Abstract: A package includes an electronic die, a photonic die underlying and electronically communicating with the electronic die, a lens disposed on the electronic die, and a prism structure disposed on the lens and optically coupled to the photonic die. The prism structure includes first and second polymer layers, the first polymer layer includes a first curved surface concaving toward the photonic die, the second polymer layer embedded in the first polymer layer includes a second curved surface substantially conforming to the first curved surface, and an outer sidewall of the second polymer layer substantially aligned with an outer sidewall of the first polymer layer.

Abstract: A pointing device for detecting motion relative to a surface includes a transmitter configured to emit an electromagnetic signal toward the surface. The pointing device further includes a receiver configured to receive a reflection of the electromagnetic signal from the surface. The pointing device further includes a processor configured to determine the motion based on a Doppler-shift between the electromagnetic signal and its reflection.

Abstract: A method for characterizing structures etched in a substrate, such as a wafer is disclosed. The method includes the following steps: illuminating the bottom of at least one structure with an illumination beam issued from a light source emitting light with a wavelength adapted to be transmitted through the substrate, acquiring, with an imaging device positioned on the bottom side of said substrate, at least one image of a bottom of the at least one structure through the substrate, and measuring at least one data, called lateral data, relating to a lateral dimension of the bottom of the at least one HAR structure from the at least one acquired image. A system implementing such a method is also disclosed.

Abstract: Method and apparatus for capturing an image of a lateral face of a wooden board, where the lateral face (2) is parallel to a main axis of development of the wooden board (3), with the method comprising a step for feeding the wooden board (3) with the lateral face (2) transverse to a feeding direction (4), a step for illuminating the lateral face (2), a step for capturing, using a plurality of area scan cameras (9), a plurality of first digital images at different times, where each first digital image comprises a portion (10) of the lateral face (2) extending for an entire height of the lateral face (2) transverse to the main axis of development and for part of a length of the lateral face (2) along the main axis of development, where the set of all such portions (10) corresponds to the entire lateral face (2), and a merging step for merging the first digital images using an electronic processing unit to obtain a second digital image showing the entire lateral face (2).

Abstract: The present disclosure provides an electronic system with defect identification function and a method of qualifying a photoresist pattern formed using a lithography process. The electronic system includes an inspection apparatus and a processor associated with the inspection apparatus. The inspection apparatus is used for acquiring at least one image of the specimen on which a photoresist pattern is formed using a lithography process. The processor is configured to automatically apply machine learning processes implemented through one or more neural networks to identify at least one defect present in the photoresist pattern.

Abstract: The invention provides systems and methods for making sequencing libraries that are useful for quantitatively analyzing nucleic acids in a sample. Sample nucleic acids are randomly cleaved at, and PCR handled are attached to, a random cut site. The nucleic acid is amplified into a sequencing library in which a sequencing primer generates a sequence read from adjacent the random cut site. The sequence reads can be mapped to a reference, but they will also include a unique identifier sequence that comes from within the nucleic acid molecule being analyzed, i.e., an intrinsic molecular identifier (IMI). The IMI is unique for each molecule and can thus be used to deduplicate sequence reads originating from the same molecule.

Abstract: An overlay alignment mark located in a patterned wafer and a method for measuring overlay error are provided, the patterned wafer having a lower-layer pattern in a first layer thereof and an upper-layer pattern in a second layer thereof above the first layer, the overlay alignment mark comprising: a first pattern, which is a portion of the lower-layer pattern and comprises a pair of solid features formed in the first layer; and a second pattern, which is a portion of the upper-layer pattern and comprises two pairs of hollowed features formed in the second layer, with two imaginary lines connecting between geometric centers of respective pairs in the two pairs of hollowed features extending in two mutually orthogonal directions, respectively; an orthographic projection of the pair of solid features on the wafer at least partially overlaps with an orthographic projection of a respective pair of hollowed features on the wafer.

Abstract: The present disclosure relates to a method for measuring full-field strain of an ultra-high temperature (UHT) object based on a digital image correlation method. The temperature range is from normal temperature to 3500 degrees Celsius. The method includes the steps of selecting a proper high-temperature-resistant speckle material, tantalum carbide powder, according to the characteristics of the object to be measured. First, polishing a to-be-measured surface of a tungsten test piece to remove an oxide layer, then mixing the tantalum carbide (TaC) powder and absolute ethanol to form a paste according to a mass ratio of 1:2. Making randomly distributed speckles from the mixture on the to-be-measured surface of the test piece which has been processed. In order to improve firmness and stability of the newly made speckles, performing curing treatment to the speckles.

