Abstract: An actuator adapted to incrementally translate and/or rotate an object, the actuator comprising a body comprising a first portion, a second portion, and an opening coaxially extending from the first portion and the second portion, wherein the opening is dimensioned to accommodate a diameter or cross section of an object; a first element disposed in the first portion, and a second element disposed in the second portion, wherein the first and second elements are adapted to selectively clamp the object; a spring in operative communication with the first and second portions; and a third element fixedly attached to the first and second portions, wherein at least one of the first, second, or third elements or spring is formed of an active material.

Abstract: A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element.

Abstract: A bimorphic structure responsive to changes in an environmental condition, sensor structures incorporating one or more of such bimorphic structures, and a method of forming such bimorphic structures. The sensor structure has an electrically-conductive first contact on a substrate, and a bimorph beam anchored to the substrate so that a portion thereof is suspended above the first contact. The bimorph beam has a multilayer structure that includes first and second layers, with the second layer between the first layer and the substrate. A portion of the first layer projects through an opening in the second layer toward the first contact so as to define an electrically-conductive second contact located on the beam so as to be spaced apart and aligned with the first contact for contact with the first contact when the beam sufficiently deflects toward the substrate.

Abstract: A bistable MEMS microswitch produced on a substrate and capable of electrically connecting ends of at least two conductive tracks, including a beam suspended above the surface of the substrate. The beam is embedded at its two ends and is subjected to compressive stress when it is in the non-deformed position. The beam has an electrical contact configured to produce a lateral connection with the ends of the two conductive tracks when the beam is deformed in a horizontal direction with respect to the surface of the substrate. Actuators enable the beam to be placed in a first deformed position, corresponding to a first stable state, or in a second deformed position, corresponding to a second stable state, and the electrical contact ensures connection of the ends of the two conductive tracks.

Abstract: A method comprising forming a structural element 115 on a surface 620 of a layer 510 via an electroless plating of nickel or cobalt 130 onto the surface, the layer being rigidly fixed to an underlying substrate 110. The method also comprises etching away a portion of the layer such that a part of the structural element is able to move with respect to the substrate.

Abstract: A drive unit and drive module which use a shape memory alloy as a drive source to move a driven member, and which can drive at a high speed, independently of the ambient temperature and the position of the driven member. The timing of moving the driven member is controlled based on the position to which the driven member is moved, and based on the settling time for the driven member moved to that position to settle at that position, thus, the driven section can be moved in the minimum drive time, and this arrangement provides the drive unit and drive module that can drive at a high speed, independently of the ambient temperature and the position of the driven member.

Abstract: The invention relates to an actuating device comprising at least two coaxial bimetal disks and at least one axial strut arranged between the disks, the bimetal disks being mounted opposite each other and being deformable in opposite directions according to the thermal variations. The invention can be especially applied to the thermal compensation of an optical system.

Abstract: A microelectromechanical (MEM) apparatus is disclosed which includes a shuttle suspended above a substrate by two or more sets of tensile-stressed beams which are operatively connected to the shuttle and which can comprise tungsten or a silicon nitride/polysilicon composite structure. Initially, the tensile stress in each set of beams is balanced. However, the tensile stress can be unbalanced by heating one or more of the sets of beams; and this can be used to move the shuttle over a distance of up to several tens of microns. The MEM apparatus can be used to form a MEM relay having relatively high contact and opening forces, and with or without a latching capability.

Abstract: A method of manufacturing a micro-electromechanical device is provided. The method comprises providing a substrate incorporating drive circuitry, and forming a drive member, a motion-transmitting member and a working member on the substrate as discrete components. The drive member is formed to have an electrical circuit in electrical contact with the drive circuitry for receiving an electrical signal therefrom, a fixed end fast with the substrate and a free end arranged to be displaced relative to the substrate on receipt of the electrical signal by the electrical circuit. The motion-transmitting member is formed to be fast with the free end of the drive member so that the motion-transmitting member is displaced together with the free end. The working member is formed to be fast with the motion-transmitting member so that the working member is displaced with the motion-transmitting member to perform work.

