Abstract: Response delay error is calculated from an instructed position based on a position of a moving body and a position instruction to detect reversal of a servo motor and to compare response delay error produced in reversal of the servo motor and threshold value. In the case where response delay error is a threshold value or greater, the value of the already determined compensation torque is updated into a value that enables the response delay error to be decreased, and allows the moving body to carry out circular arc complementary feed motion under the same condition to compensate, based on the updated compensation torque, instructed torque for instructing the servo motor when reversal of the servo motor is detected. Compensating the instructed torque and updating the compensation torque is repeated until the response delay error is at the threshold value or less. Thus, a reasonable compensation torque is determined such that response delay error at the time of reversal of the servo motor is minimized.

Abstract: The present invention relates to an automatically reconfigurable contour checking fixture for comparing a component to a programmed contour. The fixture comprises a horizontal support table, having a length and width, wherein a drive rack runs along its length. The fixture also includes a plurality of stations positioned at intervals along the length of the support table, each of the stations including an artificial template member, and a multi-service drive assembly which drives the artificial template member of each of the plurality of stations to a respective designated point along the programmed contour. A computer is in communication with the multi-service drive assembly, communicating positional instructions such that the artificial template member of each of the plurality of stations conforms to the programmed contour.

Abstract: A positioning apparatus includes a movable stage, a first linear motor for moving the stage in a predetermined direction, a platform for supporting the first linear motor, and an inertial force application mechanism for applying a force for canceling a force acting on the platform, which is generated when the stage is moved by the first linear motor. The inertial force application mechanism includes amass body, a guide for supporting and guiding the mass body, a second linear motor for moving the mass body, and a controller for controlling the second linear motor. Since the inertial force application mechanism of the positioning apparatus prevents transmission of vibration generated by an increase in an exciting force of the stage, rapid and precise positioning can be performed.

Abstract: A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

Abstract: A method for determining the active power (P) of asynchronous electric motors of winning and conveying equipment in underground mining. According to the invention, particularly easy and accurate determination of the instantaneous active power of the motors is obtained by storing the individual motor characteristic (P(n); M(n)) of each motor in a computer, by detecting the instantaneous speed (n, n') of the motor with the aid of a tachometer and by comparing this speed with the characteristic stored in the computer, the active power being derived from the torque value or power value assigned to the detected instantaneous speed, as stored in the computer. This particularly rapid and simple calculation of the power value does not require any readings to be taken at the power supply to the motors.

Abstract: In a servo system having a controller such as a numeric controller for multi-axes control and a plural number of drive-unit-built-in servo motors, a branching circuit (2) is provided between the controller and the drive-unit-built-in servo motors to communicate through branching of the signals from the branching circuit (2) to the drive-unit-built-in servo motors (3). A constant voltage is output from the drive units and charged on the resistors (14) in the branching circuit (2) with resistance values different from one another in each shaft and the shaft numbers are identified through the detection of the currents flowing out at that time by the drive units in the drive-unit-built-in servo motors (3). The servo system realizes the reduction in wiring, the enhanced reliability and the elimination of hardware settings.

Abstract: A guideless stage for aligning a wafer in a microlithography system is disclosed, and a reaction frame is disclosed which isolates both external vibrations as well as vibrations caused by reaction forces from an object stage. In the guideless stage an object stage is disclosed for movement in at least two directions and two separate and independently movable followers move and follow the object stage and cooperating linear force actuators are mounted on the object stage and the followers for positioning the object stage in the first and second directions. The reaction frame is mounted on a base structure independent of the base for the object stage so that the object stage is supported in space independent of the reaction frame. At least one follower is disclosed having a pair of arms which are respectively movable in a pair of parallel planes with the center of gravity of the object stage therebetween.

Abstract: The network (N) links control modules (CM) of a device (M) on the basis of a common instruction and of a quantity measured by a sensor (S) associated with a measurement module (MM). The instruction is formulated in the measurement module and broadcast over the network by the measurement module together with the measurement value.

Abstract: Synchronization of the drive bars of a servo transfer system is safely restored, while avoiding mechanical damage as much as possible.A synchronization position C for all the drive bars is determined from the respective present positions B of the drive bars and the respective deviations of the present positions B from the synchronization position C are determined. Then, servo motors for all the drive bars are so controlled that the drive bars move the distances corresponding to their respective deviations within the same period of time.

