Abstract: A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which calculates X- and Y-direction reaction forces and a moment reaction force on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object, which are to be received by the reaction force counter when the object is driven by the first actuator, and controls the second actuator so as to cancel the reaction forces and the moment reaction force.

Abstract: In a linear motor and its progressive motion or motion control, e.g., for modular transport devices with straight and curved route sections forming a route course, extensive modularity or flexibility of the linear motor may be guaranteed with little expenditure in terms of equipment and software, e.g., with regard to various applications or machine configurations, e.g., when a plurality of secondary parts are used. A secondary part may have at least one permanent magnet and a signal processing device with a progressive motion or motion controller, which generates at least one set value relevant to the coil control. A set value is fed as a magnitude for commutation using a set value interface of a coil control that is stationary relative to the primary part. Device(s) are also provided for rigidly positioning the secondary part, the device(s) guiding the secondary part along a predetermined stretch.

Abstract: Some embodiments of the present invention provide an anti-collision device used for a sample-loading system. This device may include a code plate, an optical coupler, a location signal-detecting unit, a drive pulse counting unit and a drive pulse-sending unit. The optical coupler detects the code plate during the relative movement between the optical coupler and the code plate and outputs detection signals. The location signal detecting unit determines whether to output location signals to the drive pulse counting unit. The drive pulse counting unit judges whether collisions occur to the sample-loading system. Some embodiments of the present invention provide an anti-collision method and a sample-loading system comprising the anti-collision device.

Abstract: A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter, which receives a reaction force generated when the first actuator drives the object, and a controller which calculates X- and Y-direction reaction forces and a moment reaction force on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object, which are to be received by the reaction force counter when the object is driven by the first actuator, and controls the second actuator so as to cancel the reaction forces and the moment reaction force.

Abstract: First and second acceleration detectors are attached to first and second sections on a driven body, and values of accelerations ?1 and ?2 in a travel direction of the driven body are detected. On the basis of the difference or sum of the acceleration values ?1 and ?2, at least one of a position command, speed command, or current command for performing drive control of the driven body is corrected.

Abstract: A method and an apparatus for estimating the position of a moving part of a linear actuator are provided. The method comprises the following steps. Move the moving part towards a target position. Receive magnetic signals generated by the magneto-resistive sensor of the linear actuator, which include a sine signal and a cosine signal. Then, generate a first square wave, a second square wave, and a regional square wave based on the sine signal and the cosine signal. Generate a saw-tooth wave based on the sine signal, the cosine signal, the second square wave, and the regional square wave. Next, calculate the number of regions which the moving part is across from the origin point based on the first square wave, the second square wave, and the regional square wave. Finally, estimate the current position of the moving part based on the saw-tooth wave and the number of regions.

Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.

Abstract: Stator position feedback controller. A first position monitoring device responds to the position of a stator supported for relative motion by a machine base. A second position monitoring device responds to the position of a carriage with respect to the machine base. An actuator is provided to move the carriage through interaction with the stator. A servo controller responds to the difference in the output of the first and second position monitoring devices to control the position of the carriage with respect to the machine base.

Abstract: Methods and apparatus for precise positioning of an object using linear actuators based on linear stepper motors operating in microstepping or full step mode, a control algorithm based on compensation table, and a calibration apparatus for obtaining the compensation table.

Abstract: A method of controlling the speed and position of a motor includes receiving a pulse train indicative of the speed of the motor, and a periodic signal at a frequency greater than the pulse train. The number of cycles of the periodic signal per cycle of the pulse train is counted, and compared to a predetermined number. The speed of the motor is adjusted to match the count to the predetermined number, thus effecting speed control. A command position signal defining a plurality of sampling points is generated. The number of cycles of the periodic signal between a sampling point of the command position signal and an operative edge of the pulse train is counted and compared to a predetermined number. The speed of the motor is further adjusted to match the count to the predetermined number, thus effecting position control.

Abstract: An alignment stage apparatus including a vacuum chamber, a linear motor including a plurality of coils to drive a stage, a coil selector which selectively energizes the plurality of coils, and a storage box arranged to store the coil selector. The interior of the storage box is connected to the outside of the vacuum chamber. The linear motor and the storage box are arranged in the vacuum chamber.

