Abstract: A guard fence is mounted on a transfer arm used to transport a boat carrying semiconductor wafers. The fence limits tipping movement of the boat and includes a plurality of sensors to sense tipping movement of both the top and bottom of the boat, in opposite tipping directions. A guard cover includes sensors that sense when the boat is tipped off-axis before the boat is moved into a process chamber by a boat elevator. Each of the sensors delivers signals to a controller which controls the operation of the transfer and elevator and interrupts operation thereof when the boat has tipped off-axis.

Abstract: A compact robotic hand 10 includes a palm housing 16, a wrist section 12 and a forearm section 16. The palm housing supports a plurality of fingers 18, 20, 22 and one or more movable palm members 24, 25 that cooperate with the fingers to grasp and/or release an object. Each flexible finger 18, 20, 22 comprises a plurality of hingedly connected segments, including a proximal segment 16 pivotally connected to the palm housing. The proximal finger segment 16 includes at least one groove 122 defining first and second cam surfaces 126, 128 for engagement with a cable 60. A plurality of lead screw assemblies 54 each carried by the palm housing are supplied with power from a flexible shaft 92 rotated by an actuator 91, and output linear motion to a cable 60 move a finger. The cable 60 is secured within a respective groove 122 and enables each finger to move between an opened and closed position.

Abstract: Substrate handling apparatus and methods are described. In one aspect, the substrate handling apparatus includes a clamping member having an extended condition wherein substrate movement relative to the transfer arm is substantially restricted and a retracted condition wherein substrate movement relative to the transfer arm is substantially free. The substrate handling apparatus further includes a sense mechanism (e.g., a vacuum sensor) constructed to determine whether a substrate is properly positioned on the support arm and to trigger the mode of operation of the clamping member between extended and retracted conditions. The sense mechanism also provides information relating to the operating condition of the clamping member.

Abstract: An object holding device has a base plate, first and second claws, base ends of which are pivoted at the first and second pivotal points on the base plate, respectively, free ends of which hold an object detachably, a driving device, first and second driven members to be rotated around the first and second pivotal points, respectively, by a driving device, and first and second spiral springs wound around the first and second pivotal points, respectively, for connecting the first and second driven members with the first and second claws, respectively, in order to urge the claws in a closed position. An angular position of the claw is detected, and an original position is set when the claws are opened fully. The object is held by a holding force according to the difference between the rotary angles of the driven member and the claw.

Abstract: An apparatus for transferring wafers by a robot blade and a method for using the apparatus are disclosed. In the apparatus, a robot blade that is equipped with distance sensors mounted in a bottom surface of the blade is provided which senses the distance between the bottom surface of the robot blade and an adjacent surface below the robot blade such that any possible scratching of the adjacent surface is eliminated. The adjacent surface below the robot blade may be a wafer surface in a wafer cassette, or a wafer pedestal surface in a process machine. The distance sensors are mounted in recesses in the bottom surface of the blade which may be suitably capacitance sensors, ultrasonic sensors or optical sensors. The distance sensed by the distance sensors is analyzed by a controller and compared to a predetermined value of a minimum allowable distance such that any danger of scratching the adjacent surface is eliminated.

Abstract: An arm assembly for gripping a sheet of material including jaws and a sensor assembly for detecting a change in the thickness of the material gripped between the jaws. A sensor is mounted to the side of the arm and a lever is operatively associated with the jaws for pivotal movement towards and away from the sensor in response to a change in the thickness of the material gripped between the jaws. In one embodiment, a magnet is mounted to the tip of the lever and the sensor is a Hall-effect sensor which is responsive to a change in the distance between the sensor and the magnet.

Abstract: The amount of particulate contamination produced due to rubbing between a semiconductor substrate and the robotic substrate handling blade has been greatly reduced by the use of specialized materials either as the principal material of construction for the semiconductor substrate handling blade, or as a coating upon the surface of the substrate handling blade. In particular, the specialized material must exhibit the desired stiffness at temperatures in excess of about 450° C.; the specialized material must also have an abrasion resistant surface which does not produce particulates when rubbed against the semiconductor substrate. The abrasion resistant surface needs to be very smooth, having a surface finish of less than 1.0 micro inch, and preferably less than 0.2 micro inch. In addition, the surface must be essentially void-free. In the most preferred embodiments, the upper, top surface of the substrate handling blade is constructed from a dielectric material being smooth, non-porous, and wear-resistant.

