Abstract: Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.

Abstract: An automobile servomotor controller includes a master control unit having a master control circuit for transmitting a designation signal and a slave unit having a motor and a control circuit which controls driving of a motor by outputting an operation signal to a driving device depending upon said designation signal. The slave unit is constructed by a same feedback control unit having a non-feedback control unit for inhibiting the operation of the motor until a target is changed by an input of a new designation signal with a target reached state and a feedback control unit for driving the motor to reach a target state by detecting a present position value with a position detecting device, and a control inhibiting signal for inhibiting the feedback control is individually provided to the designation signal transmitted from the master control circuit to the non-feedback control unit.

Abstract: In order to suitably intercommunicate an output signal from a sensor arranged outside an actuator with a higher-order control system, an output from a contact sensor at an arbitrary position on a robot is entered to a nearest actuator device in that a wiring route is the shortest (or joint driving is not interfered therewith). Then, in the actuator device, the output of the outside sensor is processed to remove noise and sensor information is computed, and the processed results are bus-transmitted to the higher-order control system together with a drive-control signal of the actuator and sensor information from sensors housed in the actuator.

Abstract: An auto-adjusting electric rear-view mirror includes at least two driving mechanisms for driving the rear-view mirror to deflect. The driving mechanisms are respectively coupled to servo control circuits that are further connected to sensor members. The servo control circuits are also coupled to a master control circuit that is further connected to an external controller. The sensor members can sense a positional variation of the rear-view mirror and send a feedback signal to the servo control circuits. The servo control circuits compare a signal from input ports thereof with the feedback signal, and output a control signal to the driving mechanisms according to the comparison result to drive position or negative rotation of the driving mechanisms, such that the rear-view mirror would automatically adjust its view angle to ensure driving safety.

Abstract: A system for control of a plurality of motors comprising: an inverter including at least three legs, with each leg including two series switching devices configured to receive a command from a controller. The system also includes a first motor operably connected to an inverter at a common terminal of the switching devices for a first leg and at a common terminal of the switching devices for a second leg; a second motor is operably connected to the inverter at the common terminal of the switching devices for the second leg and at a common terminal of the switching devices for a third leg. The outer terminals of the switching devices for each of the first leg, second leg and third leg are operably connected to the voltage source. The controller executes a process for controlling the first motor and the second motor with an error arbiter function.

Abstract: The invention regards a method for co-ordinating and synchronizing the movement of servo-assisted axes in machines and apparatuses which execute various industrial applications. The method in object is applied in the programming of electronic control systems using specific commands collected in a particular table subdivided into sectors and known as a “CAM TABLE”, according to a programming technique known as “CAMMING”. The fundamental characteristic of the devised method is given by the fact that inside the aforementioned sectors of the CAM TABLE are described, through the use of a special operating code comprising a plurality of operating instructions, both the position relationships and the virtual laws of motion which bind a first reference axis known as the “MASTER axis”, and each of the other axes known as “SLAVE axes” together.

Abstract: An inverter has a measuring part that measures an operating time such as the time interval from when a command to start a specified operation by an associated system until a signal indicating the completion of the operation is received. A comparing part compares this measured operating time with a threshold value stored in a memory and an abnormal condition is reported to a host system, depending on the result of the comparison.

Abstract: A motor controller provides pulse width modulated drive signals to a motor. A digital demand code for controlling motor speed is input to the motor controller. A dither generator generates a digital dither value, which an adder adds to the demand code to generate a dithered demand code. A position determining circuit determines a rotational position of the motor. A pulse width modulation controller generates pulse width modulated drive signals with duty cycles controlled as a function of a stored set of waveform coefficients, the dithered demand code, and the rotational position of the motor.

Abstract: A servo control device comprises a current supply unit for supplying a drive unit with a drive current for driving a target to be controlled, a first detector for detecting at least the drive current value, and a logical arithmetic section. The logical arithmetic section introduces a current command determining the drive current for controlling the drive speed of the drive unit to move the target to a predetermined position, and introduces the drive current value fed back from the first detector. The logical arithmetic section outputs the current command to the current supply unit after converting the current command by a digital logic process on the basis of the drive current value by using a custom LSI.