Abstract: A method and an apparatus for estimating the position of a moving part of a linear actuator are provided. The method comprises the following steps. Move the moving part towards a target position. Receive magnetic signals generated by the magneto-resistive sensor of the linear actuator, which include a sine signal and a cosine signal. Then, generate a first square wave, a second square wave, and a regional square wave based on the sine signal and the cosine signal. Generate a saw-tooth wave based on the sine signal, the cosine signal, the second square wave, and the regional square wave. Next, calculate the number of regions which the moving part is across from the origin point based on the first square wave, the second square wave, and the regional square wave. Finally, estimate the current position of the moving part based on the saw-tooth wave and the number of regions.

Abstract: The invention relates to a method and to a circuit arrangement used to regulate synchronous linear motors, especially linear drive mechanisms in film drawing systems. The force (Fclip) between the stationary primary part and the moved secondary part is determined in a sensorless manner from the voltages and currents calculated and measured in a frequency converter in a functional block, in such a manner that the integral is calculated from the active power during a time period (tclip) between two pulses (new—clip) produced by an overriding control and said integral is divided by the active length (1zone) of the primary part. Alternatively, the force (Fclip) can also be determined by summation of the voltages in the f-axis in order to reduce the drop in voltage in relation to the resistance (Rstr) of the branch in the primary part. Voltages and currents are transformed on the primary part by a co-ordinate system related to the secondary part.

Abstract: An alignment stage apparatus includes a base structure and a movable stage which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switching device for sequentially switching, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feeding device for supplying AC power to the power transmission coils to be energized through the switching device.

Abstract: An apparatus and method for controlling the maximum stroke of a linear compressor is provided. The shorting of the normal supply voltage of a compressor to ground is used to detect overstroking. A plurality of transistors are electrically coupled to the control circuit that is electrically coupled to a linear compressor. When the compressor's stroke exceeds it maximum stroke marked by the refrigerant barrel of the compressor making physical contact with the armature, a signal is received by the control circuit. The control circuit processes this signal and sequences the transistors to return the extended stroke of the compressor to its maximum stroke.

Abstract: By applying time-frequency analysis to a given standard iterative learning control or ILC an adaptive filter for the learned feed-forward loop is designed. This time varying filter varies according to the momentary frequency content of the error signal and allows to discriminate between areas of deterministic and stochastic error. Its application results in selective application of ILC to those intervals where error signals of high level are concentrated and allows application of a single ILC acquisition to different setpoint trajectories. The adaptive filter finds particular use in lithographic scanning systems where it is used for varying scan length.

Abstract: A path module for a linear motor system includes a controller coupled to one or more amplifiers that are operative to control associated windings in the module. The controller receives control information via a communications link. The controller controls the amplifier based on the received control information so as to selectively energize the associated windings in the module. In one aspect, a plurality of such modules may be connected together to form a path along which one or more stages are moveable according to energization of the windings in the path.

Abstract: A digitally controlled, integrated Sawyer motor forcer consists of a rigid mechanical housing containing one or more linear motor segments, integrated control electronics, cooling means, and optional feedback sensors. The integrated control electronics include digital processing circuits, an external host communication interface, power conditioning and supply circuits, forcer phase amplifiers, input/output circuits and optional feedback sensor circuits. The integrated controller also provides control, amplifier, input/output, and sensor circuits for additional external motor axes that may be attached to the forcer as needed for specialized machines. The forcer may be operated in an open-loop mode without feedback sensors, or in a closed-loop servo mode using integrated feedback sensors of various types. Cooling means are included in the forcer to reduce the temperature rise caused by power dissipation in the forcer coils and the integrated electronic elements.

Abstract: A stage alignment apparatus includes a first moving member which moves in a first direction, a second moving member which moves in a second direction different from the first direction, a stage which is slidably supported by the first moving member and the second moving member and is guided in the first and second directions, a first control section which controls a posture of the first moving member in a third direction, the third direction being a direction rotatable about an axis substantially perpendicular to the first and second directions, and a second control section which controls a posture of the second moving member in the third direction on the basis of a signal which controls the posture of the first moving member in the third direction.