Abstract: Two similarly shaped, such as rectangular, shells are attached to one another such that they form a resulting thin airfoil-like structure. The resulting device has at least two stable equilibrium shapes. The device can be transformed from one shape to another with a snap-through action. One or more actuators can be used to effect the snap-through; i.e., transform the device from one stable shape to another. Power to the actuators is needed only to transform the device from one shape to another.

Abstract: A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element.

Abstract: The Resettable Latching MEMS Temperature Sensor provides the capability of recording external temperature extremes without consuming electrical power. The device incorporates a thermal bimorph, contacts, latches, and actuators for device reset. The device can be designed, hardwired, or programmed to trigger at various temperature levels. The device can be fabricated in a simple micromachining process that allows its size to be miniaturized for embedded and portable applications. During operation, the device consumes no quiescent power. The device can be configured to close a circuit, switch an interrupt signal, or switch some other electrical trigger signal between devices at the time of a temperature extreme being reached, or it can be configured to latch and be polled at some time after the temperature limit has occurred.

Abstract: A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.

Abstract: The present invention employs an optimized cross-sectional shape for a ferromagnetic shape memory alloy (FSMA) composite that is used in a spring-type actuator, an improved hybrid magnetic trigger for use in FSMA based actuators, an a FSMA composite based spring type actuator, an a FSMA based spring type actuator including a stack of triggering units and FSMA springs, a FSMA composite based torque actuator. The invention also includes a model that can be employed to evaluate different materials being considered as components a FSMA for a FSMA composite used in either a FSMA based torque actuator or a FSMA spring actuator.

Abstract: A thermal actuator for a micro-electromechanical device is disclosed. The thermal actuator includes a base element and a movable element extending from the base element and residing at a first position. The movable element includes a barrier layer constructed of a barrier material having low thermal conductivity material, bonded between a first layer and a second layer; wherein the first layer is constructed of a first material having a high coefficient of thermal expansion and the second layer is constructed of a second material having a high thermal conductivity and a high Young's modulus. An apparatus is provided adapted to apply a heat pulse directly to the first layer, causing a thermal expansion of the first layer relative to the second layer and deflection of the movable element to a second position.

Abstract: A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.

Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movably parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate.

Abstract: A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.

Abstract: An apparatus (1) that is capable of a first stable configuration and a second stable configuration is disclosed. The bistable mechanism (10) has a leg (30, 32) that is coupled on one end by a base member (22, 24) and on the other end by a shuttle (20). The leg (30, 32) stores potential energy as it is deflected. The potential energy stored in the leg (30, 32) has a maximum potential energy position with a low potential energy position on either side of the maximum. An apparatus and method are also disclosed for a latching mechanism (910) and the associated method. The latching mechanism (910) is comprised of a grasping member (932), a lock slider (928), and a detent slider (916). These three members (916, 928, 932) operate together to induce a locked configuration and an unlocked configuration by actuating the lock slider (928) in a single direction.

Abstract: An electroactive polymer actuator, which has the capability of improving response speed and operation reliability of a device utilizing an electroactive effect, comprises a laminate formed by alternately placing a plurality of ring members of an electroactive polymer material having different diameters and a plurality of ring electrodes having different diameters such that each of the ring members is positioned between inner and outer peripheral surfaces of adjacent ring electrodes, and a voltage applying unit for applying a voltage(s) between odd-numbered ring electrodes and even-numbered ring electrodes in the case of counting the ring electrodes in order from an innermost ring electrode of the laminate, to thereby cause a deformation in the laminate. This actuator is preferably used as a diaphragm drive unit of a diaphragm pump.

Abstract: A method and associated apparatus are provided for improving the performance of a high speed data bus, such as a memory bus, using selectively activated receiver and driver pairs. Each receiver and driver pair may be selectively activated to permit data communication on a segment of the high speed data bus coupled to the activated receiver and driver pair. Each receiver and driver pair may also be deactivated, thereby disconnecting at least a respective segment of the high speed data bus, so that communicating system components may be connected in a substantially stubless environment.

