Abstract: The assembly (10) is a self-propelled conveyor system including a vehicle (12) having wheels (18) and a motor (16) for moving the vehicle (12) along a track (20). The vehicle (12) includes a speed sensor (24) for sensing actual speed of the vehicle (12) and a location sensor (26) for sensing the absolute position of the vehicle (12) along the track (20). A control (22) receives the actual speed and absolute location signals and drives the vehicle (12) at a speed associated with the absolute position, this value being obtained from a memory (32). The control (22) drives the motor (16) at the selected speed with a feedback signal of actual speed wherein the control (22) may adjust the drive signal when actual speed differs from selected speed.

Abstract: A drive control device has a driving switch for remotely-operating a plurality of drive mechanisms, and a transmission device for transmitting to the operator the kind of a drive mechanism which is about to be driven, before the driving by the driving switch.

Abstract: A rotation control system for preventing unbalance vibrations and synchronous disturbance vibrations of a rotary member suspended by a magnetic bearing. This system includes a vibration detector which detects radial vibration of the rotary member. On the basis of the detected radial vibration, a compensating signal which has the same amplitude and cycle as the vibration component having the rotational frequency is generated. The difference between the detected vibration and the compensating signal is obtained and used for controlling the radial position of the magnetic bearing.

Abstract: A constant speed driving apparatus comprises a starting means for starting a control unit, the first pulse-generating means for generating the first pulse signal with a predetermined frequency, a driving mechanism for driving a load, the second pulse-generating means for generating the second pulse signal corresponding to driving speed of the driving mechanism, and the control unit for controlling the driving mechanism on the basis of the first and second pulse signals.

Abstract: Apparatus for mounting and positioning an associated device such as a camcorder which includes a transmitter for producing a control signal, a substantially fixed platform and a control apparatus including a plurality of sensors disposed in a plane at angularly spaced intervals about a first axis. Each of the plurality of sensors is constructed to receive a first control signal radiated by the transmitter. The apparatus also includes structure to discriminate which of the plurality of sensors is receiving the control signal from the transmitter and utilizes that information to drive the servomechanism.

Abstract: A probing control apparatus for use in aligning an object comprises: a mechanism having n-degrees of freedom and adapted for controlling the object; n pieces of actuators for actuating the mechanism; detecting means for detecting change in the output from the object in response to the operation of each actuator; and control means for computing a command for each actuator in accordance with a change in the output detected by the detecting means and amount of movement of the mechanism, and for controlling each actuator in accordance with the command such that the output from the object takes the maximum value.

Abstract: A servo loop particulary useful for a focusing or tracking servo in an optical disk. The peak-to-peak value of an error signal in the servo loop is detected while the optical pickup is being driven perpendicularly to the disk in focusing or transversely to the disk in tracking. The detected peak-to-peak value is used to adjust the gain of a variable gain amplifier included in the servo loop.

Abstract: Selective compliance in up to six degress of freedom in a magnetically levitated fine motion device, or robot wrist, with limited motion in X,Y,Z, ROLL, PITCH, YAW, is provided by controlled actuation currents applied to six electrodynamic forcer elements. The wrist has a stator support base defining a dual periphery, carrying a number of stator magnet units. A shell flotor unit nests within the stator support base dual periphery, and carries forcer coils at locations corresponding to respective magnet units. The magnet unit and related flotor coil form a forcer element. There are a number of forcer elements. The vector sum of all the translational forces and rotational torques established at the forcer elements determines the X,Y,Z, ROLL, PITCH, and YAW motion of the flotor. The flotor carries an end effector which may be a tool. Position and orientation of the flotor is monitored by light emitting diodes and lateral effect cells.

Abstract: This invention relates to a system for strictly positioning along an axis an object such as a wafer of semi-conducting material during a process of constructing integrated circuits, wherein it comprises:means for controlling the drive means for causing the carriage to make a displacement of acquisition of which the amplitude is at least equal to the step of the second optical grating;a generator generating, during said displacement of acquisition, a periodic reference signal, of period equal to the step of said second grating;multiplication means for forming the product of said period reference signal and of the signal actually delivered by said photoelectric sensor;means for summing the signal formed by the succession of said products;calculating means for determining the possible offset existing between said optical gratings; andmeans controlling the drive means to bring said optical gratings into strict alignment.

