Vacuum-type Holding Means Patents (Class 269/21)
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Patent number: 11661286Abstract: A vacuum holder for articles, a combination of a vacuum holder and an article, a system for holding and conveying articles, and a method for holding and conveying articles are disclosed. The vacuum holder includes a main body having a surface and an air passageway leading to the surface, and a valve joined to the main body and in fluid communication with the air passageway. The vacuum holder includes an extensible skirt gasket with an opening therein. An article can be placed adjacent to the surface of the main body, and a vacuum can be drawn through the air passageway to hold the article to the vacuum holder. The valve maintains the vacuum between the article and the vacuum holder without being connected to a vacuum source, until it is desired to release the article from the vacuum holder.Type: GrantFiled: December 16, 2021Date of Patent: May 30, 2023Assignee: The Procter & Gamble CompanyInventors: Christopher Robert Lyman, Jason Matthew Orndorff, Marcus Shen
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Patent number: 11658058Abstract: Provided is a substrate holding apparatus capable of appropriately holding a substrate. The substrate holding apparatus is suggested to hold a substrate including a portion to be plated that is exposed to a plating solution and an edge portion that is an area outside the portion to be plated. The substrate holding apparatus comprises a grasp module to come in contact with the edge portion of the substrate and thereby grasp the substrate, a suction module to attract the portion to be plated of the substrate by suction to hold the portion to be plated, and a protrusion provided at a position corresponding to the portion to be plated in the substrate, and protruding toward the substrate to be held by the substrate holding apparatus more than the suction module.Type: GrantFiled: February 9, 2021Date of Patent: May 23, 2023Assignee: EBARA CORPORATIONInventors: Takahiro Abe, Takuya Tsushima, Tomonori Hirao
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Patent number: 11658057Abstract: A wafer chuck includes a body portion; a vacuum barrier portion including a wall structure arranged at the same distance from a center point of the body portion; f protrusions arranged inside and outside the vacuum barrier portion, protruding from a top surface of the body portion and spaced apart from each other; and a vacuum portion including vacuum holes spaced apart from each other penetrating the body portion inside the vacuum barrier portion.Type: GrantFiled: September 23, 2020Date of Patent: May 23, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sungil Choi, Hyeondong Song, Myeongshik Shim, Jonghyun Hong, Bonggyo Seo
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Patent number: 11623326Abstract: Apparatus for use in handling windscreens for example for installation in a vehicle, includes a windscreen anchor assembly comprising a windscreen anchor device and a support arm extending away from the windscreen anchor device. A mount assembly is provided for supporting the windscreen anchor assembly. The mount assembly includes a mount structure for engaging with the support arm such that the support arm can slide bodily in its longitudinal direction with respect to the mount structure.Type: GrantFiled: May 24, 2021Date of Patent: April 11, 2023Assignee: Belron International LimitedInventors: William Finck, Christopher Davies
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Patent number: 11621182Abstract: An equipment front end module (EFEM) includes sidewalls forming an EFEM chamber configured to receive inert gas from an inert gas supply. The sidewalls include a first sidewall configured to attach to a panel first side of a panel. The panel forms a panel opening extending between the panel first side and a panel second side. The panel second side is configured to attach to a side storage pod. The EFEM further includes a robot disposed in the EFEM chamber. The robot is configured to transfer substrates from the EFEM chamber into the side storage pod via the panel opening. An exhaust conduit is coupled to the side storage pod to exhaust gas from the side storage pod to an exterior of the side storage pod.Type: GrantFiled: October 26, 2020Date of Patent: April 4, 2023Assignee: Applied Materials, Inc.Inventors: Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice, Jeffrey A. Brodine
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Patent number: 11618133Abstract: The purpose of the present invention is to facilitate bonding between a jig and a plate-shaped workpiece and to suitably support the workpiece. A support device is provided with: a jig that has a bent support surface for supporting a plate-shaped workpiece; a first abutment that abuts against one end of the workpiece mounted on the support surface; and a second abutment that is disposed so as to face the first abutment across the support surface and that abuts against the other end of the workpiece mounted on the support surface. The first and second abutments move toward each other and apply a load, in the tangential direction load of the support surface, with respect to the workpiece mounted on the support surface.Type: GrantFiled: February 14, 2019Date of Patent: April 4, 2023Assignee: MITSUBISHI HEAVY INDUSTRIES, LTD.Inventors: Jun Eto, Manabu Hayashi, Osamu Katsuchi