Abstract: Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.

Abstract: An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.

Abstract: MEMS Device Having Contact and Standoff Bumps and Related Methods. According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves.

Abstract: A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.

Abstract: A microelectromechanical system is disclosed that provides amplified movement without requiring the use of a displacement multiplier. Generally, a lever or the like is interconnected with a substrate on which the system is fabricated at a first location, while a free end of the lever is able to move relative to the substrate, typically at least generally about the first location. One or more actuators are movably interconnected with the substrate, and in turn are interconnected with the lever at a location that is somewhere between the free end and the first location. The lever may be configured to move at least generally away from the substrate upon movement of the actuator in one direction, at least generally toward the substrate upon movement of the actuator in another direction, or in any direction and in any manner. The movement of the “free” end of the lever may be used to perform any function, including lifting/pivoting a mirror away from/relative to the substrate.

Abstract: A microelectronic package and method for manufacture. The package can include first and second microelectronic substrates, each having a first surface with a connection site, and a second surface facing opposite the first surface. The second microelectronic substrate can be coupled to the first microelectronic substrate with the second surface of the second microelectronic substrate facing towards the first surface of the first microelectronic substrate. A conformal conductive link formed, for example, from sequentially deposited portions of conductive material, can be coupled between the first and second connection sites to provide for electrical communication between the substrates. Accordingly, the substrates can be stacked and electrically connected to reduce the footprint occupied by the substrates.

Abstract: An actuator including a shape-memory flexible cable with a flexible sheath can be used, by controlling it both electrically and mechanically using the sheath as element for applying a mechanical tensile force. The shape-memory flexible cable is provided with a coating made of synthetic or elastomer material moulded thereon and adherent thereto, which favors rapid return of the shape-memory cable into its resting configuration after its activation both on account of its elastic return and owing to the fact that it favors cooling of the cable. Preferably, the coating is obtained by means of a process of co-extrusion with the shape-memory cable.

Abstract: A micro-actuator includes a shape memory thin film having one end fixed to a substrate and one remaining part which, at room temperature, is in the martensitic phase and assumes a curly-configuration, whereas at a higher temperature than a threshold value it changes to the austenitic condition, wherein the film is completely stretched upon the substrate.

Abstract: A flexible area 2 is joined at one end via a thermal insulation area 7 to a semiconductor substrate 3 which becomes a frame and at an opposite end to a moving element 5. The thermal insulation area 7 is made of a thermal insulation material a resin such as polyimide or a fluoridated resin. The flexible area 2 is made up of a thin portion 2S and a thin film 2M different in thermal expansion coefficient. When a diffused resistor 6 formed on the surface of the thin portion 2S is heated, the flexible area 2 is displaced because of the thermal expansion difference between the thin portion 2S and the thin film 2M, and the moving element 5 is displayed with respect to the semiconductor substrate 3.

Abstract: A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.

Abstract: A linear actuator includes a plurality of sub-modules disposed in adjacent array and adapted to translate reciprocally parallel to a common axis. A plurality of shape memory alloy wires extend generally linearly and parallel to the axis, and are each connected from one end of a sub-module to the opposed end of an adjacent sub-module. The SMA wires are connected in a circuit for ohmic heating that contracts the SMA wires between the sub-modules. The sub-modules are linked by the SMA wires in a serial mechanical connection that combines the constriction stroke displacement of the SMA wires in additive fashion to achieve a long output stroke. Moreover, the sub-modules are assembled in a small volume, resulting in an actuator of minimal size and maximum stroke displacement.

Abstract: This disclosed generators include one or more transducers that use electroactive polymer films to convert thermally generated mechanical energy to electrical energy. The generators may include one or more transmission mechanisms that convert a portion of thermal energy generated from a heat source such as internal combustion, external combustion, solar energy, geothermal energy or waste heat, to mechanical energy that is used to drive the one or more transducers located in the generator. The energy received by the transducers may be converted to electrical energy by the transducers in conjunction with conditioning electronics located within the generator. One embodiment of the present invention provides an energy conversion device with two chambers each chamber including a diaphragm transducer that may convert thermal energy to electricity using a thermodynamic cycle such as a Stirling gas cycle.