Abstract: A spreader for multistage container stacking comprising a flipper beam having a pair of corner flippers upwardly and downwardly movable along the end surface of an end beam of the spreader; a couple of right and left wires paid out from a pair of drums on the end beam, guided vertically downwardly along the opposite ends of the end beam, and tied at the ends thereof to positions straddling the center of gravity of the cross sections of the flipper beam and the corner flipper to support the flipper beam; a flipper lock pin mounting/removing device provided on the vertical side surface of the corner flipper, the flipper lock pin mounting/removing device having a lock pin insertible into and removable from a side surface opening of the spreader or a lower corner fitting of a container; a rotary encoder provided in association with the drums for detecting the amount of upward or downward movement of the flipper beam; and a lower end detecting sensor provided on the flipper beam for detecting the lower end of the

Abstract: The present invention discloses methods and apparatus for use in a mass memory data storage system. The present invention includes a gripper assembly having a roller-inserter, which permits contact with a data cartridge to be retrieved from or archived in said data storage system. The present invention also includes methods to inventory cartridges in said data storage system using the roller-inserter to provide for a contact method of inventory. The present invention also provides for teach-mode probe functions and real-time cartridge position locators.

Abstract: A self-sensing wafer holder in a robot blade is described which includes a holder body of generally elongated shape adapted for carrying a wafer on a top surface and at least three sensors positioned on the holder body sufficiently away from each other to form a plane that is covered by the wafer. The at least three sensors can be of the capacitive type, the optical type or the weight sensing type. The wafer holder is capable of determining whether a wafer is properly seated on top of the holder and automatically stopping the motion of the robot blade when a misplacement is detected by utilizing a sensing circuit including logic gates.

Abstract: The present invention is a vacuum valve assembly that creates vacuum on demand. The assembly has a body with a fluid inlet port, a fluid outlet port, a fluid flow channel extending between the fluid inlet port and the fluid outlet port, a vacuum port, a low pressure channel extending between the vacuum port and the fluid flow channel, a sensing member receiving channel, the sensing member receiving channel extending between the fluid flow channel and the low pressure channel, and a flow occlusion chamber that intersects the fluid flow channel. There is a sensing member with a fluid flow regulation portion and a sensing portion. The sensing portion is adapted to be movably received by the sensing member receiving channel. The sensing member is movable from a closed position to an open position.

Abstract: A device for transferring an object between at least two locations with a gripper which grips the object at a handle element after it approaches the object with gripper elements has the aim of preventing deformation or destruction of the object during the approach of the gripper. This should minimize particle generation resulting from firm holding. The gripper has a sensor for detecting the object and its distance during approach, wherein the time at which the object is detected defines the determination of the remaining approach path for a controlled approach and the start of the gripping process.

Abstract: Modular IC holding device in a modular IC handler, is disclosed, for holding a modular IC when loading or unloading the modular IC, including a lifting block having both ends and a central isolation wall and adapted to move for a certain stroke in up and down directions, a guide bar coupled to the lifting block in a horizontal direction, one pair of horizontal movement cylinders each in one of the ends of the lifting block unitary therewith, one pair of sliders coupled to the guide bar for horizontal movement in opposite directions to each other according to operation of the cylinders, one pair of fingers respectively coupled to the one pair of sliders, and a sensor provided to the lifting block for sensing presence of the modular IC.

Abstract: The, present invention is a gripper for use in combination with a machine for repositioning a component. Structurally, the present invention includes a housing formed with a chamber. A fixed-pole housing magnet is positioned inside of the chamber. A pair of grips are slidingly mounted for movement relative to the housing. Each grip is partially contained in the chamber and partially projects from the housing. An electromagnetic coil is attached to each grip. Functionally, the gripper is positioned with an assembly component between the grips. A separate electric current is then passed through each of the electromagnetic coils mounted on each of the respective grips. The electric current causes each electromagnetic coil to generate a magnetic field which interacts with the housing magnet. The interaction between the magnetic fields generated by the electromagnetic coils and the housing magnet creates a force on each grip, causing each grip to move translationally to hold, or squeeze, the component.

