Electrostatic Field Patents (Class 324/457)
  • Patent number: 6809522
    Abstract: The present invention is a system for automatically testing and providing notification of an efficacy failure of an electrostatic discharge (ESD) device or devices. The system includes testing circuitry for testing the efficacy of one or more ESD devices, a memory for storing ESD device testing protocol, ESD device test results, employee identification information, e-mail messaging software, and interface connection software, an internet interface, and a processor for controlling the testing circuitry in accordance with the executed process steps of the ESD device testing protocol and for controlling the storing of the ESD device test results in memory, wherein the processor automatically provides email notification of efficacy failure of an ESD device by collecting and formatting an ESD device test result into an e-mail message using the stored e-mail messaging software and forwarding the e-mail through the internet interface using the internet connection software.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: October 26, 2004
    Assignee: Semtronics
    Inventor: Hoa Nguyen
  • Publication number: 20040169516
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Application
    Filed: March 1, 2004
    Publication date: September 2, 2004
    Inventor: Vladimir Kraz
  • Publication number: 20040151672
    Abstract: A particle counter counts particles in aerosol having a particle size of from 2 nm to 50 nm in an operating pressure range from an atmospheric pressure through a reduced pressure to a low vacuum and calculate a particle size distribution. The particle counter charges particles in the aerosol and applies an electrostatic field thereto, and mixes the aerosol with a non-charged sheath gas flow shaped like a laminar flow whereby the respective particles separate into traces depending on their particle size where they can be counted. Further, by using an electron multiplier for exciting cluster ions to detect the charged particles and operating it as a high-pass filter, even if the number density of the particles is small, it is possible to effectively count the particles.
    Type: Application
    Filed: January 23, 2004
    Publication date: August 5, 2004
    Applicant: Matsushita Electric Industrial Co., Ltd.
    Inventors: Takehito Yoshida, Nobuyasu Suzuki, Toshiharu Makino, Yuka Yamada
  • Patent number: 6771081
    Abstract: Micro-electromechanical (MEM) devices having their fixed and movable members immersed in a liquid medium. Movement is effected by applying a stimulus which creates a force that causes the movable member to move with respect to the fixed member. The movable and fixed members are immersed in a liquid medium having desired characteristics. The liquid is preferably selected to have a viscosity which critically damps the motion of the movable member. The liquid may also be chosen to provide a dielectric constant greater than one, which, where applicable, increases the electrostatic force created for a given drive voltage, and the device's capacitance sensing range, over what they would be in air. The liquid medium might also be used to improve the device's thermal dissipation characteristics, or to provide improved isolation between structures.
    Type: Grant
    Filed: August 22, 2002
    Date of Patent: August 3, 2004
    Assignee: Rockwell Scientific Licensing, LLC
    Inventors: Robert L. Borwick, III, Philip A. Stupar, Jeffrey F. DeNatale
  • Patent number: 6750659
    Abstract: A electrostatic sensing device for sensing a voltage from a electrostatic device, includes a first actuator having a first membrane and a first electrode, the first membrane being moveable and a second actuator having a second membrane and a second electrode, the second membrane being moveable. Additionally, a control device controls the first actuator and the second actuator to alternatively charge the first actuator with a first charge and the second actuator with a second charge, and a circuit outputs a first voltage linearly based on the first charge and a second voltage linearly based on the second charge.
    Type: Grant
    Filed: June 13, 2002
    Date of Patent: June 15, 2004
    Assignee: Texas Intruments Incorporated
    Inventor: Terence J. Murphy
  • Patent number: 6737871
    Abstract: The present invention is a non-invasive cable tester. The cable tester comprises a sensor for detecting an electric field emitted by a live electric cable. The resulting signal from the sensor is then filtered, amplified, and compared to a threshold value to determine the energization status of the electric cable. A meter can be provided to get a reading of the amplified signal that can be compared to a predetermined threshold value. Also, a detector circuit can be provided that includes a comparator in electrical communication with a light-emitting device such as a light-emitting diode. The detector circuit processes the amplified signal and compares it to a predetermined threshold value. If the electric cable is energized, the output of the comparator either causes the light-emitting device to emit light or not emit light, as desired. This enables an operator to determine the status of the electric cable simply by determining whether the light-emitting device is lit.
    Type: Grant
    Filed: January 27, 2003
    Date of Patent: May 18, 2004
    Assignee: American Electric Power Co., Inc.
    Inventors: John M. Schneider, James R. Booker, Edward J. Koegler, John D. Mandeville
  • Publication number: 20040080320
    Abstract: This wrist technology invention uses the latest miniature state of the art electronics to gather, process and display electromagnetic data in order to warn industrial, recreational and environmental health concerned individuals of electric shock, electrocution and biological hazards. It is run by a highly sophisticated custom software controlled microcontroller that is able to quickly measure, process and present data to a user in a form that will allow quick determination of possible surrounding electrical hazards. This technology used is the key in being able to produce this invention in a unique miniature battery operated package the size of a wristwatch.
