Aligned Apertures (e.g., Beam Power) Patents (Class 313/299)
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Patent number: 9934934Abstract: Electrostatic lenses for focusing a beam of charged particles, and in particular an electron beam, are used especially in the electron guns of electron microscopes or electron-beam lithography apparatuses. The present disclosure improves the possibilities for focusing the particle beam, in particular an electron beam emitted by a cathode. The lens comprises at least one conducting electrode having at least one through-opening for the passage of an electron beam. Different electric fields are set up upstream and downstream of the opening. The passage opening is at least partially closed by a planar or curved thin membrane of semi-conducting material that is transparent to electrons and has a high dielectric permittivity. Structuring the membrane (holes or thickened portions of electrodes deposited on the membrane) makes it possible to correct lens aberration defects.Type: GrantFiled: May 26, 2014Date of Patent: April 3, 2018Assignee: Commissariat A L'Energie Atomique et aux Energies AlternativesInventor: Christophe Constancias
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Patent number: 8227989Abstract: The present invention relates to a new discharge element having a discharge-control electrode for inducing a discharge even at low voltage by improving a characteristic in which a discharge element may not be discharged against a fast transient voltage when it is at low voltage, and more specifically, the discharge element having a discharge-control electrode according to the present invention comprises an airtight cylinder formed with a ceramic insulation material, a pair of discharge electrodes arranged for facing an end opening of the airtight cylinder, a discharge gap formed between the pair of discharge electrodes, a discharge-assisting material filled inside the airtight cylinder, and a discharge-control electrode in contact with the airtight cylinder and physically separated from the discharge-assisting material, wherein a discharge between the pair of discharge electrodes is induced by a control voltage applied through the discharge-control electrode.Type: GrantFiled: August 28, 2008Date of Patent: July 24, 2012Assignee: Surgelab KoreaInventor: Seonho Kim
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Patent number: 7397190Abstract: The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3?) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5?) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).Type: GrantFiled: November 28, 2003Date of Patent: July 8, 2008Assignee: Koninklijke Philips Electronics, N.V.Inventors: Guenther Hans Derra, Joseph Robert Rene Pankert, Willi Neff, Klaus Bergmann, Jeroen Jonkers
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Patent number: 7319287Abstract: The present invention relates to an electron emission device in which a high voltage can be properly applied to anode electrodes by improving a pattern of apertures of a grid electrode to reduce a diode emission. In an exemplary embodiment of the present invention, the electron emission device includes a first substrate and a second substrate facing each other and having a predetermined gap therebetween. An electron emission unit is formed on the first substrate, and a light emission unit formed on the second substrate. A grid electrode is mounted between the first and second substrates, and has a plurality of apertures per a sub-pixel region of the electron emission unit.Type: GrantFiled: November 29, 2004Date of Patent: January 15, 2008Assignee: Samsung SDI Co., Ltd.Inventor: Sang-Hyuck Ahn
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Patent number: 7095169Abstract: A flat panel display device capable of reducing charging of phosphors and disposing spacers easily and accurately. The flat panel display device has a rear substrate including an insulating substrate provided with many cold cathode elements for emitting electrons, a display substrate including a light-transmissive substrate disposed to face the rear substrate, and phosphors disposed on the light-transmissive substrate for generating light when excited by electron beams from the cold cathode elements, and a peripheral frame member. Provided on the light-transmissive substrate is a metal sheet perforated with plural fine holes arranged in a matrix configuration and having the phosphors disposed therewithin to form a light-emissive region.Type: GrantFiled: October 10, 2003Date of Patent: August 22, 2006Assignee: Hitachi, Ltd.Inventors: Tetsu Ohishi, Masakazu Sagawa, Yoshie Kodera, Motoyuki Miyata, Akinori Maeda
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Patent number: 6774550Abstract: A charged particle apparatus, with multiple electrically conducting semispheric grid electrodes, the grid electrodes mounted in a dielectric mounting ring, with hidden areas or regions to maintain electrical isolation between the grid electrodes as sputter deposits form on the grid electrodes and mounting ring. The grid electrodes are mounted to the mounting ring with slots and fastening pins that allow sliding thermal expansion and contraction between the grid electrodes and mounting ring while substantially maintaining alignment of grid openings and spacing between the grid electrodes. Asymmetric fastening pins facilitate the sliding thermal expansion while restraining the grid electrodes. Electrical contactors supply and maintain electrical potentials of the grid electrodes with spring loaded sliding contacts, without substantially affecting the thermal characteristics of the grid electrodes.Type: GrantFiled: April 14, 2003Date of Patent: August 10, 2004Assignee: Veeco Instruments, Inc.Inventors: Viktor Kanarov, Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch
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Patent number: 6590324Abstract: A charged particle apparatus, with multiple electrically conducting semispheric grid electrodes, the grid electrodes mounted in a dielectric mounting ring, with hidden areas or regions to maintain electrical isolation between the grid electrodes as sputter deposits form on the grid electrodes and mounting ring. The grid electrodes are mounted to the mounting ring with slots and fastening pins that allow sliding thermal expansion and contraction between the grid electrodes and mounting ring while substantially maintaining alignment of grid openings and spacing between the grid electrodes. Asymmetric fastening pins facilitate the sliding thermal expansion while restraining the grid electrodes. Electrical contactors supply and maintain electrical potentials of the grid electrodes with spring loaded sliding contacts, without substantially affecting the thermal characteristics of the grid electrodes.Type: GrantFiled: September 7, 1999Date of Patent: July 8, 2003Assignee: Veeco Instruments, Inc.Inventors: Viktor Kanarov, Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch
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Patent number: 6534923Abstract: An electron source including a nanostructured carbon electron-emitting film and an electron extraction grid spaced closely adjacent the surface of said film.Type: GrantFiled: July 13, 2001Date of Patent: March 18, 2003Assignee: Microwave Power TechnologyInventor: Robert J. Espinosa
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Patent number: 5914067Abstract: A microwave oven includes a microwave generating apparatus having a cathode, a first grid for controlling the flow of electrons from the cathode, the first grid having holes for converting electrons from the cathode to the electron beams, a choke structure, positioned between the cathode and the first grid, for serving as a blocking capacitor, wherein the cathode, the first grid and the choke structure define an input cavity functioning as a resonant circuit, a resistor, one end of which is connected to the first grid and the other end thereof is connected to the cathode, for inducing a bias voltage on the first grid, a second grid provided above the first grid and having holes through which the electron beams passing through holes of the first grid pass, an anode for receiving the electrons passing through the holes of the second grid, wherein the second grid and the anode define an output cavity for generating a microwave, the output cavity being electrically insulated from the input cavity, and a driving vType: GrantFiled: June 23, 1998Date of Patent: June 22, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Lee-Kyo Chung
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Patent number: 5883368Abstract: An apparatus for generating a microwave frequency energy includes a cathode for emitting electrons, a first grid for controlling and focusing the flow of electrons from the cathode, a choke structure for serving as a capacitor, wherein the cathode, the first grid and the choke structure define an input cavity functioning as a resonant circuit.Type: GrantFiled: December 4, 1997Date of Patent: March 16, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Shin-Jae Jeong
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Patent number: 5883367Abstract: A microwave oven includes a cooking chamber, a waveguide, and an apparatus for generating a microwave frequency energy.Type: GrantFiled: December 4, 1997Date of Patent: March 16, 1999Assignee: Daewoo Electronics Co., Ltd.Inventors: Gi-Jun Cho, Jae-Soo Kim
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Patent number: 5883369Abstract: An apparatus for generating a microwave frequency energy includes a cathode for emitting electrons, a first grid for controlling and focusing the flow of electrons from the cathode, a choke structure for serving as a capacitor, wherein the cathode, the first grid and the choke structure define an input cavity functioning as a resonant circuit.Type: GrantFiled: December 4, 1997Date of Patent: March 16, 1999Assignee: Daewoo Electronics Co., Ltd.Inventors: Jae-Soo Kim, Hong-Woo Lee
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Patent number: 5850074Abstract: A microwave oven includes a microwave generating apparatus having a cathode, a first grid for controlling the flow of electrons from the cathode. The first grid has holes for converting electrons from the cathode to the electron beams and a metal film for reducing emission of secondary electron from the first grid. The cathode, the first grid and the choke structure define an input cavity functioning as a resonant circuit. The microwave generating apparatus further includes a resistor for inducing a bias voltage on the first grid, a second grid having holes through which the electron beams passing through holes of the first grid pass, an anode for receiving the electrons passing through the holes of the second grid, and a driving voltage source for providing a driving voltage to the cathode and the anode. The anode is provided with a plurality of protuberances for reducing emission of secondary electron from the anode. The second grid and the anode define an output cavity for generating a microwave.Type: GrantFiled: June 30, 1998Date of Patent: December 15, 1998Assignee: Daewoo Electronics Co., Ltd.Inventor: Lee-Kyo Chung