Abstract: A suction apparatus includes an opening/closing valve for supplying a negative pressure fluid to a pad section when one end of a valve rod abuts against a workpiece to make a change from a valve-closed state into a valve-opened state, and a lead switch for detecting that the opening/closing valve is changed from the valve-closed state into the valve-opened state. Once the lead switch is in the ON state, it is possible to detect that the workpiece is certainly attracted by the pad section.

Abstract: A collet end effector comprises two jaws pivotably mounted in a housing for movement between an open and a closed position. A collet sleeve surrounds the jaws and is slidably mounted in the housing for movement along the jaws toward and away from a gripping end of the jaws. Each of the jaws has a cam surface; the collet sleeve has collet bearings for riding along the cam surface. The cam surface has a ramp region configured such that as the collet sleeve moves toward the jaws gripping end while the collet bearings ride along the ramp region, the jaws move toward the jaws closed position. The cam surface also has a dwell region extending from the ramp region toward the jaw gripping end configured such that as the collet sleeve moves toward the jaw gripping end while the collet bearings ride along the dwell region, the jaws are maintained in the jaw closed position.

Abstract: A vacuum chuck having a body portion made of moldable glass or another suitable dielectric material including a top surface and bottom surface, a series of flat lands on the top surface of the body portion for supporting a wafer, and a series of orifices and vacuum lines for drawing a vacuum to secure the wafer in place on the lands of the body portion. A method of manufacturing such a vacuum chuck. A method of aligning a wafer on such a vacuum chuck.

Abstract: A control is provided for a load-handling device that includes a hydraulic gripper (14) which is intended to grip objects, such as one or more rolls or bales of paper material or other goods, through the medium of pressure in a clamping pressure line (32) leading to one or more hydraulic cylinders (30) that actuate gripping arms on the gripper (14), and on the other hand to lift the objects by actuation from a lifting device (22, 42). The clamping force is adapted to the lifting force during a clamping and lifting operation, by, among other things, monitoring the lifting force of the lifting device (42) with the aid of sensor member. A pressure reduction valve (36) is provided in the clamping pressure line (32), and a control member (50) is provided for controlling the pressure reduction valve (36) to a pressure in the clamping pressure line (36) that is proportional in the lifting force detected by the sensor member (60).

Abstract: A vacuum cup actuator for applying and releasing vacuum to a workpiece engaging vacuum cup wherein a housing provides a passageway for communicating vacuum to the vacuum cup, and a vacuum is actuated in response to the relative position of the vacuum cup with respect to the housing. A piston is slidably disposed within a stepped bore of the housing, and a valve is slidably disposed within the piston for relative movement therein. A valve cover is connected to the piston and disposed above the valve. The passageway extends through a port provided through a side wall of the housing and extends through the piston and the valve to the vacuum cup. A flexible seal is circumferentially connected to the valve for engaging and disengaging a shoulder of the piston thus closing and opening, respectively, the passageway. A quick connect releasable mount is provided for releasably connecting the vacuum cup to the valve to place the vacuum cup in communication with the passageway.

Abstract: The amount of particulate contamination produced due to rubbing between a semiconductor substrate and the robotic substrate handling blade has been greatly reduced by the use of specialized materials either as the principal material of construction for the semiconductor substrate handling blade, or as a coating upon the surface of the wafer handling blade. In particular, the specialized material must exhibit the desired stiffness at temperatures in excess of about 450.degree. C.; the specialized material must also have an abrasion resistant surface which does not produce particulates when rubbed against the semiconductor substrate. The abrasion resistant surface needs to be very smooth, having a surface finish of less than 1.0 micro inch, and preferably less than 0.2 micro inch. In addition, the surface must be essentially void-free. In the most preferred embodiments, the upper, top surface of the substrate handling blade is constructed from a dielectric material being smooth, non-porous, and wear-resistant.

Abstract: An adjustable positioning target assembly for use in a positioning device includes a target member that is secured in a desired position in an internally threaded bore between a pair of set screws. The internally threaded bore is provided in body of a positioning device. Proximity sensors which respond to the target member are coupled to an element of the positioning device. The body and element of the positioning device are movable with respect to one another. The target member and set screws can include through-holes which allow the target member and set screws to be adjustably positioned in the internally threaded bore by a driver tool. The adjustable positioning target assembly can be used in cooperation with gripper jaws or other positioning devices.