Abstract: A high precision transducer and a system related thereto are provided for achieving high precision in an efficient, economical, and small size configuration. In a preferred embodiment, an optical position encoder transducer utilizes an optically sensed code wheel in combination with a vernier optical split to achieve high precision. Code wheel positions are sensed photo-optically to provide the most significant bits of the encoder position number. Optical slit position is sensed photo-optically to interpolate between disk code positions and to provide a high precision vernier to generating the least significant bits of the encoder output number. Anti-ambiguity circuitry resolves ambiguity between code wheel positions, vernier positions, and alignment. An array of photosensors provides enhanced precision and economy. Systems utilizing such transducers include digital readout systems, machine control systems, and data logging systems.

Abstract: An extra magnetic field positioning apparatus includes a motor which does not have stable points for defining the extra magnetic field. An encoder is provided which is rotated with the motor and individually has the information which indicates rotating displacement and the information which indicates rotating position. Further, a sensor detects the information indicating the rotating position recorded on the encoder, and another sensor detects the information indicating the rotating displacement recorded on the encoder.

Abstract: In a speed control system for a carriage movable along a predetermined path, light beams originating at the ends of the path are deflected by light conductors aboard the carriage so that they are interrupted, as the carriage moves, by a slotted plate extending along the path. The light beams are then deflected by light conductors so that they are directed along the carriage path to light receivers situated at the ends of the path. Electrical pulses from the light receivers are ORed together and converted by a transducer to a signal representative of the actual carriage speed, and by a counter to a signal representative of the carriage position. The carriage position signal is converted, in accordance with a predetermined functional relationship, to a speed set signal which is compared with the actual carriage speed. A signal, representative of the difference between the actual speed and the set speed is used to control the driving motor for the carriage.

Abstract: A first servo system (31) which feeds back at least position and speed and a second servo system (32) which effects integral control by feeding back position are connected in series. A first signal obtained by multiplying the output of the integral controller of the second servo system by a first gain is added to the position feedback signal of the first servo system, while a second signal obtained by multiplying the input of the integral controller of the second servo system by a second gain is added to the speed feedback signal of the first servo system. In this way, feedback control is effected using one mutual position detector, thereby eliminating the dynamic interference between the first and second servo systems, and thus enabling the two servo systems to be activated simultaneously.

Abstract: A direct drive motor system for controlling driving of the joints of a multi-jointed robot, comprising a motor portion, a rotation detecting portion, a position control portion, a speed control portion, a driving circuit and a tuning portion, wherein the motor portion is of an inductor type, the rotation detection portion uses an optical rotary encoder or magnetic resolver, and the position control portion is arranged to control in a feedback manner the rotational position of the motor with a tertiary servo system with software. The system's driving circuit has a feedback control loop for the current of the motor coil, and a detection circuit for the current includes a small signal isolator. The tuning portion tunes the servo systems of the speed control portion and the position control portion. As a result, the system simultaneously satisfies various requirements of such a direct drive motor.

Abstract: This disclosure describes a method and associated apparatus, in the manufacture of flat tension mask cathode ray tubes, for detecting the edges of a mask receiving surface in a plane, identifying its coordinates and subsequently delineating the path of an attachment device for permanently affixing a tensed foil shadow mask to the mask receiving surface of a mask support structure.

Abstract: In a method for visually inspecting a sample through an objective lens of a microscope, a slide carrier attached to the microscope stage is automatically shiftable relative to a frame and to the stage along a predetermined meander path. A microscope slide and the slide carrier are provided with cooperating elements for positioning the slide at a predetermined position and orientation with respect to the carrier. The slide is further provided with a reference mark for enabling an automatic monitoring of the position of the slide relative to the frame of the carrier during an inspection of the slide. The x and y coordinates relative to the slide carrier frame of a detected microscopic object are recorded.

Abstract: A system and method for determining the precise location of a moving object such as a semiconductor wafer relative to a destination position, using an array of optical sensors positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points along the path of movement are used to calculate the center position of the wafer relative to the destination position.