Abstract: A method for controlling the rotation speed of a slave drive is described, where a reference rotation speed and a reference position is provided to a controller. The controller determines an estimated acceleration curve for the slave drive based on an instantaneous rotation speed, an instantaneous position and a maximum rotation-speed-dependent acceleration of the slave drive. The estimated acceleration curve for the slave drive is hereby determined so that after a compensation time, the rotation speed of the slave drive is equal to the reference rotation speed and the position of the slave drive is also equal to an expected reference position, which is determined by the controller based on the reference position, the reference rotation speed and the compensation time.

Abstract: In a motor drive device having a plurality of driver units for driving motors and a command generator for giving a command to the driver units which are connected in serial communication, there is a communication section for setting up the communication formats corresponding to each of the driver units having different communication formats including data transmission speed from one another. Communication among the plurality of driver units with the respective communication formats and the command generator is carried out on a single serial bus.

Abstract: Disclosed is a method of driving a servo motor with a built-in drive circuit in which a common rectifying circuit is provided on a distribution board to which a plurality of the servo motors with built-in drive circuits are connected, to thereby achieve a reduction in size of each servo motor. In this method, there is used a common distribution board for distributing power to be supplied to a plurality of servo motors with built-in drive circuits and for distributing a communication line, an external communication signal and external input power are supplied through the distribution board.

Abstract: In determining a starting point of a motor of an electric actuator during its initialization procedure, when a rotation angle sensor detects pulse signals in a certain initialization pattern, power supply to the motor is stopped by the control of a motor drive circuit. This electrical control of motor rotation enables the initialization procedure of the actuator to be carried out without using mechanical restriction means for locking purposes, and the influence of variations in the deflection amount of any stoppers is eliminated. The precision in determining the starting point in the initialization procedure is thus improved.

Abstract: A driving apparatus which drives an object along a guide surface in X and Y directions. The apparatus includes a first actuator which drives the object in the X direction, a second actuator which drives the object in the Y direction, and a controller which controls the first and second actuators. The first and second actuators each have a reaction force counter which moves upon receipt of a reaction force generated in driving the object. In moving the object standing at a first position to a second position and stopping the object, the controller controls the first and second actuators such that acceleration periods of the two coincide and deceleration periods of the two coincide. Also, the object moves on a straight line connecting the first position and the second position.

Abstract: An aligning apparatus for a semiconductor device test handler is provided which reduces semiconductor device loading and unloading time. An exchange unit of the handler includes a pair of aligners which operate independently to continuously transfer devices to a test site of the handler for test, and then away from the handler upon completion of the test. Both horizontal and vertical movement of each of the aligners facilitates the loading and unloading of semiconductor devices. This aligning apparatus provides for simplified design and operation of the aligners, and improves loading and unloading speed, thereby enhancing test efficiency.

Abstract: A reference variable having a linear relationship with the angular position of a master axis is set, and a correspondence between this reference variable and the displacement of a slave axis is stored in a data table. One execution stage is specified by setting a starting reference variable and an ending reference variable from this data table. A desired sequence is assigned to a plurality of execution stages thus specified. The reference variable corresponding to the angular position of the master axis is determined, slave axis displacement data corresponding to the reference variable is read out, and the slave axis is positioned in accordance with the position of the master axis on the basis of this displacement data.

Abstract: Learning control is performed when carrying out processing by repeating instructions in a pattern cycle. Time/position converting means determines a positional deviation for a prescribed position with respect to a reference position, from the positional deviation determined by sampling, and the reference position output in synchronization with the drive of the servo motor. Corresponding correction data stored in the memory means is added to the positional deviation, and then the result is subjected to filtering processing to update the correction data corresponding to the position. Position/time converting means then determines correction data for the current sampling time, on the basis of the correction data corresponding to the position as stored in the memory means, and the detected reference position. This correction data is processed to compensate for dynamic properties, thereby deriving a correctional quantity, which is added to the positional deviation.