Abstract: An end effector system adapted to be used for robotic tooling applications which allows the end effector to be used to acquire parts by vacuum pick-up or grasping. A vacuum type end effector is provided at the end of each of two robotic tooling fingers. Each vacuum type end effector includes a flexible bellows member on the end thereof such that it can be used for vacuum acquisition. Extending down from each finger to reside adjacent a respective bellows is a pinch member. Through robotic control of the movement of the fingers, finger gripping can be accomplished to grip an object between the two bellows using the pinch members for lateral support. As the part is captured between the two bellows, each bellows is compressed against its respective pinch member. In such manner, the bellows are at least partially collapsed such that a vacuum sensor located in the vacuum supply line to the bellows registers that a vacuum is present and, thus, a part has been acquired.

Abstract: An article gripping apparatus capable of gripping the articles with adequate gripping pressure without damaging or dropping the gripped articles is disclosed.The apparatus comprises paired clamp arms 7 opposedly arranged free to open and close; a plurality of opening- and closing driving means 10 for individually opening- and closing moving the clamp arms; a hydraulic jack 13 provided on each clamp arm and having a plunger 14, the plunger being prevented from backward movement by liquid sealed therein; clamp bodies 12 provided at the extreme end of the plunger; and pressure detection means 21 for individually detecting liquid pressure in the hydraulic jack, wherein when the pressure detection means detects the rise of liquid pressure in the hydraulic jack in excess of a predetermined pressure when the article is gripped between the pair of clamp bodies, the opening- and closing driving means for the clamp arms is stopped.

Abstract: A method and apparatus for orienting a disk to precisely align a fiducial mark on the disk relative to an external reference point while gripping the disk only along its circumferential edge.

Abstract: In one aspect, the present invention provides an apparatus for transferring wafers to or from a wafer cassette having a plurality of wafer-receiving slots, wherein the apparatus comprises a wafer paddle which is adapted to be inserted into a wafer cassette alongside a wafer. Edge grippers carried by the wafer paddle releasible grip the wafer by its edges. A first capacitive sensor carried by the wafer paddle is oriented in a first direction for sensing information about a wafer in a wafer receiving slot of the wafer cassette. A second capacitive sensor carried by the wafer paddle is oriented in a direction perpendicular to the first direction for sensing additional proximity information about a wafer in a wafer receiving slot of the cassette. A transport mechanism produces movement of the wafer paddle along at least three axes of movement to permit transferring wafers to or from respective wafer receiving slots of the wafer cassette.

Abstract: A pick and place apparatus for picking, transferring and placing an object which is capable of performing picking and placing operations with high stability and high speed without causing a jamming. The pick and place apparatus has a negative pressure source therein and includes a first pressure detector for detecting suction condition in a process for picking up an object by applying a negative pressure from the negative pressure source, a second pressure detector for detecting suction-release condition in a process for placing the object on a predetermined position by releasing the negative pressure, and a controller for controlling an overall operation of the pick and place apparatus to proceed to the next procedure upon receiving a suction detection signal from the first pressure detector or a suction-release detection signal from the second pressure detector.

Abstract: Apparatus for use in a semiconductor wafer polishing machine of a type in which the wafer is picked up and held by a suction cup effect between the wafer and a resilient diaphragm on the wafer carrier. The apparatus permits the presence or absence of a wafer on the carrier to be sensed so that this information can be used in controlling the operation of the machine. In normal operation, a vacuum is applied to a downwardly-opening plenum that is covered by a resilient diaphragm. The present invention is the addition to the wafer carrier of an air conduit opening into the plenum through an air port and connected to an orifice so that air can flow through the orifice, through the air conduit and the air port into the plenum at a rate that is slow relative to the capacity of the vacuum pump. The present invention further requires the addition of a pressure sensor for sensing the pressure in the air conduit or alternatively in the vacuum conduit.