Abstract: A drive apparatus for a specimen stage of a microscope suitable for handling specimens of a known shape or internal structural configuration. A coordinate position (Xd, Yd) on a two-dimensional coordinate designating means is made to correspond to coordinate positions (Xs, Ys) of a plurality of specimens of the same configuration on the specimen stage independently and selectively, thereby ensuring that correspondence between each of the plural specimens of the same configuration and a layout drawing of the specimen placed on the two-dimensional coordinates designating means can be set up accurately. A part desired to be observed of a specimen can therefore be moved quickly and easily into a very small field of view of the microscope.

Abstract: A servo system for controlling the position of an object in accordance with a servo signal, employing an A/D converter to normalize an error in the position of the object and to enable digital correction of any offset in the system and digital compensation for track jumping and drop outs.

Abstract: A material positioning and registering system for patterned material incorporating a computer with associated memory and software. A material moving system employing a drive roller with associated pressure roller in a novel pinch roller system, moves the material. A motion detecting sensing device driven by the pressure roller and an optical sensor for viewing the patterned material, each provide outputs to a computer which, in turn, provides control of material movement and optical sensor operation and may, provide signals for initiating machining of the patterned material when the pattern is properly located relative to a designated work station.

Abstract: An apparatus for measuring the shape and size of a rotary tool is provided which includes a tool rotation unit for rotating the tool around the tool axis, a tool moving mechanism for moving the tool in the axial direction, a measuring head having a line sensor, and a calculation control unit. The measuring head can be moved at a rate of a predetermined angle around a lateral shaft, located in a direction perpendicular to the axis of the tool, with one end of a measuring area of the line sensor as a center. Upon measuring the tool in terms of its shape and size, the aforementioned end of the line sensor is located in a position a given distance inside the aforementioned end of the tool, the line sensor is moved for every predetermined angle around a lateral shaft, with one end of the measuring area as a center, and measured values are fed to a computer through the line sensor, while the tool is rotated around its axis for every predetermined angle.

Abstract: A start of scan circuit for an FTIR spectrometer includes a mode counter, counting through various states of operation of the moving mirror in the FTIR interferometer, and a positioning counter circuit which counts laser pulses from a positioning laser also directed through the interferometer. By appropriately loading and counting up or down the counter in various states, as determined by the mode counter, the circuit can flexibly control the start of scan of the FTIR so that that start of scan can be selectively varied by switches and/or under software control.

Abstract: A control system providing a control of position, velocity, and direction of movement of a member in an axis of freedom which employs a scale having scale divisions thereon and bands or zones defining limits of constant velocity control, acceleration and deceleration zone limits, and a rest or parking position. The scale spans and parallels the axis of freedom. A single channel transducer or encoder mounted on and moving with the member produces time varying output signals in response to the sensing of scale divisions along the scale and signals of different characteristic in response to encoder sensing of the limit bands. The time varying output signals are employed as scale division count signals for position determination and as scale division count signals per unit of time, for velocity feedback.

Abstract: An interactive multiaxis encoder positioning system is provided for positioning a tool or a work piece to a degree of accuracy which is only limited by the encoder system and not the mechanical guides, slides and bearings of prior art systems. A highly precise and accurate multiaxis scale comprising a plurality of sets of grading indicia is made under accurate manufacturing conditions. The multiaxis scale is attached to a fixed or a moving part of the machine or apparatus and is positioned juxtaposed encoder means to provide relative movement to the grating scale means. Thus, the accuracy of positioning a tool or work holder is determined by the accuracy of the encoder and not by the accuracy of the mechanical positioning guides, slides and bearings.

Abstract: A machine tool setting device and control system are provided. The machine tool setting device sets the machine tool tip at a predetermined distance above a work piece by detecting when the machine tool tip intercepts an optical beam. The control system allows for the drilling of multi-ply work pieces wherein the multi-plies comprise different thicknesses and hardnesses. The drill bit translational velocity and rotational velocity are continuously controlled for optimization depending upon the type of material and thickness as a hole is drilled through the work piece.

