Abstract: A linear vibration motor includes a base including an accommodation space; a vibration unit; and a first elastic unit suspending the vibration unit in the accommodation space. The first elastic unit includes two elastic pieces located on two opposite sides of the vibration unit, each the elastic piece having a main elastic arm, a first auxiliary elastic arm and a second auxiliary elastic arm extending reversely in a bending way respectively from an end of the first auxiliary elastic arm and an end of the second auxiliary elastic arm. The main elastic arm is perpendicular to the vibration direction, the first auxiliary elastic arm and the second auxiliary elastic arm are respectively located on the two opposite sides of the main elastic arm, the first fixed arm is fixed to the vibration unit, and the second fixed arm is fixed to the base.

Abstract: A double resonance vibration motor includes a housing, vibration parts in the housing, a coil fixed in the housing, and elastic connectors to support elastically the vibration part. The vibration parts include a mass block, a first magnet group and a second magnet group installed in the mass block. The coil is opposite to the first magnetic group and the second magnetic group. The driving force generated by the first magnetic group and the coil makes the vibration motor vibrate along the first direction. The driving force of the second magnet group and the coil makes the vibration motor vibrate along the second direction. The first direction and the second direction intersect. Two different directions have respectively one resonance frequency. Two different resonant frequencies can vibrate alone or at the same time, to realize the control in different vibration directions.

Abstract: An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1a to 1d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1a to 1d of the stator 1. Multiple projecting elements 104b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2, forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface.

Abstract: In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

Abstract: A method that includes forming a first layer having a first dopant concentration, the first layer having an integrated circuit region and a micro-electromechanical region and doping the micro-electromechanical region of the first layer to have a second dopant concentration is presented. The method includes forming a second layer having a third dopant concentration overlying the first layer, doping the second layer that overlies the micro-electromechanical region to have a fourth dopant concentration, forming a micro-electromechanical structure in the micro-electromechanical region using the first and second layers, and forming active components in the integrated circuit region using the second layer.

Abstract: A magnetic field sensor including a body including a magnetic mechanism capable of forming a torque applied on the body by action of an external magnetic field to be detected; a connector, separated from the body, mechanically connecting the body to an inlay portion of the sensor by at least one pivot link having an axis perpendicular to the direction of the magnetic field to be detected; a detector detecting stress applied by the body by action of the torque, separated from the connector and including at least one suspended stress gauge including a first part mechanically connected to the inlay portion, a second part mechanically connected to the body, and a third part provided between the first and second parts and suspended between the inlay portion and the body.

Abstract: A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof.

Abstract: There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators.

Abstract: A capacitive micromachined ultrasonic transducer (CMUT), which has a conductive structure that can vibrate over a cavity, has a number of vent holes that are formed in the bottom surface of the cavity. The vent holes eliminate the deflection of the CMUT membrane due to atmospheric pressure which, in turn, allows the CMUT to receive and transmit low frequency ultrasonic waves.

Abstract: A fluid impermeable protective layer is described for a structure that has a 3-dimensional profile. The 3-dimensional profile can include actuators. The protective layer is applied so that there are no breaches in the protective layer and so that the protective layer is not too thick to prevent the actuators from being able to properly function.

Abstract: A method and system for facilitating focusing of a miniature camera are disclosed. One or more lenses can be attached to a MEMS stage. The MEMS stage can be moved by a Lorentz actuator. The MEMS stage can be configured to limit movement of the lens(es) to a single degree of freedom to inhibit misalignment thereof with respect to an imaging sensor. The stage can be biased to a predefined position thereof, e.g., for focus at infinity. A metal cover can inhibit electromagnetic interference and can limit movement of the lens(es).

Abstract: A micro-image acquisition and transmission system is provided. In a preferred embodiment, the system is comprised of an image acquisition chip comprising an electronic imager, control electronics and a micro powered rotary stage comprising a transceiver array that acts as a hub to optically link a group of distributed image acquisition chips. A preferred embodiment is further comprised of a transceiver array chip comprising one or more micro-powered rotary stages having a transceiver array assembly disposed thereon. The micro-powered rotary stage is supported by a micro-brush bearing.