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Patent number: 11590665Abstract: A robot includes a base, a movable unit coupled to the base, and a control board having an imaging calculation unit that calculates output from an imaging unit, a force calculation unit that calculates output from a first force detection unit, and an action calculation unit that calculates an action of the movable unit based on a calculation result by the imaging calculation unit and a calculation result by the force calculation unit, wherein the control board is located inside of the base.Type: GrantFiled: March 26, 2020Date of Patent: February 28, 2023Inventor: Ryosuke Teranaka
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Patent number: 11583965Abstract: A system for supporting workpieces during machining. The system comprises one or more adjustable workpiece support assemblies and a robotic unit. Each workpiece support assembly comprises a pedestal and a rotatable fixture element. The robotic assembly comprises means of mobilizing and immobilizing each support assembly, so that the fixture element may be secured in a particular orientation. The robotic unit moves along a frame, and manipulates and fixes the position of the fixture elements to match the contour of a workpiece. Vacuum forces may be applied through the workpiece support assemblies to secure the workpiece against the fixture elements.Type: GrantFiled: April 9, 2019Date of Patent: February 21, 2023Assignee: ADVANCED MACHINE WORKS, LLCInventor: Larry Don Kirby
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Patent number: 11577981Abstract: A method of separating a transparent mother sheet includes contacting a first surface of the transparent mother sheet with an open ended pressure assembly including a pressure vessel shell, thereby forming a shell cavity defined by the first surface of the transparent mother sheet and the pressure vessel shell, where the transparent mother sheet comprises a damage path. The method also includes removing gas from the shell cavity through a fluid removal outlet extending through the pressure vessel shell to reduce a cavity pressure in the shell cavity, thereby applying stress to the damage path to separate a portion of the transparent mother sheet along the damage path.Type: GrantFiled: July 15, 2020Date of Patent: February 14, 2023Assignee: Corning IncorporatedInventors: Andreas Simon Gaab, Michael Albert Joseph, II, Albert Roth Nieber, John Charles Speeckaert, Sergio Tsuda, Heather Nicole Vanselous
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Patent number: 11567418Abstract: An imprint lithography method for positioning substrates includes supporting first and second substrates respectively atop first and second chucks, pneumatically suspending the first and second chucks laterally within first and second bushings, supporting the first and second chucks vertically within the first and second bushings, maintaining the first and second chucks respectively in first and second fixed rotational orientations, and forcing the first and second chucks in a downward direction independently of each other respectively against first and second vertical resistive forces until first and second top surfaces of the first and second substrates are coplanar, while maintaining the first and second chucks suspended laterally within the first and second bushings and while maintaining the first and second chucks in the first and second fixed rotational orientations.Type: GrantFiled: February 22, 2021Date of Patent: January 31, 2023Assignee: Molecular Imprints, Inc.Inventors: Roy Matthew Patterson, Charles Scott Carden, Satish Sadam
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Patent number: 11565382Abstract: A mounting device for fastening a component, such as in particular a fixture, at a defined location has a base body having a holder or receptacle for the component and a suction device for retaining the component held in the holder at the defined location. In addition, the mounting device contains a pressing device to press the component held in the holder or receptacle to the defined location. A method for the validatable fixation of a component, such as in particular a fixture or bracket, at a defined location is also provided.Type: GrantFiled: July 4, 2019Date of Patent: January 31, 2023Assignee: XENIOS AGInventors: Michael Rau, Sven Filipon
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Patent number: 11555515Abstract: An active suction cup includes a vacuum chamber provided with at least one opening with an elastic rim adapted to be applied against a surface sealingly closing the chamber vacuum, and air extraction means from inside the chamber, adapted to extract the air from inside the chamber to reduce the pressure inside the chamber so that the suction cup remains adhered to the surface. The suction cup is characterized in that the air extraction means are arranged inside the vacuum chamber and connected to a conduit that opens outside the chamber, the suction cup also comprising a pressure sensor inside the chamber to detect the pressure inside the chamber. The pressure sensor is connected to control means adapted to actuate the air extraction means if the pressure detected by the pressure sensor is greater than a predetermined maximum pressure threshold.Type: GrantFiled: November 23, 2021Date of Patent: January 17, 2023Inventor: Pierre Michel Nothman
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Patent number: 11548121Abstract: The invention relates to a suction device (12) comprising a valve housing (18), a flexible partition wall (28) which runs in such a way that a control space (30) extends on one side and an intake side (21) lies on the other side, wherein the control space (30) is connected to the intake side (21) via a throttle passage (38), wherein the throttle passage (38) is formed in such a way that a flow resistance for flows is defined by the throttle passage (38) in such a way that, in the case of free suction, a negative pressure in relation to the intake side occurs in the control space (30) on account of the flow resistance.Type: GrantFiled: March 29, 2018Date of Patent: January 10, 2023Assignees: J. SCHMALZ GMBH, TRUMPF WERKZEUGMASCHINEN GMBH & CO. KGInventors: Rainer Hoehn, Jonas Horst, Magnus Deiss
