Abstract: The present invention relates to a process for preparing high-purity lithium fluoride proceeding from lithium carbonate, and to lithium fluoride having a preferred morphology.

Abstract: A fluorite with excellent laser durability is provided by devising a heat-treatment method for CaF2 crystal. A fluorite production method is proposed, wherein heat-treatment is carried out by providing, through compartment walls in the periphery of a fluorite crystal, a fluoride gas trap layer containing a fluoride gas-adsorbing material.

Abstract: CaF2 translucent ceramics includes at least two rare earth elements selected from a group consisting of La, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb, and Lu.

Abstract: The invention is directed to calcium fluoride crystal optics with improved laser durability that can be used for the transmission of below 250 nanometer (nm) electromagnetic radiation. The optics consist of CaF2 as the major component and, in one embodiment, at least one dopant/amount selected >0.3-1200 ppm Mg, >0.3-200 ppm Sr, >0.3-200 ppm Ba, while Ce and Mn are <0.5 ppm. The doped crystal and optics made therefrom have a ratio of 515/380 nm transmission loss of less than 0.3 after exposure to greater than 2.8 MRads of ?-radiation.

Abstract: The present invention provides a fluorophosphate glass containing 30 to 50 cationic % of a phosphorus ingredient in terms of P5+, the glass having, in a nuclear magnetic resonance spectrum, a resonance spectrum which is generated near a reference frequency of 31P and has a shape of Gaussian function. The glass of the invention is reduced in volatility and erosiveness.

Abstract: An infrared optical element, and methods for its manufacture. The optical element is made by cold working an ingot of a soft crystalline ionic solid such as silver halide or a thallium halide inside a sacrificial split die. The solid preferably includes at most one part per million of metallic impurities and at most ten parts per million total impurities. Preferably, the Knoop hardness of the ionic solid is at most about 20, and the elongation ratio of the ionic solid is at least 10% at a temperature of 120-180° C. The optical element maybe a bulk element or a surface element. The optical element may be a refractive element, a diffractive element or a hybrid element. One such element is a flat sensor for attenuated total reflection spectroscopy. In one embodiment of the sensor, a thin layer of silver halide or thallium halide is formed by diffusion or deposition on the surface of a substrate having a lower index of refraction than the layer.

Abstract: The method of making a high quality fluoride crystalline optical microlithography lens element blank includes crystallizing a fluoride crystalline member with dimension ?200 mm from a melt, annealing the fluoride crystalline member and qualifying the resulting member for use as an optical microlithography lens element blank The fluoride crystalline optical lithography lens element blanks have multiple adjoining abutting crystalline subgrains with low boundary angles. The crystalline members made by the method are qualified for use as lens element blanks by a testing method including measuring their absorption spectra at 200 to 220 nm to determine absorbance at 205 nm and/or by making measurements of radiation diffracted by them.

Abstract: Method of making a high quality identifiable fluoride crystalline optical microlithography lens element blank for formation into an lens element of a microlithography system. The highly qualified fluoride crystalline characteristics of the fluoride optical lithography lens blank ensure its beneficial performance in the demanding microlithography manufacturing regime which utilizes high energy short wavelength ultraviolet laser sources. The fluoride crystalline optical lithography lens element blanks are comprised of multiple adjoining abutting crystalline subgrains with low boundary angles.

Abstract: Windows for attenuating vacuum ultraviolet (VUV) light are created by adding metallic material to a fluoride crystalline material during manufacturing. The amount of attenuation in the final window may be controlled by controlling the manufacturing process to control the amount of metallic material remaining in the window after manufacture. If the distribution of metallic material from one window to another is inconsistent, the windows may be measured and sorted by their attenuation characteristics.

Abstract: The invention provides a method of making ≧4 kHz repetition rate argon fluoride excimer laser crystal optics. The method includes providing a magnesium fluoride crystal solid precursor, nonmetallically crushing the magnesium fluoride solid precursor to provide a crushed low metal contaminant magnesium fluoride feedstock, providing a magnesium fluoride crystal growth crucible, loading the crushed magnesium fluoride feedstock into the crystal growth crucible, melting the loaded crushed magnesium fluoride feedstock to provide a precrystalline magnesium fluoride melt, growing an oriented magnesium fluoride crystal from the precrystalline magnesium fluoride melt, cooling the grown magnesium fluoride crystal to provide a magnesium fluoride laser optical crystal and forming the magnesium fluoride laser crystal into an excimer laser crystal optic for transmitting a high repetition rate (≧4 kHz repetition rate) excimer laser output.

Abstract: An infrared optical element, and methods for its manufacture. The optical element is made by cold working an ingot of a soft crystalline ionic solid such as silver halide or a thallium halide that preferably includes at most one part per million of metallic impurities and at most ten parts per million total impurities. Preferably, the Knoop hardness of the ionic solid is at most about 20, and the elongation ratio of the ionic solid is at least 10% at a temperature of no more than 200° C. The optical element maybe a bulk element or a surface element. The optical element may be a refractive element, a diffractive element or a hybrid element. One such element is a flat sensor for attenuated total reflection spectroscopy. In one embodiment of the sensor, a thin layer of silver halide or thallium halide is formed by diffusion or deposition on the surface of a substrate having a lower index of refraction than the layer.

Abstract: The present invention provides a method for manufacturing an optical component that have increased transmittance in the ultraviolet region of the spectrum. The method includes the steps of cutting out a part from a block material; polishing optical sides of the part; subjecting the part to heat treatment at a temperature of between 100 and 900° C.; and subjecting the part to acid treatment.