Abstract: An inkjet print head comprises a fluid channel, the fluid channel including a pressure chamber; a piezo actuator including an active piezo stack and a membrane, the active piezo stack being provided at a surface of the membrane and the membrane forming a flexible wall of the pressure chamber, and a cavity having a cavity dimension determining a wall dimension of the membrane. The method of manufacturing such a print head includes selecting a desired actuator compliance; manufacturing a first print head layer including the piezo actuator; determining at least one actual actuator property of the piezo-actuator; determining a desired wall dimension based on the actual actuator property such that the combination of the piezo actuator and the membrane having the desired wall dimension provides for the desired actuator compliance; and manufacturing a second print head layer including the cavity.

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

Abstract: An acoustic wave element (100) according to certain examples includes a piezoelectric body (130), an interdigital transducer (IDT) electrode (140, 150) disposed above the piezoelectric body (130), and a connection electrode (160) disposed above the piezoelectric body (130) and connected to the IDT electrode (140, 150). A first insulation layer (172) covers the connection electrode (160), and a second insulation layer (174a, 174b) covers the IDT electrode (140, 150). The first insulation layer (172) disposed above the connection electrode (160) has a first thickness T in a direction perpendicular to an upper surface of the piezoelectric body (130) and the second insulation layer (174b) disposed above the IDT electrode (150) has a second thickness K in the direction perpendicular to the upper surface of the piezoelectric body (130). The first thickness T is less than the second thickness K based on FIG. 2C and the relevant description.

Abstract: An acoustic wave filter device includes a base comprising an acoustic wave filter part formed on one surface thereof and including a bonding part formed to surround the acoustic wave filter part, and a cap including a depression groove formed therein and a bonding counterpart formed to correspond to the bonding part. The depression groove is positioned over the acoustic wave filter part. The bonding part and the bonding counterpart receive a voltage to deform and bond the bonding part and the bonding counterpart to each other.

Abstract: A bulk acoustic wave resonator may include: an air cavity; an etching stop layer and an etching stop part, which define a lower boundary surface and a side boundary surface of the air cavity; and a resonating part formed on an approximately planar surface, which is formed by a upper boundary surface of the air cavity and a top surface of the etching stop part. A width of a top surface of the etching stop part may be greater than a width of a bottom surface of the etching stop part. A side surface of the etching stop part connecting the top surface of the etching stop part to the bottom surface of the etching stop part may be inclined.

Abstract: There is provided a power generating element which is capable of converting vibration energy in various directions into electric energy without waste and less likely to be damaged even upon application of excessive vibration. Made available is a main generating structure (MGS) in which a first layer (100), a second layer (200) and a third layer (300) are laminated. The second layer (200) has a plate-like bridge portion (210), a central plate-like portion (220), a left-hand side plate-like portion (230) and a right-hand side plate-like portion (240), each of which is flexible, and the third layer (300), that is a weight body, formed in the “U” letter shape is joined with the lower surface thereof. The plate-like bridge portion (210) is protected by the weight body (300) circumference thereof.

Abstract: An acoustic apparatus includes an anchored diaphragm that is actuated by mechanical energy and a transduction material that is disposed in the anchored diaphragm that generates the mechanical energy that actuates the anchored diaphragm. The acoustic apparatus further includes an extendable diaphragm that is actuated when the anchored diaphragm is actuated and a plurality of damping holes that are disposed about the extendable diaphragm and that allow the extendable diaphragm to actuate in a vertical direction.

Abstract: Disclosed is an audio signal processing device. The audio signal processing device includes a receiving unit configured to receive an ambisonic signal and an object signal, a processor configured to modify a magnitude of a specific directional component of the ambisonic signal based on a location of an object simulated by the object signal, and render a signal generated based on the object signal and the ambisonic signal having a magnitude-modified specific directional component, and an output unit configured to output the rendered signal.

Abstract: To sum up, the present invention relates to an examination system 1301 for examining an associated tissue sample 1302, where the examination system comprises an interventional device 1320 which comprises a plurality of ultrasound transducers 306a-c and wherein the different ultrasound transducers are arranged to obtain images of different regions of an associated tissue sample, and wherein the examination system furthermore comprises a display device 1351 arranged for showing the images so that each of their positions corresponds to the corresponding positions of the different adjacent tissue sample regions in the adjacent associated tissue sample. A possible advantage of the system may be that relevant information regarding the associated tissue sample is conveyed to an observer in a fast an intuitive manner.