Abstract: An energy harvester comprising: a substrate; two magnets coupled to the substrate in close proximity to each other with like magnetic poles facing each other creating a flux gap; a coil coupled to the substrate and disposed within the flux gap, wherein the coil and the magnets are coupled to the substrate such that substrate acceleration causes relative elastic motion between the magnets and the coil thereby exposing the coil to a changing magnetic flux; and a resonant frequency tuner coupled to the substrate and configured to adjust the resonant frequency between the coil and the magnets.

Abstract: An energy storage device includes at least one nanotube. An energy storage mechanism converts energy external to the device into the appropriate levels of strain on the at least one nanotube to produce stored energy, and an energy recovery mechanism converts the energy released by relaxing the at least one nanotube back to energy external to the device.

Abstract: A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment fields is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and ?z directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, ?x and ?y directions. Direct driving by electromagnetic force is used in the invention. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current.

Abstract: The invention relates to a primary component (2) for an electric motor (1), said primary component (2) being formed from at least one bundle of laminations (3) and comprises at least one flux guiding element (10) on one or both front faces (S1, S2) to reduce the ripple effect, said primary component (2) being separated from a secondary component (7) by a first air gap (?1). The primary component (2) has at least one section (?2) in the region of the flux guiding element (10), said section (?2) being electrically non-conducting (Kel=0) and having a negligibly low magnetic permeability (?r?1).

Abstract: A self-assembly micro fan includes a body, a plurality of blades and flexible joints, with any one of the blades being connected to the body by one of the flexible joints while each flexible joint is regarded as a pivot to move the blade connected therewith to have an angle relative to a radial direction of the body. Besides, each of the flexible joints has plural link members or at least one link member and extension member to provide variable types of shape of the micro fans, so that the air driving efficiency of the self-assembly micro fan is improved.

Abstract: A microelectromechanical device that includes a fixed supporting body, at least one semiconductor body, which is movable with respect to the fixed supporting body, and at least one micromotor for moving the semiconductor body with respect to the fixed supporting body, the micromotor having at least one permanent magnet and a coil, which are coupled together and are movable with respect to one another. A ferromagnetic guide is coupled to the magnet and is shaped so as to concentrate lines of magnetic field generated by the magnet towards the coil.

Abstract: A nano-scale compliant mechanism includes a coupler and a plurality of nanotubes disposed for nano-scale motion relative to a grounded component. The nanotubes are fastened at one end to the coupler and at the other end to ground, to guide motion of the coupler relative to the ground. Particular embodiments include a plurality of parallel carbon nanotubes. An exemplary embodiment exhibits first and second regions of mechanical behavior; a first region governed by bulk elastic deformation of the nanotubes and a second region governed by compliant, hinge-like bending of the buckled nanotubes.

Abstract: A method for position and/or speed control of a linear drive utilizing a converter having a control unit and being coupled to a motor of the linear drive. The method includes determining, in a sensor-free manner, a motor position, generating a motor position signal, generating an acceleration signal utilizing an MEMS accelerometer provided in the control unit and arranged on a moving part of the linear drive, mathematically converting the motor position signal and the acceleration signal to a speed signal, and utilizing the speed signal to control the linear drive.

Abstract: A micro-electro-mechanical systems (MEMS) device includes a back-plate substrate, having an intended region formed with a plurality of perforating holes. A first structural dielectric layer, disposed on the back-plate substrate, wherein the dielectric layer having an opening above the intended region. An etching stop layer, disposed over the first structural dielectric layer. A second structural dielectric layer, formed over the back-plate substrate. The etching stop layer and the second structural dielectric layer form at least a part of a micro-machine diaphragm, and cover over the opening of the first structural dielectric layer to form a chamber between the micro-machine diaphragm and the back-plate substrate.

Abstract: A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.