Abstract: An apparatus for positioning a workpiece carrier with respect to a workstation can include an encoder reader located in a fixed position at a workstation for generating a signal in response to interaction with at least one encoder strip, a workpiece carrier movable along a path of travel through the workstation, and having an encoder strip connected thereto, the encoder strip operably interacting with the encoder reader located at the workstation, and a non-direct drive or friction drive engaging the workpiece carrier for moving the carrier along the path of travel through the workstation, the non-direct drive or friction drive responsive to the signal from the encoder reader in a closed loop feedback control system. The encoder reader can be selected from a group consisting of an optical encoder reader, a magnetic encoder reader, and any other absolute positioning encoder reader.

Abstract: A high-speed and extremely large range positioning apparatus capable of producing motions in multiple dimensions with high precision and very high reliability. An ultra fast absolute position sensor providing instantaneous position readings with sub nanometer precision on full range of relative positions. A set of optical encoding schemas providing high encoding density and extremely fast decoding regardless of their planar positions.

Abstract: A stage alignment apparatus includes a first moving member which can move in a first direction, a second moving member which can move in a second direction different from the first direction, a stage which is slidably supported by the first moving member and the second moving member and is guided in the first and second directions, a first control section which controls a posture, in a third direction different from the first and second directions, of the first moving member, and a second control section which controls a posture, in the third direction, of the second moving member on the basis of a signal which controls the posture of the first moving member. The second control section controls the posture of the second moving member on the basis of a signal which controls the posture of the first moving member filtered by a predetermined filter.

Abstract: A drive control method includes detecting an angular displacement of a rotor driven by a pulse motor, calculating a difference between the detected angular displacement and a preset target value of the angular displacement, and calculating a drive pulse frequency of a drive pulse signal used to drive the pulse motor. The pulse motor is driven by the drive pulse signal having the drive pulse frequency to allow the rotor at a constant angular velocity.

Abstract: A patient bed for use with at least one imaging device in which a plurality of scans to be correlated are performed, as well as in a continuous motion scanner used to compile whole-body scans. The patient bed includes a horizontal rail base and a movable patient surface. Electronic controllers are provided for controlling the horizontal and vertical positioning of the patient surface. The horizontal rail base is secured to the support proximate the scanner. A linear motor is used to generate horizontal motion of the patient bed. The linear motor is controlled using a motion controller in communication with a computer associated with the imaging device. A pedestal is provided for mounting a vertical carriage assembly. A vertical track is carried by the pedestal for controlling vertical travel of the patient bed. A motor is provided for controlling vertical motion. A pallet support member is cantilevered from the vertical carriage assembly for carrying a pallet.

Abstract: A multiple degree-of-freedom ultra-precision (DOF) robotic system yielding either rigid body guidance or large deformation analysis (LDRS, i.e. semi-flexible and flexible robotics) is developed based on the technology of integrating a multiple DOF ultra-precision shadow robotic measurement system with a multiple DOF robot for form a closed-loop linkage chain to establish a corresponding closed-loop feedback control of end-effecter of said robotic system without the use and limitation of any target or artificial marker in work-cell as the reference. In this way, the major degrading problems that greatly drag down the positioning accuracy of a robot have been fairly resolved. The embodiment conducts the details of the development of such a multiple DOF ultra-precision robotic system for the general applications in precision engineering.

Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).

Abstract: A ripple suppressor/compensator useful in the general area of motion control and applicable to a wide range of servomechanisms exhibiting a force ripple characteristics, including the permanent magnet linear motors. An adaptive feed-forward control signal is generated which compensates for the ripple force, thus allowing for more precise tracking performance to be achieved.

Abstract: There is provided a finite type rolling guide deviation correcting method and system capable of detecting the deviation in relative position between a rolling guide and a movable body if the deviation in relative position increases, and automatically carrying out a correcting operation for returning the deviation in relative position to a normal positional relationship. The finite type rolling guide deviation correcting method corrects a relative positional relationship between a finite type rolling guide for guiding a reciprocating motion of a movable body and the movable body.

