Angular Orientation (e.g., Skew) Patents (Class 250/559.37)
  • Patent number: 10365092
    Abstract: An electronic angle measuring device for measuring the bending angle between the legs (4) of a metal sheet (5) having a sensor element (7) which delivers angle-equivalent signals in a contact-free manner to a signal processing device (9) comprising a microprocessor and a memory unit which is connected to a digital display (10) is described. In order to create advantageous measurement conditions, it is proposed that a sensor element (7) which deflects a laser beam through a rotating mirror onto the two legs (4) of the metal sheet (5) and which forms a measured value from the reflection beam received in the emission direction, the signal processing device (9) with the microprocessor and the memory unit as well as the digital display (10) form an angle measuring device (6) which can be fastened to an upper tool (1) of a bending machine and which can be used as a manual measuring device (6).
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: July 30, 2019
    Assignee: KEBA AG
    Inventors: Johann Wögerbauer, Andreas Wögerbauer
  • Patent number: 10365091
    Abstract: An electronic angle measuring device for a bending machine for measuring the bending angle between the legs (4) of a sheet (5) using a sensor element (7) is described, which supplies angle-equivalent signals in a contactless manner to a signal processing unit (9), which has a microprocessor and a memory unit and is connected to a digital display (10). To provide simple measuring conditions, it is proposed that the sensor element (7), the signal processing unit (9), and the display (10) form an angle measuring device (6) which is fastenable on the upper tool (1) of the bending machine and is usable as a handheld encoder, and which has a motion sensor (11), which is connected to the signal processing unit (9) and detects the lowering and/or raising movement of the upper tool (1), for triggering the measuring procedure.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: July 30, 2019
    Assignee: KEBA AG
    Inventors: Johann Wögerbauer, Andreas Wögerbauer
  • Patent number: 10186078
    Abstract: Provided are a system and method of recognizing an indoor location of a moving object. A recognition device includes an illumination unit including a plurality of illumination modules respectively having different predetermined light receiving characteristics, each of the illumination modules receiving polarized light emitted from at least one lighting device according to one of the predetermined light receiving characteristics and measuring an illumination value; and an analysis unit configured to calculate a light source polarization axis angle of the at least one lighting device using a predetermined linear polarization rule and the illumination value measured by each illumination module, the at least one lighting device emitting light received by the illumination unit.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: January 22, 2019
    Assignee: Polariant, Inc.
    Inventors: Hyouk Jang, Hyeon Gi Jeon, Youngjae Choi
  • Patent number: 10094951
    Abstract: Apparatus determines whether a stored object is a wafer alone or a frame unit formed by uniting the wafer and a ring frame. The apparatus includes first and second detecting units, the second detecting unit being stored more shallowly than the first detecting unit. The apparatus determines whether light transmitted by the first detecting unit is blocked by the object and does not reach a light receiving portion of the first detecting unit. When light transmitted from the second detecting unit is blocked by the object and does not reach a light receiving portion of the second detecting unit, the apparatus determines that the object is the frame unit, whereas when the light transmitted from the second detecting unit is not blocked by the object and reaches the light receiving portion of the second detecting unit, the apparatus determines that the object is the wafer.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: October 9, 2018
    Assignee: DISCO CORPORATION
    Inventors: Ken Togashi, Masahiro Tsukamoto
  • Patent number: 10054423
    Abstract: Method and system for measuring one or more parameters of a patterned structure, using light source producing an input beam of at least partially coherent light in spatial and temporal domains, a detection system comprising a position sensitive detector for receiving light and generating measured data indicative thereof, an optical system configured for focusing the input light beam onto a diffraction limited spot on a sample's surface, collecting an output light returned from the illuminated spot, and imaging the collected output light onto a light sensitive surface of the position sensitive detector, where an image being indicative of coherent summation of output light portions propagating from the structure in different directions.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: August 21, 2018
    Assignee: NOVA MEASURING INSTRUMENTS LTD.
