By Same Path And/or To Same Aperture Patents (Class 315/5.19)
Device tunable (Class 315/5.21)
  • On-chip vacuum microtube device and method for making such device
    Patent number: 6803725
    Abstract: In accordance with the invention, improved vacuum microtube devices are provided with arrangements for tunably spacing the gate and the cathode. Tuning can be effected by using an electrostaic or magnetic actuator to move the gate on a spring or a rail. Advantageously a feedback arrangement can be used to control the spacing. Magnetic reassembly components can be provided for facilitating release of tube components in fabrication.
    Type: Grant
    Filed: August 23, 2003
    Date of Patent: October 12, 2004
    Assignee: The Regents of the University of California
    Inventor: Sungho Jin