Abstract: An improved gas bearing X-Y-.theta. stage assembly is disclosed which has a base, a stage element with three retroreflectors fixedly mounted thereto, and a control system for controlling the movement of the stage element. The control system is made up of three interferometer measuring systems for measuring parameters associated with changes in position of the three retroreflectors as the stage element moves. Also, the control system includes a transport system for moving the three interferometers to maintain optical coupling between the interferometers and retroreflectors. In addition, the control system includes control circuitry for causing the stage element to move to a preselected X-Y-.theta. position in response to signals from the interferometer measuring systems.

Abstract: A load support servomechanism circuit controls the armature of a shaker apparatus. The circuit includes a position sensor, peak detectors connected to outputs of the position sensor, an A/D converter connected to outputs of the peak detectors through a switching bank, a power supply and a microprocessor which provides clock, read, write and ready signals and which automatically controls the position of the armature through solenoids operating on an exhaust valve and a pressure valve. Manual operation of the shaker armature is also provided.

Abstract: An improved mirror alignment control for dynamically aligning the reflecting mirrors bounding the optical path in an interferometer comprises a closed loop servo control which utilizes a two frequency laser beam to provide phase comparison between beams traversing differing portions of the optical paths in the interferometer to determine alignment of the mirrors, said phase comparison providing a correction signal to direct multi-axial alignment of at least one of the mirrors.

Abstract: A focus servomechanism control system in an optical disc is provided for controlling a light focusing unit to adjust a focus of light impinging on a track in a rotatable optical disc. The focus servomechanism control system includes: a unit for moving the light focusing unit in a direction perpendicular to a plane of the optical disc; a unit for producing a focus error signal; a unit for producing a track error signal; and a unit for controlling a position of the light focusing unit through the light focusing unit moving unit in response to the focus error signal and the offset parameter. The focus servomechanism control system further includes an offset setting unit for continuously setting, during an offset adjustment mode, a plurality of offset parameters to the position control unit, to determine a maximum amplitude of the track error signal, and to set the offset parameter producing the maximum amplitude of the track error signal to the position control unit.

Abstract: A method and system are provided for automatically locating an object at a vision station by performing an edge-detecting algorithm on at least a portion of the gray-scale digitized image of the object. Preferably, the algorithm comprises an implementation of the Hough transform which includes the iterative application of a direction-sensitive, edge-detecting convolution to the digital image. Each convolution is applied with a different convolution mask or filter, each of which is calculated to give maximum response to an edge of the object in a different direction. The method and system have the ability to extract edges from low contrast images. Also, preferably, a systolic array processor applies the convolutions.

Abstract: The position of a rotating element is controlled by a galvanometer and a servo system. The position of the rotating element is determined by using a two-grating moire pattern. Movement of the element causes a projected scale image representing radiation reflected from the element to shift relative to a fixed grating thereby generating moire fringes. The accumulated fringes serve to measure absolute position and motion of the element. The servo digitally processes the measured position to generate several force components which are then combined to control the amount of force applied by the galvanometer to rotate the element.

Abstract: A light control system operable by one hand for directing the movements of a luminaire rotatably movable to a plurality of liminaire positions about a Y-axis and an X-axis by a pan motor and a tilt motor, respectively. The control system includes a first disk rotatably mounted to a support panel and a second disk rototably mounted to the first disk at the axis of the first disk perpendicular to the first disk. Code markings such as code bars marked around the circumferential periphery of each disk are indexed to the desired movements of the luminaire by simultaneously processing signals from optical pickoffs for the first and second disks and transmitting the processed signals to the pan and tilt motors. The primary received signals are analog signals which are converted to digital signals. An operator knows the position of the luminaire by manual touch feedback relating to the positions of the first and second disks.

Abstract: A driverless vehicle is guided along a guideline which is detected on a floor by an optical sensor having a plurality of light receiving elements. A value representing the amount of light received by each of the light receiving elements is composed with a value representing the amount of light received by one or more neighbouring light receiving elements and smoothed to an appropriately large value so that the detection of the guideline may be based on the smoothed value.