    Inventors: Dror Shafir, Gilad Barak, Shay Wolfling
  • Patent number: 9989358
    Abstract: An assembly includes a hoist or a winch, a cable, and a fleet angle sensor. The fleet angle sensor includes a frame disposed around an opening. A first photodetector with multiple light-receiving zones is mounted on the frame. A first light source is mounted on the frame opposite the first photodetector. The first light source directs a first light beam across the opening to the multiple light-receiving zones of the first photodetector. The cable extends through the opening and into the first light beam, and the multiple light-receiving zones produce signals that vary based upon a fleet angle of the cable extending through the opening.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: June 5, 2018
    Assignee: Goodrich Corporation
    Inventor: Chuang-Chia Lin
  • Patent number: 9816941
    Abstract: Systems and methods are disclosed relating to composite photonic materials used to design structures and detecting material deformation for the purpose of monitoring structural health of physical structures. According to one aspect, a composite structure is provided that includes a base material, an optical diffraction grating and one or more fluorophore materials constructed such that localized perturbations create a measurable change in the structure's diffraction pattern. An inspection device is also provided that is configured to detect perturbations in the composite structure. The inspection device is configured to emit an inspecting radiation into the structure and capture the refracted radiation and measure the change in the diffraction pattern and quantify the perturbation based on the wavelength and the angular information for the diffracted radiation.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: November 14, 2017
    Assignee: SAUDI ARABIAN OIL COMPANY
    Inventors: Enrico Bovero, Abdullah S. Al-Ghamdi, Abdullah A. Al-Shahrani
  • Patent number: 9770897
    Abstract: A transportation apparatus includes a transportation section that transports continuous paper in a transportation direction intersecting with a shaft direction of a transportation roller. An imaging section includes plural photoreceptor elements and captures an image of the continuous paper transported by the transportation section. The photoreceptor elements are arranged in a first direction and a second direction, the first direction intersecting with the shaft direction, and the second direction intersecting with the first direction. A transportation amount acquisition section acquires a transportation amount of the continuous paper in the transportation direction on the basis of the image captured by the imaging section. The transportation amount acquisition section acquires the transportation amount of the continuous paper by correcting a movement amount of the continuous paper in the first direction with a correction value that changes in accordance with orientation of the first direction.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: September 26, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Takahiro Abe, Tomoya Murotani, Hiroyuki Kobayashi
  • Patent number: 9240334
    Abstract: The invention relates to the prepeeling phase of methods for detaching a semiconductor chip from a foil. According to a first aspect, the invention relates to the determination of time periods, which each defines a duration of a prepeeling step. In a setup phase, the following steps are carried out for each prepeeling step: Initiating the method step; Repeating the two steps Recording of an image of the semiconductor chip and assignment of a time period to the image which has passed since the initiation of the prepeeling step, and Checking whether in the image a peripheral region of the semiconductor chip is darker than a predetermined brightness value; until the check leads to the result that no peripheral region of the semiconductor chip is darker than the predetermined brightness value. According to a second aspect, the detachment of the semiconductor chip from the foil is monitored in realtime.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: January 19, 2016
    Assignee: Besi Switzerland AG
    Inventors: Ernst Barmettler, Irving Rodriguez
  • Patent number: 9126771
    Abstract: The present invention relates to a method and device for transferring cutouts (6), for manufacturing packaging boxes having polygonal cross-sections, from a magazine (3) from a vertical stack, consisting of at least one stack (4, 5) of cutouts made of a cardboard or corrugated cardboard sheet material comprising notches. The method and device of the invention involve locating the top cutout of the stack using a camera (10), preliminarily detaching the cutout from the remainder of the stack, gripping, by means of suction, the thus-located top cutout, moving said cutout by means of a robotic arm (17) and releasing same to a next station, for or prior to subsequent shaping, and repeating the above cycle of steps with the next top cutout.
    Type: Grant
    Filed: March 28, 2011
    Date of Patent: September 8, 2015
    Assignee: OTOR
    Inventors: Philippe Saison, Thomas Bruneau, Franck Menegazzi, Yves Clauss, Didier Desertot
  • Patent number: 8227780
    Abstract: A measuring apparatus includes a light source emitting a measuring light, a first photo-detection element directly receiving a part of a reflected light of the measuring light reflected from a shaft to be measured to detect a first light receiving position, and a second photo-detection element directly receiving another part of the reflected light to detect a second light receiving position. An axis tilt angle of the shaft is measured on the basis of a signal output from the first photo-detection element and a signal output from the second photo-detection element.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: July 24, 2012
    Assignee: Panasonic Corporation
    Inventors: Atsuyuki Isotani, Masami Kajihara
  • Patent number: 7924441
    Abstract: An optical locating and tracking system may have two or more optical scanners, one or more optical detectors responsive to radiation from one or more optical sources, and a controller coupled to the detector(s) and the scanner(s). Each scanner has a reflector mounted to a two-dimensional actuator that tilts the reflector about first and second axes. The controller determines whether a given reflector of a given scanner is aligned to provide an optical path between the optical source(s) and the detector(s) from one or more detection signals from the one or more optical detectors. The optical path originates, terminates or is deflected at the object. The controller also determines the object's position in three dimensions from control signals to the two-dimensional actuators of the scanners obtained the reflectors are aligned to provide the optical path. The control signals determine a tilt of each reflector about its first and second axes.