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Patent number: 11538712Abstract: A suction holder for sucking and holding a holding target member includes a sucker, a tube bellows connected to a lower end of the sucker, and a tube arranged inside the tube bellows and having an upper end positioned lower than an upper end of the sucker. A lower opening of the tube is communicated with a suction source and the holding target member is contacted with the upper end of the sucker to form a closed room, and the inside of the closed room is placed into a negative pressure state to hold the holding target member.Type: GrantFiled: September 10, 2020Date of Patent: December 27, 2022Assignee: DISCO CORPORATIONInventors: Masahiro Wada, Naohisa Watanabe
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Patent number: 11529849Abstract: A vehicle windshield triangulation assembly (11), and triangulation method using it with a railing (22) fixed to a vehicle (16) via sliding/rotatable/orientation-adjustable/height-adjustable mounts (18). A sliding seat (21) on railing (22) receives the telescoping end (1) of assembly (11) after its two connected 360-degree rotation swivel clamps (7), each having a suction cup (8), are secured against the old windshield's (17) exterior surface. Assembly (11) triangulation transfers to a new/replacement windshield (17) by releasing suction cups (8) and pairing them in the same manner with the new/replacement windshield (17), and making needed height adjustment to a top stop (12/13) and the swivel clamp (7) remote from top stop (12/13). The telescoping end (1) of assembly (11) is then engaged with sliding seat (21), allowing one person to easily and accurately move the new windshield (17) into the same positioning of the old windshield (17).Type: GrantFiled: June 26, 2017Date of Patent: December 20, 2022Inventor: Christian M. Foss
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Patent number: 11508608Abstract: Disclosed is a vacuum chuck and a method for securing a warped semiconductor substrate during a semiconductor manufacturing process so as to improve its flatness during a semiconductor manufacturing process. For example, a semiconductor manufacturing system includes: a vacuum chuck configured to hold a substrate, wherein the vacuum chuck comprises, a plurality of vacuum grooves located on a top surface of the vacuum chuck, wherein the top surface is configured to face the substrate; and a plurality of flexible seal rings disposed on the vacuum chuck and extending outwardly from the top surface, wherein the plurality of flexible seal rings are configured to directly contact a bottom surface of the substrate and in adjacent to the plurality of vacuum grooves so as to form a vacuum seal between the substrate and the vacuum chuck, and wherein each of the plurality of flexible seal rings has a zigzag cross section.Type: GrantFiled: August 20, 2020Date of Patent: November 22, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien-Fa Lee, Chin-Lin Chou, Shang-Ying Tsai, Shou-Wen Kuo, Kuei-Sung Chang, Jiun-Rong Pai, Hsu-Shui Liu, Chun-wen Cheng
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Patent number: 11507046Abstract: Manufacturing of a shoe or a portion of a shoe is enhanced by executing various shoe-manufacturing processes in an automated fashion. For example, information describing a shoe part may be determined, such as an identification, an orientation, a color, a surface topography, an alignment, a size, etc. Based on the information describing the shoe part, automated shoe-manufacturing apparatuses may be instructed to apply various shoe-manufacturing processes to the shoe part, such as a pickup and placement of the shoe part with a pickup tool.Type: GrantFiled: October 5, 2020Date of Patent: November 22, 2022Assignee: NIKE, Inc.Inventors: Dragan Jurkovic, Patrick Conall Regan, Chih-Chi Chang, Chang-Chu Liao, Ming-Feng Jean, Kuo-Hung Lee, Yen-Hsi Liu, Hung-Yu Wu
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Patent number: 11504825Abstract: A holding apparatus, in particular a chuck, for a substrate comprises a main body with a upper side, a carrier element arranged in a recess of the main body so as to be vertically movable such that it can be adjusted between a protruding loading position and a retracted clamping position, the carrier element comprising a support surface for placement of the substrate. The support surface has a smaller diameter than the main body. A lifting element lifts the carrier element to the loading position. The carrier element seals the recess such that a sealed cavity is provided between the main body and the carrier element, which cavity can have a negative pressure applied thereto which counteracts the effect of the lifting element.Type: GrantFiled: September 3, 2021Date of Patent: November 22, 2022Assignee: SUSS MICROTEC LITHOGRAPHY GMBHInventors: Thomas Grund, Rainer Targus
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Patent number: 11477926Abstract: Support blocks for printed circuit boards (PCB's) and printed circuit board assemblies (PCBA's), wherein the support blocks are produced from a 3D printing process. The support block including a bottom surface having a vacuum connection; a top surface having at least one vacuum hole; at least one recessed surface that is offset from the top surface; and at least one vacuum channel extending from the vacuum connection to the at least one vacuum hole.Type: GrantFiled: September 9, 2020Date of Patent: October 18, 2022Assignee: JABIL INC.Inventors: Darin Burgess, Randy Crockett, Timothy DeRosett, Charles Santhakumar, Scott Klimczak, Anwar A. Mohammed, Luke Rodgers, Harpuneet Singh, Daniel Torres, Felipe Torres
