Identifying Marking, Pattern, Or Indicia Patents (Class 250/559.44)
  • Patent number: 7378675
    Abstract: A method of indicating the condition of an item comprises illuminating the item to excite one or more photoluminescent markers incorporated within the item. Photoluminescent emission from the markers in response to the excitation is compared to one or more pre-defined photoluminescent signatures indicating different conditions of the item.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: May 27, 2008
    Assignee: NCR Corporation
    Inventors: Gary A. Ross, Graham I. Johnson, Barrie Clark, Simon J. Forrest
  • Patent number: 7375360
    Abstract: There is disclosed a light device for arranging a thin film pattern sensor array where a sensor array used for inspecting a thin film pattern is made to be arranged without a separate correction pattern film in accordance with an inspection subject. In the light device for arranging the thin film pattern sensor array, a shutter controls a width of a light beam which progresses from a light emitting element array to a sensor array. A correction pattern sled is installed in any one of a fixed location of an upper part of the shutter and a surface of the shutter to be transferable.
    Type: Grant
    Filed: January 9, 2006
    Date of Patent: May 20, 2008
    Assignee: LG Electronics Inc.
    Inventor: Kyung Gu Kim
  • Patent number: 7372062
    Abstract: A defect inspection device which inspects for surface defects in substrates, and which includes an illumination section that irradiates the substrate with illumination light having a variable incident angle, and a light-receiving section that receives light from the substrate irradiated with illumination light from the illumination section with a variable detection angle. The light-receiving section receives diffracted light emitted in substantially the same direction as the direction of incidence of the illumination light from the illumination section.
    Type: Grant
    Filed: October 20, 2006
    Date of Patent: May 13, 2008
    Assignee: Olympus Corporation
    Inventor: Toshihiko Tanaka
  • Patent number: 7361921
    Abstract: The orientation of the surface of an object to be examined is changed by adjusting the distance thereof to an optical measuring system in a plane-parallel manner in relation to a focusing plane of the optical measuring system, enabling high speeds of examination to be obtained during examination of the extended surfaces of the object. A distance-measurement system which is mounted in an auxiliary manner with regard to the measuring head enables fluctuations in the topography inside the surface of the object to be compensated in such a way that a currently received point or area can be optically sharpened.
    Type: Grant
    Filed: March 19, 2004
    Date of Patent: April 22, 2008
    Assignee: Icos Vision Systems NV
    Inventors: Detlef Gerhard, Johannes Lechner
  • Patent number: 7356176
    Abstract: When a component is replaced or replenished in a predetermined feeder, mounters 3A and 3B refer to mount data in accordance with the feeder number for the feeder and read out the mounting position of the replaced or replenished component. The mounting position data is transmitted to a substrate inspecting apparatus 5 together with the substrate identification code of a substrate first processed after reel replacement. When the substrate corresponding to the substrate identification code is supplied, the substrate inspecting apparatus 5 refers to substrate inspection data in accordance with the mounting position data, specifies a component to be inspected, and executes the mounting error inspection according to character-string recognition for the specified component. When a mounting error is detected in this inspection, the substrate inspecting apparatus 5 transmits no-good determination to the mounters 3A and 3B receiving information.
    Type: Grant
    Filed: February 26, 2004
    Date of Patent: April 8, 2008
    Assignee: Omron Corporation
    Inventors: Yoshiki Fujii, Hiroshi Yamazaki
  • Patent number: 7330042
    Abstract: It is an object of the present invention to provide a substrate inspection system, a substrate inspection method, and a substrate inspection apparatus for realizing efficient operation of inspecting both a large region and a small region of a substrate. The present invention includes a first inspection apparatus 11 executing a macro inspection of each of a plurality of substrates 14(l) to 14(n) and outputting information on presence/absence of a defect on each of the substrates; a storage unit 12 storing therein the information on presence/absence of a defect outputted from the first inspection apparatus for each of the substrates; and a second inspection apparatus 13 executing an inspection of a predetermined portion of the substrate. The second inspection apparatus refers to the presence/absence information stored in the storage unit, and inspects a substrate, the one without a defect, of the plural substrates 14(l) to 14(n).
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: February 12, 2008
    Assignee: Nikon Corporation
    Inventors: Kazuhiko Fukazawa, Yasuto Kawashima
  • Publication number: 20070295922
    Abstract: An apparatus for inspecting sidewall thickness of non-round transparent containers includes a conveyor for holding a container in stationary position and rotating the container around an axis. A light source directs light energy onto a sidewall of the container on the conveyor. An anamorphic lens system having a lens system axis directs onto a light sensor energy reflected from portions of the inside and outside surfaces of the container sidewall that are substantially parallel to the lens system axis. An information processor is responsive to the sensor for determining sidewall thickness at increments of container rotation as a function of separation at the sensor between light energies reflected from the inside and outside surfaces of the container sidewall.
