Abstract: A wafer bonding apparatus is provided includes a lower support plate configured to structurally support a first wafer on an upper surface of the lower support plate; a lower structure adjacent to the lower support plate and movable in a vertical direction that is perpendicular to the upper surface of the lower support plate, an upper support plate configured to structurally support a second wafer on a lower surface of the lower support plate, and an upper structure adjacent to the upper support plate and movable in the vertical direction.

Abstract: A power tool includes a housing, a power output element for outputting power, a motor for driving the power output element to output power, and a surface light source device for providing illumination. The surface light source device is mounted on the housing and the surface light source device includes a light exit surface allowing the surface light source device to emit light.

Abstract: A modular tool retainer, comprising a main body extending along an axis of rotation and which is functionally divided into a shaft section for coupling to a machine tool spindle and a clamping section having a central accommodating bore for accommodating and clamping a cutting tool, which has a cutting head and at least one cutting edge, which is arranged concentrically to the main body and detachably fastened to the main body, and which is arranged at a predetermined axial and/or radial and/or angular position relative to the at least one cutting edge. The cutting head has a sleeve section, which extends the tool retainer and has a central accommodating bore arranged concentric to the central passage bore of the clamping section for accommodating and radially supporting a tool shaft part of the cutting tool protruding from the central accommodating bore of the clamping section.

Abstract: A collet adaptor 20 including a work piece clamp mechanism 29. The collet adaptor 20 is rotatable about a first axis A and the work piece clamp mechanism 29 is mounted within the collet adaptor 20 for rotation with the collect adaptor 20. The clamp mechanism 29 is also mounted for movement laterally to the first axis A during rotation of the collet adaptor 29. The clamp mechanism 29 can also be mounted within the collect adaptor 20 for rotational movement lateral to the first axis A during rotation of the collect adaptor 20.

Abstract: A positioning board for a chuck includes a board member with a central bore, positioning bores and positioning slots. Each positioning slot has a main slot and two sub-slots connected to opposite ends of the main slot to form an H-shaped slot. Two flexible tongues are formed at opposite sides of the main slot. Therefore, while a post of a base engages the positioning slot, the flexible tongues are bent by the post to provide a precise engagement of chuck's bases.

Abstract: A chuck isolator for the chuck of a drill comprising a base plate mountable to the chuck, a drive plate connectable to a drill bit, and a first elastomeric member interposed between the base plate and the drive plate. The base plate and the drive plate are wider than the drill bit. The chuck isolator is connectable to the chuck of the drill and capable of providing sound and vibration isolation when the chuck isolator is connected to the drill.

Abstract: A floating chuck assembly used in connection with a workpiece support carrying a workpiece, the floating chuck assembly comprising a chuck assembly; a linkage assembly adapted to support the chuck assembly, the linkage assembly including a mounting link attachable to the chuck assembly, a first link having a first end pivotally attached to a support about a first support axis and having a second end pivotally attached to the mounting link about a first mounting axis, a second link having a first end pivotally attached to the support about a second support axis and a second end pivotally attached to the mounting link about a second mounting axis; and, an extendable support having a first portion attached to the support and a second portion attached to one of the mounting link, first link, and second link, wherein the first portion moves relative to the second portion.

Abstract: A device for employment in a machine tool, including: a first unit; a second unit connected to the first unit, wherein the first unit is rotatable around a rotational axis relative to the second unit; a motor spindle connected to the second unit; a line feed-through extending along the rotational axis from the first to the second unit; lines extending from the interior of the first unit through the line feed-through as well as through the second unit into the motor spindle; and a line guiding device formed in the first unit and serving for guiding a part of the lines disposed in the first unit immediately in front of the line feed-through, wherein the line guiding device is formed in a plane oriented perpendicularly to the rotational axis, and wherein the line guiding device feeds the lines upon rotation of the second unit with respect to the first unit.