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Patent number: 11469121Abstract: A spin coating device and method. The spin coating device includes a rotatable rotary shaft and sucker fixed on an end portion of the shaft, and an electromagnetic induction device below the sucker which includes an annular magnet fixed below the sucker, coil group formed by a first and second coil, and strip-shaped magnet fixed at the rotary shaft. A base on the sucker has a notch. The unbalanced centrifugal force during rotation of the sucker causes vibration. The electromagnetic induction device enables the centrifugal force generated during rotation of the sucker to be in balance with the magnetic force generated by the electromagnetic induction device to adjust the levelness of the sucker surface. The device does not need manual manipulation, enables the sucker to be more stable, reduces damage to the equipment due to vibration, and improves the effect of photoresist spin-coating while saving time and labor.Type: GrantFiled: May 25, 2018Date of Patent: October 11, 2022Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.Inventors: Shiliang Lu, Hang Ran, Yihui Li, Xiaoping Yan, Jun Zhao, Shanshan Chen
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Patent number: 11420340Abstract: A robot suction hand mountable on an industrial robot and configured to hold a workpiece by suction using a suction unit. The robot suction hand includes: a vacuum pump incorporated in the robot suction hand. The vacuum pump has a housing in which an intake port and an exhaust port are formed, and configured to intermittently take in air from the intake port and intermittently discharge air from the exhaust port. The robot suction hand includes a suction path that communicates with the suction unit and the intake port and a first member made of a porous material. The first member covers the exhaust port.Type: GrantFiled: July 30, 2020Date of Patent: August 23, 2022Assignee: DENSO WAVE INCORPORATEDInventors: Masaki Yamanaka, Takayuki Saito
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Patent number: 11413726Abstract: A method for holding a workpiece to be machined including the steps of: includes manufacturing a locking jig for locking the workpiece on a support base by additive production techniques wherein the locking jig includes a wall defining a loop. Irregularities present on at least one end of the wall arrangement are eliminated to define a support surface for the workpiece to be machined. A seat is formed in at least one end of the wall for housing a seal. At least one opening is formed on the support base and connected to at least one inner space of the loop on one side and with a suction device on the other side. A vacuum is supplied through the opening and the inner space which enables the workpiece to stick to and remain stationary with respect to the support surface during machining of the workpiece.Type: GrantFiled: November 22, 2019Date of Patent: August 16, 2022Inventor: Maurizio Bernini
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Patent number: 11404979Abstract: A motor driving circuit includes a first motor driving circuit that controls driving of a first motor is disposed, a second motor driving circuit that controls driving of a second motor is disposed, and a constant current generation circuit that generates a constant current is disposed, and the constant current generation circuit is disposed at a position deviating from between the first motor driving circuit and the second motor driving circuit.Type: GrantFiled: October 29, 2020Date of Patent: August 2, 2022Assignee: SEIKO EPSON CORPORATIONInventors: Haruo Hayashi, Motoaki Nishimura, Makoto Katase, Yusuke Sano
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Patent number: 11367612Abstract: The present invention relates to a method for manufacturing semiconductor manufacturing parts used in a dry etching process, and a jig usable therein, and the method for manufacturing semiconductor manufacturing parts by using the jig, of the present invention, comprises the steps of: preparing a base material; supporting at least one surface of the base material by the jig; forming a deposition layer by spraying source gas on the base material supported by the jig; and processing the base material on which the deposition layer is formed, wherein the jig has a tapered cross-section of which the width increases in the direction of approaching the surface of the base material.Type: GrantFiled: December 18, 2017Date of Patent: June 21, 2022Assignee: Tokai Carbon Korea Co., LTDInventor: Ki Won Kim
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Patent number: 11345028Abstract: A grasping error correction method includes a position information acquisition step of acquiring position information of a plurality of areas of a lower component 2, a grasping error value calculation step of calculating a grasping error value based on the position information at the time of the reproduction and the position information of the plurality of areas of the lower component 2 at the time of teaching, and an arm control step of controlling an operation of a multi-axis articulated arm 11a so as to correct the grasping error value. Further, in the grasping error value calculation step, the grasping error value is calculated so that a grasping error in a processing nearby area, which is one of the plurality of areas of the lower component 2 that is closest to the processing area, is preferentially eliminated over those in the other areas of the lower component 2.Type: GrantFiled: January 8, 2020Date of Patent: May 31, 2022Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventor: Takashi Sakui
