Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

Abstract: Novel gelatinous compositions and articles are formed from an intimate melt blend admixture of one or more of a selected block SEEPS copolymers in combination with one or more polymers of poly(styrene-butadiene-styrene), poly(styrene-butadiene)n, poly(styrene-isoprene-styrene), poly(styrene-isoprene)n, poly(styrene-ethylene-propylene), poly(styrene-ethylene-propylene-styrene)n, poly(styrene-ethylene-butylene-styrene)n, poly(styrene-ethylene-butylene), poly(styrene-ethylene-propylene)n, poly(styrene-ethylene-butylene)n, polystyrene, polybutylene, poly(ethylene-propylene), poly(ethylene-butylene), polypropylene, and polyethylene, and a plasticizing oil.

Abstract: An actuator 100 of the type employing a two-degree-of-freedom vibration system includes: a pair of first mass portions 1, 11; a second mass portion 2 provided between the pair of first mass portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of first mass portions 1, 11 and the second mass portion 2; at least a pair of first elastic connecting portions 4, 4 which respectively connect the first mass portions 1, 11 to the supporting portions 3, 3 so that each of the first mass portions 1, 11 can rotate with respect to the supporting portions 3, 3; and at least a pair of second elastic connecting portions 5, 5 which respectively connect the second mass portion 2 to the first mass portions 1, 11 so that the second mass portion 2 can rotate with respect to the first mass portion 1, 11. Each of the first mass portions 1, 11 is driven by the application of an alternating voltage, causing the second mass portion 2 to rotate.

Abstract: In one embodiment, a micro electromechanical system (MEMS) driver circuit receives a pulse-width modulated (PWM) signal and uses it to control a voltage at a MEMS cell. The driver circuit further includes a current source, a capacitor, and a reset circuit that can discharge the capacitor. The voltage at the MEMS cell can be controlled in proportion to the pulse width of the PWM signal. In another embodiment disclosed, a MEMS driver circuit receives a first PWM signal and a second PWM signal. Each PWM signal is coupled to a current source. One current source can provide a course current control and the other current source can provide fine current control. The driver circuit can further include a capacitor and a reset circuit for discharging the capacitor. The voltage at the MEMS cell can be controlled in proportion to a summation of the first and second current sources. According to another aspect of the embodiments, a method of controlling a voltage at a MEMS cell is disclosed.

Abstract: A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.

Abstract: A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1–20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.

Abstract: An apparatus comprising a substrate; and a platform elevated above the substrate and supported by curved flexures. The curvature of the flexures results substantially from variations in intrinsic residual stress within the flexures. In one embodiment the apparatus is a deformable mirror exhibiting low temperature-dependence, high stroke, high control resolution, large number of degrees of freedom, reduced pin count and small form-factor. Structures and methods of fabrication are disclosed that allow the elevation of mirror segments to remain substantially constant over a wide operating temperature range. Methods are also disclosed for integrating movable mirror segments with control and sense electronics to a produce small-form-factor deformable mirror.

Abstract: A micro-mirror device includes a stator structure having a set of radial stator electrodes, a rotor structure having a set of radial rotor electrodes, a mirror mounted on the rotor structure, and a flexure structure suspending the rotor structure relative to the stator structure.

Abstract: The present invention relates to an actuator and optical attenuator using the actuator. The rotary-type comb-drive actuator includes a substrate, a movable electrode, a drive electrode, one or more vertical springs, one or more vertical spring anchors, a horizontal spring and a horizontal spring anchor. The movable electrode is arranged on a plane of the substrate to be movable in parallel to the substrate plane, and formed to have a predetermined length so as to have a comb-shaped electrode comprised of a plurality of fingers. The drive electrode is formed to have a length corresponding to that of the movable electrode, and formed to have a comb-shaped electrode that is comprised of a plurality of fingers and arranged to be interdigitated with the comb-shaped electrode of the movable electrode. The vertical springs are arranged in parallel to the substrate, and connected to be perpendicular to the movable electrode on both sides of a first end of the movable electrode.

