Abstract: A vacuum generator driven by compressed air and arranged to supply vacuum to a vacuum gripper element, wherein a chamber (6) is associated with the vacuum generator and arranged to be brought in flow connection (9) with the vacuum gripper element via a valve (15) which is actuated by overpressure accumulated in the chamber to open the connection (9) to the vacuum gripper element in order to discharge the overpressure to the vacuum gripper element in result of interruption of the compressed air flow (P). The vacuum generator is characterized in that the chamber (6) in addition includes a flow connection (11) with the ambient atmosphere, and in the additional flow connection (11) a one-way valve (10) which is arranged to open the connection (11) with the atmosphere in result of the air pressure in the chamber (6) falling below the atmospheric pressure.

Abstract: A method of attaching a wafer by suction, includes a step of mounting a wafer on a right arm and a left arm of a transfer jig, moving the transfer jig toward a wafer suction stage in such a manner that a facing right arm surface of the right arm slides along and in contact with a first side surface of the wafer suction stage and a facing left arm surface of the left arm slides along and in contact with a second side surface of the wafer suction stage until the wafer comes to lie directly above a mounting surface of the wafer suction stage, mounting the wafer on the mounting surface by moving the transfer jig downward toward the wafer suction stage while maintaining the contacts, and attaching the wafer to the mounting surface by suction.

Abstract: A method of optical lens blank holding on a chuck using vacuum pressure to easily load and unload, and accurately and repeatedly position blanks concentrically with the axis of rotation of the chuck.

Abstract: A press molding die structure having a paired press lower die and press upper die that are relatively movable to each other in which a work transferred into a portion between the press lower die and the press upper die is press-molded thereby to form a molded work. A concave portion is formed to a molding surface of the press lower die, and a suction cup of a vacuum stabilizer is provided to the concave portion formed to the molding surface of the press lower die, wherein the suction cup elastically sucks and retains the work at least at a time when the press molding dies are opened, thereby stabilizing a posture of the work.

Abstract: A workpiece clamping jig configured to clamp a workpiece is provided with a baseplate, a fixed abutting member, and a movable abutting member. The baseplate has a pocket, which forms an air intake passage on the reverse side of a workpiece mounting surface, and a suction through-hole internally connecting the workpiece mounting surface and the pocket. The fixed abutting member is disposed on the baseplate and has a fixed abutting surface corresponding to the shape of the workpiece, and the movable abutting member has an abutting surface movable relative to the workpiece caused to abut against the fixed abutting surface of the fixed abutting member.

Abstract: An apparatus for lightening of thin, flexible and shaped workpieces by removal machining of material from surfaces thereof, on a machining unit has a worktable and counterthrust means, which rest against a part of the surface of the workpiece opposed to the one on which said tool must work. The worktable includes supporting means of the workpiece to be machined, and gripping means designed to support the workpiece during its machining independently from said supporting means. The counterthrust means include a board movable according to several axes and carrying a plurality of supporting elements. The supporting elements can be individually translated or in groups between a draw-in position and an extended position to define a supporting plane depending on the shape of the surface of the workpiece against which the counterthrust means must rest. A method is also included for mapping the workpiece surface by means of the supporting elements.

Abstract: Provided is a jig having a structure that differs from conventional jigs and enables flat plates to be bonded while suppressing an air bubble formation. A flat-plate bonding jig is provided with the following: a first surface; a second surface that is on the opposite side of the first surface, has a plurality of suction holes for sucking a flat-plate, and is curved outward in a substantially arc shape; a main body connecting the first surface and the second surface; and a communication means that is disposed in the main body and allows the suction holes to communicate with a suction means.

Abstract: A substrate carrier for performing a deposition process comprises a supporting element and a cover element. The supporting element having a through hole is used to carry a substrate. The cover element is removably engaged with the supporting element, so as to secure the substrate therebetween and expose a deposition surface of the substrate from the through hole.

Abstract: A suction cup for a tool driven by vacuum is presented, the suction cup in a first or upper end arranged to be brought into fluid flow communication with a vacuum source and in its opposite end arranged to be brought tightly into contact with the surface of an object to be handled. The suction cup is in its lower end arranged to be coupled to a sealing ring having a sealing surface arranged between an outer periphery and a through-opening defined by an inner periphery, and the sealing ring in the region of its inner periphery having a lip arranged to engage with the suction cup, to which purpose the suction cup in its lower end has a circumferentially running groove) in which the peripheral region and the lip of the sealing ring is insertable under form fitting engagement and in a radially overlapping relation between the groove and the lip in the region (r) of engagement.