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Patent number: 11327406Abstract: A method for estimating a parameter across a region on a substrate, the region being divided into a plurality of sub-regions, the method including: obtaining values of the parameter for at least two sub-regions out of the plurality of sub-regions; and estimating the parameter for a position on the region by evaluation of a function having said values of the parameter as input values, wherein the function: a) has piecewise defined base functions, wherein a single base function is defined across a sub-region; and b) is continuous between one or more adjacent sub-regions of the at least two sub-regions within the region.Type: GrantFiled: April 2, 2019Date of Patent: May 10, 2022Assignee: ASML Netherlands B.V.Inventors: Svetla Petrova Matova, Jochem Sebastiaan Wildenberg, Roy Werkman, Luc Roumen
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Patent number: 11316111Abstract: A mask assembly for manufacturing a display device, the mask assembly includes: a mask frame including a pair of first side portions arranged in a first direction, a pair of second side portions arranged in a second direction intersecting the first direction, and an opening portion defined by the first side portions and the second side portions; a mask sheet arranged on the opening portion of the mask frame, fixed on the mask frame, and including a plurality of openings; and a support member attached to at least one of the first side portions and the second side portions of the mask frame with tensile force applied.Type: GrantFiled: December 2, 2019Date of Patent: April 26, 2022Assignee: Samsung Display Co., Ltd.Inventor: Seil Kim
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Patent number: 11312585Abstract: A method of managing removable mechanical modifications to one or more printing devices, including receiving, by one or more computer processors, an input related to a removable mechanical modification of a printing device of the one or more printing devices, and determining, by the one or more computer processors, a location of the removable mechanical modification.Type: GrantFiled: March 8, 2021Date of Patent: April 26, 2022Assignee: Xerox CorporationInventors: Kenneth D. Sanders, Arthur H. Kahn, Dara Nanette Lubin
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Patent number: 11298856Abstract: An example system is configured to photocure a photocurable material to form a polymer film. The system includes a first chuck configured to support a first substantially planar mold, a second chuck configured to support a second substantially planar mold, and an actuable stage coupled to the first chuck and/or the second chuck. The actuable stage is configured to position the first chuck and/or the second chuck so that the first and second molds are separated by a gap. The system also includes a sensor arrangement for obtaining measurement information indicative of a distance between the first and second molds and/or a pressure between the first and second chucks at each of at least three locations. The system also includes a control module configured control the gap between the first and second molds based on the measurement information.Type: GrantFiled: March 15, 2018Date of Patent: April 12, 2022Assignee: Molecular Imprints, Inc.Inventors: Chieh Chang, Christophe Peroz, Roy Matthew Patterson, Matthew S. Shafran, Christopher John Fleckenstein, Charles Scott Carden
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Patent number: 11289361Abstract: Embodiments described herein relate to a substrate chucking apparatus having a plurality of cavities formed therein. The cavities are formed in a body of the chucking apparatus and a plurality of support elements extend from the body and separate each of the plurality of cavities. In one embodiment, a first plurality of ports are formed in a top surface of the body and extend to a bottom surface of the body through one or more of the plurality of support elements. In another embodiment, a second plurality of ports are formed in a bottom surface of the plurality of cavities and extend through the body to a bottom surface of the body. In yet another embodiment, a first electrode assembly is disposed adjacent the top surface of the body within each of the plurality of support elements and a second electrode assembly is disposed within the body adjacent each of the plurality of cavities.Type: GrantFiled: November 8, 2018Date of Patent: March 29, 2022Assignee: Applied Materials, Inc.Inventors: Ludovic Godet, Rutger Meyer Timmerman Thijssen
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Patent number: 11279604Abstract: A clamp device for securing an object, the clamp device including an attachment device configured for attachment to a flat surface in a first direction; and a trigger clamp including a pair of adjustable jaws adjustable in a second direction and an actuation mechanism of the pair of adjustable jaws including both a lock function and an unlock function and an adjustment structure for adjusting a space encompassed within the pair of adjustable jaws, wherein the trigger clamp is coupled to the attachment device, the actuation mechanism is configured to be operated with only one action with only one hand of a user while the trigger clamp is coupled to the attachment device to secure the object in the space and the second direction is disposed substantially at a right angle to the first direction.Type: GrantFiled: October 16, 2021Date of Patent: March 22, 2022Inventor: Dennis Klem