    Type: Application
    Filed: October 23, 2002
    Publication date: April 29, 2004
    Inventor: Joseph James Golub
  • Publication number: 20040070400
    Abstract: An apparatus for determining the performances of at least one micromachined or microelectromechanical device (MEMS device) intended to carry a high frequency signal having an intended working frequency is disclosed. The MEMS device comprises a capacitive structure with at least one movable part, able to move with a frequency. The apparatus comprises a voltage signal source, at least one voltage divider circuit arranged between the capacitive structure and the voltage signal source, and a detection unit for detecting and measuring the voltage at the outlet of the voltage divider. The detection unit provides a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage having a measurement frequency lower than the intended working frequency.
    Type: Application
    Filed: May 29, 2003
    Publication date: April 15, 2004
    Inventor: Willem Merlijn van Spengen
  • Patent number: 6700385
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Grant
    Filed: October 22, 2002
    Date of Patent: March 2, 2004
    Assignee: Credence Technologies, Inc.
    Inventor: Vladimir Kraz
  • Patent number: 6693432
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device includes sensors for detecting the parameters and converting them to sensor outputs and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also include an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Grant
    Filed: October 22, 2002
    Date of Patent: February 17, 2004
    Assignee: Credence Technologies, Inc.
    Inventor: Vladimir Kraz
  • Patent number: 6686842
    Abstract: The dielectrophoretic force caused by the non-uniform electric field squared spatial gradient three-dimensional pattern uniquely exhibited by a predetermined type of entity can be detected by a locator device. A human operator holds the device in hand to thereby electrically and dielectrically connect the device to the human operator. The human operator's naturally occurring very low electrical decay time constant is increased through electronic circuitry externally connected to the device. The device is held in a balanced nearly horizontal state, and the operator scans the device in a constant speed uniform linear motion back and forth. An antenna extends from the front of the device, and both are acted on by the dielectrophoretic force.
    Type: Grant
    Filed: May 4, 1998
    Date of Patent: February 3, 2004
    Assignee: DKL International, Inc.
    Inventor: Thomas Afilani
  • Patent number: 6686743
    Abstract: An apparatus for measuring and a method for controlling the static charge developed by a flowable solid as it passes through a conduit. The flowable solid is conveyed through the conduit in such a manner that the powder develops a static charge due to the triboelectric effect as it moves against the conduit walls. The static charge on the solid is then measured using a static charge measuring device such as a Faraday drum or cage.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: February 3, 2004
    Assignee: Univation Technologies, LLC
    Inventors: John James Weick, Robert Olds Hagerty, Per K. Husby, Frederick Yip-Kwai Lo
  • Patent number: 6674366
    Abstract: The dielectrophoretic force caused by the non-uniform electric field squared spatial gradient three-dimensional pattern uniquely exhibited by a predetermined type of inanimate entity can be detected by a locator device. A human operator holds the device in hand to thereby electrically and dielectrically connect the device to the human operator. The human operator's naturally occurring very low electrical decay time constant is increased through electronic circuitry externally connected to the device. The device is held in a balanced nearly horizontal state, and the operator scans the device in a constant speed uniform linear motion back and forth. An antenna extends from the front of the device, and both are acted on by the dielectrophoretic force.
    Type: Grant
    Filed: May 4, 1998
    Date of Patent: January 6, 2004
    Assignee: DKL International, Inc.
    Inventor: Thomas L Afilani
  • Patent number: 6661232
    Abstract: An electric potential sensor comprises a tuning fork having two legs; a detecting electrode provided on one leg of the tuning fork so as to face a surface of which an electric potential is to be detected; a driving piezoelectric member provided on at least one leg of the tuning fork; and feedback piezoelectric members respectively provided on both legs of the tuning fork.
    Type: Grant
    Filed: September 15, 2000
    Date of Patent: December 9, 2003
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Chikahiro Horiguchi
  • Patent number: 6628121
    Abstract: An apparatus is provided for determining the response of an electrometer used in an electrophotographic recording apparatus. The apparatus includes a movable base disposed adjacent said electrometer. The base includes a non-conductive material. A conductive pattern is disposed on the base. The conductive pattern is electrically connected to a variable power supply. A motor moves or drives the base past the electrometer. The motor is controlled by a motor control to vary the speed of movement of said base. A method is also provided for determining the response of an electrometer used in an electrophotographic recording apparatus. An electrometer to be tested is selected and the operational parameters of the electrometer are dynamically tested.