Abstract: Methods and apparatus provide for delivering a controlled supply of gas to at least one aero-mechanical device to impart a gas flow to suspend a material sheet; preventing lateral movement of the material sheet in at least one direction when suspended; and imparting a stream of water, from a side of the material sheet opposite the at least one aero-mechanical device, to cut the material sheet when suspended.

Abstract: An opener and a buffer table for a test handler are disclosed. The opener includes an opening plate, a plurality of pin blocks forming pairs, and at least one or more interval retaining apparatus for retaining an interval between the pin blocks forming a pair. Each of the pin blocks is movably coupled to the opening plate, and includes opening pins for releasing a holding state of a holding apparatus that holds semiconductor devices in a carrier board. Although semiconductor devices to be tested are altered in size and a carrier board loading with the semiconductor devices is thus replaced, the opener does not need to be replaced, thereby reducing the replacement cost and the waste of resources.

Abstract: An apparatus for and a method of forming a semiconductor structure is provided. The apparatus includes a substrate holder that maintains a substrate such that the processing surface is curved, such as a convex or a concave shape. The substrate is held in place using point contacts, a plurality of continuous contacts extending partially around the substrate, and/or a continuous ring extending completely around the substrate. The processing may include, for example, forming source/drain regions, channel regions, silicides, stress memorization layers, or the like.

Abstract: Manufacturing spectacle lenses using lens blanks blocked onto holding elements is laborious and time-consuming. Furthermore the manufacture is rendered difficult by different surface curvatures on the receiving side of the lens blanks. The purpose of the invention is to remedy such drawbacks. Accordingly this invention relates to equipment for processing lens blanks comprising a workpiece turret supported rotatably about a main axis of rotation, said turret being fitted with at least two workpiece receptacles configured each outside the main axis of rotation and being rotatable about spindle axes, each workpiece receptacle comprising a workpiece receiving surface having a surface curvature rotationally symmetrical about the spindle axis, whereby said surface curvatures of the workpiece receiving surfaces being different from each other.

Abstract: Alignment tool for positioning two close-fitting pieces of material together at an angle with respect to one another, that is equipped with a supporting section with which the alignment tool can rest on a first piece of material, and a table on which the second piece of material can be affixed at the aforementioned angle with respect to the first piece of material, whereby moreover the table is affixed movably on the supporting section to make one or more translation movements with respect to the supporting section, whereby the alignment tool is equipped with releasable securing elements.

Abstract: In an embodiment, a chuck to support a solar cell in hot spot testing is provided. This embodiment of the chuck comprises a base portion and a support portion disposed above the base portion. The support portion is configured to support the solar cell above the base portion and to define a space between a bottom surface of the solar cell and the base portion that thermally separates a portion of the bottom surface of the solar cell from the base portion.

Abstract: A medium suction support device includes a medium support table, a suction unit, a plurality of flexible tube members and a sliding member. Through-holes are formed in the medium support table to pass through the medium support table. The suction unit is disposed on a side of the back surface to suction the recording medium disposed on the medium support surface via the through-holes. One opening end of each of the flexible tube members surrounds a corresponding one of the through-holes on the back surface. The sliding member is configured to move in parallel along the back surface. The sliding member has openings formed in an opposing surface facing the back surface with each of the openings being configured to respectively accommodate the other opening end of a corresponding one of the flexible tube members. The openings have different lengths in a parallel movement direction of the sliding member.

Abstract: A suction apparatus 1 holds a wafer W by performing vacuum-suctioning on the wafer W. The suction apparatus 1 comprises a suction substrate 2. The suction substrate 2, which is rigid, comprises a plurality of pin-like protrusions 2a formed so that the tip-end faces (upper surfaces) thereof are the same height. An elastic coating layer is coated by way of an undercoat layer 4 on the tip-end faces of the protrusions 2a. When the wafer W is suctioned, even if a foreign matter is interposed between the wafer W and the suction surface, because the foreign matter embeds itself into the coating layer 3, the planarization of the wafer W is improved. In addition, because the coating layer 3 can be made comparatively thinner, undulations in the wafer W can be reduced and, to that end, the planarization of the wafer W in the suctioned state can be improved.