Abstract: Stage devices are disclosed that achieve high positioning and movement accuracy while producing substantially reduced outwardly extending stray magnetic fields. The stage devices are especially suitable for use in a charged-particle-beam (CPB) microlithography system because they cause substantially reduced beam perturbations. A stage device comprises multiple linear motors and a slider arranged relative to each other such that the intersection point of drive forces applied by the linear motors to move the slider coincides with the center of gravity of the slider. Each linear motor includes a respective yoke in which permanent magnets are disposed such that pairs of opposing magnets face one another across a gap, each pair of opposing magnets has similarly oriented respective poles, and the orientation is alternatingly reversed in each subsequent pair of opposing magnets in the yoke.

Abstract: A high accuracy stage supported in six degrees of freedom by electromagnetic bearings. Movements in the horizontal plane of the stage are controlled by variable reluctance actuators which are mounted between the high accuracy stage and a coarse stage so as not to distort the high accuracy stage during movements thereof. The high accuracy stage is supported in three vertical degrees of freedom by electromagnetic actuators disposed between the coarse stage and the high accuracy stage and aided by a supplemental vertical support disposed adjacent to the actuators. Preferably, the high accuracy stage is suspended from a bar supported by the supplemental vertical support, which is preferably air bellows.

Abstract: A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage.

Abstract: An XY table used in a semiconductor manufacturing apparatus including lower (X table) fixed to an X movable element and an upper table (Y table) fixed to a Y movable element, in which the upper table (Y table) is supported movably in a Y direction and immovably in an X direction on the lower table (X table), the X movable element is immovable in the Y direction with respect to the X motor main body, the Y movable element is movable in the X direction with respect to the Y motor main body. Furthermore, the Y motor main body is provided with a permanent magnet that covers an entire region of movement of a magnetic action component (coils) of the Y movable element in the X direction.

Abstract: An XY-axes table having a base, a plurality of linear guiding apparatuses, a stage, an X-axis drive linear motor and a Y-axis drive linear motor. The linear motor include an armature and a movable element relatively movable with respect to the armature. The linear motor further includes first magnetic pole teeth rows which are magnetically connected to a first magnetic pole of the armature and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to a moving direction of the movable element. Second magnetic pole teeth rows which are magnetically connected to a second magnetic pole of the movable element are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to the moving direction of the movable element.

Abstract: A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils on the window frame guide co-operating with magnetic tracks fixed on the base. The stage is driven inside the window frame guide in the Y-axis direction by motor coils located on the stage co-operating with magnetic tracks located on the window frame guide. Forces from the drive motors of both the window frame guide and the stage are transmitted through the center of gravity of the stage, thereby eliminating unwanted moments of inertia. Additionally, reaction forces caused by the drive motors are isolated from the projection lens and the alignment portions of the photolithography machine.

Abstract: An apparatus and method for operational control of a reciprocating motor compressor, includes performing an operation of the reciprocating motor compressor precisely and accurately. In addition, with the above apparatus and method, the phase difference between a first speed value of the motor (or first TDC value) and current applied to the motor is detected, the second speed value of the motor at the inflection point of the detected phase value (or second TDC value) is detected and stored as a reference value, and the speed of the motor is controlled on the basis of the reference value and the first speed value of the motor (or the first TDC value).

Abstract: Stage devices are disclosed that include gas-actuation and reaction-force-canceling mechanisms. In an embodiment, an X-axis moving guide extending in the X direction engages a lower stage via a gas bearing. Y-axis sliders (movable elements) are provided at both ends of the X-axis moving guide. A Y-axis fixed guide 8 engages each Y-axis slider via a gas bearing. Each Y-axis slider and respective fixed guide constitute a respective pneumatic actuator. Respective mounting members are provided near the ends of each fixed guide, with interposed gas bearings, and each fixed guide is slidably affixed to a base plate. An actuator for stroke correction is provided in association with each mounting member.

Abstract: A control apparatus for an electromagnetically driven valve is provided which is applied to an electromagnetically driven valve in which a movable portion including an armature and a valve element is driven using an electromagnetic force generated by an electromagnet. This control apparatus includes a controller. This controller performs feedback control such that a value of a current which is actually supplied to the electromagnet becomes substantially equal to a value of a desired attracting current when displacing the movable portion by supplying an attracting current to the electromagnet. Further, the controller variably sets a feedback gain used in feedback control of the attracting current, based on a distance between the electromagnet and the armature.