    Type: Grant
    Filed: August 7, 2009
    Date of Patent: April 12, 2011
    Assignee: Mirrorcle Technologies, Inc.
    Inventor: Veljko Milanović
  • Patent number: 7764387
    Abstract: An optical measurement device for determining at least two parameters of a measurement location of a surface of at least one workpiece positioned in a known coordinate system is described. The device comprises a first light source providing a first measurement beam. The first measurement beam is directed at a first surface of a workpiece. The device also comprises a second light source providing a second measurement beam. The second measurement beam is directed at a second surface of a workpiece facing opposite the first surface. Further, the device comprises a first system of receiving optics. The first system of receiving optics detects the incoming position of the first measurement beam. The first system of receiving optics is positioned on an opposite side of a workpiece from the first light source. Further still, the device comprises a second imaging system. The second system of receiving optics detects the incoming position of the second measurement beam.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: July 27, 2010
    Assignee: Applied Kinetics, Inc.
    Inventors: Mark T. Girard, Joseph P. Tracy, Ryan A. Jurgenson, David R. Swift
  • Publication number: 20090206284
    Abstract: This application relates to systems and methods for the detection of orientation features on a material web.
    Type: Application
    Filed: February 12, 2009
    Publication date: August 20, 2009
    Applicant: Texmag GmbH Vertriebsgesellschaft
    Inventor: Juergen Eisen
  • Patent number: 7502127
    Abstract: According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: March 10, 2009
    Assignees: Sumitomo Heavy Industries, Ltd., Tohoku Technoarch Co., Ltd.
    Inventors: Wei Gao, Satoshi Kiyono, Yoshiyuki Tomita, Toru Hirata, Yoji Watanabe, Kennichi Makino
  • Patent number: 7462855
    Abstract: An optical recording and reproducing apparatus for recording and/or reproducing an optical recording medium by irradiating light from a light source to the optical recording medium as near-field light from a near-field light irradiating unit includes a light source for emitting light, a first light-receiving unit for receiving and detecting returned light from the optical recording medium, a second light-receiving unit for receiving and detecting returned light from the near-field light irradiating unit, a control unit for detecting a relative skew between the optical recording medium and the near-field light irradiating unit based on a plurality of gap detection signals generated from divided detection signals of the second light-receiving unit and a drive control unit for outputting a drive signal to correct a skew of at least the near-field light irradiating unit to a drive unit in response to a skew detected in the control unit.
    Type: Grant
    Filed: May 1, 2006
    Date of Patent: December 9, 2008
    Assignee: Sony Corporation
    Inventors: Kimihiro Saito, Tsutomu Ishimoto
  • Patent number: 7385214
    Abstract: The invention relates to a measuring arrangement comprising a sensor head (13) that can be displaced over a surface (11) at a distance therefrom in a scanning direction (R), a plurality of distance sensors which are suitable for distance measurement and are interspaced in the scanning direction in a fixed manner, a displacement device for displacing the sensor head (13) in such a way that points of the surface (11) are detected in successive scanning steps carried out by a plurality of distance sensors, and an evaluation device to which the output signals of the distance sensors are supplied. According to the invention, one such measuring arrangement is improved by an angle measuring device (14, 15) for determining an angle value of the sensor head (13) in relation to the scanning direction (R), and for forwarding said angle value to the evaluation device. In this way, systematic measuring errors can be eliminated for the reconstruction of a topography of the surface (11) in the scanning direction (R).