Abstract: A method and apparatus for detecting an aberrant velocity of a motor used to drive an element in a plastics processing machine, such as an injection molding machine, for example. The velocity of the motor is detected by a first sensor and a machine parameter associated with the machine operation is provided. A velocity limit is determined based upon the machine parameter and an error signal is generated when the motor velocity exceeds the velocity limit by more than a predetermined tolerance value. Preferably, the machine parameter comprises the position of the element driven by the motor, which is sensed by a sensor, such as a linear displacement transducer. The velocity limit can be based upon this measured element position as well as data entered for the particular machine, such as a minimum element position, a maximum element position, and a maximum motor velocity, such that a desired motor operating envelope is defined.

Abstract: A master-slave synchronization control system is constructed having two drive systems for driving respective ones of two controlled objects capable of being operated individually, wherein the drive system having the slower response is adopted as the master and the drive system having the higher response is adopted as the slave. The drive system of the master, which has the elements of a velocity control system that operates to follow up an entered velocity command value, outputs velocity information and position information of its controlled object. The drive system of the slave has a velocity control system in which the velocity information is adopted as the velocity command value, and a position compensating loop in which the position information is adopted as a position command value. The position compensating loop adds the position compensation value to the velocity command value as a correction signal.

Abstract: An integrated motion control device having a controller mated to a motor body with a set of rigid, electrically conductive signal pins. The motor is direct-current and preferably brushless, and has Hall sensors within the motor body and an encoder at a back end for precisely determining rotor position. Signals from the Hall sensors and encoder are fed to a microprocessor contained in the controller and including a PID filter for servo control of the motor. The controller contains an amplifier for driving the motor and a power supply for providing appropriate levels of DC power to various elements of the controller and motor. All electrical signals between the motor and controller are transmitted via the pins, eliminating wiring harnesses of the prior art and related signal noise and wiring problems. The motor body and controller are affixed with a few screws, allowing the controller to be removed from the motor while the motor remains connected to an application.

Abstract: A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

Abstract: A scan-projection type exposure apparatus quickly suppresses disturbance in synchronization between a wafer stage and a reticle stage, and enables high-precision pattern exposure. This apparatus employs a master-slave control with a wafer-stage side as the master with a reticle-stage side as the slave, so as to correct a target value of a position control system of a rough-motion stage or that of a position control system of the reticle stage by using motion-mode errors e.sub.g, e.theta..sub.x and e.theta..sub.y in a one-to-one correspondence with a disturbance occurring to the rough-motion stage of the wafer stage due to movement of a fine-motion stage of the wafer stage.

Abstract: An image forming apparatus including a status detecting unit for detecting a status of each portion of the apparatus, a driving unit for driving each portion of the apparatus, an input unit having an input data storing unit for storing input data detected by the status detecting unit, an output unit having an output data storing unit for storing data to be output for driving the driving unit, a controlling unit connected to the input data storing unit and the output data storing unit for controlling the whole image forming operation of the apparatus including a control of the driving unit, in accordance with a status detected with the status detecting unit or a predetermined rule, a network for transferring data between the controlling unit and a plurality of the input or output units, and a timing control unit for controlling the timing of data transfer over the network, wherein the timing control unit includes a plurality of timing control modes and selects one of the timing control modes in accordance with

Abstract: A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

Abstract: An improved servo control device and method for a VCR that minimizes jitter caused in a reproducing mode of the VCR (reproducing VCR) when it reproduces a video signal recorded by another VCR (recording VCR). A recording characteristic of the recording VCR (such as a duty interval of horizontal synchronous signals contained in the video signal) is used along with one or more reproducing characteristics (such as speed and phase) of the reproducing VCR to control a rotation speed of the reproducing VCR's drum motor.

Abstract: A method and apparatus for controlling the output to a drive for moving a workpiece and/or tool along a defined path in a machine tool. The drive output can be modified according to a periodic controlling variable or a periodic disturbance variable. The defined path of the workpiece is divided into equidistant subdivisions and a control deviation corresponding to each subdivision of the defined path is determined and stored. A control variable is derived from the control deviation and utilized to control the drive output.