    Type: Grant
    Filed: October 13, 2000
    Date of Patent: September 30, 2003
    Assignee: Heidelberger Druckmaschinen AG
    Inventors: Peter J. Leas, Kenneth P. Friedrich, Gerald M. Darby
  • Publication number: 20030175945
    Abstract: A scanning Kelvin microprobe (SKM) system capable of measuring and analyzing surface characteristics of samples is provided. Also provided is a process of measuring and analyzing surface characteristics of samples. Further, there are provided uses of the SKM system in measuring and analyzing surface characteristics of conductors, semiconductors, insulators, chemicals, biochemicals, photochemicals, chemical sensors, biosensors, biochemical microarrays, microelectronic devices, electronic imaged devices, micromachined devices, nano-devices, corroded materials, stressed materials, coatings, adsorbed materials, contaminated materials, oxides, thin films, and self assembling monolayers.
    Type: Application
    Filed: February 28, 2003
    Publication date: September 18, 2003
    Inventors: Michael Thompson, Larisa-Emilia Cheran
  • Patent number: 6614235
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device includes sensors for detecting the parameters and converting them to sensor outputs, a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device also includes an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: September 2, 2003
    Assignee: Credence Technologies, Inc.
    Inventor: Vladimir Kraz
  • Patent number: 6608483
    Abstract: An electrostatic field sensor configuration and supporting signal processing electronics provides a wider bandwidth than prior art sensors, thus enabling the present sensor to replace three prior art instruments in the application of measuring atmospheric electricity. The quadrature, differential characteristics of the present sensor also provide suppression of unwanted disturbances and more accurate electrostatic field measurements. Besides application in the geophysical instrument known as a field mill, the present sensor may be employed in any system for measuring quasi-static and rapidly changing electrostatic fields.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: August 19, 2003
    Inventor: John P. Hill
  • Patent number: 6600323
    Abstract: A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. An amplifier and the sensitive electrode are combined in an assembly on the vibratory element thereby providing a low impedance amplifier output which in turn allows a narrow spacing around the vibratory element to prevent entry of contaminants. The vibratory element can be provided with a structure which allows measurements with various spatial resolution characteristics.
    Type: Grant
    Filed: August 24, 2001
    Date of Patent: July 29, 2003
    Assignee: Trek, Inc.
    Inventors: Jerzy Kieres, Toshio Uehara, Bruce T. Williams
  • Patent number: 6593567
    Abstract: An ion mobility spectrometer is disclosed which includes a sample input port, an ion generator, an ionization chamber receiving and ionizing samples, an ion gate for causing the ionized samples to travel in a direction, and a drift region for receiving the directed ionized samples and for subjecting the ionized samples to an electric potential. The ionized samples then separate according to their electric charge and mass and are detected by a sensor having an output with linear, non-linear, and logarithmic characteristics. The ion mobility spectrometer further includes circuitry coupled to the sensor for linearizing the output such that the non-linear and logarithmic characteristics are linearized while preserving the linear characteristics.
    Type: Grant
    Filed: May 9, 2000
    Date of Patent: July 15, 2003
    Assignee: Agilent Technologies, Inc.
    Inventor: Mahmoud F. Abdel-Rahman
  • Patent number: 6577115
    Abstract: An invention including an outer shell that can be used to provide separated conductors and a method for installing a conductor in the outer shell is disclosed. The invention can assume many different embodiments. The outer shell is adapted to retain a conductor and includes a base adapted to associate with a support surface. The outer shell also includes a hollow sensing portion that extends from the base and is adapted to retain a conductor. The sensing portion is spaced from the base a distance sufficient to accommodate a portable, hand-held current sensing device. The invention also includes a method of installing a conductor in the hollow sensing portion.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: June 10, 2003
    Inventor: Warren W. Carpenter
  • Patent number: 6573543
    Abstract: A reset device detects a rise of a supply voltage to start outputting a reset signal. The reset device includes a voltage detection circuit for detecting the supply voltage. The voltage detection circuit includes a ferroelectric capacitance element for detecting the supply voltage.
    Type: Grant
    Filed: September 28, 2001
    Date of Patent: June 3, 2003
    Assignee: Sharp Kabushika Kaisha
    Inventor: Hidekazu Takata
  • Patent number: 6573725
    Abstract: A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. The driver transducer is at a location along the beam and is operated at a vibratory frequency such that a virtual mechanical node appears along the beam. This, in turn, reduces vibration at the mechanical attachment node so that the degree of stiffness of the mechanical node does not affect the operating frequency and/or the displacement at the free end of the cantilever.
    Type: Grant
    Filed: August 24, 2001
    Date of Patent: June 3, 2003
    Assignee: Trek, Inc.