Abstract: A positioning device comprising a first and a second support (9, 11) which are interconnected by a parallelogram mechanism of elastically deformable rods (17), the first and the second support (9, 11) together being displaceable in horizontal planes with a maintained position of the first support (9) in vertical direction, while with a maintained position of the first support (9) in a horizontal plane that support (9) is displaceable in vertical direction by means of a substantially frictionless relative displacement in horizontal direction of the second support (11) with respect to the first support (9).The positioning device is particularly suitable for displacements of an object in the submicron range, such as, for example, in optical lithographic devices.

Abstract: The operating means for manual focusing of a microscope having a motorized-focus drive is embodied in a separate control console that is flexibly connected to and positionable alongside the microscope; the operating means includes a finger wheel or knob which is coupled with an electrical bit-signal generator (encoder). Digital output signals of the encoder are fed to control electronics for the focus-drive motor, and the electronic control system may either be contained within the control console, or it may be packaged, along with further electronic control means for additional functions, in a separate housing provided for the purpose.

Abstract: In an X-Y addressable workpiece positioner the workpiece to be positioned, such as a semiconductive wafer to be aligned with a mask image, is coupled to move with a work stage moveable in X and Y direction and having a two-dimensional array of positioning indicia affixed thereto for movement therewith. An enlarged image of a portion of the positioning array is projected onto a relatively stationary sensor stage to derive an output determinative of the X and Y coordinates of the positioning array relative to the position of the sensor. The sensed X and Y coordinates of the positioning array are compared with the X and Y coordinates of a reference positioning address to derive an error output. The work stage is moved in response to the error output for causing the workpiece to be positioned to the reference address.

Abstract: An authority limiter includes an input shaft clutched to an output shaft. The output shaft is geared to a motor. Opto-sensors provide control signals to a current source supplying power to the motor. Different amounts of opposing torque are applied by the motor dependent upon the positioning of a disc, mechanically attached to the output shaft, effecting the optical path in the opto-sensors. In another embodiment, the opto-sensor control is replaced by an electro-mechanical mechanism which senses various thresholds corresponding to angular positions of the coupled input and output shafts.

Abstract: A portable system (10) for abrading the floor of a bathtub (26) to render it slip resistant. The system contains a portable power unit (12) containing an air compressor providing compressed air to abrading unit (14) via compressed air hose (20) and provides a source of electrical power to an abrading unit (14) via a power cable (18). The abrading unit (14) is adapted to direct a high velocity stream of abrasive particles against the floor of a bathtub through perforations in a particle impervious template (24). The unit (14) which is adapted to travel in the forward direction (indicated by the arrow), has a carriage movable in a direction lateral to the direction of forward travel. An abrading head (38) is supported by and reciprocally movable with a carriage to apply the particle stream in a direction lateral to the direction of forward travel and normal to the bathtub surface.

Abstract: A system for positioning a movable body for a processing machine. A lead screw is rotatably and axially shiftably supported and engaged with the movable body. The lead screw is rotated by a motor to move the movable body. A hydrostatic thrust bearing is provided for preventing axial movement of the lead screw. The lead screw is finely moved in the axial direction by controlling the pressure difference of oil supplied to the thrust bearing to position the movable body.

Abstract: The printer is characterized by construction adapted to detect the offsetting of the carriage from its intended position by signals of a sensor which detects the carriage offset at a first position spaced by a predetermined distance in the opposite direction of the home position of the carriage and at a second position which is the home position.

Abstract: A sensor arrangement for providing positional information about a component (1) to a robot (11) comprises sensors (4,5) sensing index marks (2,3) on the component. The sensing arrangement derives signals denoting the extent of mispositioning of the object. These signals may be fed to the control unit (20) so that the robot carries out its preprogrammed task on the object in its misplaced position. Alternatively the component is shifted with the aid of said signals to a reference position.

Abstract: An xy-surface drive of limited .phi.-rotation and z-movement, has three box coils, positioned at mutual angles of 120.degree., the coils being mechanically connected to each other, and guided in the working air-gap of the magnet ring segment system such that when current flows through the coils, there a power or momentum results, which moves and/or rotates the coil arrangement which, by means of an electrodynamic system, is deflectably connected in z-direction to the object support only via a plate spring. The coil arrangement is connected to an incremental x-y-.phi.-measured value indicator, so that a position control connects the coils according to the deviation to the voltage sources of various polarity, so that the ideal position is attained. The z-position is optimized via an analyzer of object sharpness and a position control.