Abstract: A servo device which simultaneously controls plural servo systems, using a digital signal processor (DSP). The servo device includes plural servo systems, plural control subjects, and plural sensors which determine control quantities of the respective control subjects. The servo device also includes a calculation processing device which finds operating amounts of the respective control subjects from the control quantities which have been detected. The calculation processing device measures the gain of each servo system, and during the gain measurement of a given servo system, drops the control band of other servo systems, or sets the other servo systems to OFF or HOLD.

Abstract: In a storage system using multiple disk drives, the disk drive spindles are rotated at the same frequency and at a predetermined phase relationship. A phase angle, measured as the difference between an index mark recorded on the disk and the disk's read head, is used to control the spindle rotation speed. Each of the disk drives are first independently frequency locked to a target frequency, and once frequency locked, each disk drive is phase locked in relation to one another. In the phase locking process, each disk generates a synchronizing signal for synchronizing the rotation of the disks to a predetermined phase relationship. If any one of the disk drives becomes inoperable (due to a failure or "hot-swapping"), the other disk drives remain synchronized since the synchronizing signal is not lost.

Abstract: A multi-blade wafer handling device is provided to concurrently move two or more wafers through a vacuum processing system. The wafer handling device includes two motors magnetically coupled into a transfer chamber to move an arm assembly connected to a dual blade assembly. The preferred wafer handling device includes a first rotating member operated by the first motor, a second rotating member operated by the second motor, a blade assembly having at least first and second wafer blades wherein the wafer blades are co-planar, and an arm assembly connecting the first and second rotating members to the blade assembly.

Abstract: The present invention provides a robot assembly for transferring objects, namely substrates, through a process system. A robot linkage is provided to a multi-plane, multi-arm robot assembly driven by two motors. In one embodiment, a linkage is provided which is driven by two magnetic retaining rings. In another embodiment, a linkage is provided which is driven by three magnetic retaining rings, two of which are coupled to the same motor. Both embodiments enable a substrate shuttle operation to be performed wherein a pair of substrates can be shuttled into and out of a selected chamber without having the robot assembly rotate in the transfer and by actuation of only two motors.

Abstract: A power drive device is disclosed that includes a motor, a control device coupled to the motor, and a rotatable reference axle member rotatably interlocked with the rotation of the motor. A first detection member detects a first phase and a third phase of rotation of the reference axle member wherein the first phase corresponds to a rotation starting position of the reference axle member and the third phase corresponds to a near completion position of the reference axle member. The device also includes a second detection member that detects a second phase and a fourth phase of rotation of the reference axle member, wherein the fourth phase of rotation corresponds to a rotation completion position of the reference axle member. The control device drives the motor in accordance with the detected phases of the first and second detection members, and in particular, can control the velocity of the motor and the timing of the operation of the motor in relation to a second motor.

Abstract: A wafer prober for testing uncut die of a semiconductor wafer has an alignment accuracy in the X-Y plane within the sub-micron range. The wafer, held by a chuck, is positioned in the X-Y plane by using a pair of linear servo motors each driven by a servo drive unit providing drive control, monitoring and diagnostic functions. Positional information is obtained from a pair of linear encoders, one along each drive axis. Positional information is also obtained from a pair of resolvers, one for the vertical axis and the other for rotational position about the vertical axis. Ways and runner blocks are used to provide substantial downforce capability and high speed translational movement. In addition, the present invention uses a general purpose computer providing for an on-board controller card interfacing with the servo drives via a fiber optic coupler.

Abstract: In a displacement machine for compressible media having at least two rotors (14a-c) which are configured as profiled bodies and whose profiles engage with one another in the manner of gearwheels during rotation, the individual rotors are respectively driven by their own electric motors (9a-c) and are kept synchronous in rotational speed and angular position by electronic closed-loop and/or open-loop control units (1; 25a-c) in accordance with the transmission ratio of the displacer unit stage. The electronics can be employed for monitoring further operating data of the pump and also for matching the pump output by changing rotational speed. It can also be used as an overload protection. The rotational speeds and rotational attitudes of the rotors are controlled individually and independently of one another, the required attitude values being specified to the individual control units (25a-c) by means of a main control unit (1).