    Type: Grant
    Filed: July 4, 2005
    Date of Patent: June 10, 2008
    Assignee: Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt
    Inventors: Ingolf Weingaertner, Clemens Elster, Michael Schulz
  • Patent number: 7345293
    Abstract: A piston-ring inspecting device includes a sensor unit (27) including a light emitting system (27a) that emits slit-like detection light toward an outer peripheral surface (Ps) of a piston (P) and an outer peripheral surface (2c) of a piston ring (2) and a light receiving image system (27b) that receives light reflected from the outer peripheral surfaces so as to form an image; an image calculating means that subjects image information obtained by the sensor unit to numerical processing and that calculates a tilt angle of the outer peripheral surface of the piston ring with respect to the outer peripheral surface of the piston; and a controller (30) including a judgment means that, based on arithmetical information obtained by the image calculating means and preset standard information, judges whether or not the piston ring has been fitted in a predetermined direction. Accordingly, an inspection can be performed without scanning, through a simple analysis process, in a short time, and with high accuracy.
    Type: Grant
    Filed: June 23, 2003
    Date of Patent: March 18, 2008
    Assignee: Hirata Corporation
    Inventors: Yasuhiko Wakatsuki, Haruo Tsutsumi
  • Patent number: 7129507
    Abstract: The invention is a method for detecting float or peel of semiconductor chips arranged in X and Y axes directions diced and bonded to a dicing tape on a stage. The method includes detecting float or peel of the semiconductor chips in a respective horizontal or longitudinal row arranged in the X or Y axis direction; moving the stage in the X axis direction, the Y axis direction, a Z axis direction, and a rotational direction around the Z axis for aligning the stage with a position detection unit for detecting positions of the semiconductor chips in the X axis direction and the Y axis direction; detecting the positions of abnormal semiconductor chips in the respective horizontal or longitudinal row that includes said abnormal semiconductor chips; and specifying the positions of said abnormal semiconductor chips on the X-Y axes.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: October 31, 2006
    Assignee: Tokyo Seimitsu Co., Ltd
    Inventors: Akira Yamamoto, Konosuke Murakami, Yoshio Niki, Takashi Ishimoto, Yutaka Ueda
  • Patent number: 7126145
    Abstract: A frame transfer prober 1, for carrying out an electrical property test on a number of semiconductor chips 10 fixed on a dicing tape 11, comprises a separation detection unit 9 for detecting the separation and/or protrusion of the semiconductor chips 10 from the dicing tape. The separation detection unit has a light emitting portion 91 for emitting a laser beam L, a light receiving portion 92 for receiving the laser beam L so emitted and a determination portion 93 for determining the separation and/or protrusion of the semiconductor chips through an increase or decrease in amount of the laser beam L so received.
    Type: Grant
    Filed: September 27, 2004
    Date of Patent: October 24, 2006
    Assignee: Tokyo Seimitsu Co., Ltd.
    Inventor: Yutaka Ueda
  • Patent number: 7110153
    Abstract: An optical apparatus is disclosed which has a scanner for scanning a predetermined area with a laser beam. The optical apparatus comprises: a laser source; a scanner having a scanning mirror for causing a laser beam generated by the laser source to scan; an angle sensor for sensing angles of the scanning mirror of the scanner; a fault detection block for determining whether the scanning mirror operates safely and normally based at least on angle information coming from the angle sensor; and a projection control block for controlling projection of the laser beam based on fault detection information coming from the fault detection block.
    Type: Grant
    Filed: April 25, 2005
    Date of Patent: September 19, 2006
    Assignee: Sony Corporation
    Inventor: Yoshitsugu Sakai
  • Patent number: 7068408
    Abstract: An optical apparatus is disclosed which has a scanner for scanning a predetermined area with a laser beam. The optical apparatus comprises: a laser source; a scanner having a scanning mirror for causing a laser beam generated by the laser source to scan; an angle sensor for sensing angles of the scanning mirror of the scanner; a fault detection block for determining whether the scanning mirror operates safely and normally based at least on angle information coming from the angle sensor; and a projection control block for controlling projection of the laser beam based on fault detection information coming from the fault detection block.
    Type: Grant
    Filed: April 25, 2005
    Date of Patent: June 27, 2006
    Assignee: Sony Corporation
    Inventor: Yoshitsugu Sakai
  • Patent number: 7034279
    Abstract: A method and apparatus is used to detect and compensate for printhead rotation in an inkjet printer. The detecting operation includes receiving an initial image of a pattern taken from a medium as the printhead passes over the medium, receiving a subsequent image of the pattern taken from the medium as the printhead continues to pass over the medium, comparing the initial image of the pattern and the subsequent image of the pattern taken from the medium and identifying a rotation of the printhead in the inkjet printer passing over the medium if the comparison indicates the initial image of the pattern is rotated relative to the subsequent image of the pattern. The compensation operation includes modifying the timing settings associated with the firing of the nozzles in the inkjet printhead to compensate for the rotation of the printhead.
