to the outer peripheral surface of the piston; and a controller (30) including a judgment means that, based on arithmetical information obtained by the image calculating means and preset standard information, judges whether or not the piston ring has been fitted in a predetermined direction. Accordingly, an inspection can be performed without scanning, through a simple analysis process, in a short time, and with high accuracy.

Abstract: A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.

Abstract: An image forming apparatus that forms an image on a recording medium includes a sensor including a light emitting element configured to emit light and a light receiving element configured to receive light emitted from the light emitting element. A sensor actuator is configured to cause a transition between a first state where the light emitted from the light emitting element is received at the light receiving element and a second state where the light emitted from the light emitting element is not received at the light receiving element in response to a recording medium being detected. A light shield is coupled to the sensor actuator and configured to cover at least a part of the sensor and to prevent light other than light emitted from the light emitting element from entering the light receiving element in the second state.

Abstract: In the optical distance measuring device of the invention, a second optical path is formed by a transparent resin formed in a region where a light emitting element and a second light receiving part are connected directly to each other. As the temperature increases, the length of the optical path increases while its refractive index decreases, so that the optical path length itself becomes generally constant. Therefore, the length of the second optical path can be kept generally constant independently of temperature. Further, a first light receiving part for a first optical path and a second light receiving part for the second optical path 18 are formed in one identical light receiving element. Therefore, characteristic variations of the first light receiving part and the second light receiving part due to temperature can be reduced. This optical distance measuring device can achieve high distance measuring accuracy even under environments of intense temperature changes.

Abstract: There is provided an edge position detecting apparatus that includes a reflective optical sensor that outputs light to a supporting surface of a supporting member, and receives a reflected light; a moving unit that moves the reflective optical sensor; a reflected light data generating unit that generates reflected light data by obtaining a light-receiving signal; and a detecting unit that detects an edge position of the target detection object. The reflected light data generating unit generates the reflected light data when the target detection object is/is not supported by the supporting member. The detecting unit detects the edge position based on a relative change between a first and a second reflected light data. The first reflected light data is generated when the target detection object is supported by the supporting member. The second reflected light data is generated when the target detection object is not supported by the supporting member.

Abstract: A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical module for providing a light source to scan the wafer edge, a light channel detector for detecting light reflected from the wafer edge, and a processor and memory for converting detected signals to digital form, and for filtering and processing the digital data. The module includes a wafer edge scanning mechanism for projecting a collimated laser beam toward the wafer edge at a predetermined angle of incidence to scan the wafer edge for defects. The light channel detector detects light reflected from the wafer edge to obtain wafer edge data, which are applied to thresholds to determine the location of defects in the wafer edge.

Abstract: An image is recorded of the edge of a moving object, in particular a sheet, in a machine processing printing material. The illumination is carried out with an illuminating device, and an image is recorded of at least one part of the edge with an image recording device. The use of the illuminating device and/or the image recording device is substantially synchronous with the movement of the object and substantially parallel to the direction of movement of the object. A preferred illuminating device has a row or array of light sources which in each case are switched on and off synchronously with the movement of the object. The constant shadow or shadow strip produced by the illumination moves with the object and ensures adequate contrast between the brightly illuminated object and the dark background, so that the object can be segmented reliably, at least in the region of the edge, and its position, orientation and movement can be determined.

Abstract: A device for examining the optical properties of surfaces having at least one first radiation device emitting radiation at least at one first predetermined spatial angle to a surface to be examined, at least one first detector device for capturing the radiation emitted to and reflected back from the surface, wherein the detector device allows a local resolution of detected radiation and is positioned at least at a second predetermined spatial angle relative to the surface. At least one spatial angle at which the radiation device and/or the detector device are positioned, is variable.

Abstract: A light receiving device 12 that receives reflected light condensed by a light receiving condenser means 14 has two first and second electrodes 15, 16 provided on a light receiving surface at prescribed intervals along a baseline that connects a light emitting device 11 with the light receiving device and a resistive region 21 provided between the two electrodes. An electric charge generated at the incident position of light incident on the light receiving surface of the light receiving device 12 becomes a photo current and outputted from the first and second electrodes 15, 16 via the resistive region 21. The resistance value of the resistive region 21 of the light receiving device 12 is distributed so as to be roughly inversely proportional to a distance from the optical axis of the light receiving condenser means 14 to the incident position of a light spot on the light receiving surface.

Abstract: A medium detection apparatus is provided with: a light emitting section adapted to emit light; a light receiving section adapted to detect reflected light and output an output value in accordance with an amount of the reflected light; a medium supporting section adapted to support a medium and having a diffusing section adapted to diffuse the light emitted from the light emitting section; and a controller adapted to detect an edge of the medium based on a difference between the output value of the light receiving section when the light receiving section detects light reflected from the medium and the output value of the light receiving section when the light receiving section detects light reflected from the medium supporting section.

Abstract: Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.

Abstract: A plurality of microswitches are arranged in a photosensitive material receiving section in a row, in a direction perpendicular to the travel direction of a printing plate. The printing plate is carried while being centered with respect to a center of a transport path. The plurality of microswitches are arranged in an asymmetrical manner with respect to the center of the transport path. Thus the width of a photosensitive material can be precisely calculated with a small number of microswitches. Further, deviation of the photosensitive material from the center of the transport path can be easily detected.

Abstract: The method of making an online measurement of a shape of a conveyed sheet, the method comprises the steps of: imaging continuously at least two edge portions of entire the conveyed sheet in a widthwise direction of the conveyed sheet from a leading end to a trailing end of the conveyed sheet in a direction of conveyance of the conveyed sheet by means of a CCD line sensor; processing an image obtained in the imaging step to extract a sheet image portion corresponding to the conveyed sheet in the obtained image; and obtaining the shape of the conveyed sheet according to the sheet image portion extracted in the processing step.

Abstract: A prealignment sensor comprising a frame fixed to a base and having a U-shape when viewed from its side. A light source is attached to a lower part of the flame. A convex lens is attached to a lower part of an inside of the frame by which diffused light of the light source is transformed into parallel light. A lens holder is provided for fixing the convex lens to the frame. An optical receiver is attached to an upper part of an inside of the frame by which the parallel light is received and is transformed into an electrical signal. A signal processing circuit is attached to the frame by which the electric signal is transformed into a desired displacement magnitude. The frame is formed of aluminum subjected to sulfuric-acid hard alumite treatment and then to steam sealing.

Abstract: A pattern measurement method includes acquiring graphic data of a plurality of patterns including image data; processing the graphic data to detect a coordinate of an edge point of the pattern; combining the edge points between the patterns to make a pair of edge points and calculating a distance between the edge points constituting each pair of edge points and an angle between a straight line which connects the edge point to the other edge point and an arbitrary axial line with respect to each pair of edge points to prepare a distance angle distribution map which is a distribution map of the calculated distance and angle of the pair of edge points; and evaluating at least one of a relation of shape between the patterns, a relation of size between the patterns, and a relative location between the patterns on the basis of the prepared distance angle distribution map.