Abstract: A small sized, low cost plate conveyance robot includes first and second driving motors on first and second link mechanisms respectively. The rotation angles of three driving motors are simultaneously and sequentially controlled to allow the third arm to make a rectilinear motion by a predetermined distance L in a fixed direction in a horizontal plane in order to take a plate material to be conveyed into the suction hand portion of the third arm as well as to take out the plate from the suction hand portion of the third arm after finishing the given conveyance operation.

Abstract: An electronic memory seat module having integrated sensors is disclosed. The module is mounted on a seat frame which, in turn, is mounted on a fixed base member. Position sensors are mounted in or on the module. Mechanical linkages are provided between adjustable members belonging to the seat frame and the sensors. The linkages translate movement of the structural members into a motion which can be sensed by the sensors. This sensed position can then be stored by an electronic memory unit for later recall.

Abstract: Automated diagnosis of drive trains having electrically operated components based upon the ability of a first servo motor to rotate a second servo motor when both servo motors are selectively coupled to the drive train. Beneficially, the status of the drive train is sent to a remote location using a data link.

Abstract: A controlled method to automate a power train transmission of a vehicle with a manual gearbox considering all moments of inertia in clutch actuations through dual servomotors, executing controlled up and down gearshifts automatically. The control system encompasses a central microprocessor controller unit that executes functions based on special equations that reflects instantaneous moments of inertia wherein gearshifts are decided based upon the vehicle's instantaneous speed and the increase or decrease of motor RPM, whether it is gas pedal sensed or road inclination derived. A fuel flow control is activated in each gearshift to insure RPM control within the next gear engaging range.

Abstract: A motor control system for individually feedback-controlling a plurality of servomotors includes: a plurality of motor drive devices for converting DC power into AC power to drive the servomotors; current detecting devices for detecting the current value of the AC current to feed it back to the motor drive devices; and an A/D converter for converting the output signals of the current detecting devices into a digital signal. The motor drive devices, current detecting devices and A/D converter are accommodated in a casing for a group of servomotors, and the output terminals of the current detecting devices in the casing are connected in parallel to the input terminal of the A/D converter, so that the A/D converter is used for all of the current detecting devices in the casing. The resultant motor control system is small in the number of components, and accordingly in the number of wiring conductors, and is simple in construction and accordingly in adjustment work.

Abstract: A movable stage apparatus and an exposure system including a moving stage apparatus, includes a movable member capable of being driven by a driving mechanism, and first and second sets of fluid bearings. The first set of fluid bearings supports the movable member. The second set of fluid bearings is connected to a plurality of driving elements. The plurality of driving elements are connected to the movable member and are displaceable in a direction in which the movable member is supported by the first set of fluid bearings. The second set of fluid bearings supports the movable member. Also provided is a controller for applying a voltage to the plurality of driving elements so as to compensate for the postutre of the movable member when the posture of the movable member changes in response to being driven by the driving mechanism. The system further includes an exposure apparatus for exposing an object to be exposed which is mounted on the movable member.

Abstract: A threaded ball screw is stationarily non-rotatably mounted in a machine tool to extend parallel to the line of action traversed by a carriage. A pair of threaded ball nuts are laterally restrained in and mounted for free rotation thereof in a drive mechanism of the carriage and threadably and concentrically engage the ball screw in laterally spaced apart co-axial relationship therealong. A pair of digitally controlled electric drive motors are mounted in the carriage for individually imparting rotational torque to the nuts. A conventional programmably CNC controller is programmed to synchronously control both motors for causing the ball nuts to conjointly produce computer controlled linear motion and positioning of the carriage along the stationary ball screw, and to develop anti-backlash pre-load forces between the ball nuts relative to the ball screw.

Abstract: A drive unit capable of maintaining the stability of driving speed with respect to the driven part in which the motor is not used at a low drive efficiency.