Abstract: A system and method for estimating a pose of an imaging device for one or more images is provided.

Abstract: A detection device includes: a detector that detects an object from a first viewpoint; an information calculator that calculates first model information including shape information on the object from the first viewpoint by using detection results of the detector; a light source calculator that calculates light source information on the light source by using a first taken image obtained by imaging a space including a light source that irradiates the object with illumination light and including the object; and a position calculator that calculates a positional relation between the first viewpoint and the object by using the light source information as information used to integrate the first model information and second model information including shape information obtained by detecting the object from a second viewpoint different from the first viewpoint.

Abstract: A medium conveying apparatus includes a moving mechanism to move the set guide, a guide pair including a first guide having a first opening and a second opening, and a second guide to regulate a vertical direction of the medium conveyance path, a light emitting element and a light receiving element located on an outside of the medium conveyance path with the first guide in between, and on the downstream side of the first opening and the second opening so as to be apart from the moving mechanism by a predetermined distance or more in the medium conveying direction, a first light guide which is bent so as to guide a light emitted from the light emitting element to the first opening, and a second light guide which is bent so as to guide the light incident from the second opening to the light receiving element.

Abstract: Herein disclosed are a wafer, a wafer testing system, and a method thereof. Said wafer testing method comprises the following steps. First, an incident light is provided toward a wafer. And, a wafer surface image corresponded to the wafer is generated. Then, determining whether the wafer surface image has a plurality of first strips and a plurality of second strips, and the plurality of first strips and the plurality of second strips are symmetrical. When the wafer surface image has the plurality of first strips and the plurality of second strips, and the plurality of first strips and the plurality of second strips are symmetrical, a qualified signal corresponded to the wafer is provided.

Abstract: A perfusion chamber for use in a phantom includes a waterproof housing containing a porous material defining fluid paths between pores and tubular channels within the porous material. A reservoir for use in a phantom, a pump mechanism for use within the bore of an MRI scanner, a phantom for use in an MRI scanner, and a method for calibrating a scanning device are disclosed. Also disclosed is apparatus for validating images of a phantom that includes: one or more sensors for coupling to a phantom to be imaged; a control/logging system configured to: collect sensor data during imaging of the phantom and pass this as input to a computer model; compare the image data with reference image data produced using the computer model; and return a pass score depending on the comparison. A system and method for verifying images of a phantom are also disclosed.

Abstract: A system for time-resolved fluoroimmunoassay detection is disclosed. The system comprises a receptacle with a sample volume adapted for receiving a sample therein; a light source adapted to emit pulsed excitation light illumination optics adapted to collect the pulsed excitation light from the light source and to deliver the pulsed excitation light to the sample volume in the receptacle; a detection device adapted for gated detection of fluorescence radiation at least in a detection spectral range; detection optics adapted to collect fluorescence radiation from the receptacle at least in the detection spectral range and deliver the fluorescence radiation to the detection device; and an optical filter device configured for the separation of excitation light and detection light. A method for time-resolved fluoroimmunoassay detection is also provided.

Abstract: The present disclosure provides a method, an apparatus, and a system for health management. The method includes: receiving, from a graphical interface of a first user terminal, login information of a first user account, the first user terminal having a memory, a processor, and a measurement sensor; obtaining, by the first user terminal, physiological data of a user based on a measurement value detected by the measurement sensor; storing the physiological data into a medical record corresponding to the first user account; and sending, by the first user terminal via a server, the physiological data to a second user terminal associated with the first user account remotely.

Abstract: A load port adapted for wafer cassettes of different sizes detects storage states of wafers stored in the wafer cassettes. The load port includes a body, a positioning mechanism, a sensing mechanism, and a detecting mechanism. The body has a carrier base. The positioning mechanism is disposed on the body and has a positioning unit disposed on the carrier base, a hooking unit, and a limiting unit. The hooking unit is disposed in the body and has a driving assembly and a hooking element. The driving assembly is disposed in the body. The hooking element is mounted to the driving assembly. The sensing mechanism is disposed on the carrier base. The detecting mechanism is disposed on the body, detects the storage states of wafers stored in the wafer cassette, and has a first detecting assembly and a second detecting assembly spaced apart from each other.