    Type: Grant
    Filed: September 25, 2003
    Date of Patent: April 25, 2006
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Rodrigo Ruiz, Carles Flotats, Francesc Subirada
  • Patent number: 6950548
    Abstract: A method and system create a geometric object model for use in machine vision inspection. A pixel image representation of an object is acquired. Based on this pixel image representation, part models for the parts of the object are generated. Each part model corresponds to a different part of the object. From the part models of the object, a model for the entire object can be created. Using this created object model, a test inspection is performed on a set of test images, and each of the test images is associated with a set of known inspection measurements. The test inspection produces a set of testing inspection measurements. If the test inspection yields satisfactory performance, the object models created are stored.
    Type: Grant
    Filed: March 16, 2001
    Date of Patent: September 27, 2005
    Assignee: Cognex Corporation
    Inventors: Ivan A. Bachelder, Yun Chang, Yasunari Tosa, Venkat Gopalakrishnan, Raymond Fix, Rob Milligan, Therese Hunt, Karen Roberts
  • Patent number: 6903857
    Abstract: An optical apparatus is disclosed which has a scanner for scanning a predetermined area with a laser beam. The optical apparatus comprises: a laser source; a scanner having a scanning mirror for causing a laser beam generated by the laser source to scan; an angle sensor for sensing angles of the scanning mirror of the scanner; a fault detection block for determining whether the scanning mirror operates safely and normally based at least on angle information coming from the angle sensor; and a projection control block for controlling projection of the laser beam based on fault detection information coming from the fault detection block.
    Type: Grant
    Filed: June 29, 2004
    Date of Patent: June 7, 2005
    Assignee: Sony Corporation
    Inventor: Yoshitsugu Sakai
  • Patent number: 6891183
    Abstract: An ultrasonic-welding apparatus including: a cradle, onto which two work pieces are mounted, and which can rotate around an axis vertical to the welding surface of the work pieces; a welding horn, which carries out welding using ultrasonic energy while sandwiching the two work pieces between it and the cradle; a transmission-type laser sensor which measures the fixed part of the work pieces after welding, rotating on the cradle, in the condition that the welding horn is apart from the work pieces after welding; and an optical sensor including a light-emitting part, a light-receiving part, a connecting part on which the light-emitting and light-receiving parts are mounted, and an adjusting part that rotates the connecting part around two axes.
    Type: Grant
    Filed: June 6, 2003
    Date of Patent: May 10, 2005
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Kouta Kitamura, Tadashi Takahara, Kenji Ishikawa, Novuo Takahashi
  • Patent number: 6813377
    Abstract: A method and an apparatus are disclosed for generating a model of an object from an image of the object. First, an orientation of the object in the image is determined through the generation of, and subsequent evaluation of, at least a portion of a frequency response of the image. Thereafter, the orientation is used to gauge the object. The gauging provides the necessary dimensional information that becomes a part of the geometrical model of the object. An embodiment is disclosed that generates a geometrical model of a leaded object from the image of the leaded object.
    Type: Grant
    Filed: July 31, 2000
    Date of Patent: November 2, 2004
    Assignee: Cognex Corporation
    Inventors: Venkat Gopalakrishnan, Albert Montillo, Ivan Bachelder
  • Patent number: 6707053
    Abstract: A tilt detector for detecting a tilt amount of a recording surface of an optical disc at a high degree of precision. The tilt detector comprises a light emitting diode for emitting a divergent beam of light to be incident on the recording surface of the optical disc, a collimating lens for collimating the divergent beam of light emitted from the light emitting diode and directing the collimated beam of light onto the recording surface of the optical disc, a condensing lens for condensing the collimated beam of light from the collimating lens, directed onto the recording surface of the optical disc and then reflected from the recording surface, and a photodiode for receiving the collimated beam of light condensed by the condensing lens and detecting the centroid of the intensity of the received beam of light, the photodiode including a receiving surface partitioned into a plurality of areas for receiving the collimated beam of light condensed by the condensing lens.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: March 16, 2004
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventor: Mitsuhiro Togashi
  • Publication number: 20040021099
    Abstract: An apparatus and method of making the same for sensing inclination. The apparatus includes a member moveably positioned in a body, the member moves in response to gravity between two positions if the body is rotated relative to an axis exceeding a certain amount. A detector can be used to detect when the member moves and can automatically report rotation. A method of making an inclinometer includes creating the body by laminating layers, where a layer is prefabricated to include an appropriate cut-out to guide the member between the two positions. Another layer or layers can include the detector. An aspect of the invention comprises having each layer include prefabricated features for multiple inclinometers, and then superposing the prefabricated layers, activating adhesive between them to form a lamination defining a plurality of inclinometers, and then separating the lamination into individual inclinometers.