Abstract: The present invention provides a chuck structure for substrate cleansing equipment, which comprises a base and at least a pair of clipping members. The pair of clipping members is disposed on both corresponding sides of the base, respectively. Each clipping member has a plurality of holes on a surface thereof. When the pair of clipping members moves towards the base, it clips a substrate such as a photomask, a wafer, or other semiconductor substrate. The surfaces of the clipping members having the plurality of holes are against the substrate for reducing the contact area between the clipping members and the substrate. Thereby, the static charges generated on the substrate by the friction between the clipping members and the substrate can be avoided, which can reduce the damages on the substrate due to electrostatic discharge effectively.

Abstract: A power tool is provided and includes a housing, a motor, a gear case, a bearing assembly, and a chuck assembly. The motor is disposed in the housing and defines an axis of rotation. The gear case is coupled to the motor and includes a proximal end and a distal end. The proximal end of the gear case is coupled to the housing. The bearing assembly extends from the distal end of the gear case along the axis of rotation and supports a driveshaft for rotation about the axis of rotation. The chuck assembly is rotatably coupled to the driveshaft and includes a chuck sleeve annularly surrounding the bearing assembly about the axis of rotation.

Abstract: A chuck face of a wafer bonding chuck that includes a flat central zone and an outer annular zone contiguous to the central zone, the outer annular zone being lower than the flat central zone such that an annular edge portion of a wafer that is mounted to the chuck face has a convex profile with respect to the chuck face of the bonding chuck. The outer annular zone may move along an axis that is perpendicular to the central zone. The chuck face may include a plurality of contiguous zones, with at least one of the zones moveable with respect to another of the zones.

Abstract: A processing apparatus for processing a substrate chucked by a chuck installed on a stage includes: a conveying unit configured to convey the substrate to the chuck; a robot configured to selectively convey, to the stage, a pressing member capable of pressing the substrate to reduce a warp of the substrate chucked by the chuck and a cleaning member capable of cleaning a chuck surface; and a controller configured to cause the robot holding the pressing member to execute pressing processing for correcting the warp of the substrate and cause the robot holding the cleaning member to execute cleaning processing of the chuck surface.

Abstract: A power tool includes a clamp shaft for clamping a tool accessory to the power tool and a clamp shaft holding mechanism for selectively locking the clamp shaft to hold the clamp shaft in a position that secures the tool accessory on the power tool. The power tool also includes a lever for shifting the clamp shaft holding mechanism between clamped and unclamped states. The lever is configured such that when an operator grasps the lever and moves it toward a position for releasing the tool accessory, the lever and the operator's hand move away from the tool accessory.

Abstract: A tool attachment has: (i) a drive shaft driven rotationally; (ii) a locking section for locking on a mounting interface of a hand-held machine tool, the machine tool including a tool holder having a receiving member for receiving an insert tool and a first locking sleeve preloaded by a first spring element in an axial direction pointing away from the hand-held machine tool; and (iii) an actuating element configured to shift, upon mounting the tool attachment on the hand-held machine tool, the first locking sleeve against a spring force applied by the first spring element, in the direction of the hand-held machine tool.

Abstract: The present disclosure relates to a tool holder to receive and lock a tool taper on a tool magazine, an unlocking device to unlock a tool taper that is received and is locked in a tool holder of this type, and a tool magazine for a machine tool comprising one or more tool holders of this type and an unlocking device of this type.

Abstract: A lithographic apparatus is described that comprises a support structure to hold an object. The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck, on which the object is supported, and an array of shear-compliant elongated elements normal to the chuck and the stage, such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.

Abstract: A rotary tool for coupling with a rotary tool accessory includes a motor and a power shaft operably coupled with the motor. A collet is operably coupled to the power shaft, the collet including a longitudinally extending inner surface portion. A nickel based bonding material is affixed to the longitudinally extending inner surface portion. A plurality of abrasive particles extend outwardly of the bonding material on the longitudinally extending inner surface portion, wherein generally between about 30 percent and about 55 percent of each abrasive particle of the plurality of abrasive particles extends outwardly of the nickel based bonding material.