Abstract: A method for driving a plurality of actuators having an output stage having multiple channels, by way of whose channels boost currents are conveyed to the actuators. In this method, a check is made as to whether rising edges of multiple boost currents are present simultaneously (rising edge collision). Upon the identification of simultaneously present rising edges, at least one of the boost currents is conveyed in time-offset fashion to the associated actuator.

Abstract: A method of providing pitch torque compensation for planar motors in which pitch torque is not inherently provided includes calculating and summing a given set of forces ideally required to be applied by each forcer in the planar motor. Correction forces for each forcer are determined such that the net effect of the corrections is equal and opposite to the pitch torques previously determined.

Abstract: A system for control of a plurality of motors comprising: an inverter including at least three legs, with each leg including two series switching devices configured to receive a command from a controller. The system also includes a first motor operably connected to an inverter at a common terminal of the switching devices for a first leg and at a common terminal of the switching devices for a second leg; a second motor is operably connected to the inverter at the common terminal of the switching devices for the second leg and at a common terminal of the switching devices for a third leg. The outer terminals of the switching devices for each of the first leg, second leg and third leg are operably connected to the voltage source. The controller executes a process for controlling the first motor and the second motor with an error arbiter function.

Abstract: A method, apparatus, and system for controlling a reticle-masking blade in a photolithography system. A reticle-masking blade is supported with a reticle-masking blade carriage assembly. The reticle-masking blade carriage assembly is levitated at a position with respect to a reference frame and at an orientation with respect to the reference frame. Preferably, the reticle-masking blade carriage assembly is electromagnetically levitated. At least one of the position and the orientation of the reticle-masking blade carriage assembly is measured. At least one of the position and the orientation of the reticle-masking blade carriage assembly is controlled. Optionally, the reticle-masking blade carriage assembly is moved within a dimension within a range defined by the reference frame. The dimension can be two dimensions. The movement of the reticle-masking blade carriage assembly can be controlled.

Abstract: A motion control system comprises a motion unit having a motor connected to an encoder and an amplifier. The motion control system further comprises a scalable motion controller connected to the motion unit wherein the scalable motion controller receives signals from the encoder and outputs signals to the amplifier. The scalable motion controller comprises a plurality of dip sockets arranged for inserting and removing one or more motion control processors and a connector interface comprising a plurality of male and female connectors arranged for stacking a plurality of motion controllers.

Abstract: A numerical control apparatus for controlling a machine having two moving shafts placed in parallel and separate servomotors 6 and 10 for driving one of the shafts as a master shaft and the other as a slave shaft in the same direction and performing return to origin of the above-mentioned master shaft and the slave shaft according to a dog technique. The numerical control apparatus comprises position determination means 16 for determining the positional relationship as to whether or not the master shaft is ahead of the slave shaft, and return-to-origin management means 14 for performing return to origin of the above-mentioned master shaft and the slave shaft with one dog based on the determination result of the position determination means, so that the return to origin of the master shaft and the slave shaft can be performed with one dog and moreover the return to origin can be performed reliably at parallel positions.

Abstract: A device for supplying energy by means of a first DC voltage source e.g. in the form of a DC voltage bus, a drive system comprising several electric motors is connected to said DC voltage bus. The electric motors are comprised e.g. in a number of yarn feeding devices co-acting with a weft insertion system in a shuttleless weaving machine for producing a woven fabric having a multi-colour pattern. The electric motors operate with energy consumption function phases (start and acceleration) and with energy generating function phases (deceleration or braking). The first DC voltage source is associated with at least one second DC voltage source via a variable voltage converter.