Abstract: An intermodal container positioning system for facilitating loading or positioning of intermodal containers via overhead crane or the like. The preferred embodiment of the present invention contemplates a system for positioning, in a precision matter, an intermodal container or the like upon the deck, or in the hold, of a ship or the like, or another transportation vehicle or storage area, wherein there is provided an array of electromagnets in various, alternative positions in the vicinity of the container, such that the electromagnets may be selectively utilized to engage adjacent structure, or other containers, in the vicinity of the container lock down or storage area, in such a manner as to manipulate the position of the container, to align same with other containers, a container holding area, lock down area, or the like.

Abstract: In an automatic medicament dispensing machine, a vial gripper mechanism includes a rotatable first jaw and a second jaw coupled with the output shaft of a jaw motor. In an open position, the jaws are spaced for receiving a medicament vial therebetween. Actuation of jaw motor rotates the second jaw toward the first jaw for gripping the vial therebetween in a gripping position. Continued rotation of the jaw motor causes rotation of both of said jaws and any vial gripped therebetween to a dispensing position for receipt of medicament into the vial from an adjacent dispensing cell.

Abstract: A straight line motion gripper employs a longitudinally moving piston head, a laterally moving slide and a drive pin moving the slide in response to movement of the piston head. The drive pin is mounted to the piston head and disposed at an angle. Another aspect of the present invention provides a booster spring to maintain a pair of gripper arms in gripping positions even when pneumatic pressure is lost.

Abstract: A robot gripper comprising a pair of gripper surfaces with flexible, non-elastic membranes disposed on each gripper surface respectively, these membranes being comprised of cubic cells filled with compressible fluid, so that when each gripper surface makes contact with the object to be lifted, they simultaneously compress and lift the object whereby the friction between the object and the gripper surfaces generates a shear force which distorts the membranes. As the compression and lifting forces are simultaneously increased, the distortion to the membranes will also increase until the pressure inside the cubic cells is large enough to provide sufficient friction force to lift the object.

Abstract: This is a ?relatively! simple load lifting apparatus, tongs-like in appearance, with a larger lower portion for grabbing loads of various sizes. It has two embracing halves, pivoted at a selected distance from the apparatus' top. ?Its lower portions tend to be vertical to enable it to hold a containerized load in place, as in previous Gabriel's U.S. Pat. No. 5,209,538.! It is designed to safely and reliably hold a person between its lower portions without injuring one who may be wounded ?on the battlefield or in the ocean!. Sensors are added to enable it to sense the distance of the apparatus' lower portions from the load. When in range of the load, its lower portions automatically separate to straddle the load ?without making contact with it!. When the flexible fingers, extending inward from the bottom of each lower portion, touch a platform surface or terrain, then a motorized gearing may cause the lower portions to come together.

Abstract: An improved wafer holder with spindle assembly and wafer holder actuator is disclosed. In one embodiment, the vertical motion of a shaft drives an arm positioning member in a rotational motion. The arm positioning member is coupled to a first position of an arm such that the arm moves in a horizontal motion when the arm positioning member rotates. A substrate holding member is coupled to the arm at a second position, such that the horizontal motion of the arm moves the substrate holding member between an open and a closed position. The shaft of the above described embodiment is moved in a vertical motion by an actuator. A first cylinder of the actuator expands and engages a spring which moves the shaft upward and a second cylinder of the actuator retracts to disengage the first cylinder thereby moving the shaft downward.

Abstract: A hand held device for manipulating articles having a generally vacuum sustaining face surface. The hand held device includes a suction cup having generally pliable side walls and a hand held portion attached to the suction cup. In a first embodiment the hand held portion includes an electric motor coupled to a vacuum pump. An electronic circuit within the hand held portion allows the operator to directly control the application of vacuum to the suction pump. Also, an electronic circuit senses the vacuum sustained between the suction cup and the article being manipulated and if that vacuum falls below a predetermined level the electronic circuit warns the operator of the condition and automatically actuates the motor until an exceptable vacuum level is reestablished. Alternative embodiments of the present invention include embodiments which utilize a venturi pump or a hand actuated pump which can directly replace the electric motor vacuum generation module.

