Abstract: An electronically commutated motor (ECM) includes windings, a power switch, an infrared transceiver and an electromagnetic shield. The power switch is configured to provide pulse width modulated (PWM) power signals to the windings and to generate a substantial level of electromagnetic noises at PWM frequencies during its switching operation. The infrared transceiver is configured to communicate with an external device using infrared signals and convert electrical signals from and to infrared signals that carry data. The electromagnetic shield is configured to substantially shield the infrared transceiver from the electromagnetic noises of PWM frequencies from the power switch.

Abstract: A surge current protection circuit, has a control unit having an output end, a photoelectric coupling and driving circuit, a silicon symmetrical switch having a control end, and a current-limiting resistor. The current-limiting resistor and the silicon symmetrical switch are parallel connected altogether and then serially connected to a load and an AC input, and the control end of the silicon symmetrical switch is connected to the output end of the control unit via the photoelectric coupling and driving circuit. The invention features low production cost, high reliability and improved power efficiency, and is capable of effectively suppressing surge current.

Abstract: A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.

Abstract: An optical entire-circumference encoder includes a plurality of rotation slits provided to transmit light at an equal pitch radially around a rotation axis as a center in a rotation track. A plurality of fixed slits is provided to transmit light at an equal pitch in a plurality of regions radially around the rotation axis as the center in a fixed track. A plurality of light receivers is disposed in a vicinity of the rotation axis to receive a light guided by the light guide in the regions respectively. The fixed slits in one of the regions and the fixed slits in another region adjacent to the one of the regions among the regions in the fixed track are formed so that a phase difference by which a rotation direction of the rotor is determined occurs between light reception signals of the plurality of light receivers.

Abstract: A solar-powered automated system for the operation of drapery, roller blinds, and similar window coverings. The solar panel (102), or photovoltaic source provides the sole power to drive common types of window drapery and blinds in a compact system having a solar panel (photovoltaic source), actuator (104) and head rail (120). The solar panel (102) is to be mounted onto the frame of a window or elsewhere to collect sufficient light. A connecting cable links the solar panel (102) to the actuator (104) to draw electrical power from the solar panel. The actuator is attached to the head-rail (120) to provide the required driving force. The actuator (104) includes the control circuit boards, a single rechargeable battery (110), an electric motor (106) and output mechanism. An RF remote control receiver (116) is built inside the actuator (104). A low voltage control port (114) allows the actuator (104) to be accessible by a control interface.

Abstract: A medium detection device includes: a sensor lever configured to rotate corresponding to a travel of a recording medium; a sensor configured to detect the rotation of the sensor lever; a stopper having a guide surface inclined with respect to the movement direction of the sensor lever and configured to stop movement of the sensor lever upon the rotation of the sensor.

Abstract: A DC motor assembly includes a motorized unit for generating a rotatable power at an output shaft, and a step adjusting control arrangement including an optical grating and a photocoupler. The optical grating, which is operatively coupled at the output shaft, has a plurality of light transmissible portions and a plurality of light blocking portions alternating with the light transmissible portions. The photocoupler is activated to send out an impulse signal in responsive to a phase shift between the light transmissible portion and the light blocking portion of the optical grating, wherein the output shaft is controllably driven to be rotated and stopped in a sequent manner as a stepping movement thereof in responsive to the impulse signal so as to controllably adjust the rotational speed of the output shaft.

Abstract: Reflected light can be effectively utilized by increasing a light receiving area. Incremental light receiving element groups are separated and arranged in the circumferential direction of a rotating unit while placing a light source therebetween. First and second absolute light receiving element groups are arranged at both sides of the outside and inside of the light source in the radial direction of the rotating unit. As a result, first and second absolute light receiving elements are continuously arranged, and also the incremental light receiving element groups and the absolute light receiving element groups can be arranged to surround the periphery of the light source from four directions.