Abstract: A method for controlling and positioning a two-dimensional electric motor is disclosed. The electric motor has a coil array and a magnet array. The method controls the motor in two directions in the plane of the magnet array and about a third direction generally orthogonal to the plane. The method includes: determining currents for generating the desired forces, determining a resultant torque that would be generated from applying the determined currents, determining current adjustments to compensate for the resultant torque, and applying a current equal to the sum of the determined currents and the current adjustments to the coils to interact with the magnetic fields of the magnet array. The currents are applied to the portion of the coil array within the magnetic field of the magnet array, including those coils which are only partially within the magnetic field of the magnet array. Alternatively, the currents could be applied to all of the coils.

Abstract: Stage apparatus are disclosed for holding an object (e.g., substrate or reticle, for example) in a microlithography system, especially a system for performing microlithography in a vacuum environment. The stage apparatus provides movement of a stage (intended to hold the object) in X and Y directions of a guide plane. The stage is mounted to an arm member having at least first and second ends situated symmetrically relative to the stage. The ends include linear-motor movers that interact with corresponding stators, and include gas bearings on surfaces that slide relative to other surfaces as the stage is moved within the guide plane. The linear-motor movers can be one- or two-dimensional movers and desirably allow &thgr;-direction motion of the stage. Other configurations include guide members and sliders that undergo sliding motion relative to the guide members via non-contacting gas bearings.

Abstract: A reaction frame structure for isolating the vibrations induced by reaction forces from stage motions, such as for a guideless stage. The reaction frame supports the driving motors in a manner whereby the reaction frame is structurally decoupled from the stage (e.g., by a slidable coupling) at least with respect to reaction forces in one direction of motion. In one embodiment, the fixed portion of the drive devices for effecting stage motion in a first direction is coupled to the reaction frame by a slidable coupling. The reaction frame is coupled to ground. The rest of the system including the stage is isolated from ground by deploying a vibration isolation system. A spring damper absorbs the reaction forces of the drive devices in the first direction. In another embodiment, the reaction frame is slidably supported on the same base as the stage. Dampers may be provided to the reaction frame along the first direction and/or a second orthogonal direction.

Abstract: An oscillation isolator for supporting an oscillation isolation platform on a pedestal includes an active oscillation isolator having a displacement generating type actuator to reduce oscillation of the platform and a displacement adjuster provided between the active oscillation isolator and the platform or the pedestal for adjusting relative displacement between the active oscillation isolator and the platform or the pedestal. The displacement adjuster has a rigidity higher than that of the active oscillation isolator and is dynamically located in series between the active oscillation isolator and the platform or the pedestal.

Abstract: Three-phase/d-q converters convert an output voltage V outputted from a power converter and a coil current flowing through a propulsion coil to a voltage and a current in a dq rotary coordinate system, respectively. A speed electromotive force observer estimates speed electromotive force based on these voltage and current, and a vehicle angular speed &ohgr;, and a speed electromotive force phase generator calculates a speed electromotive force phase &thgr;e based on the estimated speed electromotive force Zd, Zq. A phase synchronization controller constituted as a secondary PI control system stabilizes the speed electromotive force phase &thgr;e and outputs it as a phase reference &thgr;*. Accordingly, it is possible in a system of an LSM vehicle to obtain the stable phase reference &thgr;* with a minimum deviation even when the vehicle is running at low speed.

Abstract: In the control system, a propulsion force is computed by a propulsion force computing unit based on a current command value outputted from a speed controller, an acceleration is computed by an acceleration computing unit based on the propulsion force and a running resistance outputted from a running resistance computing unit, a speed is computed by a speed computing unit based on the acceleration, and a simulated phase reference value is computed by a phase computing unit. Then, the simulated phase is computed by adding, at a simulated phase computing unit, a predetermined phase delay (e.g. 30 degrees) to the simulated phase reference value. The addition of the phase delay results in generation of synchronizing force in the LSM and thus little deviation between the simulated phase and the actual phase.