Abstract: The present invention provides a circuit for correcting a horizontal state of a disk transferring device including chucks for clamping a selected disk from a cartridge, a chuck transferring body for transferring the chucks right or left, a lower frame combined with the chucks and the chuck transferring body to move them left or right, and first and second frames formed integrally with the chucks, the chuck transferring body and lower frame and fixedly connected to belts to move the chucks, chucks transferring body and lower frame up and down by the belts.

Abstract: Multiple motion controllers for controlling servo motors are connected by a digital communications link so that controlled axes of the motion controllers may be slaved together regardless of their physical proximity. A given controller broadcasts position or command signals on the communications link in response to a request report message from any other controller. A second request report message may stop the broadcasting to conserve link capacity. Time shifting implicit in the link messages is corrected by estimating the velocity of the master axis and extrapolating the position to the local axes' time of updating.

Abstract: A positioning table device includes a table, a guide for guiding movement of the table in a predetermined direction, a drive device for moving the table along the predetermined direction, the driving device including a permanent magnet provided on the table and a plurality of coils provided along the predetermined direction, a position detecting device for detecting a position of the table in the predetermined direction, a designating device for designating an energization electric current in accordance with an output of the position detecting device, a coil selector for selecting a coil, of the coils to be energized, in accordance with the position of the table in the predetermined direction, a correcting device for correcting the energization electric current designated by the designating device when the coils to be energized are changed by the coil selecting device, such that a change in coil energization electric current is slowed whereby combined energization electric currents applied to the coils are ma

Abstract: A positioning method and positioning system wherein a driving device, for moving a movable table on a rough-motion stage by a small amount, is alternately controlled through a pair of switchable control systems. The amounts by which the table is driven are initially adjusted to the same amounts by the pair of control systems when the paired control systems are switched.

Abstract: An electrical drive system for angular positioning of one or several rotating and/or tilting machine components and equipment components, particularly of printing machines, including at least one electric motor having a rotor designed for rigid and direct coupling to the component, further including by one or several angle encoders for registering the angular motion of the rotor of the electric motor and/or the component, a signal processing module which receives the actual angle position signals from the angle encoder or encoders and which also receives the setpoint data for comparison with the actual data, and a power amplifier controlled by the signal processor and used for driving the electric motor.

Abstract: In the tandem control method designed for driving one axis using a main motor and a sub motor, a speed difference between the main motor and the sub motor is calculated, and a value for correction of torque is obtained based on this speed difference. Then, the value for correction of torque is added to respective torque commands of both the main motor and the sub motor, thereby making it possible to suppress vibrations occurring in the transmission mechanism. Furthermore, the sign of the torque command generated from a speed control section is detected, whereby a positive or negative torque command is suppressed in accordance with its sign, and the current control section of each motor is always supplied with a one-directional torque command whose direction differs from that of the other motor. Thus, it becomes possible to suppress the occurrence of backlash even when a large torque is applied. Furthermore, the position control is performed by the motor corresponding to the position command.

Abstract: A positioning apparatus and method for synchronously controlling a plurality of motors, such as servo motors, and exercises synchronous control by means of only motors without using any mechanisms, such as coupling shafts, clutches, gears and cams. A controller has a virtual drive capability which provides a virtual cam and virtual clutch capability on the basis of stored values, permitting continuous and repeated operation of a single cycle of positioning with respect to changes in input axis position address data without recalculation of command addresses in real time.

Abstract: A system (200) provides control of speeds and positioning of linear or rotary actuators (14A, 14B, 342A, 342B), and the system (200) may be used to control both speeds and steering of a conveyance (10). A transducer sensitivity control apparatus (202) provides selective control of sensitivity of transducers (28A, 28B) in an X-Y controller (26). The X-Y controller (26) delivers voltages to a steering sensitivity control apparatus (156, 180) that decreases, differences as an inverse and nonlinear function, in the two voltages supplied by the X-Y controller (26), thereby reducing steering sensitivity of the conveyance (10), increasing controllability in turns by decreasing sensitivity of joystick (34) movement, and/or automatically slowing the conveyance (10) when making sharp turns.