    Type: Application
    Filed: August 1, 2002
    Publication date: February 5, 2004
    Inventors: Robert Figueria, Thomas Pinto
  • Patent number: 6653944
    Abstract: A pod for transporting a cassette of semiconductor wafers that is equipped with a cover latch indicator is described. The pod is constructed by a base, a cover, a latch means and an indicator means. The base is used to support the cassette positioned thereon, while the cover removably carries on the base for protectively covering the cassette to prevent contamination of the wafers. The latch means is carried on the base for latching the cover onto the base. The latch means may be actuatable from a latched position in which the cover is latched onto the base to a released position allowing removal of the cover from the base. The indicator means is coupled with the latch means for providing a visual indication of the condition of the latch means.
    Type: Grant
    Filed: July 20, 2001
    Date of Patent: November 25, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd
    Inventors: Hsin-Chieh Huang, Am-Ming Chiang
  • Patent number: 6650769
    Abstract: A review station comprising a wafer chuck capable of turning by at least 270 degrees, and an X-Y stage that moves over a distance one-half the diameter of a semiconductor wafer. Each of four regions obtained by dividing the surface of the semiconductor wafer 1 into four areas are successively observed using a stationary microscope 2 by turning the wafer chuck depending upon the coordinates of defective positions of the wafer to review the defects on the whole surface of the wafer.
    Type: Grant
    Filed: August 23, 1999
    Date of Patent: November 18, 2003
    Assignee: Tokyo Seimitsu Co., Ltd.
    Inventor: Masayuki Kuwabara
  • Patent number: 6639239
    Abstract: A method and apparatus reduces undesirable glints in an optical position alignment sensor designed to orient components. Collimated light is provided onto the component. A filter is positioned behind the components and is used to block glint generated by the components. The filter is tunable by rotating it about an axis in the plane of the component.
    Type: Grant
    Filed: September 17, 2001
    Date of Patent: October 28, 2003
    Assignee: CyberOptics Corporation
    Inventor: David W. Duquette
  • Patent number: 6566642
    Abstract: In an image recording apparatus which records an image on a recording medium by moving (subscanning) the recording medium while the recording medium is scanned (main scanning) with a scanner, a feed amount of the photosensitive material is detected by a detector and, on the basis of the detected result, a variation amount of movement speed is computed at a controller. A motor, which drives a light source unit in a main scanning direction is adjusted in accordance with the variation amount. Thus, a subscanning direction scanning line pitch error is corrected.
    Type: Grant
    Filed: October 4, 2000
    Date of Patent: May 20, 2003
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Futoshi Yoshida
  • Patent number: 6545284
    Abstract: The invention provides a face position detection method and a face position detection apparatus which can perform detection of the face position of a substrate with high precision, even when a pattern having a large stepped portion is formed by means of a plurality of layers on the surface of the substrate, and an exposure method and an exposure apparatus. Measurement beams S1 to S9 are irradiated onto a plurality of places on the surface of a substrate (object) W using a beam irradiation system (irradiation system) 4, the plurality of measurement beams S1 to S9 from the surface of the substrate W are then detected using a beam reception system (detection system) 5, and face positional information for the surface of the substrate W is obtained based on the detection results for the plurality of measurement beams S1 to S9 using a signal processing unit 41.