Abstract: An electrostatic actuator allows a movable electrode to move in response to the generation of electrostatic attraction between the movable electrode and the first stable electrode wall as well as between the movable electrode and the second stable electrode wall. An insulating solid piece is interposed between the first and second stable electrode walls so as to connect the first and second stable electrode walls to each other. The insulating solid piece serves to enhance the rigidity of the first and second stable electrode walls. A higher rigidity can be established in the first and second stable electrode walls of the electrostatic actuator even if the wall thickness of the first and second stable electrode walls is reduced. The reduced wall thickness of the first and second stable electrode walls enables arrangement of the first and second stable electrode walls as many as possible within a limited space.

Abstract: In one embodiment, a rotatable element includes a plate, a plate support, a cradle, and a cradle support. The plate is coupled to the cradle via the plate support. The cradle is coupled to a surrounding frame by the cradle support. The plate and cradle are suspended over a cavity so that, in conjunction with the plate support and the cradle support, both the plate and cradle are capable of freely rotating about different axes of rotation when suitably actuated. Since the plate is capable of rotating independently of the cradle, yet also rotates when the cradle is rotated, the plate is rotatable about two axes of rotation. In some cases, the axis of rotation of the plate is perpendicular to the axis of rotation of the cradle. Since the cradle does not surround the plate, the plates of adjacent rotatable elements can be placed very close to one another (i.e., as close as about 1 micron) to provide, for example, an array of very-closely-spaced mirrors.

Abstract: An electrostatic driving device according to the present invention has a flexible thin film, a holding member, which holds the flexible thin film and allows the flexible thin film to bend, a function member disposed on the flexible thin film, a film-side facing electrode disposed on the flexible thin film, a base, which faces the holding member, a base-side facing electrode, which is disposed on the base and faces the film-side facing electrode; and a bonding spacer member, which is held between the holding member and base, bonds the holding member to the base, and holds an interval between the holding member and base at a predetermined interval so as to keep an electrode interval between the film-side facing electrode and base-side facing electrode at a predetermined interval.

Abstract: An electromechanical system includes a structural plate in contact with a stop and an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the structural plate and the stop.

Abstract: Unnecessary moment in a vibrator is remarkably reduced and the power generation efficiency in capacitance-type vibrational power generation is remarkably improved. A vibrator provided in a variable-capacitance type vibrator has a structure in that one ends of oscillation plates extending in a longitudinal direction thereof sandwiches a mass and the other ends thereof sandwiches a spacer, respectively, wherein the oscillation plates are arranged parallel to each other. A space portion between the oscillation plates and in which the mass and the spacer are not in contact with each other functions as a spring. By holding the mass by the two oscillation plates, the mass can be oscillated while it is in parallel to an opposing electrode. Therefore, generation of unnecessary moment in a direction other than an oscillation direction can be remarkably reduced.

Abstract: A switch that is capable of responding at a high rate at a lower DC potential while providing high isolation. In this switch, a microstructure group, having microstructures, is used. By slightly moving the microstructures a small amount the group, as a whole, achieves a large amount of movement. Also, by this configuration, it is possible to decrease a DC potential to apply to control electrodes of the microstructures. As a result, a high isolation switch capable of operating at a high rate at a lower DC potential is realized.

Abstract: The present invention employs an optimized cross-sectional shape for a ferromagnetic shape memory alloy (FSMA) composite that is used in a spring-type actuator, an improved hybrid magnetic trigger for use in FSMA based actuators, an a FSMA composite based spring type actuator, an a FSMA based spring type actuator including a stack of triggering units and FSMA springs, a FSMA composite based torque actuator. The invention also includes a model that can be employed to evaluate different materials being considered as components a FSMA for a FSMA composite used in either a FSMA based torque actuator or a FSMA spring actuator.