Abstract: An optical encoder includes a light source, a light sensor array, and a code disk having a data track and a commutation pattern. The commutation pattern includes first, second, and third commutation tracks, each including a series of apertures configured to allow light to continuously pass from the light source to a respective light sensor of the light sensor array as the series of apertures passes over the first light sensor. The relative positions of the first, second, and third commutation tracks correspond to a commutation sequence of a brushless motor.

Abstract: The present invention relates to a method and a device for the machining of an object using a tool, in which the tool (2) or the object (18) is guided using a handling apparatus, which has multiple movement axes for the coarse positioning of the tool (2) or object (18), which form a kinematic chain. In the method, an additional actuator (3), which has a higher positioning precision in at least one dimension or axis than the other movement axes, is inserted between a terminal link (1) of the kinematic chain and the tool (2) or object (18). A relative movement of the tool (2) or terminal link (1) of the kinematic chain to the object (18) is detected using at least one sensor (5) and a deviation from a target movement path is compensated for using the additional actuator (3). The method and the associated device allow the use of robots or other handling apparatuses having lower path precision for applications which require a high precision during the guiding of the tool.

Abstract: This disclosure discloses an encoder. The encoder includes a disk including a first and a second track. A first and a second rotating grating are formed in the first and second tracks, respectively. A first and a second detector are disposed so as to face the first and second tracks, and have a first fixed grating constructing a first diffraction interference optical system together with the first rotating grating and a second fixed grating constructing a second diffraction interference optical system together with the second rotating grating, respectively, and configured to detect a first and a second detection signal, respectively, from the first and second diffraction interference optical systems. At least one of the first and second rotating gratings is formed by a plurality of curved slits in a curved shape.

Abstract: The encoder includes a disk in a disk shape that is arranged rotatably about a rotation axis and that includes one track in a ring shape on which a rotating grating is formed and one or more origin detection areas serving as partial areas on which a rotating grating is formed, and a mask that is fixed and arranged in a manner facing the disk and on which one or more fixed gratings are formed so as to constitute a diffraction interference optical system together with the rotating gratings. A plurality of slits and included in at least one rotating grating are formed along a curved line obtained by curving a plurality of radial lines about the rotation axis in the circumferential direction at predetermined curvature such that pitches and of the slits and can be set to a predetermined value.

Abstract: A pulse generating device includes a rotatable disc having a plurality of patterns that are formed on a surface of the rotatable disc in a circumferential direction of the rotatable disc, and three pulse generators to each detect the plurality of patterns formed on the rotatable disc and to respectively generate three pulse signals each corresponding to a rotational speed of the rotatable disc based on the detected patterns. The three pulse generators are evenly spaced at intervals of 120 degrees of angle with respect to a rotational axis of the rotatable disc in the circumferential direction of the rotatable disc.

Abstract: The encoder includes a disk in a disk shape that is arranged rotatably about a rotation axis and that includes one track in a ring shape on which a rotating grating is formed and one or more origin detection areas serving as partial areas on which a rotating grating is formed, and a mask that is fixed and arranged in a manner facing the disk and on which one or more fixed gratings are formed so as to constitute a diffraction interference optical system together with the rotating gratings. A plurality of slits and included in at least one rotating grating are formed along a curved line obtained by curving a plurality of radial lines about the rotation axis in the circumferential direction at predetermined curvature such that pitches and of the slits and can be set to a predetermined value.

Abstract: In one embodiment a method determines a system parameter of an alignment unit in a system that measures a position and posture of a workpiece, such as a substrate (or a semiconductor wafer), using the alignment unit. A mounting error of the alignment unit is determined, and a real system parameter value of the alignment unit is determined based on the mounting error, thereby accurately measuring position and posture information of the workpiece.

Abstract: A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit.

Abstract: A method of three-dimensional object location and guidance to allow robotic manipulation of an object with variable position and orientation using a sensor array which is a collection of one or more sensors capable of forming a single image.