Abstract: There are provided a drive unit 50 having a connection part 52 while driving a motor 61, a control unit 40 having a connection part 48 while receiving a command from a host controller 30 and sending a command to the drive unit 50, a rack for providing a back panel 80 having connected parts 84, 85 for removably making electrical connection to the connection parts 48, 52 while accommodating the control unit 40 and the drive unit 50, and a DC voltage conversion part 14 for converting a DC voltage into an output using an AC voltage as an input while being provided in the back panel 80, and the drive unit 50 is provided with a capacitor 58 while being connected to an output of the DC voltage conversion part 14, and an inverter 59 for converting the DC voltage into an AC voltage based on the command.

Abstract: A servo controller carries out tandem control in which one driven body is driven by a plurality of motors. Each motor is provided with a position control section, a velocity control section, a current control section, a current amplifier, and a velocity detector. This tandem control is carried out by using a velocity integrator sharing unit for equalizing integral values of integration elements of the velocity control sections. The same position command is inputted to control systems for the plurality of motors to undergo tandem control. The velocity integrator sharing unit keeps the integral values of the integration elements of the velocity control sections substantially equal.

Abstract: A data table stored in a numerical controller associates motors controlled by the numerical controller with information from sensors used by the motors. When the numerical controller is turned on, the contents of the data table are sent from the numerical control section to the motor control section. The motor control section controls each motor by using information from the sensors associated with the motor in the data table.

Abstract: An operation confirming method capable of making, in order to enhance an operation program correction efficiency, an operation path at an operation confirming time (teaching mode) identical with that at an actual job time (play mode) as much as possible; and a control device therefor. The method comprises the steps of inputting respective shaft operation instruction values (&ohgr;j) based on an actual operation speed to a mechanical simulator-carrying low-speed instruction converter (7), and instructing to a servo controller unit (4) a quantity (&ohgr;ij) (=&ohgr;sj/P), obtained by dividing an output (&ohgr;sj) from the mechanical simulator by a specified positive real number P at the low-speed instruction converter, as respective shaft operation values N times (N; maximum natural number not exceeding the real number P).

Abstract: Disclosed is a method of driving a servo motor with a built-in drive circuit in which a common rectifying circuit is provided on a distribution board to which a plurality of the servo motors with built-in drive circuits are connected, to thereby achieve a reduction in size of each servo motor. In this method, there is used a common distribution board for distributing power to be supplied to a plurality of servo motors with built-in drive circuits and for distributing a communication line, an external communication signal and external input power are supplied through the distribution board.

Abstract: There is provided a serial transmitting section for serially transmitting a command frame 100 which is sent from a host controller 1 to a positioning type servo amplifier 30 and a command follow-up type servo amplifier 50. In the command frame 100, an information section, into which information to be transmitted is inputted, has discrimination data for showing a selection between the positioning type servo amplifier 30 and the command follow-up type servo amplifier 50. In the positioning type servo amplifier 30 and the command follow-up type servo amplifier 50, there is provided information reading section for reading the content of an information section after the discrimination data of the command frame 100 by the discrimination data of the command frame 100.

Abstract: A method of transitioning a motor from a torque control mode to a speed control mode includes providing the motor with a torque command to eliminate torque holes at the transition. A speed controller generates a speed error, which is used to generate two torque terms. The first torque term is proportional to the speed error, and the second torque term includes the integral of the speed error. A third torque term comprises a feedforward torque, which is added to the first two torque terms to generate the torque command.

Abstract: When driving a plurality of paralleled feed drive mechanisms individually by servo motors (105, 106), torque of the servo motors (105, 106) is detected, and in dependence on a difference therebetween, a position command of servo motor (106) at a slave side is corrected, so that torque of the slave side servo motor (106) is matched to to torque of servo motor (105) at a master side.

Abstract: A motion control system comprises both a stepper motor and a DC motor. The motors are coupled, and may be operated independently or in concert for various scan types. The stepper motor may be used as an encoder for measuring the position of the mechanism.

Abstract: A vibration isolation system is provided. A frame is provided. A stage supported by the frame is provided. The stage comprises a stage body supported by the frame, a first isolation stage supported by the stage body, a first stage vibration isolation device that reduces vibrations transferred from the stage body to the first isolation stage, a second isolation stage supported by the first isolation stage, and a second stage vibration isolation device that reduces vibrations transferred from the first isolation stage to the second isolation stage.