Abstract: A substrate holder for use in a lithographic apparatus. The substrate holder comprises a main body, a plurality of burls and a heater and/or a temperature sensor. The main body has a surface. The plurality of burls project from the surface and have end surfaces to support a substrate. The heater and/or temperature sensor is provided on the main body surface. The substrate holder is configured such that when a substrate is supported on the end surfaces, a thermal conductance between the heater and/or temperature sensor and the substrate is greater than a thermal conductance between the heater and/or temperature sensor and the main body surface.

Abstract: Respective attracting openings of a bonding head are disposed so as to avoid joining regions at which bump electrodes (obverse electrodes) of a semiconductor chip are joined with bump electrodes of a package substrate. Bump electrodes (reverse electrodes) that are connected to the bump electrodes are provided at a reverse side of the semiconductor chip at positions opposing the bump electrodes. Because the attracting openings do not overlap the joining regions, the bump electrodes (reverse electrodes) are not suctioned at the joining regions.

Abstract: A movable table, which has a substrate to be processed mounted thereon and moves, includes: a main plate formed of a metallic material; and a plurality of sub plates which is disposed on the main plate and is formed of a material with a hardness higher than the metallic material, and the top surfaces of the plurality of sub plates are mounting surfaces of the substrate to be processed.

Abstract: An omni-direction rotatable dual-cup suction device includes two suction cups, which are respectively combined with and in communication with two evacuation structures, so that the two evacuation structures can evacuate air from the suction cups to induce vacuum suction forces. The two suction cups are respectively provided with a mounting seat and an attaching seat for securely coupling the two evacuation structures. The mounting seat includes a pillar fixed thereto. A collar receives a ball end of a bar therein and is attached to the pillar. The ball-ended bar is coupled to a threaded rod, which extends through an internally-threaded locking knob and received into the attaching seat to be secured by a nut. With such an arrangement, one of the suction cups can be attached to a planar fixture surface, while the other suction cup can be used to hold an article and is orientation adjustable in any direction.

Abstract: A sucking device includes a fixing assembly and a sucking assembly. The sucking assembly includes a matching plate, a first annular sealing member, a second annular sealing member, a vacuum generator, and an air pipe. The matching plate is mounted on the fixing assembly, and includes a profile surface. The profile surface defines at least one air hole. The first annular sealing member is mounted on the profile surface of the matching plate, and surrounds the air hole. The second annular sealing member is mounted on the profile surface of the matching plate, and surrounded by the first annular sealing member. The at least one air hole is located between the first annular sealing member and the second annular sealing member. The vacuum generator is mounted on the fixing assembly. The air pipe communicates the at least one air hole with the vacuum generator.

Abstract: Provided is a substrate suction apparatus which has a vacuum suction mechanism and an electrostatic attraction mechanism, and improves planarity of a subject to be processed by improving uniformity in vacuum suction power. A method for manufacturing such substrate suction apparatus is also provided. A substrate suction apparatus (1) is provided with a base board (2), a dielectric body (3), an electrostatic attraction mechanism (4) and a vacuum suction mechanism (5). Specifically, the dielectric body (3) is composed of a downmost dielectric layer (31), an intermediate dielectric layer (32) and a topmost dielectric layer (33). The electrostatic attraction mechanism (4) is composed of attraction electrodes (41, 42) and a direct current power supply. The vacuum suction mechanism (5) is composed of a groove (51), a suction channel (52), a porous dielectric body (3) and the porous attraction electrodes (41, 42).

Abstract: Embodiments of the present invention include various different types and sizes of automated, computer-controlled, adjustable machine-tool work-piece mounting systems used to support and constrain movement of work pieces during manufacture, repair, and maintenance. The automated, computer-controlled, adjustable machine-tool work-piece mounting systems that represent embodiments of the present invention are implemented from one or more adjustable machine-tool work-piece mounting-system modules. Each adjustable machine-tool work-piece mounting-system module comprises an array of extendable supports with non-circular and non-elliptical cross sections. In certain embodiments of the present invention, the extendable supports are extended and retracted along a direction approximately normal to a substrate or surface of the automated, computer-controlled, adjustable machine-tool work-piece mounting-system module by linear actuators and are maintained at desired positions by compressed-air brakes.