Abstract: A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.

Abstract: In an electrostatic driving structure for a MEMS device or other electrostatically-driven device, non-insulating material is disposed on or adjacent a gap on the surface of a dielectric between adjacent electrodes and is electrically coupled to a source of potential, so as to form an electrostatic shield which reduces the effect of mobile charges in the dielectric gap on the forces generated by the electrostatic driving structure. The shield is made of non-insulating material and may, for example, be formed by plating of metal or epitaxial deposition of silicon onto the electrode.

Abstract: A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

Abstract: A compliant mechanism is provided for accurate and precision alignment of mechanical component parts, surfaces or assemblies and the like, where low-cost, accurate, and repeatable alignment are desired. The compliant mechanism may be used in applications that require high precision alignment and where the relative location of coupled components must be variable or adjustable. The compliant mechanism includes a stage coupled to a plurality of hinges, at least one tab coupled to one of the hinges, and a support coupled to the tab. The relative position of the stage and the support may be adjusted by actuating (i.e., displacing) the tab(s) or other parts of the structure, to enable controlled movement in six degrees of freedom therebetween.

Abstract: In a zoom lens unit, substrate are arranged to be faced to each other and are provided with first driving electrodes used to drive a first movable section and second driving electrodes used to drive a second movable section, respectively. A recessed portion is formed in the first movable section so as to face the second driving electrodes. A recessed portion is also formed in the second movable section so as to face the first driving electrodes. The first and second movable sections can be independently controlled to achieve a zoom operation.

Abstract: An actuator 100 of the type employing a two-degree-of-freedom vibration system includes: a pair of first mass portions 1, 11; a second mass portion 2 provided between the pair of first mass portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of first mass portions 1, 11 and the second mass portion 2; at least a pair of first elastic connecting portions 4, 4 which respectively connect the first mass portions 1, 11 to the supporting portions 3, 3 so that each of the first mass portions 1, 11 can rotate with respect to the supporting portions 3, 3; and at least a pair of second elastic connecting portions 5, 5 which respectively connect the second mass portion 2 to the first mass portions 1, 11 so that the second mass portion 2 can rotate with respect to the first mass portions 1, 11. Each of the first mass portions 1, 11 is driven by the application of an alternating voltage, causing the second mass portion 2 to rotate.

Abstract: An electrostatic actuator comprises a movable element provided with electrodes, and a stator provided with inductive electrodes for generating electrostatic induction in the electrodes of the movable element. The electrodes of the movable element includes a driven electrode part provided at a position opposite to the driving electrodes of the stator, and an induced electrode part provided at a position opposite to the inductive electrodes of the stator. The movable element is displaced relatively to the stator by generating electrostatic force between the driving electrodes of the stator and the driven electrode part in the movable element in which the electrostatic induction is generated, by applying a voltage to the driving electrodes of the stator, while generating electrostatic induction in the electrodes of the movable element through the induced electrode part by applying a voltage to the inductive electrodes of the stator.

Abstract: The present invention provides a brakeable microapparatus comprising a substrate and a structure overlying the substrate and movable relative to the substrate. A frictional brake overlies the structure and is movable into frictional engagement with the structure for holding the structure relative to the substrate.

Abstract: A high-aspect-ratio-microstructure (HARM) is provided. The structure includes: a substrate; a lower structure with a comb shape fixedly mounted on said substrate and having first plural comb fingers, wherein each of the first plural comb fingers has a thin slot thereon; an upper structure with a comb shape having second plural comb fingers, wherein the lower structure and the upper structure have a height difference therebetween so as to form an uneven surface; and a lateral strengthening structure formed at vertically peripheral walls of the first plural comb fingers and the second plural comb fingers for protecting the plural first and second comb fingers.

Abstract: A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.