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Patent number: 5841114Abstract: A microwave oven includes a microwave generating apparatus having a cathode, a first grid for controlling the flow of electrons from the cathode, the first grid having holes for converting electrons from the cathode to the electron beams, a choke structure, positioned between the cathode and the first grid, for serving as a blocking capacitor, wherein the cathode, the first grid and the choke structure define an input cavity functioning as a resonant circuit, an array of resistors, one end of which is connected to the first grid and the other end thereof is connected to the cathode, for inducing a bias voltage on the first grid, a controller for controlling the array of resistors to make a plurality of resistance values, a second grid provided above the first grid and having holes through which the electron beams passing through holes of the first grid pass, an anode for receiving the electrons passing through the holes of the second grid, wherein the second grid and the anode define an output cavity for geneType: GrantFiled: June 25, 1998Date of Patent: November 24, 1998Assignee: Daewoo Electronics Co., Ltd.Inventor: Shin-Jae Jeong
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Patent number: 5783900Abstract: A broad-beam high energy electron accelerator has an electron injection section arranged for increased current density with greater uniformity and higher transmission through the foil exit window. A plurality of cathode rods are disposed in a transverse plane and spaced at about 2.4 cm, and a reflector plate behind the cathode rods is biased negative relative thereto. A planar control grid is disposed distal of said cathode rods and a screen grid is disposed parallel to and distal of the control grid. Field-shaping wires are disposed in a plane parallel to the plane of the cathode rods and between the same and the reflector plate, with the respective field-shaping wires being disposed parallel to said rods and midway between them. The same positive bias (e.g., 11 kV) is applied to both the control grid and the field-shaping wires.Type: GrantFiled: September 23, 1996Date of Patent: July 21, 1998Assignee: Virginia Accelerators, Inc.Inventors: Stanley Humphries, Jr., Ralph D. Genuario
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Patent number: 5465023Abstract: A method and apparatus of manufacturing a grid member for use in an ion discharge apparatus provides a woven carbon fiber in a matrix of carbon. The carbon fibers are orientated to provide a negative coefficient of thermal expansion for at least a portion of the grid member's operative range of use.Type: GrantFiled: July 1, 1993Date of Patent: November 7, 1995Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: Charles E. Garner
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Patent number: 5448883Abstract: Carbon-carbon elements for ion optics sets are thermomechanically stable under the extreme temperature changes that are experienced in ion thrusters. The elements described include screen and accelerator grids and methods of producing such grids. The described elements are thermomechanically stable, lightweight, and resistant to sputtering.Type: GrantFiled: February 26, 1993Date of Patent: September 12, 1995Assignee: The Boeing CompanyInventors: Jere S. Meserole, Jr., Daniel E. Hedges, Michael E. Rorabaugh
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Patent number: 5332945Abstract: A Pierce electron gun is provided having a cathode, a focusing electrode surrounding the cathode, and an anode disposed a fixed distance from the cathode and having an opening therethrough. The electron gun has at least one grading electrode disposed between the focusing electrode and the anode. The grading electrode controls shape of equipotential lines of an electric potential difference provided between the anode and the cathode, to purposely reduce field gradient levels formed by the electric potential difference. The grading electrode further has a double radial bend having an inner radial curve of a first radius and an outer radial curve of a second radius.Type: GrantFiled: May 11, 1992Date of Patent: July 26, 1994Assignee: Litton Systems, Inc.Inventor: Richard B. True
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Patent number: 5126633Abstract: A novel electron beam apparatus and technique wherein a plurality of longitudinally extending heated filaments is employed, each similarly offset laterally of a central longitudinal axis, but with successive filaments alternately disposed on opposite sides of said axis and cooperating with a first low velocity accelerating stage comprising staggered grid slots and openings, and a high velocity second accelerating stage to provide long uniform longitudinal electron beams.Type: GrantFiled: July 29, 1991Date of Patent: June 30, 1992Assignee: Energy Sciences Inc.Inventors: Tzvi Avnery, Arthur W. Sommerstein, Rolfe W. Graham