Abstract: A time-wavelength optical sampling system may be configured to determine a substance's composition based on variations in optical pulses caused by the substance's absorption of wavelengths of the pulse. A dispersion medium may disperse pulses to form stretched signal pulses that are incident on a substance under test. Optical gating is used to overlap each signal pulse with a portion of a reference pulse to generate a cross-correlation signal corresponding to a portion of the signal pulse, which may be detected by a slow detection speed detector. A controller controls delay introduced to the reference pulses so that different wavelength ranges are sampled for various signal pulses, thereby enabling the entire wavelength range for the signal pulses to be sampled over time without requiring an expensive high-speed optical detector. By analyzing absorption across the entire wavelength range as indicated by cross-correlation signals, the composition of the substance can be identified.

Abstract: A water control system which encompasses a leak sensor and a water control unit adapted for installation on a water supply line, both capable of wireless data communication with a gateway acting as an interface between the leak sensor and water control unit and a cloud server or a remote user application.

Abstract: An apparatus for inspecting object surface according to an embodiment includes: an imaging device including an imaging area; an optical source; and a group of optical devices including a mirror and a lens, and causing a reflected light other than a regular reflection light from an object to be reflected by a mirror surface of the mirror, and to form an image in the imaging area of the imaging device through the lens, the regular reflection light being caused by a light incident to a surface of the object from the optical source, wherein the optical source, the mirror, the lens, and the imaging device are arranged in such a manner that the regular reflection light is not incident to the imaging area of the imaging device through the mirror and the lens.

Abstract: A method for automated detection of defects in a workpiece surface and generation of a robot program for the machining of the workpiece is described. In accordance with one embodiment, the method comprises the localization of defects in a surface of a workpiece as well as determining a three-dimensional topography of the localized defects and categorizing at least one localized defect based on its topography. Dependent on the defect category of the at least one defect, a machining process is selected and, in accordance with the selected machining process, a robot program for the robot-assisted machining of the at least one defect is generated with the assistance of a computer.

Abstract: A system for detecting envelopes from multi-fed documents in a scanning system with a scanning track along which documents move laterally toward a scanning station having a plurality of spaced apart penetrating detectors across the scanning track. The scanners detect a leading edge as a single layer material, i.e. without an air gap and the interior as having an air gap in the document scanned. If a document has an interior air gap, but the leading edge does not, it is first assumed to be an envelope.

Abstract: Flight based infrared imaging systems and related techniques, and in particular UAS based thermal imaging systems, are provided to improve the monitoring capabilities of such systems over conventional infrared monitoring systems. An infrared imaging system is configured to compensate for various environmental effects (e.g., position and/or strength of the sun, atmospheric effects) to provide high resolution and accuracy radiometric measurements of targets imaged by the infrared imaging system. An infrared imaging system is alternatively configured to monitor and determine environmental conditions, modify data received from infrared imaging systems and other systems, modify flight paths and other commands, and/or create a representation of the environment.

Abstract: A surface inspection system (10) for inspecting the surface of sheet elements (4) present in an inspection area (20). The system includes an image evaluation unit (18), a camera (12), a dark-field illuminator (14) and a bright-field illuminator (16). The image evaluation unit (18) subtracts a line image captured under bright-field illumination conditions from a line image captured under dark-field illumination conditions.

Abstract: An imprint apparatus comprises: a dispensing unit that dispenses a liquid to a substrate; a first measurement unit that measures a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit that measures a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit that controls the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit.

Abstract: Provided is a method of inspecting the back surface of an epitaxial wafer, capable of detecting pin mark defects in the back surface of the epitaxial wafer and quantitatively evaluating the defect size of individual point defects of the pin mark defects. The method of inspecting the back surface of an epitaxial wafer includes an imaging step of consecutively taking partial images of the back surface while moving the optical system using the scanning unit; an acquisition step of acquiring a full image of the back surface from the partial images; a detection step of detecting, in the full image, pin mark defects constituted by a set of a plurality of point defects present in the back surface of the silicon wafer 1; and a digitalization step of digitalizing the individual point defects to calculate the defect area of the individual point defects of the detected pin mark defects.

