Abstract: An electron beam drawing apparatus, comprises an electrostatic deflector which deflects the electron beam by an electric field, a coaxial cable which is connected to deflecting electrodes, and a resistive element which is connected between a central conductor and an outer conductor or the external cylinder. The electrostatic deflector includes the external cylinder provided more downstream than the electron source and kept at the ground potential and a plurality of deflecting electrodes which are provided in the external cylinder. The coaxial cable includes the central conductor and the tubular outer conductor, one end of the central conductor passing through the external cylinder and being connected to the deflecting electrodes and one end of the outer conductor being connected to the external cylinder. The resistive element is set to a resistance for obtaining impedance matching with the coaxial cable.

Abstract: This invention aims to decrease the leakage current of a dielectric barrier discharge lamp, and to prevent generation of the luminance slope between both electrodes. Electrodes 3 and 4 are formed in the outer surface of the dielectric barrier discharge lamp 1, and the high voltage side of the high frequency power sources 5 and 6 is connected to the electrodes 3 and 4, respectively. The low voltage side of the high frequency power sources 5 and 6 is connected to the grounding voltage GND. The output voltage waveform of the high frequency power sources 5 and 6 have different phases each other and inverted polarities each other.