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Patent number: 4994709Abstract: A very fine-mesh, non-emissive shadow grid is formed on the smooth emissive surface 16 of a thermionic cathode 12 by deposition from a vapor a continuous layer 22 of non-emissive conductive material. Between the elements 24 of the grid the non-emissive material is removed by bombardment through an apertured mask to restore emissivity between the elevated grid elements 24.Type: GrantFiled: March 22, 1989Date of Patent: February 19, 1991Assignee: Varian Associates, Inc.Inventors: Michael C. Green, George V. Miram
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Patent number: 4745326Abstract: A controlled porosity dispenser cathode and method of manufacture therefo using chemical vapor deposition and laser drilling, ion milling, or electron discharge machining for consistent and economical manufacturing a cathode with pores on the order of 0.2 to 2 .mu.m in diameter.Type: GrantFiled: December 10, 1986Date of Patent: May 17, 1988Assignee: The United States of America as represented by the Secretary of the NavyInventors: Richard F. Greene, Richard E. Thomas
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Patent number: 4745324Abstract: A high-power switch tube is shown constructed from a plurality of electron guns each gun having a cathode and an anode. Between the cathode and anode is mounted a shadow grid closest to the cathode beyond which is mounted a control grid, a screen grid, and, in some applications, by a suppressor grid. Each anode is formed with an anode cavity having an opening that is smaller in dimension than the largest dimension of the cavity thus forming a Faraday cage collector which prevents secondary emission problems.Type: GrantFiled: May 12, 1986Date of Patent: May 17, 1988Assignee: Litton Systems, Inc.Inventor: Richard B. True
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Patent number: 4503357Abstract: A cathode-ray tube has in a neck section of a hermetically sealed, evacuated envelope an electron-gun mount assembly in which of a cathode for emitting an electron beam, a first grid electrode section for forming a crossover point and for accelerating the electron beam and a second grid electrode section for focusing the electron beam are mounted on a plurality of insulative supporting bars. A conductive member is provided on an outer surface portion of the neck section, an inner surface portion thereof, and/or an outer surface portion of the supporting bars which surround a portion of the electron-gun mount assembly including the first grid electrode section but excepting the second grid electrode section.Type: GrantFiled: December 23, 1982Date of Patent: March 5, 1985Assignee: Hitachi, Ltd.Inventors: Koukichi Ouhata, Hiroyuki Sugawara
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Patent number: 4501990Abstract: Electron tube assemble having coaxial electrodes and grids, including a tube with given electrode trajectories and oscillation period, and interfering retarding-field effect elimination means disposed around the tube for generating a magnetic field having field lines running inside the tube substantially parallel to the electrodes and grids deflecting the trajectories of the electrons moving radially with respect to the anode during operation of the tube and substantially perpendicularly intersecting and elongating the trajectories of the electrons for increasing the oscillation period of the electrons and eliminating interfering retarding-field effects.Type: GrantFiled: December 16, 1983Date of Patent: February 26, 1985Assignee: Siemens AktiengesellschaftInventor: Jochen Stahl
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Patent number: 4405878Abstract: A variety of technologies have been applied in the development of a bonded rid cathode. Erosion lithography is used for making the fine-detail grid structure, combining air erosion and lithographic techniques. To obtain openings of the order of 0.001 inch (one mil) or smaller, a nozzle with a high aspect ratio exit opening is used, and the cathode grid structure is scanned. A photo resist in which the grid pattern is developed is used over the molybdenum or tungsten grid film. The metal film is removed from the grid openings by chemical etching. The photo resist over the metal grid is used as a composite mask for removing the BN insulation in the openings by erosion with Al.sub.2 O.sub.3 powder from the special nozzle on the air blast gun.Type: GrantFiled: October 1, 1981Date of Patent: September 20, 1983Assignee: The United States of America as represented by the Secretary of the ArmyInventor: David W. Oliver
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Patent number: 4302701Abstract: In an exemplary embodiment, a transmitting tube has a coaxial design of the electrodes and their lead-ins and includes a cathode formed of a hollow cylinder which is secured at one end to an annular cathode lead, and at the other end is secured to a cathode cap which is supported at a power supply lead extending coaxially within the hollow cylinder. In this cathode, the carrier is not to consist of wire, so that inhomogeneities on the cathode surface are avoided. To this end, the disclosure provides that the hollow cylinder consist of pyrolytic graphite and be coated with a thin metal layer, preferably consisting of tungsten carbide and thorium, or a thorium oxide.Type: GrantFiled: August 27, 1979Date of Patent: November 24, 1981Assignee: Siemens AktiengesellschaftInventor: Ingo Beling
