Abstract: A method and system are provided for an integrated fluid and vapor delivery system design that optimizes vapor delivery. The method and system utilize a purgeable valve assembly which is closely coupled to a vaporizer. The purgeable valve assembly includes a liquid control valve and a purge gas valve which are connected by an outlet to the vaporizer in a manner minimizing the dead volume of the liquid supplied to the vaporizer. The system does not require the liquid precursor to be subjected to vacuum prior to entry into the vaporizer.
Type:
Grant
Filed:
May 13, 2008
Date of Patent:
February 28, 2012
Assignee:
Parker-Hannifin Corporation
Inventors:
Stephen D. Loeffler, Seth B. Wolf, Charles W. Albrecht
Abstract: A water carbonator comprising a tubular body (1) closed at the ends by a pair of end plates (2, 4) preset for the hydraulic circuit for mixing water with CO2, said end plates (2, 4) being secured to said tubular body (1) by a shape coupling and assuring for the sealing at the pressure of the fluid contained by interposing elastic gaskets.
Abstract: A control system for adjusting the desired air pressure provided to one or more spray nozzles disposed to receive liquid and compressed air adjusts the amount of compressed air supplied to the spray nozzle based on various sensed operating parameters of the system.