Abstract: A method for designing and optimnizing compliant mechanisms is provided, in addition to bistable compliant mechanism designs. According to the method, a selected compliant structure may be modeled analytically, and the characteristics of the analytical model may be optimized. Multiple recursive optimization algorithms may be used, for example, to determine the general location of a global optimum, and then to determine the values of the analytical model characteristics that obtain the global optimum or a feasible configuration for the selected compliant structure. Geometric characteristics of the selected compliant structure may be derived from the values of the analytical model characteristics. Bistable compliant designs may have a shuttle disposed between a pair of base members. The shuttle (20) may be linked to the base members (22, 24) by a pair of legs (30, 32), via flexural pivots. The base members may have cantilevered mounting beams to create deformable mounts that receive and store potential energy.

Abstract: A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure, the capacitive drive comes from interleaved combs. In another approach, a comb drive combines with a pair of planar electrodes to produce rotation of a central body relative to a substrate. In an optical scanning application, the central body is a mirror. In a biaxial structure, a gimbal ring carries the central body. The gimbal ring may be driven by more than one type of actuation to produce motion about an axis orthogonal to that of the central body. In another aspect, a MEMS scanning device is constructed with a reduced footprint.

Abstract: A rotational actuator/motor based on rotation of a carbon nanotube is disclosed. The carbon nanotube is provided with a rotor plate attached to an outer wall, which moves relative to an inner wall of the nanotube. After deposit of a nanotube on a silicon chip substrate, the entire structure may be fabricated by lithography using selected techniques adapted from silicon manufacturing technology. The structures to be fabricated may comprise a multiwall carbon nanotube (MWNT), two in plane stators S1, S2 and a gate stator S3 buried beneath the substrate surface. The MWNT is suspended between two anchor pads and comprises a rotator attached to an outer wall and arranged to move in response to electromagnetic inputs. The substrate is etched away to allow the rotor to freely rotate. Rotation may be either in a reciprocal or fully rotatable manner.

Abstract: An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages with final or rear-most electrodes of one stage maintained at substantially the same instantaneous voltage as the immediately adjacent initial or forward-most electrodes of a next stage in an airflow direction. A single power supply or synchronized and phase controlled power supplies provide high voltage power to each of the stages such that both the phase and amplitude of the electric power applied to the corresponding electrodes are aligned in time. The frequency and phase control allows neighboring stages to be closely spaced at a distance of from 1 to 2 times an inter-electrode distance within a stage, and, in any case, minimizing or avoiding production of a back corona current from a corona discharge electrode of one stage to an electrode of a neighboring stage.

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract: A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.

Abstract: In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

Abstract: The present invention relates to transducers, their use and fabrication. The transducers convert between mechanical and electrical energy. Some transducers of the present invention include a pre-strained polymer. The pre-strain improves the conversion between electrical and mechanical energy. The present invention also relates to devices including an electroactive polymer to convert between electrical and mechanical energy. The present invention further relates to compliant electrodes that conform to the shape of a polymer included in a transducer. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: An optical scanning apparatus includes a vibration mirror having a mirror surface that reflects an optical beam. A pair of torsion beams swingably support the mirror. The mirror is vibrated in a sealed space whose pressure is adjusted such that a characteristic of the mirror falls within a predetermined range.

Abstract: A micromachined ultrasonic transducer array comprising a multiplicity of cMUT cells built on a substrate. Each cMUT cell comprises a compliant support structure built on the substrate, a membrane supported over a cavity by the compliant support structure, a first electrode supported by the membrane, and a second electrode that forms a capacitor with the first electrode, the cavity being disposed between the first and second electrodes. The compliant support structure uncouples the non-membrane outer surface of each cMUT cell from the supporting substrate.