Abstract: A microelectromechanical system (MEMS) that includes a first electro-thermal actuator, a second electro-thermal actuator and a beam having a first side and a second side. The first electro-thermal actuator applies a force to the first side of the beam as current passes through the first electro-thermal actuator and the second electro-thermal actuator applies a force to the second side of the beam as current passes through the second electro-thermal actuator.

Abstract: A microactuator providing an output force and displacement in response to an increase in thermal energy is displosed. The microactuator may have a substantially straight expansion member with a first and a second end. The first end may be coupled to a base member, and the second end may be coupled to a shuttle. The expansion member is capable of elongating in a elongation direction. Elongation of the expansion member may urge the shuttle to translate in an output direction substantially different than the elongation direction. In certain embodiments, multiple expansion members are arrayed along one side of the shuttle to drive the shuttle against a surface. Alternatively, expansion members may be disposed on both sides of the shuttle to provide balanced output force. If desired, multiple microactuators may be linked together to multiply the output displacement and/or output force.

Abstract: A microrelay device formed on a silicon substrate wafer for use in opening and closing a current path in a circuit. A pair of electrically conducting latching beams are attached at their proximal ends to terminals on the substrate. Proximal ends of the beams have complementary shapes which releasably fit together to latch the beams and close the circuit. A pair of shape memory alloy actuators are selectively operated to change shapes which bend one of the beams in a direction which latches the distal ends, or bend the other beam to release the distal ends and open the circuit.

Abstract: An apparatus for a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element extending from the base element and normally residing at a first position before activation. The cantilevered element includes a first layer constructed of an electrically resistive material, such as titanium aluminide, patterned to have a first resistor segment and a second resistor segment each extending from the base element; a coupling device that conducts electrical current serially between the first and second resistor segments; and a second layer constructed of a dielectric material having a low coefficient of thermal expansion and attached to the first layer.

Abstract: An in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating center beam positioned between the first and second anchors and movable relative to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between opposite sides of the floating center beam and the respective first and second anchors. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. In one implementation, the half-beams are configured at a bias angle to give the floating beam an affinity for in-plane motion.

Abstract: A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

Abstract: An actuator having a hot-arm and a cold-arm wherein the hot-arm and cold-arm are vertically offset from one another. The hot-arm is heated to cause the actuator to move both vertically and horizontally. When used as a relay, an electrostatic force latches the actuator when the electrodes are brought in close proximity to one another.

Abstract: A motion device (100) includes a shape memory transducer (110) having a preset memory state and logically divided into first and second portions (116, 118). A coupled electrical circuit (130) is operable to selectively energize the first portion (116) to create a force that moves the first portion (116) toward its memory state which moves the second portion (118) in a first direction out of its memory state, and to selectively energize the second portion (118) to create a force that moves the second portion (118) towards its memory state which moves the first portion (116) away from its memory state in a second direction different from the first direction. A feedback system (120) is preferably included to provide for precise motion control.

Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator that may include a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure.

Abstract: This disclosed generators include one or more transducers that use electroactive polymer films to convert thermally generated mechanical energy to electrical energy. The generators may include one or more transmission mechanisms that convert a portion of thermal energy generated from a heat source such as internal combustion, external combustion, solar energy, geothermal energy or waste heat, to mechanical energy that is used to drive the one or more transducers located in the generator. The energy received by the transducers may be converted to electrical energy by the transducers in conjunction with conditioning electronics located within the generator. One embodiment of the present invention provides an energy conversion device with two chambers each chamber including a diaphragm transducer that may convert thermal energy to electricity using a thermodynamic cycle such as a Stirling gas cycle.