    Type: Grant
    Filed: July 5, 2000
    Date of Patent: April 8, 2003
    Assignee: Nikon Corporation
    Inventor: Takashi Masuyuki
  • Patent number: 6542839
    Abstract: An apparatus and a method for calibrating the position of a cassette indexer in a semiconductor process machine are described. The apparatus is constructed by a base plate, a top plate and at least two support members rigidly attaching the top plate to the base plate in a parallel relationship. On the bottom side of the top plate, is mounted at least two spaced-apart rows of distance sensors each having at least five sensors capable of sensing a distance in the cavity of the calibration apparatus. After a wafer blade is extended into the cavity of the apparatus, a sensor in the front row and a sensor in the back row can be used to sense a front-to-back tilt of the wafer blade, while two adjacent sensors in the same row can be used to sense a side-to-side tilt of the wafer blade.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: April 1, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hsueh-Chin Lu, Jeng-Ding Tseng, Chi-Wei Chang
  • Patent number: 6538252
    Abstract: In a method for determining alignment of line formations of a web, a radiation source emitting radiation and a detector with numerous radiation sensors for sensing the radiation are provided. The radiation source and the detector are reciprocated together simultaneously transversely across the web. During reciprocation across the web, at least one measuring location of the web is irradiated by the radiation source and measured values, based on local radiation intensities are measured by the radiation sensors of the detector. The measured values are communicated to a computer. The computer generates, based on the measured values and the relative positions of the radiation sensors to one another, a local structural image of the at least one measuring location of the web.
    Type: Grant
    Filed: April 25, 2000
    Date of Patent: March 25, 2003
    Assignee: PLEVA GmbH
    Inventors: Ralf Pleva, Harry Pleva
  • Patent number: 6525332
    Abstract: This invention relates to a method for detecting and compensating the disk tilt of an optical disk and an apparatus using it. The disk tilt causes the coma which degrades the carrier-to-signal ratio of a pickup. To reduce the coma induced by the disk tilt of an optical disk, the pickup of the present invention adapts a two-dimension (2-D) grating to produce a plurality of laser beams for detecting the disk tilt in the radial and tangential direction of the optical disk. In addition, according to the radial and tangential tilts of the disk, an actuation device adjusts a reflection angle of a reflective mean to change the incident angles of the laser beams for the compensation of the coma induced by the disk tilt of the optical disk.
    Type: Grant
    Filed: December 27, 1999
    Date of Patent: February 25, 2003
    Assignee: Industrial Technology Research Institute
    Inventors: Hung-Lu Chang, Ming-Feng Ho
  • Patent number: 6521906
    Abstract: Method of measuring a distortion angle between the longitudinal extent of the weft threads or rows of stitches in a textile strip (T) that is being continuously transported in a transporting apparatus (M) and the perpendicular to the transport direction, by means of a lighting arrangement (100A), a photoelectric sensor arrangement (107) with a plurality of sensor elements and an evaluation device (115) connected to the sensor arrangement for processing the values sampled from the sensor fields in order to obtain the distortion angle, wherein an arrangement of sensor elements with a plurality of rows and columns is used in which individual elements can be accessed as desired, and in a sequence of scanning steps different predetermined groups of sensor elements are interrogated, each of which is situated substantially on a sensor-field line, the groups involved in each scanning step being determined such that the scanned sensor-field lines are positioned at progressively altered angles with respect to the trans
    Type: Grant
    Filed: January 30, 2001
    Date of Patent: February 18, 2003
    Assignee: Mahlo GmbH & Co. KG
    Inventors: Karl-Heinz Beying, Gunter Abelen, Helmut Klaehsen
  • Patent number: 6512578
    Abstract: A surface inspection apparatus of the present invention comprises: an illumination optical system 100 which is fixed at a first predetermined angle with respect to a wafer 3 and which irradiates a substantially parallel illuminating light toward the entire surface of the wafer 3; an image pickup device 6 which is fixed at a second predetermined angle with respect to the wafer 3 and which receives diffracted light or scattered light from the wafer 3 and projects an image of the wafer; and an image processing apparatus 7 which performs a macro inspection by taking the image signal generated by the image pickup device 6 and carrying out image processing, and is further provided with a plurality of interference filters F1˜F4 to enable the variable setting of the wavelength of the illuminating light from the illumination optical system 100.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: January 28, 2003
    Assignee: Nikon Corporation
    Inventors: Koichiro Komatsu, Takeo Omori, Toshiaki Kitamura
  • Patent number: 6459092
    Abstract: A 6 degree-of-freedom (DOF) motion measuring apparatus using a multidirectional reflector, and a swing arm type optical system using the 6-DOF motion measuring apparatus to measure the 6-DOF motion of a slider in a hard disc drive (HDD) are provided. The 6-DOF motion measuring apparatus includes: a multidirectional reflector having at least three reflecting sides by which the laser beam is slit and reflected in three directions, the multidirectional reflector being provided to the object whose motion is to be measured; three position-sensitive detectors for receiving three sub-laser beams reflected from the multidirectional reflector; and a controller for calculating the 6-DOF motion of the multidirectional reflector using the intensity distributions of the three sub-laser beams received by the three position sensitive detectors assuming that the laser beam before reflection has a Gaussian intensity distribution.