Abstract: A rotary actuator comprises a rotatable chuck assembly and an actuating mechanism. The chuck assembly may include a chuck housing movable between retracted and deployed positions. The chuck assembly may further include a pair of jaws pivotable between open and closed positions in correspondence to the retracted and deployed positions of the chuck housing. The actuating mechanism may be coupled to the chuck assembly for rotation between “Off”, “Neutral”, and/or “On” positions.

Abstract: Exemplary embodiments are directed to tool bit holders that generally include a tool bit cartridge defined by side walls located opposite and facing away from each other, and at least one end wall that defines a curved, angled or staggered geometry. The exemplary tool bit holders generally include a pivot point located on the side walls of the tool bit cartridge. The tool bit cartridge includes tool bit storage holes in the at least one end wall. The tool bit cartridge generally rotates about the pivot point within a cavity of a device.

Abstract: Methods and apparatuses are disclosed for rinsing the interface area of a liquid and air boundary after a substrate cleaning process using gas barrier. In some embodiments, a protective chuck having an inner gas ring and an outer liquid ring can be used to clean the area under the edge of the protective chuck. A gas flowing outward from the gas ring can enable a liquid to flow outward from the liquid ring, rinsing the outer portion of the protective chuck. The interface rinsing process can enable combinatorial processing of a substrate, providing multiple isolated processing regions on a single substrate with different material and processing conditions.

Abstract: The invention concerns a centring device for centring a chuck on a securing portion in particular of a rotating spindle of a machine, wherein a tapered portion corresponding to a mating tapered portion on the chuck side is provided on the securing portion in such a way that the tapered portion and/or the mating tapered portion is/are formed so as to yield elastically in the axial direction such that, after the tapered portion comes into contact with the mating tapered portion, the chuck can be moved further in the axial direction, at least to a limited extent, as a result of an axial pulling-in force until the chuck comes to lie against a stop on the securing portion side. The invention likewise concerns an associated locking device.

Abstract: The description shows a collet chuck 303 for clamping a tool for the purpose of machining a workpiece, comprising: a cutout for receiving a collet 301, wherein the collet chuck 303 has a cutting edge 306 for machining the workpiece.

Abstract: An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.

Abstract: A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface.

Abstract: The invention concerns a securing device for securing a chuck, in particular a power-operated chuck, on a rotating spindle of a machine, wherein a rotating element and at least one chucking-slide assembly are provided in a main body in such a way that, when the rotating element turns, the chucking-slide assemblies change their radial position such that, in a chucking position, they force the chuck against the securing device in the axial direction.

Abstract: The present invention is directed to a high speed, spinning chuck for use in a semiconductor wafer inspection system. The chuck of the present disclosure is configured with a turbulence-reducing lip. Spinning of the chuck produces radial airflows proximal to a surface of the wafer and proximal to the bottom of the chuck. The turbulence-reducing lip of the chuck of the present disclosure directs the radial airflows off of the top surface of the wafer and the bottom surface of the chuck in a manner that minimizes the size of the low pressure zone formed between these radial airflows. The minimization of the low pressure zone reduces air turbulence about the periphery of the chuck and substrate, thereby reducing the possibility of contaminants in the system being directed onto the surface of the substrate by such air turbulence.

Abstract: A run-off securing device, in particular a run-off securing device of a handheld power tool, is configured to avoid running off of a clamping element and/or a tool from a spindle. The device has at least one transmission unit, which is removably coupled to the spindle and has at least one first transmission element and at least one second transmission element. The at least one second transmission element is movable in relation to the at least one first transmission element. The transmission unit has at least one movement changing unit, which at least partially transforms a first relative movement between the at least one first transmission element and the at least one second transmission element into a second relative movement in a braking mode.

Abstract: An object of the present invention is to prevent a socket from falling off by means of a simple and compact configuration without impairing comfort and ease of use, regardless of model. In an impact driver, a connecting ring in which a protrusion including a through hole protrudes from an outer periphery thereof is clamped detachably to an outer periphery of a shaft support portion of a hammer case. By a carabiner passing through a ring of a socket and the through hole in the connecting ring and engaging the carabiner, a socket portion can be prevented from falling off when a bit portion is broken.