Abstract: A combinatorial processing chamber is provided. The processing chamber includes a substrate support rotatable around a central axis. The substrate support has a plurality of subsections operable to be isolated from each other. The plurality of subsections has a rotatable support cell independently controllable from the substrate support. A vacuum source in fluid communication with a gap defined around a peripheral region of the substrate support is provided. The vacuum source is in fluid communication with a peripheral region of each rotatable support cell of the plurality of subsections.

Abstract: A fixing jig is made up of a plate-like jig main body (2) and a close contact layer (3) which detachably holds a work (W) in close contact therewith. The jig main body has: on one surface thereof a plurality of supporting projections (4) to support the close contact layer; and also has, along an outer peripheral portion of said one surface, a side wall (5) which is of substantially the same height as the supporting projections. The close contact layer is adhered to an end surface of the side wall to thereby define a partitioned space (6) between the close contact layer and the jig main body. By sucking the air within the partitioned space via a ventilation hole (7) formed in the jig main body, the close contact layer is deformed. The work is thus surely supported and fixed also in performing a processing in which a force is applied to the work.

Abstract: The present invention relates to a vacuum cup assembly designed to quickly and easily remove and mount a suction pad. The assembly comprises: a pipe-shaped body having a first passage for discharging air; a vacuum cup coupled to a lower end of the body; and a movable holder disposed between the body and the vacuum cup. Here, the vacuum cup includes a ring-shaped fastener, and a suction pad mounted on an outer surface flange of the fastener, wherein the holder resiliently presses and fixes the mounted suction pad against the fastener. Here, the inner space of the suction pad is in communication with the first passage of the body. The pressed and fixed state is negated when the holder is moved upwards, whereupon the suction pad can be easily removed and mounted.

Abstract: The invention relates to a device for securing solar cells to glass surfaces, the securing device comprising a film of encapsulation material containing a plurality of holes and troughs in the film surface. Solar cells disposed on the film can be secured to a glass surface as a result of a vacuum being generated in the troughs and holes. The invention also relates to a method for securing solar cells in solar module production.

Abstract: A tool comprises a caul plate having at least one suction hole and a vacuum port fluidly coupled to the suction hole for drawing a patch against the caul plate under vacuum.

Abstract: A holding/turning device for touch-sensitive flat objects, in particular wafers, with a distance positioning device which is arranged for holding the object perpendicular to the object plane at a defined distance, a lateral positioning device, arranged for positioning the object in the object plane and for rotating together with the object about a rotational axis perpendicular to the object plane, and with a rotational drive, coupled with the lateral positioning device, providing a driving force for rotating the object about the rotational axis, wherein the driving force can be applied to the object by the lateral positioning device. The distance positioning device is adapted for holding the object without involving contact, and is decoupled from the rotational drive in such a way that the distance positioning device does not rotate together with the object.

Abstract: A rotary table device includes a cooling structure and a rotary bearing provided with a cooling structure. A rotary table device provided with a cooling structure includes a hollow motor as a drive source, a table rotated by the hollow motor, and a rotary bearing supporting rotational motion of the table, in which the rotary bearing includes an outer ring having an inner peripheral surface to which a rolling surface is formed, an inner ring having an outer peripheral surface to which a rolling surface facing the rolling surface of the outer ring is formed, and a number of rolling members in a rolling passage formed by the rolling surface of the outer ring and the rolling surface of the inner ring, and a heat sink is formed to either one of the inner and outer rings.

Abstract: A device capable of picking up optical elements includes a first suction member, a second suction member, a vacuum pump unit and a liquid spraying unit. The first suction member defines a chamber. The second suction member is arranged around the first suction member to form an annular space. The vacuum pump unit pumps the air out of the chamber and the annular space to create a vacuum therein, which generates a suction force to suck the optical elements respectively. The liquid spraying unit communicates with the chamber and the annular space, and pours the liquids into the chamber and the annular space. When the liquid volatilizes in the chamber and the annular space to fill the vacuum, the optical elements disengage from the first suction member and the second suction member respectively.

Abstract: A biochip holder is disclosed, the holder including a means to receive a biochip, a vacuum port in communication with the received biochip, and a vacuum source connected to the vacuum port. Liquid from flushing of the biochip is pulled by vacuum force into a vacuum port and can be collected in order to prevent cross-contamination of the biochip. A method of collecting fluid from such a biochip is also disclosed.