    Type: Application
    Filed: June 26, 2006
    Publication date: December 27, 2007
    Inventor: James A. Ringlien
  • Patent number: 7309872
    Abstract: A paper sheets feature detector 20, through which a banknote 21 is carried and passed is provided with a carrying-in sensor part 22, a transmissive and reflective line light sensor 23, a magnetic sensor 24, a thickness sensor 27, and a carrying-out sensor part 28. When a watermark part of the banknote 21 is measured by the line light sensor 23, a watermark pattern is detected by a light transmissive sensor, and that pattern is not detected by a light reflective sensor, the banknote 21 is determined to be a true banknote. Watermark braille is similarly processed. When the thread is detected by the light transmissive sensor and the thread is not detected by the light reflective sensor, the banknote 21 is determined to be a true banknote.
    Type: Grant
    Filed: August 22, 2005
    Date of Patent: December 18, 2007
    Assignee: Fujitsu Frontech Limited
    Inventor: Masanori Mukai
  • Patent number: 7297969
    Abstract: A method and apparatus for use with a web of material having a web length dimension and a web surface, the method for placing mark sequences on the web surface every X distance along the web length dimension identifying location along the web length dimension, the method comprising the steps of monitoring web location, every X distance, placing a sequence of N marks on the web surface along the web length wherein each two adjacent marks define a space length dimension and wherein the pattern of space length dimensions formed by the N marks in the sequence together specify a specific web length location. The invention also includes a marking and defect locating system including a high speed printer and a high resolution, high speed camera to facilitate the methods.
    Type: Grant
    Filed: June 9, 2003
    Date of Patent: November 20, 2007
    Assignee: Cognex Technology and Investment Corporation
    Inventors: Jeffrey Wolinsky, Markku Jaaskelainen
  • Patent number: 7280200
    Abstract: A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical module for providing a light source to scan the wafer edge, a light channel detector for detecting light reflected from the wafer edge, and a processor and memory for converting detected signals to digital form, and for filtering and processing the digital data. The module includes a wafer edge scanning mechanism for projecting a collimated laser beam toward the wafer edge at a predetermined angle of incidence to scan the wafer edge for defects. The light channel detector detects light reflected from the wafer edge to obtain wafer edge data, which are applied to thresholds to determine the location of defects in the wafer edge.
    Type: Grant
    Filed: July 15, 2004
    Date of Patent: October 9, 2007
    Assignee: ADE Corporation
    Inventors: Mark P. Plemmons, Timothy R. Tiemeyer
  • Patent number: 7256389
    Abstract: A camera based inspection system for inspecting glass bottles made in a glass-forming machine. A single picture shows the heat distribution of an inspected portion of the bottle over a period of time whereby the operator will see a loss of stability in the glass process.
    Type: Grant
    Filed: November 7, 2005
    Date of Patent: August 14, 2007
    Assignee: Emhart Glass SA
    Inventor: Mukesh Prasad
  • Patent number: 7253428
    Abstract: A system for identifying a mark or other recess formed in a substrate and at least partially covered by at least one layer of opaque or visibly opaque material. The system includes a radiation source configured and positioned to direct incident electromagnetic radiation of at least one wavelength toward the substrate, a reflectometer positioned so as to receive electromagnetic radiation reflected from a location of the substrate, and at least one processor associated with the reflectometer for analyzing an intensity of electromagnetic radiation of each wavelength of radiation reflected from the substrate. The radiation source may direct incident radiation including a range of wavelengths toward a substrate.
    Type: Grant
    Filed: April 4, 2000
    Date of Patent: August 7, 2007
    Assignee: Micron Technology, Inc.
