Abstract: The present invention is a compound sliding seal unit of markedly reduced size and height dimensions which is employed as a discrete assembly for both the passage across and the at-will height adjustment of a mounted, rotatable shaft which extends from the atmospheric environment portion into the vacuum environmental portion of an ion implanter apparatus. The extended, rotatable shaft is typically fashioned as either a rotatable hollow tube or conduit (suitable for the passage of electrical components) and/or as a rotatable support suitable for the mounting of a pivotal scanning radial arm translation system. The manner of construction and the substantially reduced height dimensions of the compound sliding seal unit permits on-demand changes of height for the mounted, rotatable shaft which extends from the atmospheric environment and extends through the compound unit into the confined and limited spatial volume of a vacuum environment within a conventional ion implantation apparatus.

Abstract: The invention relates to a single seal, and more specifically to a seal for a rotary shaft extending through a wall, e.g. that of a pump housing. The single seal exhibits one single sealing location between a stationary and a rotating sealing ring. The seal is attached by means of a flange (12) on to the wall in order to seal off a chamber inside the wall against the shaft (22) and towards the exterior. According to the invention, the sealing rings (1, 2) are biased against each other by means of an axially movable member (5) extending through the wall in order to increase the contact between the sealing rings (1, 2). The resilient member may be a slitted sleeve (5) or a coil spring.