Abstract: A plasma generator having a housing surrounding an ionization chamber, at least one working-fluid supply line leading into the ionization chamber, the ionization chamber having at least one outlet opening, at least one electric coil arrangement which surrounds at least one area of the ionization chamber, the coil arrangement being electrically connected with a high-frequency alternating-current source (AC) which is constructed such that it applies a high-frequency electric alternating current to at least one coil of the coil arrangement, is wherein a further current source (DC) is provided which is constructed such that it applies a direct voltage or an alternating voltage of a frequency lower than that of the voltage supplied by the high-frequency alternating current source (AC) to at least one coil of the coil arrangement.

Abstract: The present disclosure relates to a liquid anode radiation source (10) having the ability of turning upside down. The liquid anode radiation source (10) comprises a body (12) equipped with inlet and outlet having a wall (15) limiting the anode space (17), where the outlet connected to the inlet outside the body (12) will define a continuous flow path closing through the body, the inlet has a wall limiting an internal cross-section changing towards the anode space (17), wherein the cross-section of the inlet a deflector (11) is arranged in a position free of contacting the wall, filling out the cross-section partially and movable to the direction perpendicular to the cross-section; the liquid anode material (14) arranged in the flow path; the circulation unit inserted in the flow path in such a way that it can ensure the unidirectional movement of the anode material in the flow path.

Abstract: The present disclosure relates to a liquid anode radiation source (10) having the ability of turning upside down. The liquid anode radiation source (10) comprises a body (12) equipped with inlet and outlet having a wall (15) limiting the anode space (17), where the outlet connected to the inlet outside the body (12) will define a continuous flow path closing through the body, the inlet has a wall limiting an internal cross-section changing towards the anode space (17), wherein the cross-section of the inlet a deflector (11) is arranged in a position free of contacting the wall, filling out the cross-section partially and movable to the direction perpendicular to the cross-section; the liquid anode material (14) arranged in the flow path; the circulation unit inserted in the flow path in such a way that it can ensure the unidirectional movement of the anode material in the flow path.

Abstract: A radiation source having self-shading electrodes is disclosed. Debris originating from the electrodes is reduced. The path from the electrodes to the EUV optics is blocked by part of the electrodes themselves (termed self-shading). This may significantly reduce the amount of electrode-generated debris.

Abstract: A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first portion within the beam of radiation and a second portion outside of the beam of radiation, capturing at least some of the particles in the beam of radiation with the first portion, and moving the filter in a direction that is transverse to the beam of radiation so that the first portion is moved outside of the beam of radiation and the second portion is moved into the beam of radiation.

Abstract: The invention is directed to an arrangement for generating extreme ultraviolet (EUV) radiation based on a plasma that is generated by electric discharge. It is the object of the invention to provide a novel possibility for radiation sources based on an electric discharge by which a long lifetime of the electrodes that are employed and the largest possible solid angle for bundling the radiation emitted from the plasma are achieved. According to the invention, this object is met by providing coated electrodes in the form of two endless strip electrodes which circulate over guide rollers and which have at a short distance between them an area in which the electric discharge takes place.

Abstract: An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with a laser. Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.

Abstract: A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and to form a plasma so as to generate electromagnetic radiation, the anode and the cathode being rotatably mounted around an axis of rotation, the cathode being arranged to hold a liquid metal. The radiation source further includes an activation source arranged to direct an energy beam onto the liquid metal so as to vaporize part of the liquid metal and a liquid metal provider arranged to supply additional liquid metal so as to compensate for the vaporized part of the liquid metal.

Abstract: An extreme ultraviolet source with wide-angle vapor containment and reflux is described. In the optical output directions radiating from the source plasma there is an array of tapered buffer gas heat pipes, with wick structures in the walls. In directions toward the insulators separating the discharge electrodes there are disc-shaped buffered gas heat pipes that prevent metal vapor from condensing on these insulators. A preferred electrode configuration has three electrode discs that operate in the star pinch mode. Another electrode configuration comprises two electrode discs and supports a pseudospark discharge. The star pinch variant of this source has efficiently generated 13.5 nm radiation with lithium vapor and helium buffer gas.

Abstract: An emitter for an ion source, such as a liquid metal alloy ion source (LMAIS). The emitter includes a binary alloy PrSi as a source material.

Abstract: A micro-discharge optical source apparatus and a method and system which utilizes the apparatus to analyze a sample are provided. The apparatus includes a substrate and an anode electrode and a cathode electrode supported on the substrate. One of the electrodes, such as the cathode, is preferably a liquid electrode. The electrodes are spaced apart to define an inter-electrode gap therebetween. The apparatus further includes a voltage source for applying a voltage between the electrodes sufficient to generate a glow micro-discharge in the gap to cause a first emission having a first desired excitation spectrum. An optical element is integrated with the substrate to direct the first emission to travel along an optical path including an axis. In one embodiment, the system detects the direct fluorescence of a sample such as tryptophan and other amino acids. In another embodiment, the system detects fluorescence of dye-labeled biochemicals.

