Plural Liquid Electrodes Patents (Class 313/165)
  • Patent number: 7759663
    Abstract: A radiation source having self-shading electrodes is disclosed. Debris originating from the electrodes is reduced. The path from the electrodes to the EUV optics is blocked by part of the electrodes themselves (termed self-shading). This may significantly reduce the amount of electrode-generated debris.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: July 20, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer
  • Patent number: 7649187
    Abstract: The invention is directed to an arrangement for generating extreme ultraviolet (EUV) radiation based on a plasma that is generated by electric discharge. It is the object of the invention to provide a novel possibility for radiation sources based on an electric discharge by which a long lifetime of the electrodes that are employed and the largest possible solid angle for bundling the radiation emitted from the plasma are achieved. According to the invention, this object is met by providing coated electrodes in the form of two endless strip electrodes which circulate over guide rollers and which have at a short distance between them an area in which the electric discharge takes place.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: January 19, 2010
    Assignee: XTREME Technologies GmbH
    Inventors: Guido Hergenhan, Christian Ziener, Frank Flohrer
  • Patent number: 7622727
    Abstract: An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with a laser. Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: November 24, 2009
    Assignee: Ushiodenki Kabushiki Kaisha
    Inventors: Takahiro Shirai, Kyohei Seki
  • Patent number: 7518134
    Abstract: A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and to form a plasma so as to generate electromagnetic radiation, the anode and the cathode being rotatably mounted around an axis of rotation, the cathode being arranged to hold a liquid metal. The radiation source further includes an activation source arranged to direct an energy beam onto the liquid metal so as to vaporize part of the liquid metal and a liquid metal provider arranged to supply additional liquid metal so as to compensate for the vaporized part of the liquid metal.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: April 14, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun
  • Publication number: 20080191596
    Abstract: A device for producing electrical discharges in an aqueous medium, the device has a first electrode 3 and a second electrode 4, where each electrode 3, 4 is made of a metal alloy 5 and each has an electrode tip 3C, 4C integral or otherwise affixed to said electrode 3, 4. Each tip 3C, 4C is made of a metal alloy and at least the outer surface of such tips includes a percentage of gold or platinum. Preferably the entire tip 3C, 4C portion is made of an alloy 5 having between 0.02 to 20 percent weight percent gold or platinum. The tip metal alloy 5 preferably has a base composition of steel, more preferably a base composition having either at least 4 percent cobalt or at least 4 percent nickel in combination with the small amount of gold or platinum. The use of gold or platinum provides exceptional electrical conductivity, but improves the ductility of the tip material such that the explosive and corrosive effects of the high voltage plasma discharges in the acoustic shock waves are greatly diminished.
    Type: Application
    Filed: February 14, 2007
    Publication date: August 14, 2008
    Inventor: David Leo King
  • Patent number: 4482842
    Abstract: In a curved tube type ultra high pressure mercury discharge lamp device of the type comprising an arcuate glass tube, a quantity of mercury contained in both ends of the glass tube and electrodes projecting into the glass tube beyond surfaces of the mercury for creating electric discharge between the electrodes, throttles are formed on an inner surface of the glass tube near the electrodes. The throttles have diameters smaller than an inner diameter of the glass tube and the mercury is contained in spaces between the throttles and the both ends of the glass tube.
    Type: Grant
    Filed: September 29, 1981
    Date of Patent: November 13, 1984
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Fujimura, Yoshifumi Tomita, Kiyoshi Sawatari