Abstract: The present invention comprises a microelectromechanical positioner to achieve substantially translational positioning of a platform without rotational motion, thereby maintaining a constant angular orientation of the platform during movement. A linkage mechanism of the positioner can comprise parallelogram linkages to constrain the rotational motion of the platform. Such linkages further can comprise flexural hinges or other turning joints at the linkage pivots to eliminate the need for rubbing surfaces. A plurality of the linkage mechanisms can be used to enable translational motion of the platform with two degrees of freedom. A variety of means can be used to actuate the positioner. Independent actuation of the anchor links of the linkage mechanisms with rotary electrostatic actuators can be used to provide controlled translational movement of the platform.

Abstract: An actuator device comprises a flexible cable (2) and opposite ends (4, 5), one of which is connected to a control member and the other to a controlled member. At least one portion of the flexible cable (2) is made of a shape-memory material in such a way that the device can be used both as a mechanical element of flexible transmission between the control member and the controlled member, and as a shape-memory actuator, designed to operate the controlled member following upon a variation in length of said shape-memory portion.

Abstract: A flexible area 2 is joined at one end via a thermal insulation area 7 to a semiconductor substrate 3 which becomes a frame and at an opposite end to a moving element 5. The thermal insulation area 7 is made of a thermal insulation material a resin such as polyimide or a fluoridated resin. The flexible area 2 is made up of a thin portion 2S and a thin film 2M different in thermal expansion coefficient. When a diffused resistor 6 formed on the surface of the thin portion 2S is heated, the flexible area 2 is displaced because of the thermal expansion difference between the thin portion 2S and the thin film 2M, and the moving element 5 is displayed with respect to the semiconductor substrate 3.

Abstract: A method for varying the resonance frequency of a resonator beam is disclosed. The method comprises first manufacturing a resonator beam having a first end and a second end. The resonator beam is suspended above a substrate by the first end and the second end. At least one end of the resonator beam is connected to an actuator that applies an actuation force to the resonator beam to apply tensile strain or compressive strain onto said resonator beam. By varying the amount of actuation force, the resonance frequency of the resonator beam may be tuned. Additionally, by varying the magnitude and direction of the actuation force, the resonator beam may be used as a temperature sensor or a temperature compensated resonator.

Abstract: A Microelectromechanical (MEMS) device that can minimize the effects of fabrication tolerances on the operation of the device can include a MEMS electromagnetic actuator to selectively generate displacement forces to displace an actuable element along a path. A cantilever can apply an opposing force to the actuable element to control the amount of displacement. Coil ends of the actuator can be shaped to vary a gap distance between the coil ends, and/or the magnetic portion of the actuable element may be shaped, so as to vary the force applied to the actuable element along the displacement axis. One or more pins located in the deflection path of the cantilever can contact the cantilever at one or more points so as to change the bending resistance of the cantilever. The cross-section of the cantilever can also be varied along its length so as to change the bending resistance of the cantilever.

Abstract: A Microelectromechanical (MEMS) device and method of fabrication that can minimize derailing of an actuable element of the MEMS device during fabrication can include a MEMS actuator to selectively generate displacement forces to displace an actuable element along a path between sidewalls of a channel. The sidewalls can have stops formed therein that can interact with surfaces on the actuable element to limit displacement of the actuable element during fabrication. One of the sidewalls can be indented to form the stops and the actuable element can have an arm portion that extends between the stops. The sidewalls can be offset to form the stops on spaced apart faces on opposite sides of the channel and the actuable element can be offset between the spaced apart faces to form offset faces in an opposing relationship with the spaced apart faces on the sidewalls. In addition, the actuable element and the sidewalls may be so shaped as to maintain a generally constant width between them.

Abstract: An actuator including a shape-memory flexible cable with a flexible sheath can be used, by controlling it both electrically and mechanically using the sheath as element for applying a mechanical tensile force. The shape-memory flexible cable is provided with a coating made of synthetic or elastomer material moulded thereon and adherent thereto, which favors rapid return of the shape-memory cable into its resting configuration after its activation both on account of its elastic return and owing to the fact that it favors cooling of the cable. Preferably, the coating is obtained by means of a process of co-extrusion with the shape-memory cable.