Abstract: Electronic device fabrication processes, apparatuses and systems for flowable gap fill or flowable deposition techniques are described. In some implementations, a semiconductor fabrication chamber is described which is configured to maintain a semiconductor wafer at a temperature near 0° C. while maintaining most other components within the fabrication chamber at temperatures on the order of 5-10° C. or higher than the wafer temperature.

Abstract: A fastening nut for fastening a receiving body and a collet together is disclosed. The fastening nut comprises a main body having an outer surface, a first end, and a second end distal to the first end and a plurality of blades located radially on the outer surface of the main body, wherein each blade is at an angle to the second end. The fastening nut is attachable on the receiving body for coaxial retention of the collet. Furthermore, axial rotation of the fastening nut creates a suction proximate the second end of the fastening nut. In one embodiment of the fastening nut, the plurality of blades protrude axially past the second end of the main body in a direction away from the first end. A tool bit holding system and a system and method for machining specimens comprising the fastening nut are also disclosed.

Abstract: Provided are: a double grasping mechanism including a double grasped part and a double gripping mechanism; a spindle, a holder holding mechanism, a main-spindle, and a holder holding device each including a double gripping mechanism; and a tool holder; a chuck holder; and a clamp holder. The double grasped part is formed by an outer pull stud and an inner pull stud. The double gripping mechanism is formed by: an outer gripping mechanism including an outer large-diameter part, an outer small-diameter part, an outer draw bar, and outer balls; and an inner gripping mechanism including an inner large-diameter part, an inner small-diameter part, an inner draw bar, and inner balls. The tool holder includes the outer pull stud. The chuck holder includes the outer pull stud and the inner pull stud. The clamp holder includes the outer pull stud and the inner pull stud.

Abstract: In accordance with an embodiment of the invention, there is provided a system for cooling a load.

Abstract: A damping tool holder, such as a boring head, a chuck, or a milling cutting arbor, integrates a damping device (2), in the form of an elongated body. The damping device (2) is housed in a mounting body (3), connected by one end to the tool-holder body (1) and having at its other end an end fitting (4) for mounting a tool, whereby the mounting body (3) is equipped with at least one lubricant feed pipe (32), emptying at its front end into the end fitting (4) for mounting a tool and connected at its other end to a circular groove (102) for distributing lubricant that is provided on the front surface of the tool holder (1).

Abstract: A retention knob for use with a tool holder that is less prone to distorting a tapered tool holder surface, especially if it is over-tightened. The retention knob includes a knob head, a flange engageable with an end of a tool holder shank, a pilot segment receivable by the counter bore defined by said tool holder shank and a threaded segment spaced from said flange by an undercut segment. The threaded segment is configured so that it has a length that is substantially the minimum length required to achieve maximum thread holding strength. The undercut segment is configured to space the threaded segment from its head so that a distal end of the threaded segment is substantially near the bottom of the tapered bore forming part of the tool holder.

Abstract: An adhesive chuck, and an apparatus and method for assembling substrates using the same are disclosed. The apparatus comprises a chamber, a first adhesive chuck inside the chamber and having a plurality of adhesive protrusions to adhere to a first substrate conveyed from an outside into the chamber via an intermolecular attractive force, and a driving unit to move the first substrate adhered to the first adhesive chuck and a second substrate toward each other to be compressed and assembled to each other. The apparatus can achieve adhesion and separation of a substrate with minimal power consumption, enhancing an to operating efficiency. Additionally, the adhesive chuck can overcome a problem of spot generation on a display panel caused by remaining static electricity. Furthermore, since the adhesive chuck is almost free from a problem of electric instability, it can exhibit high stability and efficiency and can be fabricated at lower costs.

Abstract: A collet for connecting a rotary tool to a rotary tool driver, the rotary tool including a shaft having a shaft end and a shaft diameter includes a body including a first end configured to connect to the rotary tool driver and a second end configured to receive the rotary tool. A magnet is disposed within the body and is positioned to magnetically engage and contact the shaft end to inhibit movement of the rotary tool along a shaft rotational axis. A support member is disposed within the body and is configured to support the shaft for rotation about the shaft rotational axis.