Abstract: An object detecting device, an object detecting method and a non-transitory computer-readable medium are provided. The object detecting method includes the following steps: A classifier generates a current color image and a current gray scale image. The classifier generates an initial characteristic pattern from the current color image via a neural network algorithm. The classifier adjusts a current dimension of the initial characteristic pattern to generate an adjusted characteristic pattern according to a gray scale image dimension of the current gray scale image. The classifier concatenates the adjusted characteristic pattern and the current gray scale image to calculate a class confidence. The classifier determines whether the class confidence is larger than a confidence threshold, and outputs a current classification result if the class confidence is larger than the confidence threshold. A storage device stories the current classification result.

Abstract: Methods and systems are disclosed that provide nuisance reduction in images, such as semiconductor images that include one or more metal lines. A potential defect is correlated against pixel grey level intensity charts for two perpendicular axes. A position of the potential defect relative to a pattern, such as a metal line, is determined along the two axes. The potential defect can be classified as a defect of interest or nuisance event.

Abstract: A device includes a time-of-flight ranging sensor configured to transmit optical pulse signals and to receive return optical pulse signals. The time-of-flight ranging sensor processes the return optical pulse signals to sense distances to a plurality of objects and to generate a confidence value indicating whether one of the plurality of objects has a highly reflective surface. The time-of-flight sensor generates a range estimation signal including a plurality of sensed distances and the confidence value. The image capture device includes autofocusing circuitry coupled to the time-of-flight sensor to receive the range estimation signal and configured to control focusing based upon the sensed distances responsive to the confidence value indicating none of the plurality of objects has a highly reflective surface. The autofocusing circuitry controls focusing independent of the sensed distances responsive to the confidence value indicating one of the objects has a highly reflective surface.

Abstract: The invention relates to a method for manufacturing multi-component aerosol forming articles, each aerosol forming article defining a longitudinal axis and comprising N components serially juxtaposed along the longitudinal axis, where N is an integer?2, the method comprising: —providing transporting means for transporting components of aerosol forming articles in a transporting direction, said transporting means defining seats along said transporting direction; —supplying seats of said transporting means with a first component for each aerosol forming article by positioning said first components one after the other along the transporting direction with their longitudinal axis parallel one to the others; —checking each seat for the presence of said first component; —adjoining a second component to the first component in a lengthwise axial manner in a given seat only if the first component is present in said given seat.

Abstract: An IC device 4 of the present invention includes a robot arm 6 for conveying IC devices D to a test head 2 for testing the IC devices. The test head 2 includes sockets 3 having placement surfaces 3a onto which the IC devices D are placed and for attaching the IC devices placed on the placement surfaces to the test head. The robot arm 6 includes a contact head 61 for holding the IC devices while the IC devices are conveyed and for pressing the IC devices onto the test head during testing, and a non-contact displacement meter 71 that moves in association with the movement of the contact head 61. The non-contact displacement meter 71 is mounted on the robot arm 6 so as to measure a distance by emitting a beam in a direction perpendicular to the placement surfaces 3a.

Abstract: A drilling apparatus includes: a table supporting a plate; a drill machining a through-hole in the plate; an annular pressing member pressing the plate around the through-hole; a camera capturing a plate surface image through an inner space of the pressing member; and a moving device moving the drill between machining and retraction positions, the machining position being at which the drill center coincides with the pressing member center, the retraction position being a position at which the drill is positioned outside a field of view of the camera. Insertion holes distributed in a circumferential direction are formed in the pressing member, and illumination devices, each emitting light to the plate surface around the through-hole, are inserted in the respective insertion holes. An optical axis direction of each of the illumination devices inserted in the respective insertion holes and the plate surface form an angle of 25 to 60°.

Abstract: Time required for exchanging game media for another type of game media can be shortened. A game medium exchange device includes: a display device; an arranging mechanism configured to hold one or more convertible game media and one or more inconvertible game media in such a manner that the convertible game media and the inconvertible game media are arranged in their respective sections of the arranging mechanism; an information acquiring mechanism configured to acquire game medium information including the currency values of the convertible game media and the inconvertible game media arranged in the arranging mechanism; and a control device configured to obtain total amounts of the currency values of the convertible game media and the inconvertible game media acquired by the information acquiring mechanism, and to display these total amounts on the display device in association with the convertible game media and the inconvertible game media.