Abstract: An aluminum-plastic composite structure includes an aluminum portion and a plastic portion. The aluminum portion defines a plurality of micro grooves by ultraviolet lithography. The plastic portion is integrally formed on the aluminum portion and substantially filling in the micro grooves. A width of each micro groove is in a range from 0.02 millimeters to 0.05 millimeters. A depth of each micro groove is in a range from 0.2 millimeters to 0.25 millimeters.

Abstract: A method is provided for creating an electrode node array device. First and second conductors are stamped from a stock sheet. Each of the conductors has a plurality of raised protrusions. The protrusions are interleaved in a manner in which in both directions of the array, a raised protrusion of one conductor alternates with a raised protrusion of the other conductor. The method includes assembling the device in stages on a vacuum apparatus having guide pins that interact with guide holes on laminate sheets that are applied to both sides of the first and second conductors.

Abstract: A non-contact transport apparatus includes a housing and a plate which is fitted into a circular recess formed at a central portion in a lower surface of the housing. The housing is formed in an octagonal shape corresponding to the shape of a workpiece to be transported. In the plate, a plurality of nozzles are arranged radially at equal angular intervals. The nozzles include first nozzle grooves and second nozzle grooves having cross sectional areas that are determined in proportion to distances between a principal side of the housing and the nozzle and between an oblique side of the housing and the nozzle for making the flow rates of the pressure fluid through the first nozzle groove and the second nozzle groove different.

Abstract: A medium support member includes a table having a top surface; an overlay placed on the top surface of the table, the overlay having a top surface and a bottom surface and a plurality of through-holes; a spacer array provided between the top surface of the table and the bottom surface of the overlay to define a gap between the table and the overlay, and at least one vacuum passage communicating with said gap for creating an underpressure in the gap, wherein at least portions of the overlay and corresponding portions of the table are held together by magnetic attraction.

Abstract: A holding device for holding an element in sheet form 10 during its phase of insertion into a work station 300 of a converting machine 1. The holding device 310 includes a suction member 320 able to partially hold each sheet 10 by its rear portion during insertion of the sheet 10 into the work station 300. The holding device also includes a blower 330 able to flatten the rear portion of each sheet 10 against the suction member 320 during the phase of insertion.

Abstract: A vacuum gripper includes a suction plate for gripping an object. The suction plate has a lid and a suction bottom which define a suction chamber there between and engage formfittingly at least on one side within one another via a tongue and groove joint extending in parallel relation to a gripping plane. The tongue and groove joint includes a groove on one of the suction bottom and lid, and a tongue which is formed on the other one of the suction bottom and lid and fits into the groove.

Abstract: A multi-generational carrier platform is configured to carry substrate carriers of different sizes depending on processing needs. Multiple carrier adaptors are provided on one side of a support plate, and substrate carriers can be distributed among the carrier adaptors to mount a maximum number of substrates under the constraint of non-overlap of the substrates and the substrate carriers. The multi-generational carrier platform can be configured to provide rotation to each substrate carrier mounted thereupon, and is compatible with chemical mechanical planarization processes that require rotation of substrates against an abrasive surface. The multi-generational carrier platform facilitates maximum utilization of a processing area provided by a tool configured to process substrates of different sizes.

Abstract: A substrate laminating apparatus which sticks substrates together in vacuum with high accuracy. The apparatus includes a first chamber into which two substrates are carried; a second chamber in which substrates are stuck together; and a third chamber which delivers a substrate laminate. The pressure level in the first chamber and the third chamber is varied from atmospheric to medium vacuum under control and that in the second chamber is varied from medium vacuum to high vacuum under control. In the second chamber, electrostatic adsorption means which can move up and down picks up an upper substrate and holds it on an upper table.

Abstract: A vacuum chuck comprises a main body including a support projection and a vacuum groove arranged in a lattice form on the top surface thereof, an installation space, a vacuum space, a filter space. The main body further includes an inlet that communicates with the installation space and an outlet that communicates with the vacuum space. An air saving valve B, a vacuum sensor S, a vacuum generator V and a filter F are installed in the installation space, vacuum space and filter space of the main body. A pressure gauge and a vacuum gauge that are mounted on the front side and communicate with the inlet and the vacuum space respectively. A main body cover that is air-tightly coupled to the lower part of the main body, and a filter cover that is air-tightly coupled to the lower part of the filter space.