Abstract: A tool holder, in particular for a measuring sensor, with an interface to a spindle of a machine tool is proposed. The tool holder comprises, as seen from the interface for the spindle, a material portion which differs from the customary basic material of a tool holder in a lower coefficient of linear expansion ? and/or in a lower heat conductivity ?. According to the invention, the material portion affords thermal decoupling between the tool-side portion of the tool holder and a tool received therein from the tool spindle for reducing a length change on account of an introduction of heat coming from a comparatively hot tool spindle.

Abstract: A holder for the shank of a tool comprising a cylinder having a series of shoulders and grooves in radial formation with the shoulders and grooves allowing for O-rings to penetrate to the interior and exterior of the cylinder to form a means whereby the shank of a tool can be inserted and the tool held in position. As an alternative embodiment the shoulders and grooves can be helical around the cylinder with rubber latex tubing in the grooves and penetrating to the interior and exterior of the cylinder to thereby hold a tool or implement. Also note that a tool can be inserted at either end of the cylinder; and that an oversize cylinder can be inserted over the cylinder and held by the exterior portion of the O-ring or latex tubing. A special embodiment of this invention is the formation of a grommet employing a tubular portion to form a ring into which is cut grooves forming shoulders and into which is inserted an O-ring to form a grommet.

Abstract: An adjusting magnetism shelter of a cutter holder has a stationary collar, a sliding assembly and a cap. The stationary collar has a disk and multiple sliding recesses. A first hole is defined in the disk. The sliding recesses are defined in the disk. The sliding assembly has multiple sliding bars. Each sliding bar is mounted in a sliding recess and has a magnetism bar and a moving shaft. The magnetism bar has a reflection surface. The moving shaft protrudes from each sliding bar. The cap covers the stationary collar and has a top board. The top board has multiple arc grooves. Each arc groove has an inner end and an outer end. The inner end of the arc groove is near the first hole. The outer end of the arc groove is far away from the first hole and is inserted into one of the moving shafts.

Abstract: The invention relates to a hand-held power tool with a tool clamping unit and an adjustment ring. The invention provides that the adjustment ring protrudes forwards in an axial direction beyond an axially rear end of the tool clamping unit, at least when the tool clamping unit is completely open. The invention further relates to an adjustment ring for a hand-held power tool.

Abstract: An aspect of the present invention is drawn to a device for use with an electrostatic chuck having a top surface and a bottom surface, the top surface being separated from the bottom surface by a width, the electrostatic chuck additionally having a hole therein, the hole having a first width at the top surface and having a second width at the bottom surface, the first width being less than the second width, the top surface being capable of having wafer disposed thereon. The device includes a pin, a shaft, a neck portion and an outer housing portion. The pin has a pin width less than the first width. The shaft has a pin-holding portion, an end portion and a central portion disposed between the pin-holding portion and the end portion. The central portion has a first bearing portion. The outer housing portion has a first end and a second end and includes a second bearing portion. The shaft is disposed within the outer housing portion and is moveable relative to the outer housing portion.

Abstract: The present invention discloses a self-locking mechanism for use in a drill chuck, comprising: clutch tooth sleeves, fixedly connected with the chuck body of the drill chuck and forming teeth; an oval deformation ring, having a substantially circular first shape and a substantially oval second shape, wherein the oval deformation ring has teeth on the side wall, with the teeth engaging with the teeth of the clutch tooth sleeve when the oval deformation ring is in the second shape; and a control sleeve, for controlling the conversion of the oval deformation sleeve between the first shape and the second shape. The present invention also discloses a force increasing self-locking drill chuck with said self-locking mechanism. The self-locking mechanism according to the present invention can be used in drill chucks of multiple structures, and provides a brand-new thought for the designs of the self-locking mechanisms of drill chucks.