Abstract: A power conversion device including, a power converter controlling a motor in variable speed control, first to second control circuits outputting first to second control signals, first to second detectors detecting a state of the power converter and outputting first to second detection signals to the first to second control circuits, a switch receiving the first to second control signals and outputting one of the control signals to the power converter, and a selection circuit outputting a changeover selection signal to the switch for outputting the second control signal instead of the first control signal, when the switch has outputted the first control signal and the first control circuit fails.

Abstract: There are provided a positioning-controlling apparatus and a positioning-controlling method in which a rotary encoder (2) detects the Z phase before the subject (4) is return to the origin which is the position of the Z phase detected by the linear encoder (5). The driving mode of the servo motor (1) is switched from rectangular waveform pulse driving to sine waveform pulse driving upon the detection of the Z phase by the rotary encoder (2). The subject's moving direction for returning to the origin may be previously specified, and in which the detection of the ON state of the origin sensor (11), the detection of the Z phase by the rotary encoder (2), and the detection of the Z phase by the linear encoder (5) are done in this order, while the subject (4) is being moved in the above specified direction. Alternatively, the rotary encoder (2) may detect the CS phase instead of the Z phase.

Abstract: The present invention relates to a flexible and compact motor control module based on the Controller Area Network (CAN) communication network. More specifically, the present invention relates to a motor control module which is based on the ISO11898 standard Controller Area Network (CAN), recognized for its suitability in the communication of intelligent sensors and actuators, and also capable of obtaining the location, speed and torque control commands of a motor and executing digital control functions irrespective of motor's type and power consumption, transmitting feedback data.

Abstract: A precision positioning tilt device includes an inner tilt frame directly actuated by a first motor so as to enable the tilt frame to pivot about a frame axis and a platform removably mounted on the inner tilt frame and directly actuated by a second motor so as to pivot about a platform axis extending perpendicular to and coaxial with the frame axis

Abstract: A precision positioning tilt device includes an inner tilt frame directly actuated by a first motor so as to enable the tilt frame to pivot about a frame axis and a platform removably mounted on the inner tilt frame and directly actuated by a second motor so as to pivot about a platform axis extending perpendicular to and coaxial with the frame axis.

Abstract: A motor driving apparatus is basically composed of a driving circuit for driving a plurality of loads contained in a plurality of motors, and a control circuit for controlling the driving circuit to sequentially drive the plurality of the motors. The driving circuit has at least two channels which are controlled by the control circuit concurrently with each other. Each channel is controlled by the control circuit such as to selectively drive the loads. The channel is provided with at least (n+1) number (n: integer of 2 or greater) of output terminals to connect at most n number of the loads. The control circuit controls the driving circuit to perform an intra-channel driving mode in which one pair of the output terminals are selected from one channel and allocated to drive one load, and an inter-channel driving mode in which another pair of the output terminals are selected from two channels and allocated to drive another load.

Abstract: A system for allowing a wide selection of components to affect a desired result in the positioning business. Up to nine axes of coordinated motion are offered each of which may use a servomotor, a single or double rod air cylinder. The control for the system is a series of digital commands that cause the cylinder to accelerate, decelerate, maintain a given velocity, stop or pause and repeat a series of commands. It uses a low power servo system which, when activated, opens an air valve to an air cylinder which then moves until the valve actuator is turned off by the cylinder thus causing the air cylinder to follow the lower power servo system.

Abstract: The invention makes it possible to execute the pre-control and the fine interpolation in the drive (A) in the fast drive clock (tDR) with a slower path pre-setting in the clock (tNC) of the NC. For this purpose, in each NC clock (tNC) a setpoint speed value (nNC*) and the P gain (kP) of the NC position controller (L_NC) and the desired axle speed (nNC) and the average axle speed (nNCMW) during the last NC position controller clock are transferred from the NC to the drive. From this information, polynomial segments of the third degree are in each case generated on the drive side, valid for the duration of an NC position controller clock (tNC). They are constructed in such a way that the speed at the polynomial transitions is constant. A variable component of the position polynomial is determined as the fine position component xF, with which the setpoint position values are finely interpolated in the drive.