Abstract: A capacitive sensor that includes a plurality of capacitance detection electrodes, an insulating substrate, a plurality of capacitance detection electrodes and an insulating substrate. A piezoelectric sensor includes a press detection electrode, a piezoelectric film, a plurality of press detection electrodes and an insulating substrate. The piezoelectric film includes a top surface on which the press detection electrode and wires are formed. The insulating substrate includes a top surface on which the plurality of press detection electrodes and wires are formed. The piezoelectric film includes a cutout portion through which part of the wires of the insulating substrate are exposed. A normal direction of an inner corner of the cutout portion of the piezoelectric film does not match with a uniaxial stretching direction of the piezoelectric film.

Abstract: Embodiments are directed to a micro transducer array comprising a shared motor system having a base plate and mounting interfaces to a frame of a portable electronic device; a first transducer comprising a first magnet disposed between the base plate and a first top plate, and a first diaphragm projecting sound out of a surface of the portable device; a second transducer comprising a second magnet disposed between the base plate and a second top plate, and a second diaphragm projecting sound of an opposite surface of the portable device; a first pair of input terminals inputting a first audio signal to the first transducer; and a second pair of input terminals inputting a second audio signal to the second transducer.

Abstract: An actuator providing a large shear movement in a chosen direction. The angle of inclination of the fibers relative to the chosen direction is larger than 2° and smaller than 40°; the spaces between the piezoelectric fibers of the active layer are filled with an incompressible elastic material; the active layer comprises at least two dimensionally stable elongate elements parallel to the chosen direction; the ends of each fiber are adhesively bonded to said dimensionally stable elements using a rigid adhesive; and said dimensionally stable elements are adhesively bonded, by a rigid adhesive, to said electrode-bearing layers.

Abstract: Textured PMN-PZT fabricated by templated grain growth (TGG) method has a piezoelectric coefficient (d) of 3 to 5 times that of its random counterpart. By combining this TGG method with low-temperature co-firing ceramics (LTCC) techniques, co-fired multilayer textured piezoelectric ceramic materials with inner electrodes were produced at a temperature as low as 925° C., which silver could be used. Trilayer PMN-PZT ceramics prepared by this method show a strain increase of 2.5 times, a driving voltage decrease of 3 times, and an equivalent piezoelectric coefficient (d*) improvement of 10 to 15 times that of conventional random ceramic counterparts. Further, a co-fired magnetostrictive/piezoelectric/magnetostrictive laminate structure with silver inner electrode was also synthesized. The integration of textured piezoelectric microstructure with the cost-effective low-temperature co-fired layered structure achieves strong magnetoelectric coupling.

Abstract: A configuration is provided for firmly fixing a transmitting and receiving unit for IVUS and a transmitting and receiving unit for OCT in a probe of an imaging apparatus for diagnosis in which space saving is achieved. The probe includes a cylindrical housing in which an ultrasonic wave transmitting and receiving unit is arranged on a distal side and a light transmitting and receiving unit is arranged on a proximal side. Two signal wires are connected to the ultrasonic wave transmitting and receiving unit and which extend toward the proximal side substantially parallel to each other and which are arranged in the housing so as to cause the distance between the two signal wires to be smaller than a width of a ball lens portion of the light transmitting and receiving unit.

Abstract: A liquid ejecting head includes a piezoelectric element having a first electrode on a vibration plate, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric material layer. The piezoelectric layer has functional portions sandwiched between the first and second electrodes; the second electrode configures a common electrode provided continuously across a plurality of the functional portions; the piezoelectric layer extends to an outer side of an end of the first electrode; the vibration plate has a first region opposing the first electrode, a second region opposing an area of the piezoelectric layer extending further toward an outer side than the first electrode, and a third region further toward the outer side than the piezoelectric layer; the second region has a thickness substantially equal to or greater than the thickness of the first region; and the third region is thinner than the first region.

Abstract: An acoustic wave filter includes a substrate having voids formed therein; a first resonator disposed on one or more of the voids, and a second resonator disposed on other of the voids. A first trimming layer is provided in the first resonator, and a second trimming layer is provided in the second resonator. The second trimming layer is formed of a material having an etching rate for a given etchant different from that of the first trimming layer.