Abstract: An encoder includes a disk including a first track and a second track each being ring-shaped and provided with a rotary grating, and a first detector and a second detector that are fixedly disposed so as to respectively face the first track and the second track each provided with a fixed grating that detects diffracted interfering light. A plurality of slits of the first track are formed as curved slits. The first detector facing the first track is disposed at a position where a tangent of each of the slits included in the diffraction grating of the first track becomes parallel to a tangent of each of the slits included in the diffraction grating of the second track at a position where the second detector faces the second track.

Abstract: Method, measuring arrangement (23;26;27) and apparatus (1) for optically measuring by interferometry the thickness of an object (2) having an external surface (16) and an internal surface (17) opposite with respect to the external surface. A low coherence beam of radiations (I) is emitted, such beam being composed of a number of wavelengths within a band determined, by means of radiation sources (4a,4b;4c,4d;4ef) which can alternatively employ at least two different radiation beams belonging to differentiated bands, as depending on the thickness of the object, or a single wide band radiation source. The radiation beam is directed onto the external surface of the object by means of an optical probe (6). The radiations (R) that are reflected by the object are caught by means of the optical probe.

Abstract: A sample preparation system in which an ion beam is made to hit the surface of a sample while rotating the sample about an axis perpendicular to the processed surface of the sample under the condition where the processed surface of the sample is not perpendicular to the beam. The preparation system has a rotating mechanism and a tilting mechanism both of which are mounted in an enclosure mounted to the vacuum chamber. The rotating mechanism rotates the holder about the X-axis perpendicular to the surface of the holder on which the sample is placed. The tilting mechanism tilts the holder about the Y-axis perpendicular to the X-axis.

Abstract: An article of furniture includes a drive device for moving a movable furniture part. The drive device includes an electric drive unit and a coupling device for at least temporarily transmitting a force of the electric drive unit to the movable furniture part, and the coupling device has a drive and a drive output. Operating between the drive and the drive output are coupling elements by which, in a first operating position, a clamping connection between the drive and the drive output and thus coupling between the drive and the drive output can be produced, and, in a second operating position, the coupling elements are movable into a position in which the drive and the drive output are not coupled.

Abstract: An encoder includes: a main scale having two or more band-shaped tracks in each of which an optical main grating is formed so that longitudinal direction of the main scale corresponds to a measurement axis direction; and an index scale opposed to the main scale so as to form a diffraction interference optical system in cooperation with the main grating, disposed so as to be movable relative to the main scale in the measurement axis direction, and in which two or more optical index gratings are formed. A plurality of slits included in the main grating in at least one track are formed so as to be inclined at a predetermined inclination angle from a direction perpendicular to the measurement axis direction so that pitch of the slits in the track becomes equal to the pitch of the slits in the at least one other track.

Abstract: The present invention relates to a method and a device for the machining of an object using a tool, in which the tool (2) or the object (18) is guided using a handling apparatus, which has multiple movement axes for the coarse positioning of the tool (2) or object (18), which form a kinematic chain. In the method, an additional actuator (3), which has a higher positioning precision in at least one dimension or axis than the other movement axes, is inserted between a terminal link (1) of the kinematic chain and the tool (2) or object (18). A relative movement of the tool (2) or terminal link (1) of the kinematic chain to the object (18) is detected using at least one sensor (5) and a deviation from a target movement path is compensated for using the additional actuator (3). The method and the associated device allow the use of robots or other handling apparatuses having lower path precision for applications which require a high precision during the guiding of the tool.

Abstract: A machine tool capable of automatically correcting an orientation of a workpiece or machining attachment based on detection results from position detectors that the machine tool inherently has. The machine tool comprises: position detectors; position deviation determining means; contact detection means that detects a contact between a probe and a surface of the workpiece or the machining attachment based on a position deviation; movable axis stopping means; coordinate value detection means; inclination determining means; and correction means. The inclination determining means moves linear axes to perform detection of contacts between the probe and the surface of the workpiece or the machining attachment at least two different points, and determines an inclination of the workpiece or the machining attachment using the obtained coordinate values. The correction means corrects a mounting error of the workpiece or the machining attachment, or corrects the machining program based on the determined inclination.

Abstract: Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure.