Abstract: Glow discharge apparatus having liquid electrodes includes a substrate with a top surface on which cathode and anode electrodes are formed. The cathode electrode may be formed with a cathode terminal port formed to hold a liquid which is spaced from the anode electrode by an inter-electrode surface of the substrate. Electrical conductors are connected to the anode and cathode electrodes to allow a voltage to be applied between them, resulting in a glow discharge in the gap over the inter-electrode surface that causes sputtering of the liquid in the cathode terminal port into the glow discharge. Excitation by the glow discharge of the sputtered or evaporated liquid allows spectroscopic analysis of the constituents of the liquid in the electrode.

Abstract: The present invention provides a DBD lamp used in fluid treatment systems, where the irradiated fluid is used as a low voltage outer electrode instead of a metallic wire mesh. This fluid is in direct contact with the lamp envelope which acts as a two-fold advantage. First, the fluid acts as a strong built-in cooling source. This allows the lamp to be driven at high voltage without forced cooling. Second, the replacement of the wire mesh as the outer electrode by fluid as well as the sleeve eliminates the absorption of radiation from the outer surface of the DBD-driven light source which more than doubles the efficiency of the DBD-driven light source. The inner high voltage electrode remains in the center of the coaxial tube assembly and provides high voltage across the gas to generate excimer formation.

Abstract: A noble-gas flashlamp having a self-replenishing mercury-pool cathode. The lamp includes a lamp envelope which is transparent to UV radiation and which forms a linearly extending discharge chamber for holding a noble gas discharge material. At the cathode end of the discharge chamber the envelope forms a cavity or bubble communicating with the discharge chamber. The cathode of the lamp is formed by a cathode electrode and a pool of liquid mercury in the cavity. The electrode is both electrically and thermally conducting, and the pool of liquid mercury covers the electrode and is in heat exchange relation with the electrode in the cavity. For enhanced heat transfer the cathode electrode extends beyond the lamp envelope so that it may be brought into direct contact with the lamp coolant material. The anode comprises an electrically and thermally conducting anode electrode at said anode end of the discharge chamber.

Abstract: A pulsed light source includes a sealed, ultraviolet-transmissive lamp tube defining a discharge region containing a rare gas or a mixture of rare gases, anode and cathode electrodes sealed into the lamp tube at opposite ends, leads for connecting the electrodes to a pulsed source of electrical energy and a phosphor material located on a surface external to the discharge region. The lamp tube contains mercury in sufficient quantity to cover the cathode electrode when the lamp tube is oriented with the cathode electrode at the bottom. The cathode electrode is protected by the mercury from sputtering that results from ion bombardment. The mercury emits pulsed ultraviolet radiation which stimulates emission of visible light by the phosphor material. Lamp tube pressure is below 200 torr. The light source is operable over a range of pulse widths and duty cycles. The color of light emission is determined by the phosphor.

Abstract: Electrode arrangement with liquid-metal electrode of controllable surface, comprising a liquid-metal reservoir, a capillary connected thereto through a controllable valve and contact means being in electric contact with the liquid-metal in the capillary. According to the invention at least one section of the capillary is formed within a metal body not reacting chemically with the liquid-metal, said metal body constituting the contact means. Preferably, the metal body is formed so that an elastic closing element of the valve fits to a surface of the metal body surrounding an opening of the capillary section formed therein.

Abstract: A liquid metal ion source is disclosed, wherein it comprises an ion emitter tip, ion source material holder means holding ion source material for supplying liquid metal ion source material to said ion emitter tip, ion extracting means for extracting ions from said ion emitter tip, when a voltage is applied between the ion extracting means and the ion emitter tip, the pulsing means for pulsing the relative voltage applied between the ion extracting means and the ion emitter tip. A DC voltage corresponding to the threshold voltage V.sub.th for ion beam extraction is applied between the ion emitter tip and the extracting electrode, what permits to extract an ion beam having a high current density by superposing a pulsed voltage on the DC voltage.

Abstract: A large-area liquid ion source comprises means for generating, over a large area of the surface of a liquid, an electric field of a strength sufficient to induce emission of ions from a large area of said liquid. Large areas in this context are those distinct from emitting areas in unidimensional emitters.

Abstract: A liquid metal ion source and alloy for the simultaneous ion evaporation of arsenic and boron, arsenic and phosphorus, or arsenic, boron and phosphorus. The ionic species to be evaporated are contained in palladium-arsenic-boron and palladium-arsenic-boron-phosphorus alloys. The ion source, including an emitter means such as a needle emitter and a source means such as U-shaped heater element, is preferably constructed of rhenium and tungsten, both of which are readily fabricated. The ion sources emit continuous beams of ions having sufficiently high currents of the desired species to be useful in ion implantation of semiconductor wafers for preparing integrated circuit devices. The sources are stable in operation, experience little corrosion during operation, and have long operating lifetimes.