Abstract: In a linear feedback servo control system, the motion profile for each axis is pre-filtered before it is introduced to the servo loop for that axis. The motion profile is pre-filtered by a filter having an inverse amplitude response to the amplitude response of the servo loop. Therefore, the composite amplitude response of the filter/servo loop combination is approximately ideal for all relevant frequencies. The pre-filtering is done using constant delay filters, whether high pass, low pass or hybrid, that exhibit a phase lag corresponding to a time delay that is essentially constant at all relevant frequencies. Each axis of synchronized motion is pre-filtered with constant delay filters having the same time delay constant, but selected so that the motion of each axis provides sufficient accuracy within the intended bandwidth of that particular axis. Consequently, while phase lag is not zero, there is essentially constant delay for all axes at all relevant frequencies.

Abstract: Functional element units are fixedly mounted on a circuit board, and unit-side connectors are electrically wired to base-board-side connectors. A predetermined wiring circuit has been formed on the circuit board, with the result that the wiring work is simplified as much, and the disused connectors can be disposed of, so that the number of connectors is reduced. In addition, the electrical connection of the functional element units through those connectors, provides the following effects: the wiring is orderly and reasonable, the number of wires is small, the occurrence of wiring errors is prevented, and in addition the application of external noises to the wires is prevented. That is, the operation of the motor control system high in reliability.

Abstract: A control for machine members propelled at plural points along their length to move linearly transverse to member length determines and eliminates skew of the driven points. Skew is determined from position indicated by position transducers associated with the driven points. Various types of position transducers are accommodated, including encoders having outputs from which member position can be determined only with reference to marker outputs of the transducer. For such encoders, the control effects velocity controlled motion to detect position. Skew is eliminated by relatively moving the driven points by the magnitude of the skew.

Abstract: An electrical drive system for angular positioning of one or several rotating and/or tilting machine components and equipment components, particularly of printing machines, including at least one electric motor having a rotor designed for rigid and direct coupling to the component, further including by one or several angle encoders for registering the angular motion of the rotor of the electric motor and/or the component, a signal processing module which receives the actual angle position signals from the angle encoder or encoders and which also receives the setpoint data for comparison with the actual data, and a power amplifier controlled by the signal processor and used for driving the electric motor.

Abstract: An industrial robot is provided with a plurality of elements articulated to each other, whose rotation is driven by respective electric motors by reduction gear units which are integrated in the structure of these elements.

Abstract: A plurality of step time tables consisting of a sequence of step times defining intervals between steps and thus a velocity profile to be executed by a stepper motor are stored in a first memory. A step table defining a plurality of identical sequences of excitation pattern for driving a stepper motor is stored in a second table. Identical DMA channels output the step times to a timer and the plurality of exitation patterns to a buffer. The timer measures the duration of the step times and when each step time expires generates a trigger signal which initiates the transfer of the next step time and next excitation pattern through the respective DMA channels. The buffer includes a control register which selects one excitation pattern from the plurality of excitation patterns output from the step table to be output for control of a selected one of a plurality of motors connected to the buffer.

Abstract: A control system having multiple control apparatuses connected by a data transmission path. Each of the control apparatuses comprises a communication control section, sequence control section, and positioning control section. The positioning control section of each control apparatus has a memory. A position controlling program is stored in the memory of a first one of the control apparatuses. The position controlling program has codes, each of which to be used by a positioning control sections of a particular control apparatus, for controlling its respective servo motor. The codes of the position controlling program are transmitted from the first control apparatus to another control apparatuses to cause the positioning control section of that apparatus to control its respective servo motor in accordance with the codes.

Abstract: A method and an apparatus for controlling the motors for moving a tool, comprising a control cycle with the steps of calculating first and second parameters indicating the speed to be imparted to the motors to travel at a pre-established nominal speed along first and second segments sequential to each other, and of calculating the absolute value of the difference between first and second parameters. If the difference is less than a pre-established maximum value, the motors are commanded to travel along the first segment at the pre-established nominal speed and are then commanded to travel along the second segment at the pre-established nominal speed.

Abstract: A stage positioning apparatus including a stage and a servo control system. The servo control system includes a compensation circuit. The compensation circuit determines the cosine of the angle between the off-axis drive bar and the direction of travel. A voltage, proportional to the cosine, is multiplied by the on-axis drive error signal to develop an off-axis compensation voltage. Each drive's new error signal is compensated by its respective off-axis compensation voltage.