Abstract: A piezoelectric actuator includes a substrate, a first electrode arranged on the substrate, a piezoelectric body stacked on the first electrode, a second electrode superimposed on a surface of the piezoelectric body on a side opposite to the first electrode, and a wiring connected to the first electrode. The first electrode has a connecting portion which is arranged to protrude from an end portion of the piezoelectric body and to which the wiring is connected, and a first conductive portion is provided so that the first conductive portion overlaps with the first electrode while extending over from an area overlapped with the end portion of the piezoelectric body up to the connecting portion of the first electrode.

Abstract: A compound acoustic wave filter device comprises a support substrate having an including two or more circuit connection pads. An acoustic wave filter includes a piezoelectric filter element and two or more electrodes. The acoustic wave filter is micro-transfer printed onto the support substrate. An electrical conductor electrically connects one or more of the circuit connection pads to one or more of the electrodes.

Abstract: An improved electroacoustic transducer with an improved mode profile is provided. The transducer comprises a velocity profile with a periodic structure and an edge structure flanking the periodic structure. The velocity profile also allows to suppress the SH wave mode.

Abstract: A method of measuring the amount of corrosion of a target material caused exposure to a fluid, over a period of time, utilizing a corrosion measuring device, including a resonator having a first surface area made of a material having a corrosion profile like that of the target material and having a second surface area made of material having a corrosion profile unlike that of the target material; and a transducer assembly, positioned to drive the resonator and sense resultant resonator motion, thereby producing a sense signal. In the method, the resonator is exposed to the target fluid over the period of time and the sense signal is analyzed over the period of time to determine changes in how the resonator responds to being driven by the transducer assembly, over time.

Abstract: A filter package comprising an array of piezoelectric films sandwiched between lower electrodes and an array of upper electrodes covered by an array of silicon membranes with cavities thereover: the lower electrode being coupled to an interposer with a first cavity between the lower electrodes and the interposer; the array of silicon membranes having a known thickness and attached over the upper electrodes with an array of upper cavities, each upper cavity between a silicon membrane of the array and a common silicon cover; each upper cavity aligned with a piezoelectric film, an upper electrode and silicon membrane, the upper cavities having side walls comprising SiO2; the individual piezoelectric films, their upper electrodes and silicon membranes thereover being separated from adjacent piezoelectric films, upper electrodes and silicon membranes by a passivation material.

Abstract: A method of fabricating a micro electrical-mechanical system (MEMS) microphone on a substrate includes forming a sacrificial layer on a front surface of the substrate, forming a membrane within the sacrificial layer, forming a fixed plate on the sacrificial layer at a location corresponding to a location of the membrane, performing a laser cutting on the back surface of the substrate at a location corresponding to an edge region of the fixed plate until a surface of the sacrificial layer is expose to form an opening, forming a patterned photoresist layer on the back surface exposing a region within the boundary of the opening, removing a portion of the back surface using the patterned photoresist layer as a mask to form a cavity, and removing a portion of the sacrificial layer above and below the membrane to form an air gap between the membrane and the fixed plate.

Abstract: A filter package comprising an array of piezoelectric films sandwiched between an array of upper electrodes and lower electrodes: the individual piezoelectric films and the upper electrodes being separated by a passivation material; the lower electrode being coupled to an interposer with a first cavity between the lower electrodes and the interposer; the filter package further comprising a silicon wafer of known thickness attached over the upper electrodes with an array of upper cavities between the silicon wafer and a silicon cover; each upper cavity aligned with a piezoelectric film in the array of piezoelectric films, the upper cavities having side walls comprising the passivation material.

Abstract: A method include forming a plurality of layers of an oxide and a metal on a substrate. For example, the layers may include a metal layer sandwiched between silicon oxide layers. A non-conductive structure such as glass is then bonded to one of the oxide layers. An antenna can then be patterned on the non-conductive structure, and a cavity can be created in the substrate. Another metal layer is deposited on the surface of the cavity, and an iris is patterned in the metal layer to expose the one of the oxide layers. Another metal layer is formed on a second substrate and the two substrates are bonded together to thereby seal the cavity.