    Type: Grant
    Filed: May 9, 2001
    Date of Patent: October 1, 2002
    Assignees: Korean Advanced Institute of Science & Technology, Samsung Electronics Co., Ltd.
    Inventors: Hyung-suck Cho, Won-shik Park, Kuk-won Ko, Noh-yeol Park, Yong-kyu Byun
  • Publication number: 20020043634
    Abstract: A radial tilt detector which is capable of detecting a tilt in a radial direction of an optical disc at a high degree of precision and being cost-effective and simple in head par: construction. The radial tilt detector is provided in an optical disc information recording/reproduction apparatus which includes an optical head for projecting a condensed beam of light on a recording surface of a rotating optical disc and receiving the projected beam of light reflected from the recording surface of the optical disc, a focus actuator for focusing the condensed beam of light on its projected position of the recording surface of the optical disc, and a driver for outputting a drive signal to drive the focus actuator.
    Type: Application
    Filed: March 30, 2001
    Publication date: April 18, 2002
    Inventor: Yukihiro Tagawa
  • Publication number: 20020027209
    Abstract: A tilt detection method and tilt detector which can make the size of an optical pickup small, improve an installation efficiency of the pickup and reduce a manufacturing cost of the pickup. A first light receiver and second light receiver output detected results corresponding to the amounts of received light to a comparator, respectively. The comparator detects a difference between output signals from the first and second light receivers and outputs the detected result as a tangential tilt signal. An analog delay element delays an output signal from tie comparator for a predetermined period of time corresponding to the rotation of an optical disc by 90° and outputs the delayed result as a radial tilt signal.
    Type: Application
    Filed: March 30, 2001
    Publication date: March 7, 2002
    Inventor: Yukihiro Tagawa
  • Publication number: 20020011576
    Abstract: A 6 degree-of-freedom (DOF) motion measuring apparatus using a multidirectional reflector, and a swing arm type optical system using the 6-DOF motion measuring apparatus to measure the 6-DOF motion of a slider in a hard disc drive (HDD) are provided. The 6-DOF motion measuring apparatus includes: a multidirectional reflector having at least three reflecting sides by which the laser beam is slit and reflected in three directions, the multidirectional reflector being provided to the object whose motion is to be measured; three position-sensitive detectors for receiving three sub-laser beams reflected from the multidirectional reflector; and a controller for calculating the 6-DOF motion of the multidirectional reflector using the intensity distributions of the three sub-laser beams received by the three position sensitive detectors assuming that the laser beam before reflection has a Gaussian intensity distribution.
    Type: Application
    Filed: May 9, 2001
    Publication date: January 31, 2002
    Inventors: Hyung-suck Cho, Won-shik Park, Kuk-won Ko, Noh-yeol Park, Yong-kyu Byun
  • Publication number: 20010042846
    Abstract: A tilt detector for detecting a tilt amount of a recording surface of an optical disc at a high degree of precision. The tilt detector comprises a light emitting diode for emitting a divergent beam of light to be incident on the recording surface of the optical disc, a collimating lens for collimating the divergent beam of light emitted from the light emitting diode and directing the collimated beam of light onto the recording surface of the optical disc, a condensing lens for condensing the collimated beam of light from the collimating lens, directed onto the recording surface of the optical disc and then reflected from the recording surface, and a photodiode for receiving the collimated beam of light condensed by the condensing lens and detecting the centroid of the intensity of the received beam of light, the photodiode including a receiving surface partitioned into a plurality of areas for receiving the collimated beam of light condensed by the condensing lens.
    Type: Application
    Filed: March 28, 2001
    Publication date: November 22, 2001
    Inventor: Mitsuhiro Togashi