    Inventor: Joseph R. Little
  • Patent number: 7202492
    Abstract: An apparatus for detecting a substantially longitudinally extending feature of a running material web, especially the side edge of the web or an applied marker line, comprises a plurality of individually addressable light sources (22-1, to, 22-n) for illuminating, in one of multiple different lighting configurations, a section of the material web (10) containing the feature (12) to be detected; a spatially resolving detection unit (24) for recording the light emitted by the illuminated section as an optical response and for transmitting to an analysis unit (30) a data signal corresponding to the recorded light; an analysis unit (30) for determining, from the transmitted data signal, one or more characteristic parameters of the feature (12) to be detected; and a selection unit (32) for automatically selecting an optimal lighting configuration, which unit is arranged and adapted to address the light sources (22-1, to, 22-n) in different lighting configurations, to rate according to a pre-selected criterion the
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: April 10, 2007
    Assignee: FMS Force Measuring System AG
    Inventors: Jörg Inhelder, Roland Steininger
  • Patent number: 7199387
    Abstract: An apparatus and method for detecting a relatively narrow predetermined pattern, such as a trigger mark, on a moving printed product uses a plurality of sensor elements arranged linearly in an array and a switching apparatus for selecting a properly located subset of the sensor elements for detecting the predetermined pattern. During the operation of the apparatus, only those signals from sensors in the selected subset are checked continuously for the occurrence of a signal pattern corresponding to the predetermined pattern. Each time the predetermined signal pattern is found in the output signal from a sensor within the selected subset, a detection signal is generated. The lateral shifting of the predetermined pattern over time may be monitored by the selected sensors, and the selection of the subset of sensors for the continuous evaluation may be changed in response to the lateral shifting.
    Type: Grant
    Filed: January 25, 2005
    Date of Patent: April 3, 2007
    Assignee: MAN Roland Druckmaschinen AG
    Inventor: Franz Lampersberger
  • Patent number: 7126124
    Abstract: The present invention realizes accurate determination on marking without using an infrared sensor having high responsiveness and high precision. An infrared sensor is disposed such that a region of a predetermined range on the downstream side in the feed direction of an X-ray film with respect to a scan line, the region including the scan line as a laser beam irradiation position, becomes a detection region. Not only an infrared ray emitted from the laser beam irradiation position but also infrared rays emitted from a plurality of dots formed on the X-ray film irradiated with a laser beam can be also detected by the infrared sensor. Consequently, an output from the infrared sensor is stabilized and by comparing the output with a threshold, occurrence of erroneous printing, poor printing, and the like can be accurately detected.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: October 24, 2006
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Haruhiko Miyamoto
  • Patent number: 7102148
    Abstract: In an electronic component mounting apparatus capable of replacing a component placing device with any of plural other component placing devices different in performance, the distance between the center line of a component pick-up portion of a replaced component placing device and the optical axis of a board recognizing camera is calibrated easily and precisely. A movable table is positioned so that a reference mark provided on a base frame to reside in the visual field of a component recognizing camera comes in the visual field of a board recognizing camera and that at the same time, the end of the component pick-up portion of the replaced component placing device comes in the visual filed of the component recognizing camera.
    Type: Grant
    Filed: November 13, 2003
    Date of Patent: September 5, 2006
    Assignee: Fuji Machine Mfg. Co., Ltd.
    Inventors: Seigo Kodama, Shinsuke Suhara, Mizuho Nozawa
  • Patent number: 7060999
    Abstract: An apparatus for inspecting a container having a central axis and a sidewall with circumferentially extending external ribs. The apparatus includes a light source for directing a line-shaped light beam onto an external surface of the container, a light sensor disposed to receive reflected portions of the line-shaped beam, and an information processor coupled to the light sensor to determine a geometric characteristic of the sidewall as a function of the reflected light energy. The line-shaped light beam preferably has a long dimension parallel to the container axis, and sufficient length to illuminate at least one rib peak and at least one valley between the rib peaks. The sensor may be a linear array sensor that is particularly useful for measuring out-of-round, or an area array sensor for measuring out-of-round and sidewall thickness.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: June 13, 2006
    Assignee: Owens-Brockway Glass Container Inc.
    Inventor: John W. Juvinall
  • Patent number: 7012684
    Abstract: The present invention generally provides an apparatus and a method for inspecting a substrate in a processing system. In one embodiment, a substrate process inspection system comprises a plurality of optical inspection systems each configured to perform an optical inspection process at a first degree of optical resolution and an inspection platform configured to perform an optical inspection process at a second degree of optical resolution. The plurality of optical inspection systems each comprises a transmitter unit and a receiver unit. The substrate process inspection system further comprises a controller system connected to the plurality of optical inspection systems and the inspection platform.
    Type: Grant
    Filed: October 6, 2000
    Date of Patent: March 14, 2006
    Assignee: Applied Materials, Inc.