Abstract: An inspection system/method in which first optics direct continuous wave (CW) light at 181-185 nm to an inspected article, and second optics redirect image information affected by the article to detectors. A laser assembly generates the CW light by generating fourth harmonic light from first fundamental CW light having a first wavelength between 1 and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and mixing the fifth harmonic light with second light having a second wavelength between 1.26 and 1.82 ?m. An external cavity mixes the first light and the fourth harmonic light using a first nonlinear crystal. The CW light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.

Abstract: In a gloss evaluation method and a gloss evaluation apparatus according to the present invention, an intensity P of specular light obtained by illuminating an object to be measured with illumination light of spectral irradiance emitted from the reference machine is obtained from an intensity of specular light obtained by illuminating the object to be measured with first illumination light of spectral irradiance from a relevant machine, based on an intensity b of dispersed reflected light obtained by illuminating the object to be measured with the first illumination light, and a spectral reflectance of diffuse reflection light obtained by illuminating the object to be measured with predetermined second illumination light from a different illuminating angle.

Abstract: Embodiments herein describe techniques for testing optical components in a photonic chip using a testing structure disposed in a sacrificial region of a wafer. In one embodiment, the wafer is processed to form multiple photonic chips integrated into the wafer. While forming optical components in the photonic chips (e.g., modulators, detectors, waveguides, etc.), a testing structure can be formed in one or more sacrificial regions in the wafer. In one embodiment, the testing structure is arranged near an edge coupler in the photonic chip such that an optical signal can be transferred between the photonic chip and the testing structure. Moreover, the testing structure has a grating coupler disposed at or near a top surface of the wafer which permits optical signals to be transmitted into, or received from, the grating coupler when an optical probe is arranged above the grating coupler.

Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.

Abstract: A sheet feeder picking up and transporting sheets includes a transport unit transporting sheets along a sheet transport path one by one, a gap occurrence detection unit detecting, within a predetermined section of the sheet transport path, occurrence of a gap between sheets, and a controller controlling a timing of the transport of sheets according to a result of the detection. The gap occurrence detection unit includes a first detection unit and a second detection unit. The first detection unit is configured to detect light that is emitted toward the predetermined section, reaches a converging surface thereof across the predetermined section, and converged on a receiving element thereof. The second detection unit is configured to detect light reflected by a sheet passing through the predetermined section. The occurrence of the gap is detected based on outputs from the first detection unit and the second detection unit.

Abstract: An optical sensor including an irradiation system including an irradiation system including a light source unit having a light source, the irradiation system configured to emit a linearly polarized light of a first polarization direction onto a surface of an object, a polarizing optical element disposed on an optical path of the light that is emitted from the irradiation system and reflected by diffuse reflection from an incident plane of the object and configured to separate a linearly polarized light component of a second polarization direction, a first photodetector configured to receive the linearly polarized light component of the second polarization direction separated by the polarizing optical element, and a housing supporting the irradiation system, the polarizing optical element, and the first photodetector, where the light source unit is fixed to the housing in a light emitting direction of the light source unit via space.

Abstract: Methods and systems for determining features of interest for following within various frames of data received from multiple sensors of a device are disclosed. An example method may include receiving data from a plurality of sensors of a device. The method may also include determining, based on the data, motion data that is indicative of a movement of the device in an environment. The method may also include as the device moves in the environment, receiving image data from a camera of the device. The method may additionally include selecting, based at least in part on the motion data, features in the image data for feature-following. The method may further include estimating one or more of a position of the device or a velocity of the device in the environment as supported by the data from the plurality of sensors and feature-following of the selected features in the images.

Abstract: A structure for grounding an extreme ultraviolet mask (EUV mask) is provided to discharge the EUV mask during the inspection by an electron beam inspection tool. The structure for grounding an EUV mask includes at least one grounding pin to contact conductive areas on the EUV mask, wherein the EUV mask may have further conductive layer on sidewalls or/and back side. The inspection quality of the EUV mask is enhanced by using the electron beam inspection system because the accumulated charging on the EUV mask is grounded. The reflective surface of the EUV mask on a continuously moving stage is scanned by using the electron beam simultaneously. The moving direction of the stage is perpendicular to the scanning direction of the electron beam.

Abstract: A detection camera includes an imaging optical unit and a light receiving unit that acquire image data, a first detection processing unit that detects a specified substance, a second detection processing unit that acquires distance information from the imaging optical unit to the specified substance, and a display control unit that outputs display data in which information regarding the specified substance is combined with the image data in a case where the distance information is in a detection target distance range.