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Patent number: 11279150Abstract: In an example, there is provided a method including: receiving, at a processor, data specifying the shape of a blank to form a folded article; and determining, using the processor, based on the received data, a suction array layout to hold the blank against a media support, wherein the suction array layout conforms to the shape of the blank.Type: GrantFiled: March 12, 2018Date of Patent: March 22, 2022Assignee: HP SCITEX LTD.Inventors: Alex Veis, Eviatar Halevi
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Patent number: 11279005Abstract: Provided are a vacuum chuck member and a vacuum chuck method that are capable of suppressing misalignment of a substrate when a wafer having a significant deflection or warpage is chucked and held. In a state in which a wafer W is placed on the upper surface side of a base 1, the pressure in an inner space S1 surrounded by the upper surface of the base 1, the lower surface of the wafer W, and the inner side surface of an inner annular rib 21 is reduced through a first air passage 101. Subsequently, the pressure in an outer space S2 surrounded by the upper surface of the base 1, the lower surface of the wafer W, the outer side surface of the inner annular rib 21, and the inner side surface of an outer annular rib 22 is reduced through a second air passage 102.Type: GrantFiled: February 6, 2017Date of Patent: March 22, 2022Assignee: NGK SPARK PLUG CO., LTD.Inventors: Tomohiro Ishino, Shinya Kikuchi
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Patent number: 11270906Abstract: Various burl designs for holding an object in a lithographic apparatus are described. A lithographic apparatus includes an illumination system, a first support structure, a second support structure, and a projection system. The illumination system is designed to receive radiation and to direct the radiation towards a patterning device that forms patterned radiation. The first support structure is designed to support the patterning device on the first support structure. The second support structure has a plurality of burls and is designed to support the substrate on the plurality of burls. A topography of a top surface of each of the plurality of burls is not substantially flat, such that a contact area between the substrate and each of the plurality of burls is reduced. The projection system is designed to receive the patterned radiation and to direct the patterned radiation towards the substrate.Type: GrantFiled: October 4, 2018Date of Patent: March 8, 2022Assignee: ASML Holding N.V.Inventors: Mehmet Ali Akbas, David Hart Peterson, Tammo Uitterdijk, Michael Perry, Richard Bryan Lewis, Iliya Sigal
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Patent number: 11254158Abstract: The present specification relates to an apparatus for manufacturing a blanket, a method for manufacturing a blanket, a blanket manufactured using the same, a reverse offset printing roll provided with the blanket, and a reverse offset printing apparatus including the same.Type: GrantFiled: June 13, 2019Date of Patent: February 22, 2022Assignee: LG CHEM, LTD.Inventors: Beom Mo Koo, Seung Heon Lee, Ji Young Hwang, Yong Goo Son, Jooyeon Kim, Jeseob Park, Kun Seok Lee
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Patent number: 11243476Abstract: The invention provides a stage apparatus comprising an object support, a plurality of support members, a gripper and a control unit. The object support comprises a surface for mounting an object on, the surface extending in a plane. The plurality of support members are for supporting the object, and are arranged to receive the object from a gripper and to arrange the object on the surface and/or vice versa. The support members are moveable in at least a first direction which is perpendicular to the plane. The control unit is arranged to receive shape information regarding an out-of-plane-shape of the object, and is arranged to control positions of the support members. The control unit is arranged to tilt the object while supported by the support members by controlling the positions so as to reduce a space consumption of the object in the first direction, based on the shape information.Type: GrantFiled: March 27, 2019Date of Patent: February 8, 2022Assignee: ASML Netherlands B.V.Inventors: Ringo Petrus Cornelis Van Dorst, Gijs Kramer, Benjamin Cunnegonda Henricus Smeets, Mark Johannes Hermanus Frencken
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Patent number: 11203123Abstract: Systems, apparatus, and methods of manufacturing an article using electroadhesion technology, either as a sole modality of handling such materials or in concert with vacuum for the pick up and release of materials, respectively.Type: GrantFiled: July 9, 2018Date of Patent: December 21, 2021Assignee: Grabit, Inc.Inventors: Harsha Prahlad, Richard J. Casler, Susan Kim, Matthew Leettola, Jon Smith, Kenneth Tan, Patrick Wang, John Mathew Farren, Patrick Conall Regan, Po Cheng Chen, Honam Ko, Dragan Jurkovic, Aishwarya Varadhan, Tsung Tai Chien, Chang-Chu Liao, Chih-Chi Chang, Kuo-Hung Lee, TaeHoun Kim