    Inventor: Reginald Hunter
  • Patent number: 6998631
    Abstract: An optoelectronic sensing device detects two contrasting marks arranged next to each other along two reading tracks on a moving web. An optical head is arranged above each reading track. Each head has a lighting source and a lens, by means of which the contrast marks are imaged on an associated light receiver. Information from the contrast mark is obtained from the output signal of the light receiver. An adjustable connector joins two substantially identical optical heads to each other so that their respective lenses are arranged asymmetrically in the associated optical head and are situated in immediate proximity to each other, which permits adjustment of the device for the smallest possible track spacings.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: February 14, 2006
    Assignee: Sick AG
    Inventors: Guenter Hirt, Matthias Opfolter
  • Patent number: 6940069
    Abstract: A pattern inspection method which irradiates a charged particle beam onto a surface of a specimen on which a pattern is formed, simultaneously detecting with plural sensors secondary particles emanated from the surface of the specimen by the irradiation, adding signals outputted from each sensor of the plural sensors which simultaneously detected the secondary particles, obtaining an image of the surface of the specimen on which the pattern is formed from the added signals and processing the image to detect a defect of the pattern.
    Type: Grant
    Filed: August 11, 2003
    Date of Patent: September 6, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji, Atsuko Takafuji
  • Patent number: 6927378
    Abstract: A monitoring apparatus and method for measuring light output gradient of a faceplate panel includes a top plate having a center detector and a plurality of corner detectors mounted along a major surface thereof. Lenses are optically coupled to a respective detector, and radiometers are electrically coupled to a respective detector. A bottom plate spaced apart from the top plate has a plurality of light outputs mounted along a major surface thereof and positioned to be opposite each detector. A light source is optically coupled to each light output through a splitter. A computer is electrically coupled to the light source for receiving feedback therefrom and for controlling the light source. The computer is also electrically coupled to each radiometer for recording data therefrom. During monitoring, a faceplate panel having a matrix applied thereto is accurately positioned between the top and bottom plates such that the center detector is located approximately above the center of the faceplate panel.
    Type: Grant
    Filed: May 5, 2003
    Date of Patent: August 9, 2005
    Assignee: Thomson Licensing S.A.
    Inventors: Istvan Gorog, Tony Tuan Vu, Anthony Stanley Baran
  • Patent number: 6903360
    Abstract: Disclosed is a method and apparatus for determining the presence or absence of a component on a printed circuit board. The method and apparatus utilizes a photo-sensor and photo-detector that are positioned within a predetermined non-contacting distance from the expected location of a given component under test. The photo-emitter emits a controlled amount of light energy on the expected location of the component under test on the printed circuit board. The photo-sensor detects the amount of reflection off the surface of the expected location of the component under test. Because the amount of reflection differs between reflection off the surface of the component under test and reflection off the surface of the bare board, based on the reflection measurement, the component under test can be classified as either present or absent at its expected location on the printed circuit board.
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: June 7, 2005
    Assignee: Agilent Technologies, Inc.
    Inventor: Robert E. McAuliffe
  • Patent number: 6885019
    Abstract: Systems and methods for operating an optical measurement system are disclosed which permit measurements to be made more uniformly in regions close the edge of a sample, such as a wafer. An optical measurement system can include a probe beam that is focused to an elliptically shaped spot on the surface of the sample. Improved measurements near the edge of the sample can be obtained by rotating the wafer with respect to the measurement spot to ensure that the short axis of the ellipse is perpendicular to the wafer edge.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: April 26, 2005
    Assignee: Therma-Wave, Inc.
    Inventors: Jeffrey T. Fanton, Craig Uhrich
  • Patent number: 6879406
    Abstract: One aspect of the present invention relates to a system and method for controlling an EUV mask fabrication process using a scatterometer. The system includes an EUV mask fabrication system comprising a translucent substrate having one or more layers of reflective material formed thereon and a patterned photoresist layer as the uppermost layer, a mask inspection system operatively connected to the mask fabrication system for examining the layers as they are being etched and developed by the mask fabrication system and generating data related thereto, and an EUV mask fabrication control system coupled to the mask inspection system for receiving data from the inspection system in order to regulate the mask fabrication system to facilitate obtaining desired critical dimensions. The method involves monitoring the etching of the features, generating data related to the features, and relaying the data to a control system to optimize the EUV mask fabrication process.
    Type: Grant
    Filed: October 1, 2003
    Date of Patent: April 12, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bharath Rangarajan, Ramkumar Subramanian, Bhanwar Singh
  • Patent number: 6864971
    Abstract: A system and method for performing optical inspection of structures on the surface of a semiconductor wafer. The wafer surface is illuminated with a polychromatic light source. A multiple-charged couple-device (CCD) camera is positioned to capture light diffracted by the structures on the wafer surface at the first order of diffraction. The captured light is then separated into a plurality of component wavelengths which are directed onto the CCDs. A digital filter creates a plurality of digitized diffractive images of the wafer surface at different component wavelengths. The diffractive images may be integrated and analyzed to detect defects in the structures, or may be, analyzed individually. An image at a particular wavelength may be selected and analyzed by using the known grating pitch of the structures to calculate the wavelength.