Abstract: An electron beam controlled switch employing a radial geometry and a Wire-Ion Plasma-Electron gun (WIP E-gun) as an electron source is disclosed. The switch comprises an inner cylinder that serves as the WIP E-gun cathode, a cylindrical grid that serves as the WIP E-gun anode, an array of fine wire anodes disposed in the WIP E-gun ionization chamber, a foil support cylinder to support the foil windows which also serve as the switch anode, and an outer cylinder which also serves as the switch cathode. The WIP E-gun and ionization chamber is gas filled at low pressure, while the switch cavity is filled with a high pressure gas. A voltage pulse is applied to the wire anodes to ionize the gas in the ionization chamber. The ions are extracted through the chamber grid and accelerated through a high voltage to bombard the E-gun cathode.

Abstract: Billet (52) of electrically conductive or semi-conductive material has slot (54) therethrough which contains insulator slip (58). In this condition, the ion emitter body (44) is machined with the cylindrical exterior surface (60), conical nose (62) and emitter point (70). The limited electrical path localizes heating under the point (70) and the strong structure of the body permits strong mounting and controlled heat extraction.

Abstract: An ion source having a sintered metal head for ionizing various substances is disclosed. This ion source comprises a container made of a material which has a higher fusing point than that of the substance which is to be ionized, and a tip formed of a molded sintered metal of a higher fusing point than that of the substance which is to be ionized. The head is formed into a nearly conical shape and has a porosity capable of allowing the substance which is to be ionized to infiltrate therethrough in the molten state and the tip of the head is positioned at the opening of one end of the container for the ionizable material and arranged in such a manner that it protrudes beyond the end of the container.

Abstract: A reservoir, extracting electrode and circular tungsten filament are maintained at high positive D.C. potential relative to a grounded electrode. Thermal electrons emanated from the filament irradiates and heats the bottom of the reservoir. As a result, powdered CsI held in the reservoir is melted and then forms a liquid CsI cone-shaped portion below the capillary formed at the reservoir bottom. Vaporized CsI molecules are created by further heating the cone-shaped portion, and are ionized by electron beam irradiation, so that a Cs.sup.+ ion beam is obtained.

Abstract: Alloys suitable for use in liquid metal field ionization ion sources are provided. Such sources include an anode electrode for supporting an ion emitter comprising an alloy in the liquid state. The source further comprises means for generating an ionizing electric field and a reservoir for the liquid metal, ions of which are to be emitted by the source.The alloys are selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element, the balance at least one transition metal element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition metal, the balance at least one late transition metal, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.Ions generated in liquid metal ion sources form a high brightness ion beam, which permits focusing a beam of emitted ions to a submicrometer spot.

Abstract: A field-emission ion source in which, under the influence of an electric field, ions are released from a metal or metal alloy present in an enclosed space in the liquid state. The ions are emitted from this space through a very narrow slit. This slit may be straight or curved. The field-emission ion source can be used in an ion thruster apparatus comprising an emitter module, an electrode system, and a power supply unit. A plurality of emitter modules can be combined to form an ion thruster apparatus having a greater ion current output. Instead of a liquid metal as the propellant, a metal in the solid phase can be supplied to the emitter module, which metal is melted in the emitter module.

Abstract: A metal vapor discharge lamp includes a cathode comprising a reservoir of liquid cesium. Metallic cesium which is eroded from the cathode surface by the action of the discharge is returned to the reservoir by the combined effects of gravity, evaporation, condensation, and diffusion to provide a highly stable, long-lived lamp.The intense infrared pulse output of cesium vapor discharge lamps of the present invention is well suited for triggering light-activated semiconductor switches through dielectric pipe networks and for pumping neodymium glass or neodymium-YAG lasers.

Abstract: A metal vapor discharge lamp includes a cathode comprising a reservoir of liquid cesium. Metallic cesium which is eroded from the cathode surface by the action of the discharge is returned to the reservoir by the combined effects of gravity, evaporation, condensation, and diffusion to provide a highly stable, long-lived lamp.The intense infrared pulse output of cesium vapor discharge lamps of the present invention is well suited for triggering light-activated semiconductor switches through dielectric pipe networks and for pumping neodymium glass or neodymium-YAG lasers.

Abstract: Liquid-metal plasma valve has an anode, a condenser and a force-fed liquid-metal cathode. These bound the interelectrode space through which the plasma jet acts during conduction. The cathode directs the plasma jet to impinge on an inclined surface which acts as the anode. The inclined surface reflects the particles to the condenser when the anode is noncondensing, but when the functions of anode and condenser are combined, the inclined surface of the condensing anode traps the jet particles. When the anode is noncondensing, in some cases the condenser and anode are at the same potential and in other cases the condenser and cathode are at the same potential. Cathode, anode and condenser are shaped to minimize the transit time of jet particles from emission to condensation.