Abstract: Embodiments of the present invention provide a device and a method for testing transparency effect of a transparent display substrate. The device comprises a transparency identification module, an optical measurement unit and a reference object including two kinds of regions of different colors. The optical measurement unit is able to directly measure brightness of the two kinds of regions of different colors of the reference object to acquire a first brightness difference, and to measure brightness of the two kinds of regions of different colors of the reference object through the transparent display substrate to acquire a second brightness difference.

Abstract: A printer has a light source that directs light toward a print medium path. An RGB sensor is positioned to receive light from the light source that is reflected by the print medium. An infrared light filter is situated between the RGB sensor and the paper to filter out infrared light. A programmed processor is coupled to an output of the RGB sensor in order to detect form elements in the output from the RGB light sensor, retrieve a stored electronic representation of a form, match the form elements to the stored electronic representation of the form to identify locations on the form, and control printing to the form.

Abstract: An image sensor capable of capturing an image formed by a lens includes a substrate and a bonding wire. The substrate has a pixel array and a bonding pad on a top surface of the substrate between the pixel array and a substrate edge. The bonding wire is electrically connected to the bonding pad and has a region forming a non-zero angle with respect to the substrate top surface. The non-zero angle is in at least one of a lower and an upper angular range for minimizing reflection of incident light on the region from reaching the image sensor. The lower angular range is selected such that the region reflects the incident light away from the pixel array toward a plane including the lens. The upper angular range is selected such that the region reflects the incident light to a clearance between the bonding pad and the pixel array.

Abstract: Air-in-line sensor systems and methods of using same are provided. The system includes an adapter (60) including first and second cylindrical portions defining a fluid flow channel, the first cylindrical portion comprising two adjacent wedge-shaped protrusions (68). Each wedge-shaped protrusion is infrared transmittive and defines an outer surface and an inner surface. The system further includes a tube and an infrared reflective sensor having an infrared light emitter (42,52) and an infrared light detector (44,54). The infrared light emitter and the infrared light detector are positioned at or near an adapter so that an infrared light can be transmitted to the adapter and at least a portion of the infrared light reflected off the adapter can be detected by the infrared light detector.

Abstract: A sheet conveying apparatus includes a curved sheet conveyance path through which a sheet passes, and a sensor that is disposed in the sheet conveyance path and detects the passing sheet. The sensor includes a light-emitting portion that collects light from a light source and irradiates the passing sheet in an irradiating range which is broader in a sheet conveyance direction than a width direction, and a light-receiving portion that receives the light arriving at and reflected from the sheet.

Abstract: An image forming apparatus includes a sheet transport path that transports a sheet on which an image has been recorded, the sheet transport path including a first guide surface and a second guide surface opposed to the first guide surface, an image reading unit disposed on the same side as the first guide surface of the sheet transport path to read the image, and a rotary element disposed on the same side as the second guide surface, the rotary element being rotatably disposed with a gap between the rotary element and the first guide surface.

Abstract: A defect recognition system and a defect recognition method are described. The method includes inspecting a wafer to generate a defect map and locating at least one defect on the wafer by using the defect map; analyzing light reflected from one of the at least one defect to obtain a spectrum of the light; comparing a waveform of the obtained spectrum with a plurality of waveforms respectively in spectrums of different substances; and determining a composition of the defect based on the comparison.

Abstract: An end position detection device includes a light emission unit including plural light sources for plural colors, respectively, each of the light sources being configured to emit line-like light of one of the colors which is long in a width direction to a conveyance object, the width direction being orthogonal to a conveyance direction of the conveyance object; a light reception unit including plural light reception elements, each configured to receive reflected light from the conveyance object and output a signal corresponding to a received amount of light, arranged in an array in the width direction; and a detection unit configured to detect an end position in the width direction of the conveyance object based on the signals output from the light reception elements in a case where the light sources for the respective colors simultaneously emit light to the conveyance object.

Abstract: An image forming apparatus includes a sheet transport path that transports a sheet on which an image has been recorded, the sheet transport path including a first guide surface and a second guide surface opposed to the first guide surface, an image reading unit disposed on the same side as the first guide surface of the sheet transport path to read the image, and a rotary element disposed on the same side as the second guide surface, the rotary element being rotatably disposed with a gap between the rotary element and the first guide surface.