    Type: Grant
    Filed: March 8, 2002
    Date of Patent: March 8, 2005
    Assignee: ISOA, Inc.
    Inventors: YouLing Lin, A. Kathleen Hennessey, Yongqiang Liu, Yonghang Fu, Masami Yamashita, Ichiro Shimomura
  • Patent number: 6855946
    Abstract: In one embodiment, the present invention includes a method. In the method, a fiducial transistor is provided in an integrated circuit. Also in the method, a power conductor is coupled to a first terminal of the transistor. Also in the method, a ground conductor is coupled to a second terminal of the transistor. Also in the method, a control conductor is coupled to a third terminal of the transistor. Also in the method, other circuitry is provided, the other circuitry is operatively decoupled from the fiducial transistor and the other circuitry is operable without the fiducial transistor.
    Type: Grant
    Filed: March 21, 2003
    Date of Patent: February 15, 2005
    Assignee: Intel Corporation
    Inventors: Steve Seidel, Simon Tam, Valluri Rao, Stefan Rusu, Richard Livengood
  • Patent number: 6852991
    Abstract: The invention relates to an optoelectronic sensor which has a transmission device for transmitting a strip illumination in the direction of an object zone, a reception device for receiving light reflected or remitted from the object zone and for outputting at least one corresponding reception signal and an evaluation device for evaluating the at least one reception signal. A division of the strip illuminated object region into a plurality of monitoring segments is provided. Furthermore, a distance measuring device is provided by which, for at least one monitoring segment, the distance to an object disposed therein can be determined.
    Type: Grant
    Filed: May 20, 2002
    Date of Patent: February 8, 2005
    Assignee: Sick AG
    Inventors: Sebastian Pastor, Hans-Werner Pierenkemper
  • Patent number: 6845178
    Abstract: A method and apparatus for characterizing pixels in an image of an object surface by providing at least two images of the surface wherein each pixel has a unique location common to all of the images; comparing each pixel value at each location to an identification matrix; and identifying the region in which each pixel is located based on the comparison. The matrix can comprise a plurality of non-pixel values representing one or more regions, each of the regions defining at least one surface attribute. One embodiment provides at least two references images of a template using the same technique used to obtain each image of the surface, and creating the matrix using the reference images. Providing at least two images comprises providing a first and second image, wherein the surface is illuminated using a first and second source of illumination, or providing the first using a source of illumination and providing the second from the first.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: January 18, 2005
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Frank Evans, Mark Singer
  • Patent number: 6819425
    Abstract: The X, Y and Rx positions of a mask stage are measured using two optical encoder-reading heads measuring displacements of respective grid gratings mounted on the mask stage. The grid gratings are preferably provided on cut-away portions of the mask table so as to be co-planar with the pattern on the mask itself. Measurements of the table position in the other degrees of freedom can be measured with capacitative or optical height sensors.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: November 16, 2004
    Assignee: ASML Netherland B.V.
    Inventor: Yim Bun Patrick Kwan
  • Publication number: 20040217308
    Abstract: An optoelectronic sensing device detects two contrasting marks arranged next to each other along two reading tracks on a moving web. An optical head is arranged above each reading track. Each head has a lighting source and a lens, by means of which the contrast marks are imaged on an associated light receiver. Information from the contrast mark is obtained from the output signal of the light receiver. An adjustable connector joins two substantially identical optical heads to each other so that their respective lenses are arranged asymmetrically in the associated optical head and are situated in immediate proximity to each other, which permits adjustment of the device for the smallest possible track spacings.
    Type: Application
    Filed: February 23, 2004
    Publication date: November 4, 2004
    Applicant: Sick AG
    Inventors: Guenter Hirt, Matthias Opfolter
  • Publication number: 20040188644
    Abstract: The present invention relates generally to the field of printing presses, and specifically to a method and apparatus for visually inspecting a web moving on a printing press using a CMOS based image recording device and preferably a LED light source. The LED light source includes at least two colors of light, such as white and blue, for highlighting various ink colors with respect to the web.
    Type: Application
    Filed: April 9, 2004
    Publication date: September 30, 2004
    Applicant: Quad/Tech, Inc.
    Inventors: Jeffrey P. Rappette, Andrew F. Tischendorf, Mark A. Gerloff, Arie S. Rechavel, Edward J. Boris, Frank N. Vroman, Michael D. Sisco, Paul Warner
  • Patent number: 6753542
    Abstract: According to the present invention, there is disclosed a defect detection apparatus comprising an illuminating unit which irradiates an inspection object with illuminating light, and an image pickup unit which picks up an image of diffracted light from the inspection object to perform defect inspection of the inspection object from image data picked up by the image pickup unit, the apparatus further comprising a diffraction angle calculation unit to obtain the diffraction angle of the illuminating light with respect to the inspection object, which is optimum for picking up the image of the diffracted light, based on design information of the inspection object, and an illuminating setting unit which sets the angle of incidence of the illuminating unit to the diffraction angle calculated by the diffraction angle calculation unit.