Abstract: This invention provides a finger with three phalanges and three degrees of freedom for a flexible and versatile mechanical gripper which uses only a limited number of actuators. The finger is robust, can provide large grasping forces and can perform power grasps as well as pinch grasps. The mechanism used in the finger has an additional mechanism maintaining the last phalanx orthogonal to the palm in order to allow the gripper to perform pinch grasps on objects of different sizes. For purposes of fine control, tactile sensors as well as potentiometers are included in the finger. The mechanical gripper designed using these fingers allows the stable grasping of a wide class of objects while specifying only two coordinates (the force or position for closing the whole finger and the orientation of the finger) for each of the fingers. The mechanical gripper has three fingers and three phalanges per finger.

Abstract: An apparatus for unloading blocks that are stacked on pallets and have flat separators interposed between the blocks is provided. The apparatus has a three-dimensionally controlled and movable pick-up head on which is disposed an approximately horizontally oriented insertion tool that terminates in a pointed insertion tip. The insertion tool is adapted by means of a horizontal movement to extend below a respectively to be removed block of blanks. In order to recognize an improperly taken up block of blanks prior to further processing thereof, a sensor unit is provided that cooperates with a reflective element that is disposed on the underside of the insertion tool. This makes it possible to inspect if a portion of the bottom blank is disposed below the insertion tool. A block of blanks that has been recognized as improper is initially separated out.

Abstract: An end effector for use with an industrial robot and capable of holding a stack of substantially flat, folded articles. The end effector includes a body which defines a vacuum chamber. The vacuum chamber has a port which may be coupled to a vacuum source and an opening or vacuum face which is positioned in spaced relation relative to the port. Sealing material is mounted on a portion of the peripheral edge of the vacuum face, and a first blade is mounted on the peripheral edge of the vacuum face adjacent to the strip of sealing material. A second blade is mounted on a third portion of the peripheral edge of the vacuum face in axial opposition to the first blade so that the two blades face one another. A second strip of sealing material is mounted on a fourth portion of the peripheral edge of the vacuum face. The first and second blades and sealing material ensure a proper vacuum seal between the end effector and the articles of interest.

Abstract: A handling device for mechanically gripping, holding, moving or otherwise handling objects of any shape having a defined or undefined position, in particular for handling equipment such as industrial robots, consists of a large number of holding pins which are lowered onto the object to be held, are movably mounted in the longitudinal direction in bores of a holding pin guide plate, and are used to clamp the objects. The objects are released once again by pushing back the holding pins by an ejector plate.

Abstract: A lead frame suction holding device including a suction holder which is movable horizontally and vertically and is provided with two rows of guide plates. A plurality of suction nozzles are installed on each of the two rows of guide plates so as to suction-hold opposite edges of a lead frame, and between the two rows of suction nozzles on the guide plate is provided a detection terminal and a paper suction nozzle which respectively detects and removes paper placed between lead frames which is accommodated in a lead frame magazine.

Abstract: A robot hand is provided with a bifinger unit integrally including a pair of fingers for grasping a workpiece therebetween, a finger feed unit for moving the pair of fingers between a predetermined open position and a closed grasping position, a single servomotor driving the feed mechanism to thereby move the pair of fingers so that a constant predetermined holding force is applied to the workpiece from the pair of fingers during the grasping operation of the fingers of the bifinger unit of the robot hand irrespective of the weight, the size, the shape or the surface condition of the workpiece.

Abstract: An adjustable system for lifting and transferring load containers which comprises a frame, a container lifting device, and a cable attached to the frame and lifting device. A first actuator is provided for raising and lowering the lifting device, which lifting device has a plurality of remotely controllable latches for engaging and disengaging latchable portions of the containers, to permit grasping and lifting of containers by the lifting device. New features of adjustability are provided, to permit the system to lift containers of varying sizes. Also, the lifting device preferably carries an electrically operated location sensing device for sensing and signalling to the operator a proper location of the latches relative to the latchable portions, to permit such latching.

Abstract: A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined force.