Abstract: A substrate processing apparatus is disclosed for bringing a substrate from a carrier, by a substrate transfer portion inside a transfer chamber, into a processing module to perform a process therein. The substrate processing apparatus includes a substrate storing chamber coupled to an exterior of the transfer chamber via a transfer opening to be in communications with the transfer chamber; a first storing shelf in the substrate storing chamber to store substrates for a first storing purpose; a second storing shelf in the substrate storing chamber to store substrates for a second storing purpose different from the first storing purpose; and a shifting mechanism that shifts the first and the second storing shelves to position a substrate storing area of one of the first and the second storing shelves so that substrate transferring is enabled between the substrate storing area and the substrate transfer portion via the transfer opening.

Abstract: A positioner includes a housing, a table, a drive portion, a cylinder, a first winder, and a first cord. The cylinder includes a first opening at the rotation center of the table, and a second opening opposite and connected to the first opening. The first winder is disposed outside the second opening of the cylinder. The first cord includes a first lead-out portion and a first wound portion. The first lead-out portion enters the second opening, passes through the cylinder, and is led out from the table. The first wound portion is wound around the first winder according to the rotation of the table. Thus, the positioner can increase the number of air tubes or wires led out onto the table without increasing its size.

Abstract: A tool to hold objects by suction includes a glue free gasket structure on its handling surface. The gasket structure includes a gland formed below the handling surface having an approximate dovetail section with a narrow opening at the handling surface defining a suction area, and a gasket inserted in the gland. The gasket has a shoulder portion that conforms to the shoulder portion of the dovetail section of the gland, and a sealing lip protruding through the narrow opening at the handling surface. The gasket fits movably in the gland, and is self-aligning to compensate for variations in the space between the holding surface and the object being handled. This gasket structure is especially useful for devices to cool injection molded parts.

Abstract: Methods and systems for manufacturing back contact solar cells that have improved efficiency and device electrical properties. the solar cell device described herein includes an Emitter Wrap Through (EWT) solar cell that has plurality of laser drilled vias disposed in a spaced apart relationship to metal gridlines formed on a surface of the substrate. Solar cell structures that may benefit from the invention disclosed herein include back-contact solar cells, such as those in which both positive and negative contacts are formed only on the rear surface of the device.

Abstract: A suction apparatus 1 holds a wafer W by performing vacuum-suctioning on the wafer W. The suction apparatus 1 comprises a suction substrate 2. The suction substrate 2, which is rigid, comprises a plurality of pin-like protrusions 2a formed so that the tip-end faces (upper surfaces) thereof are the same height. An elastic coating layer is coated by way of an undercoat layer 4 on the tip-end faces of the protrusions 2a. When the wafer W is suctioned, even if a foreign matter is interposed between the wafer W and the suction surface, because the foreign matter embeds itself into the coating layer 3, the planarization of the wafer W is improved. In addition, because the coating layer 3 can be made comparatively thinner, undulations in the wafer W can be reduced and, to that end, the planarization of the wafer W in the suctioned state can be improved.

Abstract: A clamping device for clamping a substrate with a first surface and a second surface includes a supporting plate and a number of clamping units. The supporting plate includes a base portion and an engaging portion. The base portion includes a base surface. The engaging portion protrudes from the base surface of the base portion and includes an engaging surface facing away from the base surface. The supporting plate defines a through hole in the engaging surface. The supporting plate is configured for supporting the substrate on the engaging surface of the engaging portion. The clamping units are configured for clamping the substrate on the supporting plate such that the engaging surface of the engaging portion engaging surface is substantially coplanar with the first surface of the substrate.

Abstract: The invention relates to a compressed-air-operated vacuum generator or vacuum gripper having at least two vacuum units, wherein each vacuum unit has a suction chamber, an intake opening which opens into the suction chamber, an outflow opening which opens out of the suction chamber, and at least one drive air opening which opens into the outflow opening between the intake opening and the outflow opening, and wherein the vacuum units operate on the basis of at least two different principles (Venturi, Bernoulli, Coanda, vortex, etc.) for generating a negative pressure.

Abstract: The present invention provides an apparatus for laser cutting that comprises a rigid support table frame having a X-axis and a Y-axis, and one or more bridge rail modules running across the Y-axis of the table frame, each bridge rail module comprising at least one hold-down device module. The present invention further provides a process for laser cutting a metal plate using this apparatus.