Abstract: Driving of a pulse motor is controlled in such a manner that a rotating body driven by the pulse motor rotates at a uniform angular velocity. Angular displacement of the rotating body is detected, a difference between a detection value of the angular displacement and a target value of angular displacement set in advance is calculated, and a drive pulse frequency of a drive pulse signal to be used for driving the pulse motor is calculated based on the difference and a reference drive pulse frequency. Whether the difference is added to the reference drive pulse can be selected.

Abstract: A mobile positioning structure for an axial rod motor comprises a base on which being disposed a stator, and on the stator is disposed a mover on which being mounted an optical signal reader. The stator is provided with a plurality of measurement marks. The position of the mover on the stator is read by the cooperation of an optical reader and measurement marks, such an optical signal reading method is not affected by the magnetic field. Hence, the data detected will be more accurate with less error.

Abstract: Correction of rotary encoder eccentricity in an image forming device having a motor controller using period and position pulse train feedback signals. A motor includes an encoder disc rotating with the motor and at least two encoder sensors disposed at different circumferential positions about the encoder disc. A controller may use a high speed clock to calculate a corrected speed count based on speed counts determined from the number of clock cycles that elapse per cycle of pulse trains from the encoders. The controller may also calculate a corrected position count based at least partly on one or more position counts determined from the number of clock cycles that elapse between periodic sampling points and transitions of encoder pulse trains. The corrected position count may also be calculated based on a position count and one or more speed counts.

Abstract: An ultrasonic motorized stage includes a base part, first and second tables, first and second linear ultrasonic motors which respectively drive the first and the second tables, and first and second optical linear sensors which respectively detect the amount of move of the first and the second tables. The first and the second linear ultrasonic motors and the first and the second optical linear sensors are arranged in positions, which are at sides other than the front side of the ultrasonic motorized stage and prevent wear debris generated when the first and/or the second linear ultrasonic motor is driven from affecting the first and the second optical linear sensors, so that the first and the second linear ultrasonic motors and the first and the second optical linear sensors do not protrude upward from the upper surface of the second table.

Abstract: A signal processing device for optical disks includes a reflected light process section configured to convert reflected light received by an optical pickup into an electric signal based on a first gain, wherein the optical pickup emits laser light to an optical disk and receives reflected light from the optical disk; a servo signal generation section configured to generate a servo signal by using the electric signal generated by the reflected light process section; a servo signal control section configured to control the servo signal so that a change in the amplitude of the servo signal, in response to an increase or decrease of the amount of the reflected light from the optical disk, is suppressed using an attenuator that attenuates the servo signal generated by the servo signal generation section by a factor of a second gain; and a gain setting section configured to set the first gain to the reflected light process section and the second gain to the servo signal control section substantially simultaneously.

Abstract: A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit.

Abstract: A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system programmed with a calibration routine. The calibration array has an plurality of inductive proximity sensors to determine parallelism of the robot relative to a station and a center locating sensor to determine the center of the station.

Abstract: A driving force transmission device superior in reliability with suppressed rotation fluctuation. The driving force transmission device has gearing reception portions, three arm portions and a press member. The gearing reception portions are formed in the inner circumference of a rotor. The arm portions extend from a shaft radially. The arm portions can be elastically deformed. The arm portions have engagement tooth portions for transmitting a driving force of the shaft to the rotor. The press member presses the rotor to bend the arm portions in the direction where the rotor is pressed. In that state, the gearing reception portions gear with the engagement tooth portions.

Abstract: A position of a stage in a perpendicular direction with respect to a movement plane and a tilt direction is measured, using a surface position sensor and a Z interferometer. And, the stage is driven in a stable manner and also with high precision, by appropriately switching between three control modes; servo control using a measurement result of the surface position sensor (a first control mode), servo control using a measurement result of the Z interferometer (a second control mode), and servo control using measurement results of both measurement systems (a third control mode), or by appropriately switching between two control modes out of the three control modes.