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Patent number: 4302702Abstract: The invention relates to metal oxide activated porous tungsten cathodes and methods of their manufacture. A cathode 1 of porous tungsten activated by metal oxides is mounted on a housing 2 which has a heating filament 3. On the outer face of the cathode there is a pattern or grid of pure tungsten (preferably formed by a chemical vapor deposition of WCl.sub.6 or WF.sub.6) of crystalline material the outer face of which has an orientation in the (100) or (110) plane and is parallel to the surface of the cathode. The invention will find particular use in the cathode guns of high frequency tubes such as traveling wave tubes and klystrons.Type: GrantFiled: May 9, 1978Date of Patent: November 24, 1981Assignee: Thomson-CSFInventors: Jean Montgaillard, Arvind Shroff
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Patent number: 4295077Abstract: An improved high power electron tube has at least one grid electrode. The grid electrode is formed from a one piece cylindrical member, closed at one end, having an outside diameter, D. The cylindrical member has a plurality of arcuate, circumferentially elongated apertures extending therethrough. Each of the apertures has a length x and a width y wherein the length x is greater than width y, and wherein the length x is not greater than 0.55 times the diameter, D, of the electrode. The width y, of each of the apertures is not greater than 0.1 times the diameter D, of the electrode.Type: GrantFiled: February 14, 1980Date of Patent: October 13, 1981Assignee: RCA CorporationInventors: Don R. Carter, Claude E. Doner, Fred G. Hammersand, Joseph R. Tomcavage
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Patent number: 4147953Abstract: A linear beam tube is provided with a gridded electron gun in which a concave cathode surface is provided with concave channels from which electrons are emitted. The channels may be arranged as concentric annuli. In a preferred embodiment the channels extend radially outwards from the center of the cathode to minimize the effects of temperature distortion. The cathode is provided with a shadow grid and a control grid is spaced from and aligned therewith.Type: GrantFiled: December 27, 1976Date of Patent: April 3, 1979Assignee: English Electric Valve Company LimitedInventor: Maurice Esterson
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Patent number: 4145635Abstract: An electron emitter comprises field emitter zones formed by projections of field emissive material separated by regions which are not field emissive. An extractor electrode for applying an electric field to the projections and a focus electrode have openings aligned with the emitter zones and material particles aligned with the non-emissive regions. The electrodes form, when suitably energised electron focussing fields to focus electrons emitted from the zones.Type: GrantFiled: November 2, 1977Date of Patent: March 20, 1979Assignee: E M I Varian LimitedInventor: Richard A. Tuck
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Patent number: 4100450Abstract: This disclosure deals with novel techniques for generating longitudinal strips of energetic electron beams through concentric slotted constructions, being quite adaptable for the generation of multiple beams in different directions that are of very narrow angular transverse extent, as for purposes of line irradiation of articles passing the beams, though the techniques herein disclosed are also useful in other applications of electron beam irradiation.Type: GrantFiled: February 17, 1977Date of Patent: July 11, 1978Assignee: Energy Sciences Inc.Inventors: William A. Frutiger, David E. Overberg
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Patent number: 4076992Abstract: A vacuum tube includes a cylindrical cathode around which a frusto-conical control grid extends. The control grid, which is made out of Phosnic bronze, has its larger diameter end attached to the smaller end of a first hollow truncated copper cone. A cylindrical Phosnic bronze screen grid extends coaxially around the control grid. One end of the screen grid is attached to the smaller diameter end of a second hollow truncated cone. The second cone extends around the first cone and is made out of a copper clad alloy of cobalt, nickel and iron. An anode encircles the screen grid.Type: GrantFiled: June 22, 1976Date of Patent: February 28, 1978Assignee: RCA CorporationInventor: John Thomas Mark
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Patent number: 4059784Abstract: The electron-beam converter comprises at least one of each of the following components: a cathode, an anode and, accelerating and control electrodes. The anode has a surface orthogonal with respect to a diverging electron flow and is arranged with respect to the cathode so that the angle between normals to the surfaces of these electrodes is greater than zero but less than 180.degree.. The accelerating electrode is disposed in the opening of this angle. The control electrodes are arranged near the cathode on either side of the electron flow. A cathode-adjacent focusing electrode is arranged behind the control electrode which is on the cathode side opposite to the accelerating electrode, and an anode-adjacent focusing electrode is inserted between the anode and accelerating electrode. All of said electrodes make up an electron-optical system shaping the electron flow into a beam so as to prevent electrons from impinging upon the accelerating electrode.Type: GrantFiled: June 14, 1976Date of Patent: November 22, 1977Inventors: Vladimir Innokentievich Perevodchikov, Valentina Nikolaevna Shapenko, Zarem Sergeevich Chernov, Nina Sergeevna Bunina