    Type: Grant
    Filed: March 21, 2003
    Date of Patent: June 22, 2004
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Yoshinari Ota
  • Patent number: 6753541
    Abstract: In one embodiment, the present invention includes a method. In the method, a fiducial transistor is provided in an integrated circuit. Also in the method, a power conductor is coupled to a first terminal of the transistor. Also in the method, a ground conductor is coupled to a second terminal of the transistor. Also in the method, a control conductor is coupled to a third terminal of the transistor. Also in the method, other circuitry is provided, the other circuitry is operatively decoupled from the fiducial transistor and the other circuitry is operable without the fiducial transistor.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: June 22, 2004
    Assignee: Intel Corporation
    Inventors: Steve Seidel, Simon Tam, Valluri Rao, Stefan Rusu, Richard Livengood
  • Patent number: 6750466
    Abstract: A web inspection system provides detection of web flaws along the machine direction and cross direction of a web. The detectable percent contrast between good web material and bad web material in one embodiment approaches noise level. The web inspection system utilizes a multiple of smart cameras connected to a host computer via an ethernet hub. Each smart camera includes a line scan camera for producing digital pixels, a means for lighting and pixel correction on a pixel by pixel basis, a web edge detector for monitoring the edges of a web, a multi-pipeline flaw detection pre-processor for detecting very small changes in the web material, a run length encoder for generating data regarding the location of each group of potential flaws in a cross direction, a 2D blob detector and analyzer for generating data regarding the location of block flaws along a machine direction, and an inspect/reject analysis for determining the actual flaw data from the potential flaw data.
    Type: Grant
    Filed: February 9, 2001
    Date of Patent: June 15, 2004
    Assignee: Wintriss Engineering Corporation
    Inventors: Sujoy D. Guha, Chris M. Kiraly, Robin D. Becker
  • Patent number: 6750465
    Abstract: An apparatus for evaluating distinguishing authenticity features comprising diffraction elements on a document which is illuminated by an illumination source. The distinguishing authenticity element which is to be examined, diffracts the beam of the illuminating source and projects it onto an evaluating unit in the device. In order to be independent of the nature and location of the diffraction pattern, the diffraction pattern derived from the document to be examined is projected onto a screen and the image of the pattern recorded and evaluated by a camera (matrix or cells).
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: June 15, 2004
    Assignee: Bundesdruckerei GmbH
    Inventors: Arnim Franz-Burgholz, Roland Gutmann, Harald Hoeppner, Thomas Löer, Detlef Märtens, Günther Dausmann, Zishao Yang, Robert Massen, Thomas Franz, Thomas Leitner, Jörg Eberhardt
  • Patent number: 6724005
    Abstract: When performing a defect inspection of a wafer W, defect observation equipment 3 first inputs defect position data from defect detection equipment 2. After a plurality of measurement points are set, the amount of position shift between the detection coordinate system and the observation coordinate system is measured for each measurement point. Then, the defect observation equipment 3 creates a first-order defect position correction formula in order to make reasonable the defect position in the detection coordinate system, based on the position shift amounts of the measurement points. This first-order defect position correction formula has three terms, for the offset component, the magnification component, and the rotation component of the observation coordinate system with respect to the detection coordinate system. Next, using the defect position correction formula, a defect position detected by the defect detection equipment 2 is corrected.
    Type: Grant
    Filed: October 17, 2001
    Date of Patent: April 20, 2004
    Assignee: Applied Materials, Inc.
    Inventor: Toshifumi Tokumoto
  • Patent number: 6717168
    Abstract: A device for detecting the marginal edge or a marking of a material web. The device contains an optical sensor and two light sources associated with the optical sensor. The first light source emits directed light beams and aims such beams at the material web. The first light source is formed by a plurality of light-emitting diodes, arranged such that the light reflected by the material web in a diffused manner cannot be detected by the optical sensor. A second light source is also associated with the optical sensor. The second light source contains a diffuser disk. The diffuser disk generates diffused light that is emitted in all three-dimensional directions. When the second light source is active, the condition of reflection is satisfied so that it is possible to scan the material web having mirror-like reflection.