Abstract: An improved mirror scan control for driving a movable mirror in an interferometer with a constant scan velocity comprises a closed loop servo control which provides constant velocity mirror scan in response to a phase comparison of a signal derived from the beat frequency of a two frequency laser beam passing through the interferometer and a selected frequency reference signal, wherein the difference in frequencies or beat frequency of the two frequency laser beam is stabilized at a specified difference in frequencies. The mirror scan control employs a phase lock control loop which locks the frequency of the referenced signal with the frequency of the signal derived from the laser beam to provide precise mirror velocity control.

Abstract: An aligner or positioning system for moving a member in any direction in a horizontal plane includes a planar member having an upper horizontal surface and a platform movable above the horizontal surface. Driving coils extending along either of two orthogonal directions are disposed in one of the members while a pattern of oppositely magnetized permanent magnet elements is disposed in the other in flux coupling relationship. Energization of windings in appropriate senses, in accordance with the position of the platform, generates relative movement in one or both of two orthogonal directions, which may include angular movement as well.

Abstract: A robotic sensor incorporates an array of closely spaced force sensors which are carried on a mounting plate. The front surface of this mounting plate is brought into contact with the object under inspection. A plurality of optical fibers are attached to the rear one end; the opposite ends of the fibers are connected to optical detectors. Actuation of any of the force end of the force sensor to impinge on and reduce the light flow through a corresponding optical fiber. Analysis of the data indicating which of the optical fibers and their light output reduced will result in an analysis of the dimensions and orientation of the object.

Abstract: A position control method for aligning a workpiece in a machining apparatus. An alignment pattern, such as a diamond, is provided on the surface of the workpiece. The alignment pattern and the surrounding region are sensed by an image pickup television camera, the output of which is converted to binary form. From the binary data, the central point of the pattern is calculated. The difference between this central point and a reference point is then determined, and the result used to control the position of the workpiece via a positioning mechanism.

Abstract: A collision avoidance system for a two arm robot is direction sensitive. When the separation between the arms is sensed as equal to or smaller than a predetermined distance, the trailing arm is slowed to avoid a collision. The separation sensor generates a first "slow" signal when the separation is a first predetermined distance, a second "slow" signal when the separation is a second predetermined distance, smaller than the first, and a "stop" signal when the separation is a third predetermined distance, smaller than the second. The polarity of the drive signals for the arms determine their direction, and polarity sensitive comparators determine the direction of each arm. When the first "slow" signal is present and one arm is moving in the direction of the other arm, a speed reducing resistor is inserted in the circuit for the drive signal for the one arm to reduce its speed.

Abstract: A system for controlling drive of a movable member for carrying a workpiece such as a semiconductor wafer, the system including a first servo control system effective to move the workpiece carrying member at a relatively high speed and with a relatively low positional accuracy for stoppage of the workpiece carrying member, a second servo control system effective to move the workpiece carrying member at a relatively low speed and with a relatively high positional accuracy for the stoppage of the workpiece carrying member, and a system for selecting one of or a combination of the first and second servo control system in accordance with a positional accuracy required with respect to a target position of the workpiece carrying member.

Abstract: A device for determining and adjusting the position of a web, the device having two sensor units each with a respective light source element directed towards the web and a respective photoelectric sensor element responsive to reflected light, a control unit responsive to respective output signals of the two sensor units, and a device connected to the control unit and fed by an adjusting signal from the control unit for adjusting the position of the web, including reflectors disposed at a side of the web facing away from the sensor units and projecting beyond respective opposite edges of the web, one of the two elements of one of the sensor units being directed towards one of the opposite edges of the web and the other of the two elements of the one of the sensor units being directed to a reference surface, the other of the two elements of the other sensor unit being directed towards the other of the opposite edges of the web and the other of the two elements of the other sensor unit being also directed to a r

Abstract: A power-up circuit for an electric motor uses an electronic start-up circ which increases the applied power in a predetermined fashion. An electronic timer is used to switch the motor circuit from start to run conditions after a desired time interval. Photo-electric coupling devices isolate the control circuitry from transient signals after accompanying motor operation.