Abstract: An integrated self-powered and switching electronic circuit regulates a stable reference voltage and comprises a band-gap voltage generator to produce said stable reference voltage for a system circuit block that is generally supplied by the output of the band-gap generator through a comparator and an error amplifier. A regulating loop is provided between the output of the system block and the input of the voltage generator circuit to supply a voltage signal produced by the output of the system block. Advantageously, the voltage generator circuit incorporates both the comparator and the error amplifier.

Abstract: An improved rotary servovalve system employs a rotary magnetic solenoid having an armature that includes at least one permanent magnet. The armature is rotatable relative to a stator formed as an electromagnet which is energizable to create alternative electromagnetic fields having opposite polarities from each other. When deenergized, the stator allows the armature to return to a neutral, null position from positions of extreme rotation in opposite angular directions due to the magnetic force of the permanent magnet of the armature. The armature is coupled to carry a movable valve element in angular rotation therewith, so that flow through the servovalve of the system can occur in alternative directions. Also, the valve element is biased toward a position in which all of the valve ports are closed when power is removed from the rotary solenoid.

Abstract: A patient bed for use with at least one imaging device in which a plurality of scans to be correlated are performed, as well as in a continuous motion scanner used to compile whole-body scans. The patient bed includes a horizontal rail base and a movable patient surface. Electronic controllers are provided for controlling the horizontal and vertical positioning of the patient surface. The horizontal rail base is secured to the support proximate the scanner. A linear motor is used to generate horizontal motion of the patient bed. The linear motor is controlled using a motion controller in communication with a computer associated with the imaging device. A pedestal is provided for mounting a vertical carriage assembly. A vertical track is carried by the pedestal for controlling vertical travel of the patient bed. A motor is provided for controlling vertical motion. A pallet support member is cantilevered from the vertical carriage assembly for carrying a pallet.

Abstract: A XYZ-axes table including a base, a plurality of linear guiding apparatuses, a stage, an X-axis drive linear motor, a Y-axis drive linear motor, and a Z-axis drive linear motor. The linear motor is constituted by an armature and a movable element being capable of relatively moving with respect to the armature. The linear motor further has magnetic poles and magnetic pole teeth arranged in a predetermined manner.

Abstract: The present invention provides contact sensors capable of determining the pressure distribution over the whole surface of each of joint units having a cylindrical shape, both end portions of which are cut at an offset angle, and constituting robot arms. In order to provide a technology enabling real-time drive control of the robot arms by using detected values from these sensors, the points of intersection of the electrodes are distributed across the whole surface of each joint by forming a pressure-sensitive sheet sensor in which column electrodes arranged in parallel, and row electrodes arranged in a wound-string shape, are combined, these joints having a cylindrical shape, both end portions of which are cut at an offset angle. In addition, by making an electrode structure that covers a prescribed width in both rows and columns, the number of signal output terminals is reduced and the operation processing load is lightened.

Abstract: Stage devices are disclosed that include gas-actuation and reaction-force-canceling mechanisms. In an embodiment, an X-axis moving guide extending in the X direction engages a lower stage via a gas bearing. Y-axis sliders (movable elements) are provided at both ends of the X-axis moving guide. A Y-axis fixed guide 8 engages each Y-axis slider via a gas bearing. Each Y-axis slider and respective fixed guide constitute a respective pneumatic actuator. Respective mounting members are provided near the ends of each fixed guide, with interposed gas bearings, and each fixed guide is slidably affixed to a base plate. An actuator for stroke correction is provided in association with each mounting member.

Abstract: A stage device includes a reaction-force-discharging structure in which a stationary member of a driving mechanism configured with a linear motor and the like disposed in a wafer chamber is connected to an external frame while maintaining the wafer chamber in a hermetic state. When a wafer stage is driven by the linear motor, a reaction force generated by driving the stage is applied to the stationary member. The reaction force is discharged to, e.g., a floor by the reaction-force-discharging structure via an external frame. For example, when the wafer chamber is set to a predetermined atmosphere of gas (including air from which organic substances and the like have been removed), the reaction force caused by driving the wafer stage can be discharged to the outside while maintaining the predetermined atmosphere. In an exposure apparatus using the stage device, accurate exposure is possible by reducing effects of vibration to the greatest extent possible.