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Patent number: 11198203Abstract: A device (1) for the movement of sheet-like pieces (P) in a machine tool (M), including a frame (10) moving towards or away from the machining surface (P1) of the machine, a gripping device (20) including a sheet-like element (21) with a gripping surface (21a) having openings (24) and mounted on the frame (10) rotatingly around at least one axis (x) substantially orthogonal to the direction of movement (D) of the frame (10) and element for the creation of a vacuum (25) communicating with the openings (24) and adapted to generate a vacuum pressure at the openings (24), which, when the gripping surface (21a) is substantially next to the machining surface (P1), makes it possible to detach the pieces (P) from the machining surface and keep them on the gripping surface.Type: GrantFiled: September 18, 2019Date of Patent: December 14, 2021Assignee: SAMEC S.P.A.Inventor: Antonio Muratori
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Patent number: 11199562Abstract: A wafer testing system and a method of testing a wafer include placing a wafer on a vacuum chuck containing a plurality of vacuum zones, determining a warpage of the wafer, providing a different magnitude of vacuum suction to different vacuum zones at the same time based on the determined warpage of the wafer to reduce the warpage of the wafer, and testing the wafer.Type: GrantFiled: August 8, 2019Date of Patent: December 14, 2021Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.Inventors: Liang Li, Chao Xu
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Patent number: 11175594Abstract: A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method including: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.Type: GrantFiled: May 3, 2018Date of Patent: November 16, 2021Assignee: ASML Netherlands B.V.Inventors: Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen
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Patent number: 11161202Abstract: A shaping apparatus is equipped with: a beam shaping system having a beam irradiation section that includes a condensing optical system which emits a beam and a material processing section which supplies a shaping material irradiated by the beam from the beam irradiation section; and a controller which, on the basis of 3D data of a three-dimensional shaped object to be formed on a target surface, controls a workpiece movement system and the beam shaping system such that a target portion on the target surface is shaped by supplying the shaping material from the material processing section while moving the beam from the beam irradiation section and the target surface on a workpiece (or a table) relative to each other. Further the intensity distribution of the beam in the shaping plane facing the emitting surface of the condensing optical system can be modified.Type: GrantFiled: May 9, 2017Date of Patent: November 2, 2021Assignee: NIKON CORPORATIONInventor: Yuichi Shibazaki
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Patent number: 11148258Abstract: A holding apparatus, in particular a chuck, for a substrate comprises a main body with a upper side, a carrier element arranged in a recess of the main body so as to be vertically movable such that it can be adjusted between a protruding loading position and a retracted clamping position, the carrier element comprising a support surface for placement of the substrate. The support surface has a smaller diameter than the main body. A lifting element lifts the carrier element to the loading position. The carrier element seals the recess such that a sealed cavity is provided between the main body and the carrier element, which cavity can have a negative pressure applied thereto which counteracts the effect of the lifting element.Type: GrantFiled: May 23, 2019Date of Patent: October 19, 2021Assignee: SUSS MICROTEC LITHOGRAPHY GMBHInventors: Thomas Grund, Rainer Targus
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Patent number: 11131982Abstract: A method and apparatus for processing fuselage sections. The apparatus comprises a cradle system, a metrology system, and a controller. The cradle system holds a first fuselage section and applies forces to the first fuselage section to change a current shape of the first fuselage section. The metrology system makes measurements of the current shape of the first fuselage section. The controller receives the measurements from the metrology system, identifies the forces needed to change the current shape of the first fuselage section towards a desired shape for connecting the first fuselage section to a second fuselage section, and sends commands to the cradle system to apply the forces to change the current shape of the first fuselage section towards the desired shape.Type: GrantFiled: September 17, 2014Date of Patent: September 28, 2021Assignee: The Boeing CompanyInventors: Jeffrey H. Hunt, Stephen A. Walls, David Arthur Whelan
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Patent number: 11056378Abstract: A workpiece holding method for a workpiece having a bowl-shaped warp includes a mounting step of mounting the workpiece on a holding unit having a holding surface, a suction hole opening to the holding surface, and a suction passage for making selective communication between the suction hole and a vacuum source for producing a suction force, the workpiece being mounted on the holding surface of the holding unit, a liquid supplying step of supplying a liquid to the workpiece held on the holding surface so that the liquid flows into a gap defined between the holding surface and the workpiece to fill the gap, and a suction step of bringing the suction hole into communication with the vacuum source to suck the liquid and the workpiece and thereby hold the workpiece through the liquid on the holding surface under suction, after performing the liquid supplying step.Type: GrantFiled: December 18, 2019Date of Patent: July 6, 2021Assignee: DISCO CORPORATIONInventors: Yusuke Miyagi, Paul Vincent Atendido