Abstract: A micro-electromechanical actuator includes a substrate. An elongate actuator arm has a fixed end portion that is fast with the substrate and a free end portion that is spaced from the substrate. The elongate actuator arm incorporates a heating circuit that is connectable to a power supply to heat the actuator arm. At least a portion of the actuator arm is of a material having a coefficient of thermal expansion which is such that the material is capable of thermal expansion to do work. The heating circuit is positioned to generate differential thermal expansion and contraction when heated and subsequently cooled to cause reciprocal displacement of the free end portion of the actuator arm. Control logic circuitry is positioned on the substrate along an elongate region defined on the substrate and interposed between the actuator arm and the substrate.

Abstract: A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.

Abstract: A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.

Abstract: The present invention includes apparatus and methods for powering movement of a structure by generating electricity from movement. In one aspect of the invention, electricity is generated from changes in thickness of a pad integrated into a tire. The tire can include a tire body having an outer wall and opposite sidewalls, a plurality of radial plies, and at least one pad integrated between the radial plies.

Abstract: An apparatus comprising a substrate; and a platform elevated above the substrate and supported by curved flexures. The curvature of said flexures results substantially from variations in intrinsic residual stress within said flexures. In one embodiment the apparatus is a deformable mirror exhibiting low temperature-dependence, high stroke, high control resolution, large number of degrees of freedom, reduced pin count and small form-factor. Structures and methods of fabrication are disclosed that allow the elevation of mirror segments to remain substantially constant over a wide operating temperature range. Methods are also disclosed for integrating movable mirror segments with control and sense electronics to a produce small-form-factor deformable mirror.

Abstract: A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

Abstract: Two or more independent voltages are applied between stationary and movable parts of a MEMS device via a multipart spring having at least two cooperating parts that are not in direct electrical contact with each other. In one embodiment, the at least two cooperating parts include a first cooperating part and one or more other cooperating parts that are physically separated from the first cooperating part, wherein first and second independent voltages are applied via the first cooperating part and the one or more other cooperating parts, respectively.

Abstract: The present invention is related to a novel micro-electro-mechanical systems (MEMS) torsional drive that is capable of tilting suspended structure such as a micro-mirror for steering light beams in three-dimensional analog fashion, which is suitable for high port count optical switches. The torsional drive has the advantages of allowing large tilt angle, having low drive voltage, and capable of providing a feedback signal for closed-loop control.

Abstract: A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about ?2 mm?1 to about +2 mm?1.

Abstract: A bimorphic polymeric photomechanical actuator, in one embodiment using polyvinylidene fluoride (PVDF) as a photosensitive body, transmitting light over fiber optic cables, and controlling the shape and pulse duration of the light pulse to control movement of the actuator. Multiple light beams are utilized to generate different ranges of motion for the actuator from a single photomechanical body and alternative designs use multiple light beams and multiple photomechanical bodies to provide controlled movement. Actuator movement using one or more ranges of motion is utilized to control motion to position an actuating element in three dimensional space.

Abstract: A MEMS device having a spring structure formed by two flexible beams attached between a substrate and a movable bar. When non-end sections of the beams are pulled in opposite directions, the beam ends attached to the movable bar pull that bar toward the substrate, thereby transforming in-plane motion of the non-end sections into out-of-plane motion of the movable bar. When the non-end sections are displaced symmetrically, the movable bar translates toward the substrate. Alternatively, when the non-end sections are displaced non-symmetrically, the movable bar rotates with respect to the substrate. In one embodiment, each flexible beam is attached to a comb-shaped portion of a motion actuator, which has two such portions, each portion interleaved with the other portion and adapted to move with respect to the substrate and that other portion.

Abstract: An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction.

Abstract: A method of manufacturing an electronic-charge-transferring device includes providing a charged species source and a charge species drain and providing a movable component for transferring charge to the charged species drain. A first protrusion proximate to the moveable component and a second protrusion proximate to the moveable component are also provided. The moveable component is positioned in close proximity to the charged species source, and at least one of the moveable component, the first protrusion and the second protrusion is of a micrometer scale or smaller.

Abstract: A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally ±10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.