Abstract: In the movable shaft (32) constructed by a plurality of motion modules (31), since the moving command based on the machining program (1) in unit of the movable shaft like the prior art is converted into moving commands of the motion modules (31) to control this movable shaft (32), the machining can be executed if the machining for the movement of the movable shaft is defined like the machining program in the prior art. Also, assignment of a plurality of motion modules (31) to the movable shaft (32) can be set arbitrarily and then the pulse distribution to the movable shaft (32) is executed in response to this assignment. In addition, if the failure is caused in the motion module (31), such motion module (31) can be disconnected.

Abstract: A robot distributed control system includes a host controller issuing a first command and a plurality of communication controllers connected to the host controller in a tree-structured manner. The communication controller obtains a control parameter by interpreting the first command, or issues a second command by executing an application program in response to the first command and then obtains a control parameter. In either case, the control parameter is output from the communication controller to the motor controller by which a plurality of motors are controlled.

Abstract: A servo control device 10 connected to servo motors 21 to control them includes a digital logic circuit 11 having a predetermined bit width. The digital logic circuit 11 includes at least one pair of parallel arithmetical circuits 11a, 11b.

Abstract: A stage apparatus is disclosed, which includes first and second movable members movable in directions parallel to a reference plane, a first actuator for generating a force between the first movable member and the second movable member, a second actuator for generating a force between a structure defining the reference plane and the second movable member. A first control system controls the position of the first movable member, using the first actuator, and a second control system controls the position of the second movable member, using the second actuator in synchronization with the control of the first control system.

Abstract: A scanning type exposure apparatus includes a substrate stage for holding a substrate and for moving the substrate in at least one of a scanning direction and a rotational direction, an original stage for holding an original and for moving the original in at least one of the scanning direction and the rotational direction, an optical system for transferring a pattern of the original onto the substrate, and a controller for controlling movements of the substrate stage and the original stage. The controller synchronously controls the substrate stage and the original stage in the scanning direction, and independently controls the substrate stage and the original stage in the rotational direction.

Abstract: In a servomotor drive control system comprising a command unit such as a numerical control unit, a plurality of drive control units for controlling drive of servomotors, a first communication line for transmitting data such as a control command, in a direction of the above-mentioned plurality of drive control units from the above-mentioned command unit, and a second communication line for transmitting data such as detection data, in a direction of the above-mentioned command unit from the above-mentioned plurality of drive control units, wherein data is transferred between the above-mentioned plurality of drive control units using the above-mentioned communication lines, whereby the above-mentioned servomotors are synchronously controlled, the communication period between the above-mentioned drive control units is set to one-nth of the communication period of the above-mentioned command unit (n is an integer).

Abstract: An electrical motor-driven lathe includes a work spindle mounted in and rotatable relative to a headstock about a first axis. A compound slide is mounted to be movable along a guideway that extends in a longitudinal direction parallel to the first axis. A feed shaft is mounted to be rotatable relative to the headstock about a second axis parallel to the first axis, and is coupled to the compound slide to transmit a predetermined rotational force to the compound slide so as to move the compound slide along the guideway to a predetermined position. A first servomotor is disposed to drive the work spindle to rotate about the first axis at a predetermined velocity. A second servomotor is disposed to deliver the predetermined rotational force to the feed shaft. A controller is disposed to control the first and second servomotors.

Abstract: A servo controller carries out tandem control in which one driven body is driven by a plurality of motors. Each motor is provided with a position control section, a velocity control section, a current control section, a current amplifier, and a velocity detector. This tandem control is carried out by using a velocity integrator sharing unit for equalizing integral values of integration elements of the velocity control sections. The same position command is inputted to control systems for the plurality of motors to undergo tandem control. The velocity integrator sharing unit keeps the integral values of the integration elements of the velocity control sections substantially equal.