Abstract: A robotic end effector adapted to be mounted at the end of an arm of a program-controlled robot is capable of providing compliance within a vertical plane as well as alignment along a horizontal axis. A method and system utilizing the end effector to pick up flat or curved glass panels from glass racks and place the glass panels into irregularly-shaped wooden crates. Due to the compliance and horizontal alignment provided by the end effector, the system allows essentially perfect piece-to-piece vertical edge-of-glass alignment and side-edge to side-edge alignment during the packaging process so as to eliminate glass etching/scratching and breakage. The end effector includes a base frame on which compliance devices and side-shift alignment devices in the form of linear bearing systems support a number of material handling devices in the form of suction devices. The handling devices are typically material holding/gripping devices.

Abstract: A parallel gripper includes an electric motor; a threaded spindle connected to the motor to be driven thereby about a longitudinal spindle axis; a spindle nut threadedly mounted on the spindle for longitudinal travel therealong upon rotation of the spindle; a support block affixed to the nut; an arrangement for preventing a rotation of the spindle nut about the spindle axis; a mounting plate for accommodating a gripper jaw thereon; and a first, a second, a third and a fourth web coupling the mounting plate to the support block. The first and second webs are parallel to one another and are spaced in a direction parallel to the spindle axis; and also, the third and fourth webs are parallel to one another and are spaced in a direction parallel to the spindle axis. Further, strain gauges are mounted on the webs for emitting signals representing a bending deformation the webs undergo in response to a reaction force generated by a gripping force of the gripper.

Abstract: In a vacuum chuck apparatus for chucking an article, a plurality of movable suction cups are mounted on a support member to be movable up and down relative to the support member between an operative position where each of the movable suction cups can attract the article by suction and a retracted position above the operative position. A plurality of air cylinders move the respective suction cups independently from each other between the operative position and the retracted position. An article size designating circuit outputs a size signal representing the size of the article to be chucked, and a controller controls the air cylinders according to the size signal so that a part of the movable suction cups which are not necessary for chucking the article of the size represented by the size signal are held in the retracted position and the other suction cups are held in the operative position.

Abstract: The present invention provides a device for handling wafers with every group of more than one that is built in a cassette-less automatic wafer cleaning apparatus, wherein the group of wafers are washed at a time which does not require very high accuracy in positioning the wafers and may accommodate the wafers of any different diameters, the device for handling wafers comprising: external hollow shafts and internal shafts inserted and freely slidable within the inside of the external hollow shafts; a drive mechanism, wherein each pair of the external hollow shafts and the internal shafts are movable in their respective opposed directions by the same distances with a timing belt and a drive motor for driving the timing belt; a pair of handling members respectively held fast at pairs of ends side by side of each pair of the external hollow shafts and the internal shafts; and a plurality of supporting structures holding the wafers provided on the respective opposed surfaces of handling members.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The environment of the storage chamber varies in pressure between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber.

Abstract: A wafer holding apparatus comprises a susceptor unit having wafer support grooves where wafers are detachably fixed, a plurality of chuck claws so provided as to be movable by air cylinders relative to a chuck body and adapted to hold the outer edge of the wafer, a transfer arm for transferring the chuck body to a predetermined position, and an automatic position correcting device for automatically correcting the positions of the chucks relative to the wafer support groove.

Abstract: An improved robotic end effector is disclosed. The end effector of the present invention possesses a novel breakaway clutch, which is combined with mechanically linked finger joints to significantly reduce control complexity while retaining the ability to accomplish enveloping grasps. In another embodiment, a finger using compliant tendons to accomplish enveloping grasps is disclosed. A novel palm/finger configuration which further increases the versatility of the disclosed end effector without unduly increasing complexity is also disclosed. Methods of manipulating an object are also disclosed.

Abstract: A picker mechanism (80) selectively grips and transports a data storage cartridge (62) in an automated library (30). The picker mechanism (80) has a picker frame (400) comprised of two half shell members (402, 404). Substantially all active elements of the picker are mounted to a base half shell (402) over which a cover half shell (404) mates for enclosing substantially all active picker elements. The active picker elements include a pair of gripper fingers (406) pivotally mounted to the picker frame. Each gripper finger (406) has a portion thereof configured to engage a data storage cartridge. The picker frame also carries a displacement path (e.g., leadscrew 418) along which a carriage member (e.g., leadscrew nut 426) travels. A motor (414) is provided for driving the carriage member (426) along the displacement path. A pair of biasing springs (432), one for each gripper finger (406), are provided for biasing the gripper fingers in a direction toward the displacement path.