Abstract: A position feedback device for a motor comprises a driven member and a sensing device. The driven member is indirectly connected to the motor and driven by it. The sensing device detects the travel length of the motor by sensing the driven member. With the method of indirectly sensing the motor, the measurement error, production cost can be reduced, and the assembling position is flexible.

Abstract: A machine tool capable of automatically correcting an orientation of a workpiece or machining attachment based on detection results from position detectors that the machine tool inherently has. The machine tool comprises: position detectors; position deviation determining means; contact detection means that detects a contact between a probe and a surface of the workpiece or the machining attachment based on a position deviation; movable axis stopping means; coordinate value detection means; inclination determining means; and correction means. The inclination determining means moves linear axes to perform detection of contacts between the probe and the surface of the workpiece or the machining attachment at least two different points, and determines an inclination of the workpiece or the machining attachment using the obtained coordinate values. The correction means corrects a mounting error of the workpiece or the machining attachment, or corrects the machining program based on the determined inclination.

Abstract: A control system is provided for controlling a support structure in a lithographic apparatus. The control system includes a first measurement system arranged to measure the position of a substrate supported by the support structure, the position being measured in a first coordinate system. The control system further includes a second measurement system for measuring the position of the support structure in a second coordinate system, the first measurement system having a presumed position in the second coordinate system.

Abstract: A self-supporting stand for a thin display device is to be controlled so that the display device faces in a preset screen direction in a one-touch manner. A function of constantly recognizing the screen direction of the display device and detecting its own direction by detecting a resistance value of a resistance volume such as a variable resistor installed in an electric screen direction changing mechanism, and a control unit which reproduces a preset screen direction no matter in which direction the screen faces currently, are combined with each other.

Abstract: A method for calibrating a controller of a robotic arm in a microelectronics manufacturing apparatus that includes storing a default position for an edge detector, moving a blade on the robotic arm based on the default position of the edge detector such that at least three edge points on the blade pass through and are detected by the edge detector, generating a plurality of arm position measurements from an arm position sensor by measuring a position with the arm position sensor of the robotic arm at each position of the robotic arm at which an edge point of the blade is detected by the edge detector, and determining at least one of an actual position of the edge detector and an offset for measurements of the arm position sensor based on the plurality of arm position measurements.

Abstract: Some embodiments of the present invention provide an anti-collision device used for a sample-loading system. This device may include a code plate, an optical coupler, a location signal-detecting unit, a drive pulse counting unit and a drive pulse-sending unit. The optical coupler detects the code plate during the relative movement between the optical coupler and the code plate and outputs detection signals. The location signal detecting unit determines whether to output location signals to the drive pulse counting unit. The drive pulse counting unit judges whether collisions occur to the sample-loading system. Some embodiments of the present invention provide an anti-collision method and a sample-loading system comprising the anti-collision device.

Abstract: An encoder unit releasably secured to the flange end of a motor with a form-fitting and positive connection comprises an encoder housing with guide grooves for receiving a printed circuit board (PCB), a recess for receiving the motor shaft, and at least one moveable side wall. A timing disc and hub are positioned on the motor shaft within the encoder housing beneath the PCB. The PCB, a sensor unit fixed, and the movable side wall are slid into the guiding grooves to press an abutment against the hub. The pre-assembled encoder housing can be placed onto a base plate at the flange end of the motor. Pressure movement fully insert the PCB into the housing cover so that the sensor unit records the code markings of the timing disc and so that an abutment is removed from a region of contact with the timing disc hub.

Abstract: Some embodiments of the present invention provide an anti-collision device used for a sample-loading system. This device may include a code plate, an optical coupler, a location signal-detecting unit, a drive pulse counting unit and a drive pulse-sending unit. The optical coupler detects the code plate during the relative movement between the optical coupler and the code plate and outputs detection signals. The location signal detecting unit determines whether to output location signals to the drive pulse counting unit. The drive pulse counting unit judges whether collisions occur to the sample-loading system. Some embodiments of the present invention provide an anti-collision method and a sample-loading system comprising the anti-collision device.