    Type: Grant
    Filed: May 8, 2001
    Date of Patent: April 6, 2004
    Assignee: Erhardt Leimer GmbH
    Inventors: Juergen Eisen, Harald Heim
  • Patent number: 6710364
    Abstract: The marking of identification and orientation information along the edge (E) of a semiconductor wafer (20, 20′) is disclosed. The information may be marked by way of laser marking at one or more locations (10) along a flat portion (14) or bevel (12t, 12b) of the edge (E) of the wafer (20, 20′). The wafer marking (10) may be encoded, for example by way of a 2-D bar code. A system (30) for reading the identification information from wafers (20, 20′) in a carrier (32) is also disclosed. The system (30) includes a sensor (36) for sensing reflected light from the wafer markings (10) along the wafer edge (E), and for decoding identification and orientation therefrom. A motor (38), under the control of feedback (RFB) from the sensor (36), rotates the wafers (20, 20′) by way of a roller (39) until the wafer marking (10) is in view by the sensor (36). A processing system (40), which includes a rotatable chuck (41) upon which the wafer (20, 20′) is placed, is also disclosed.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: March 23, 2004
    Assignee: Texas Instruments Incorporated
    Inventors: Richard L. Guldi, Keith W. Melcher, John Williston
  • Patent number: 6711364
    Abstract: Compensation patterns are formed on a conveyer belt. Sensors detect the compensation patterns and output a signal. A frequency component that is above the frequency that corresponds to the compensation patters is cut off by a filter. The positions of the compensation patters are determined based on the output of the filter. The filter is, for example, an IIR type digital filter. A correction value is calculated based on the determined positions of the compensation patters. A driver is controlled based on the correction value. As a result, images of different colors can be matched accurately.
    Type: Grant
    Filed: September 20, 2002
    Date of Patent: March 23, 2004
    Assignee: Ricoh Company, Ltd.
    Inventor: Tadashi Shinohara
  • Publication number: 20040051061
    Abstract: The present invention relates generally to the field of printing presses, and specifically to a method and apparatus for visually inspecting a web moving on a printing press using a CMOS based image recording device and preferably a LED light source.
    Type: Application
    Filed: September 17, 2002
    Publication date: March 18, 2004
    Applicant: Quad/Tech, Inc.
    Inventor: Paul Warner
  • Patent number: 6707056
    Abstract: A method for operating an optical measurement system is disclosed which permits measurements to be made more uniformly in regions close the edge of a wafer. The optical measurement system includes a probe beam which is focused to an elliptically shaped spot on the surface of the wafer. Improved measurements near the wafer's edge are obtained by rotating the wafer with respect to the measurement spot to insure that the short axis of the ellipse is perpendicular to the wafer edge.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: March 16, 2004
    Assignee: Therma-Wave, Inc.
    Inventors: Jeffrey T. Fanton, Craig Uhrich
  • Patent number: 6694205
    Abstract: A system and method for detecting a registration mark representing a binary code sequence of N bits. A sensor is provided to output values indicating whether positive bits, negative bits, or no bits of the binary code sequence are detected. A sequence of N sensor values are provided to a code matching filter for comparison with the binary code sequence. The code matching filter increases a value of a detection signal for each sensor value which matches its corresponding bit, decreases the detection signal value for each sensor value which is complementary to its corresponding bit, and neither increases nor decreases the detection signal value in response to a sensor value indicating detection of no bit of the binary code sequence. When the binary code sequence is a Barker code, the code matching filter yields the ideal Barker auto-correlation function response whenever the binary code sequence is detected.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: February 17, 2004
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Mark D. Perkins, Kenneth H. Suess
  • Patent number: 6633051
    Abstract: A surface sensing device includes an articulating head adapted for attachment to the spindle of a measuring machine and having two relatively rotatable parts capable of rotation about two mutually perpendicular axes. The device additionally includes a stylus assembly having a relatively stiff hollow stylus carrier, and a relatively flexible hollow stylus. An optical transducer system is provided within the stylus assembly and comprises a fixed light source which directs a beam of light towards a stylus tip, and a retro-reflective component at the tip which reflects the beam back to a fixed detector. The arrangement is such that lateral displacement of the stylus tip when the tip is in contact with a surface can be measured directly.
    Type: Grant
    Filed: December 1, 2000
    Date of Patent: October 14, 2003
    Assignee: Renishaw PLC
    Inventors: Alan J Holloway, Kevyn B Jonas, David A Wright
  • Patent number: 6608321
    Abstract: An inspection tool or inspection system can be utilized to determine whether the appropriate pattern is on a reticle. The reticle can be associated with EUV lithographic tools. The system utilizes at least two wavelengths of light. The light is directed to the reticle at the at least two wavelengths of light and detected by a detector. The image associated with the first wavelength is subtracted from or otherwise processed with respect to the image associated with the second wavelength to improve contrast ratio.