Abstract: An inkjet printing head 1 includes a pressure chamber (cavity) 5, a movable film 10A defining a top surface portion of the pressure chamber 5, and a piezoelectric element 9 disposed above the movable film 10A. The piezoelectric element 9 includes a lower electrode 11 formed above the movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. One end portion of an upper wiring 17 is connected to an upper surface of the upper electrode 13. The upper wiring 17 extends from above the upper electrode 13, crosses an outer edge of the pressure chamber 5, and extends outside the pressure chamber 5. The piezoelectric film 12 has an active portion 12A with an upper surface in contact with a lower surface of the upper electrode 13 and an inactive portion 12B extending along a lower surface of the upper wiring 17 from one end portion of the active portion 12A to outside the pressure chamber 5.

Abstract: A bulk acoustic wave resonator and a filter in which partial thicknesses of protection layers or reflection layers thereof are differently formed are provided. The bulk acoustic wave resonator includes a bulk acoustic wave resonating part comprising a piezoelectric layer, and a reflection layer configured to reflect waves of a resonance frequency generated by the piezoelectric layer based on a signal applied to the bulk acoustic wave resonating part. A thickness of a portion of the reflection layer is different from a thickness of a remaining portion thereof.

Abstract: A surface acoustic wave (SAW) resonator includes a piezoelectric layer disposed over a substrate, and a plurality of electrodes disposed over the first surface of the piezoelectric layer. A layer is disposed between the substrate and the piezoelectric layer. A surface of the layer has a smoothness sufficient to foster atomic bonding between layer and the piezoelectric layer. A plurality of features provided on a surface of the substrate reflects acoustic waves and reduce the incidence of spurious modes in the piezoelectric layer.

Abstract: A resin film, in which at least one of polyimide layers is a non-thermoplastic polyimide layer having a linear thermal expansion coefficient of 1×10?6 to 30×10?6 (1/K), is shown. The non-thermoplastic polyimide layer is composed of a polyimide which is produced by reacting an anhydride component containing an aromatic tetracarboxylic anhydride with a diamine component, wherein the diamine component contains both a dimer acid-type diamine produced by replacing each of two terminal carboxyl groups in a dimer acid with a primary aminomethyl or amino group and an aromatic diamine, and the dimer acid-type diamine is contained in an amount of 1 to 15 mol % relative to the whole diamine component.

Abstract: A method is provided for fabricating piezoelectric plates. A sacrificial layer is formed overlying a growth substrate. A template layer, with openings exposing sacrificial layer surfaces, is formed over the sacrificial layer. An adhesion layer/first electrode stack is selectively deposited in the openings overlying the sacrificial layer surfaces, and a piezoelectric material formed in the openings overlying the stack. Then, a second electrode is formed overlying the piezoelectric material. Using the second electrode as a hardmask, the piezoelectric material is etched to form polygon-shaped structures, such as disks, attached to the sacrificial layer surfaces. After removing the template layer and annealing, the polygon-shaped structures are separated from the sacrificial layer. With the proper choice of growth substrate material, the annealing can be performed at a relatively high temperature.

Abstract: A method of treating fluids, including for recovery of water apart from impurities or undesired matter, utilizes application of shock waves to the fluids.

Abstract: A SAW device (1) comprises a substrate (3); SAW elements (10) on a first main surface (3a) of the substrate (3); first lines (intermediate lines (29) and output side lines (31)) that are disposed upon the first main face (3a) and connected to the SAW elements (10); an insulator (21) that is layered upon the first lines; second lines (a second ground line (33b) and a third ground line (33c)) that are layered upon the insulator (21) and configure three-dimensional wiring parts (39) with the first lines; and a cover (5) that seals the SAW elements (10) and the three-dimensional wiring parts (39). Wiring spaces (53), formed between the first main face (3a) and the cover (5), houses the three-dimensional wiring parts (39), without housing the SAW elements (10).

Abstract: A BAW device includes a substrate and a piezoelectric element formed on a surface of the substrate. The substrate has a plurality of elastic wave diffusing regions disposed therein for diffusing an elastic wave, the elastic wave diffusing regions being formed by modifying the inside of the substrate with a laser beam.

Abstract: A ladder-type elastic wave filter includes an input terminal, an output terminal, and a ground terminal, a first series resonator and a second series resonator connected in series between the input terminal and the output terminal, and a first parallel resonator having a first terminal electrically connected to the series connection between the first series resonator and the second series resonator and a second terminal electrically connected to the ground terminal. A resonance frequency of the first parallel resonator is higher than a resonance frequency of both of the first series resonator and the second series resonator and lower than an antiresonance frequency of both of the first series resonator and the second series resonator.