Abstract: A method of driving a moveable part and, in particular, a drawer by a drive unit and, in particular, an electric drive unit. At least over a partial length of track (S2), forming part of the total track traversed by the moveable part, the force exerted on the moveable part by the drive unit is controlled at a predetermined level.

Abstract: In one embodiment, a flexure stage comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other. The positioning mechanism is coupled between the base and the stage. The positioning mechanism includes an actuator and a flexure structure engaged by the actuator. The flexure structure includes base links coupled to the first base portion, stage links coupled to the first stage portion, and an intermediate link coupled to both the base and stage links. All structures are coupled by flexure hinge connections. The control device generates a control signal to change position of the stage by sending a control signal to the actuator which provides a force to elastically deform the flexure structure and correspondingly move the stage.

Abstract: The invention relates to a method and to a circuit arrangement used to regulate synchronous linear motors, especially linear drive mechanisms in film drawing systems. The force (Fclip) between the stationary primary part and the moved secondary part is determined in a sensorless manner from the voltages and currents calculated and measured in a frequency converter in a functional block, in such a manner that the integral is calculated from the active power during a time period (tclip) between two pulses (new—clip) produced by an overriding control and said integral is divided by the active length (1zone) of the primary part. Alternatively, the force (Fclip) can also be determined by summation of the voltages in the f-axis in order to reduce the drop in voltage in relation to the resistance (Rstr) of the branch in the primary part. Voltages and currents are transformed on the primary part by a co-ordinate system related to the secondary part.

Abstract: A wire-saving optical encoder having servomotor identification information is applied to a wire-saving transmission design to provide a circuit and a method for processing servomotor identification information and encoded feedback control signals. With a microprocessor, a multiplexer and the servomotor identification information stored in the microprocessor, an output device and a driver for the feedback signals of the encoder constitute a wire-saving signal transmitting circuit. The microprocessor and multiplexer switch a signal transmission mode to transmit the servomotor identification information and phase change signal produced by the servomotor control parameters stored in a firmware by a serial output mode, and the same transmitting wire is used to transmit a rotor operating signal after the transmitting mode is switched, so as to save wires and lower costs for transmitting feedback signals and correctly identifying and effectively controlling a servomotor.

Abstract: A planar motor is controlled by supplying a three-phase alternating current to a coil assembly. Each phase is supplied to one of three coils. The coils are positioned in a magnetic field generated by a magnet plate having alternating magnet poles at its surface for generating an alternating magnetic field. In operation, the phase of each current flowing through each coil determines the direction of a force generated due to the current in the magnetic field. For correct operation, the phase angle of each current is to be adapted to the local direction of the magnetic field by determining a commutation-offset angle. The commutation-offset angle is determined by generating a force in an unknown direction and varying the commutation-angle, and determining when the generated force is directed perpendicular to the magnet plate, while ensuring that the generated force does not exceed a horizontal friction force.

Abstract: A brushless motor driving device having a current detecting unit for detecting a phase-current of a brushless motor, a voltage detecting unit for detecting a phase voltage of the brushless motor, and a signal input portion to which the detection value of the phase-current and the detection value of the phase-voltage are input and which has plural input terminals arranged sequentially. The detection values of phase currents or detection values of phase voltages which are different in characteristic are input to adjacent input terminals.

Abstract: A control apparatus for a machine that can be operated at high precision in a stable control state is provided by driving a movable body with control parameters suited to the mechanical state. A control parameter calculation circuit is provided to obtain control parameters for a drive apparatus control circuit for driving actuators in accordance with the conditions of actuator rotational velocity, the orientation of the movable body, and the position of the movable body, and a control parameter K for the drive apparatus control circuit is varied.

Abstract: A lithographic projection apparatus includes a passive magnetic bearing configured to provide support between a first and second part of the lithographic apparatus and allow both parts to be displaced relative to each other in a direction perpendicular to the support direction. The passive magnetic bearing includes first and second magnetic assemblies. Each magnetic assembly includes at least one permanent magnet.