    Type: Grant
    Filed: February 1, 2001
    Date of Patent: August 19, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bruno M. La Fontaine, Harry J. Levinson, Jeffrey A. Schefske
  • Patent number: 6603135
    Abstract: A method of detecting the positions occupied on a pallet by stacks of blanks arranged on the pallet in a number of superimposed layers and, in each layer, in a number of side by side rows, to enable automatic pickup of each stack and supply of the stack to a cigarette packing machine; the method including the step of moving a sensor along each row to determine a lateral contour of the row close to bases of the relative stacks.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: August 5, 2003
    Assignee: G.D. Societa′ per Azioni
    Inventor: Mario Spatafora
  • Patent number: 6600556
    Abstract: A method for detecting manufacturing marks on sputtered disks includes rotating the disk three hundred and sixty degrees. As the disk rotates, a sensor is used to detect a quantity of manufacturing marks formed on the outer edge of the disk. If there are less than four manufacturing marks on the edge of the disk, a signal is sent to a warning device to indicate that the disk is defective. The lack of a manufacturing mark is an indication that a gripper used to hold the disk within the sputtering chamber during the sputtering process is bent or otherwise misaligned. As such, a signal is also sent to the warning device to indicate that the grippers within the sputtering chamber must be inspected.
    Type: Grant
    Filed: January 10, 2001
    Date of Patent: July 29, 2003
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: Paul M. Green, Bob C. Robinson, Eric Christian O'Brien, Elmer Tyree York
  • Patent number: 6585341
    Abstract: A system of classifying the type of incoming media entering an inkjet or other printing mechanism is provided to identify the media according to markings or identifying indicia on the back surface of the media opposite the printing surface which ultimately bears the printed image. The printing surface of the incoming media is optically scanned using a blue-violet light to obtain both diffuse and specular reflectance values. A spatial frequency signature for the incoming media is compared with known values for different types of media to classify the media according to major categories (transparencies, glossy photo media, premium or plain paper), and specific types of media within these categories (matte photo, premium, or high-gloss photo media). An optimum print mode is selected according to the determined media type to automatically generate outstanding images without bothersome user intervention. A printing mechanism constructed to implement this method is also provided.
    Type: Grant
    Filed: August 30, 2000
    Date of Patent: July 1, 2003
    Assignee: Hewlett-Packard Company
    Inventors: Steven H. Walker, Stuart A. Scofield
  • Publication number: 20030116728
    Abstract: The optical characteristics of a banknote are measured by using first and second sets of optical devices positioned on respective sides of the banknote path. Each device includes a transmitter and an adjacent pair of receivers, the receivers being capable of receiving light from the adjacent transmitter which has been diffusively reflected by the banknote, and each receiver also receiving light from the transmitter of the opposed device. Calibration is carried out by moving a reference body of predetermined reflectance and transmittance characteristics into the banknote path between the devices.
    Type: Application
    Filed: December 16, 2002
    Publication date: June 26, 2003
    Inventor: Christian Voser
  • Patent number: 6573523
    Abstract: A system for identifying a substrate based on indicia formed in a surface of the substrate. The method includes forming the indicia having edge features and substantially flat features. The indicia is illuminated with incident illumination from an illumination source while moving the illumination source relative to the substrate, thereby scanning the incident illumination over the indicia. Reflected illumination having a first intensity level is received from the edge features of the indicia, and reflected illumination having a second intensity level is received from the substantially flat features of the indicia. The reflected illumination is detected to produce at least one output signal having a first amplitude level corresponding to the first intensity level and a second amplitude level corresponding to the second intensity level. The output signal is processed based at least in part upon the first and second intensity levels to form at least one image portion of the indicia.
    Type: Grant
    Filed: December 12, 2001
    Date of Patent: June 3, 2003
    Assignee: LSI Logic Corporation
    Inventor: Thomas F. Long
  • Patent number: 6566670
    Abstract: A method and system for guiding a web of moving material is disclosed. The system includes a plurality of variable light sources that can project light onto the surface of the web. One light source or a combination of light sources can be selected to project light onto the web, and the wavelength of the light can be selected. A light detector receives light reflected from the surface of the web and generates a data signal in response to the light received. A controller can be used to analyze the reflected light to determine the position of the web of moving material. The system enables the lateral and/or longitudinal position of various types of webs to be efficiently and effectively determined based upon the position of a line, edge, or other mark disposed on the surface of the web.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: May 20, 2003
    Assignee: Accuweb, Inc.
    Inventors: Raymond A. Buisker, Andrew Kalnajs