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Patent number: 11049758Abstract: A substrate can be placed on a placing table horizontally. When placing the substrate on the placing table having multiple protrusions configured to support the substrate, the substrate is attracted to the placing table while performing a suction from a suction hole configured to attract a position, different from positions located above the protrusions, of the substrate placed on the placing table, and then, a suction force of the suction hole is reduced. Accordingly, it is possible to place the substrate on the placing table while correcting the flexure. Further, the substrate can be horizontally placed on the placing table since deformation of the wafer, caused by attracting a bottom surface of the wafer strongly, is suppressed.Type: GrantFiled: April 22, 2019Date of Patent: June 29, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Koji Ushimaru, Masashi Itonaga
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Patent number: 10953506Abstract: A self-balancing line shaft of a machine tool includes a spindle device, a cutter tool holder and at least one balancing assembly. The spindle device includes a spindle extending along and rotatable about an axis, and at least one precision lock nut threadedly engaged with and rotated with the spindle. The cutter tool holder is coaxially connected and rotated with the spindle. The balancing assembly includes an annular groove formed in one of the precision lock nut and the cutter tool holder and extending along a circle path surrounding the axis, and a plurality of weight members disposed in the annular groove to be moved in a direction opposite to a rotation unbalance during rotation of the spindle such that the center of mass of the whole rotating system is close to the axis.Type: GrantFiled: May 24, 2019Date of Patent: March 23, 2021Assignee: NATIONAL FORMOSA UNIVERSITYInventors: Tzu-Chi Chan, Shang-Hong Wu
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Patent number: 10953504Abstract: The invention relates to a blank holder for a dental milling machine. The blank holder has a clamping frame with a receptacle for a blank. The clamping frame includes a first frame part and a second frame part which are pivotable relative to one another to open the receptacle. A first clamping face is formed on the first frame part and a second clamping face is formed on the second frame part. The clamping faces engage an outer periphery of the blank with the clamping frame closed. To configure a blank holder so that the blank is fixed in the clamping frame in a play-free manner, provision is made to form one of the clamping faces on an annular clamping ring. The clamping ring is held on a frame part and is displaceable counter to a force in the axial direction.Type: GrantFiled: January 18, 2018Date of Patent: March 23, 2021Assignee: vhf camfacture AktiengesellschaftInventor: Matthias Schumacher
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Patent number: 10933537Abstract: An end-of-arm tool includes concentric rings of suction cup assemblies. Each suction cup assembly can be independently extended and retracted. Sensors on each suction cup assembly indicate its fully extended position such that displacement from the fully extended position upon contacting an item is indicated by the corresponding sensor.Type: GrantFiled: January 30, 2019Date of Patent: March 2, 2021Assignee: Amazon Technologies, Inc.Inventors: Felipe De Arruda Camargo Polido, Noah Scott Wieckowski
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Patent number: 10930532Abstract: An object detection system utilizes a teach cycle performed with a low-pressure blow-off (i.e. positive pressure) instead of vacuum (negative pressure). During the teach operation, the positive pressure is enabled and the nozzle is lowered to the object. An air sensor detects pressure or flow at the nozzle tip. A rise in pressure or drop in flow is detected as the nozzle makes contact with the object (i.e. just before or just after actual physical contact is made). The height of the object is stored as the taught height to be used subsequently in repetitive operations by the machine. This teaching method is particularly useful for very small objects because the positive pressure does not lift the object.Type: GrantFiled: October 31, 2017Date of Patent: February 23, 2021Assignee: BPM MicrosystemsInventors: William H. White, Alain Mangiat, Rudy DeLeon
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Patent number: 10928744Abstract: An imprint lithography method for positioning substrates includes supporting first and second substrates respectively atop first and second chucks, pneumatically suspending the first and second chucks laterally within first and second bushings, supporting the first and second chucks vertically within the first and second bushings, maintaining the first and second chucks respectively in first and second fixed rotational orientations, and forcing the first and second chucks in a downward direction independently of each other respectively against first and second vertical resistive forces until first and second top surfaces of the first and second substrates are coplanar, while maintaining the first and second chucks suspended laterally within the first and second bushings and while maintaining the first and second chucks in the first and second fixed rotational orientations.Type: GrantFiled: September 8, 2017Date of Patent: February 23, 2021Assignee: Molecular Imprints, Inc.Inventors: Roy Matthew Patterson, Charles Scott Carden, Satish Sadam