Abstract: A circuit interconnect generally comprises an electrical connection pad, a shape memory material, and a flowable conductor. The electrical connection pad has an upper surface, a portion of which is covered by the shape memory material. The flowable conductor extends through the shape memory material and is electrically coupled to the electrical connection pad. The shape memory material has a first configuration at a first temperature and a second configuration at a second temperature. In the instance of the second temperature being greater than the first, the shape memory material has a first configuration that is substantially planar and a second configuration that is cupped.

Abstract: A control panel for a vehicle includes a flexible trim element, a rigid supporting member, a piezoelectric sensor arranged between the trim element and the supporting member, and a flexible element arranged between the piezoelectric sensor and the rigid supporting member.

Abstract: A surface acoustic wave (SAW) resonator includes a piezoelectric layer disposed over a substrate, and a plurality of electrodes disposed over the first surface of the piezoelectric layer. A layer is disposed between the substrate and the piezoelectric layer. A surface of the layer has a smoothness sufficient to foster atomic bonding between layer and the piezoelectric layer. A plurality of features provided on a surface of the substrate reflects acoustic waves and reduce the incidence of spurious modes in the piezoelectric layer.

Abstract: Preparation of a slip including more than 4% and less than 50% of ceramic particles and including more than 1% of orientable ceramic particles made of a material including an oriented function, as volume percentage on the basis of the set of ceramic particles, wherein the fraction of non-orientable ceramic particles has a median length less than ten times the median length of the orientable ceramic particles if the set of ceramic particles includes less than 80%, as volume percentage, of orientable ceramic particles, oriented freezing of the slip by movement of a solidification front at a speed less than the speed of encapsulation of the ceramic particles; elimination of the crystals of solidified liquid phase of said block, optionally, sintering.

Abstract: This touch-sensitive sensor includes a layer of piezoelectric material interposed between, on the one hand, first and second electrically-conductive elements and, on the other hand, at least one third conductive element including a surface opposite at least one of the first and second conductors.

Abstract: A semiconductor device connection structure includes: a semiconductor element having a plate shape and including an external connection electrode on a surface of the semiconductor element; a support member which is stacked on the semiconductor element to be adhered to the semiconductor element and of which adhesion surface has a column shape that is substantially same as that of the semiconductor element, a thickness of the support member in a stacking direction being larger than that of the semiconductor element; and a flexible board configured to be electrically connected to the external connection electrode. The flexible board is arranged on a side surface of the semiconductor element and on a side surface of the support member and is adhered only to the side surface of the support member with an adhesive.

Abstract: There are provided an acoustic generator, an acoustic generation apparatus, a portable terminal and an electronic apparatus, which have an improved sound quality. An acoustic generator includes a piezoelectric element having a piezoelectric body; and a vibration plate joined to the piezoelectric body via a joining material, distances between the vibration plate and the piezoelectric body being different. Since this configuration achieves a clear and sharp sound quality, and has an effect of increasing sound pressure, the acoustic generator having an improved sound quality can be achieved.

Abstract: An electromechanical transducer element includes an electromechanical transducer film formed of PZT, wherein Ti/(Zr+Ti) in the electromechanical transducer film is greater than or equal to 45% and less than or equal to 55%, and wherein, when a total of peak intensity values obtained by ?-2? measurement is set to be 1, for an orientation ratio of a (100) plane orientation calculated based on a ratio of the peak intensity value of each orientation, ??(100) is less than or equal to 5%, wherein ??(100) is a gradient with respect to the (100) plane orientation in an array direction, and the ratio of each peak intensity value of each orientation is represented by ?(hkl)=I(hkl)/?I(hkl), where ?(hkl) is a degree of orientation in an (hkl) plane orientation, I(hkl) is the peak intensity value of the orientation, and ?I(hkl) is the total of the peak intensity values.

Abstract: An electrostatic capacitance transducer includes: multiple elements each having a cell including a first electrode, and a vibrating film including a second electrode, formed across a gap from the first electrode; a first flexible printed circuit having multiple first lines; and a second flexible printed circuit having multiple second lines. Part of the multiple elements are grouped into a first element group, each one thereof being electrically connected to a different one of the first lines. Part of the multiple elements other than the first element group are grouped into a second element group, each one thereof being electrically connected to a different one of the second lines. The intervals between adjacent lines in at least part of the plurality of first and second lines are wider at an opposite side from a connection side where the lines have been connected to the multiple elements, than at the connection side.