Abstract: An ID tag (27) is attached to a bottom surface (31) of a hollow portion (17) of a tool holder (11) having a hollow taper shank. Concretely, a circular recess (33) is formed on bottom surface (31) of hollow portion (17), and ID tag (27) is attached in recess (33) by means of adhesive or the like. The center of circular recess (33) coincides with a rotation axis of tool holder (11).

Abstract: Methods and apparatus for bonding an electrostatic chuck to a component of a substrate support are provided herein. In some embodiments, an adhesive for bonding components of a substrate support may include a matrix of silicon-based polymeric material having a filler dispersed therein. The silicon based polymeric material may be a polydimethylsiloxane (PDMS) structure having a molecular weight with a low molecular weight (LMW) content ? D3-D10 of less than about 500 ppm. In some embodiments, the filler may comprise between about 50 to about 70 percent by volume of the adhesive layer. In some embodiments, the filler may comprise particles of aluminum oxide (Al2O3), aluminum nitride (AlN), yttrium oxide (Y2O3), or combinations thereof. In some embodiments, the filler may comprise particles having a diameter of about 10 nanometers to about 10 microns.

Abstract: The invention relates to the transmission of power and/or data from/to a stationary part of a machine tool 200 to/from an accessory 100 mounted in the spindle 210 of the machine tool 200. A first electrical link or interface 1a,1b,1c,1d provides electrical communication between the stationary part 200 and the spindle 210, and a second electrical link or interface 3 is provided electrically connected to the first electrical link at the accessory mounting area 230. The second link 3 is in the form of electrical contacts. The invention extends to an accessory shank 360 for mounting to the spindle 210 of the machine tool, and also to an accessory 100 e.g. in the form of a measurement probe, connected to the said shank 360.

Abstract: Pressing device for relative axial displacement of two parts arranged coaxially with one another and displaceable towards one another only by means of high pressure, such as, for example, collet chucks or clamping sleeves, into corresponding bores of tool or collet chuck holders. The device has an outer housing which coaxially encompasses the parts to be pressed and is hinged along an axial plane. Insert halves which in each case comprise two fixed plates having engaging edges for engaging one of the parts to be pressed and an axially moveable press plate having an engaging edge for engaging the second part to be pressed can be inserted into the housing.

Abstract: A system, in certain embodiments, includes a wedge-lock coupling configured to connect a jaw to an actuator arm of a chuck. The wedge-lock coupling includes a wedge portion having a path of travel between a release position and a lock position, and a locking direction along the path of travel gradually wedges the wedge portion between the actuator arm and the jaw.

Abstract: A system pendulum apparatus (13) is provided for a chuck and a method is provided for the clamping of workpieces with a pendulum element (16) and a basal element (30). An axially swivelable connection is provided between the pendulum element and the basal element by way of an element connection device. A swivel range a of the pendulum element can be restricted by a restriction device (39), and the pendulum element can be returned by a return device to a central position of the swivel range. The pendulum element can be fixed within the swivel range by a fixing device (23). The basal element can be joined by a joining device to one jaw of a chuck (10). The pendulum element has a clamping device with two exchangeable clamping elements (20), which are displaceable and fixable.

Abstract: A chucking fixture for a tool or a workpiece, comprising a chuck and a toolholder or workholder matching the chuck, wherein the chuck has posts having bearing surfaces for orienting the tool or workpiece in an X and Y direction and having end faces for establishing a plane perpendicular to the Z direction, wherein devices for measuring the distance between the chuck and the toolholder or workholder are formed in the bearing surfaces and in the end faces.

Abstract: The device for fast assembly of a tool on its support comprises a bolt attached to said support and disposed within a bore with a through hole and a mandrel, which is attached to the tool as such and disposed within said through hole and interacting with said bolt. At the junction between the tool and its support, the device comprises centering and locking means which consist of a set of the tenon and mortise type, which set extends perpendicularly to the mandrel and thus forms a T-shaped structure of the assembly, which confers high rigidity to the tool. Said assembly device is in particular suitable for tools such as actuators or pliers, i.e. tools which are utilized in machines for packaging flasks, bottles or the like.