Abstract: A new connector with effective shielding function. The new connector includes conductive shielding, a connector body and a set of terminals. The connector body is provided with a cavity within which the set of terminals can be accommodated and is made from plastic cement; the set of terminals are located within the cavity of the connector body. The conductive shielding can be inserted between the connector body and the set of terminals, and specifically includes several shielding bars and conductive areas; the shielding bars are made from metal, and the conductive areas, which are embedded in the shielding bars and connected with the ends of the set of terminals, are made from conductive plastic cement.

Abstract: A crystal unit includes: a crystal blank; an excitation electrode formed on the crystal blank and excites a main vibration of the crystal blank; a housing that accommodates the crystal blank; and a sub-vibration electrode formed on the housing and excites a sub-vibration of the crystal blank. And a method for inspecting a crystal unit, the method includes: generating a sub-vibration in a crystal blank by applying an input signal to a sub-vibration electrode formed on a housing, which accommodates the crystal blank, via external electrodes which are electrically coupled to the sub-vibration electrode and formed on the outer surface of the housing; obtaining an output of the crystal unit via the external electrodes; obtaining frequency characteristics of impedance between the external electrodes based on the output; and comparing the obtained frequency characteristics with the reference frequency characteristics indicating the quality of the crystal unit.

Abstract: Flextensional transducers and methods of using flextensional transducers. The transducer includes a piezoelectric element and may include at least one endcap coupled with the piezoelectric element. The endcap may have an outer portion formed of a first material and an inner portion formed of a second material having a greater flexibility than the first material. The endcap may be coupled with an annular piezoelectric element near either its outer circumference or its inner circumference. The piezoelectric element may be a planar disk or have a curved bowl-shape. The transducer may be coupled with, and at least partially restrained by, a support structure. The transducer may also be configured to permit light to pass therethrough.

Abstract: A temperature-controlled integrated circuit configured with a secure data processing element, and method of manufacture of same, is disclosed. Specifically, the temperature-controlled integrated circuit, comprising a secure data processing element operable within a nominal operating range, is configured with a heat-transfer element which allows the secure data processing element to operate in an extended operating range.

Abstract: An element is arranged to cooperate with another part so as to form an encapsulation device for a component including the element at least partially coated with a metallization. The metallization includes at least one metal layer protected by an intermetallic compound which is coated by a non-diffused portion of a material whose melting point is lower than 250° C. A method of fabricating the encapsulation device is also disclosed.

Abstract: A piezoelectric film element includes a substrate, and a piezoelectric film including an alkali niobate-based perovskite structure expressed in a composition formula (K1-xNax)NbO3 (0.4?x?0.7) formed on the substrate, the piezoelectric film including an etching cross section including a tapered inclined portion which is enlarged toward an outside. The inclined portion includes a slope angle made by a slope connecting an upper surface edge and a bottom surface edge of the piezoelectric film and a bottom surface of the piezoelectric film, and the slope angle is not greater than 70°.

Abstract: The invention relates to a measuring device for measuring mechanical stresses or vibrations occurring in a component, wherein the measuring device comprises at least one electromechanical transducer, which can be integrated in a force-locked manner into the component, and at least one electronic unit, which is connected to the transducer via signal lines and is used to record and process the signals delivered by the transducer. In order to improve the robustness of the arrangement, it is provided according to the invention that the electronic unit is at least partially surrounded by a housing, and wherein a compensation zone for absorbing relative movements between the housing and the electronic unit is provided between the housing and the electronic unit.

Abstract: Provided is a method for manufacturing a surface acoustic wave apparatus that can reduce degradation of electric characteristics and also reduce the number of manufacturing processes. The method for manufacturing a surface acoustic wave apparatus includes the steps of: forming an IDT electrode on an upper surface of a piezoelectric substrate, forming a frame member surrounding a formation area in which the IDT electrode is formed on the piezoelectric substrate, and mounting a film-shaped lid member on the upper surface of the frame member so as to be joined to the frame member so that a protective cover, used for covering the formation area and for providing a tightly-closed space between it and the formation area, is formed.