    Inventors: Jerzy Kieres, Nenad Nenadic, Thomas B. Jones
  • Patent number: 6570388
    Abstract: The present invention relates to a method which introduce a parasitic series resistance for solving electrostatic discharge voltages by using transmission line pulse method and least square error solution method. In present invention, we introduce a parasitic series resistance, Rs, into the equation which presents the correlation between the transmission line pulse method and human body model. The equation is then rewritten as electrostatic discharge voltage=electrostatic discharge current×(the human body equivalent resistance+the parasitic series resistance) We can obtain the optimal parasitic series resistance and electrostatic discharge voltage by using the least square error solution method.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: May 27, 2003
    Assignee: United Microeletronics Corp.
    Inventors: Ming-Tsan Lee, Chuan-Hsi Liu
  • Patent number: 6559649
    Abstract: A connector assembly for removing static electricity generated in high-speed communication cable as a result of tribocharging is described. The invention is realized with a typical high-speed cable having a connector provided with a dissipative medium and at least one conductive pad. Static electricity on the jacket material of the cable induces a charge in the cable wires, which is bled to the pads via the dissipative medium. The charge on the pad is then grounded prior to or as the cable is connected to a cable jack.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: May 6, 2003
    Assignee: Avaya Technology Corp.
    Inventors: Edward W. Deleu, Min-Chung Jon, Vito Palazzo
  • Publication number: 20030080744
    Abstract: A dielectrometer with a sensor face that carries an excitation electrode driven with a varying voltage. At least two sensing electrodes and a guard electrode are also carried by the sensor face. The sensing electrodes are adapted for single or multiple penetration depth measurements into a test material. The guard electrode surrounds the sensing electrodes and is at about the same voltage as the sensing electrodes.
    Type: Application
    Filed: August 20, 2002
    Publication date: May 1, 2003
    Applicant: Jentek Sensors, Inc.
    Inventors: Neil J. Goldfine, Darrell E. Schlicker, Markus Zahn, Wayne D. Ryan, Ian C. Shay, Andrew Washabaugh
  • Publication number: 20030071628
    Abstract: A low cost diagnostic system for testing the airborne static discharge systems and the grounding systems for aircraft. The present invention is a passive electrostatic detection scheme comprising an array of inexpensive, miniaturized sensors for measuring the detected E-field disturbances from aircraft. The measurements are taken on the runway upon arrival and indicate whether the aircraft had an appreciable accumulated charge indicating a failure of the electrostatic discharge system. The system further verifies that the ground discharge devices are properly working and any charge is dissipated upon landing. In one embodiment the measurement information is transmitted to a central location where the aircraft and the measurement data are matched and maintenance is scheduled for aircraft having high levels of electrostatic charge.
    Type: Application
    Filed: September 27, 2002
    Publication date: April 17, 2003
    Inventors: Paul A. Zank, Eldon M. Sutphin, David W. Buchanan, Thomas G. Cehelnik
  • Patent number: 6545480
    Abstract: The invention pertains to testing technique and designed to be used in the research n the dielectric rigidity of high-voltage equipment gaseous isolation. The technical result of the invention is the achievement of gas dielectric breakdown with relatively low voltage. A corona discharge is generated by supplying the initial voltage to the electrodes, defining the discharge gap so as to ensure a three dimensional load at the corona-producing electrode. Then, the total voltage, sufficient for complete breakdown, is supplied to the discharge gap with the uniformly distributed three-dimensional load and the breakdown of a gaseous dielectric takes place. The present method provides the decrease of corona discharge and formation of impulse pedestal with the help of additional dynamic discharger in the circuit, which electrodes are switched from the closed state to the open one.
    Type: Grant
    Filed: July 19, 2000
    Date of Patent: April 8, 2003
    Assignee: Valery Venginovich Starikov
    Inventor: Igor Viktorovich Zhuravkov
  • Publication number: 20030052691
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Application
    Filed: October 22, 2002
    Publication date: March 20, 2003
    Applicant: Credence Technologies, Inc.
    Inventor: Vladimir Kraz
  • Publication number: 20030048107
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Application
    Filed: October 22, 2002
    Publication date: March 13, 2003
    Applicant: Credence Technologies, Inc.
    Inventor: Vladimir Kraz
  • Patent number: 6512355
    Abstract: Materials display innate resistance, capacitance, and inductance (RCL) properties and can therefore be distinguished in accordance with these properties. A high voltage is applied across a material, and a waveform is obtained whose rise time, frequency content, duration, and fall time represent the RCL properties of the material. The high voltage can be applied by passing air containing the material through a pair of screens held at a potential difference or by gluing a sample of the material to two rods held at a potential difference. The voltage may or may not be enough to cause the material to arc.
    Type: Grant
    Filed: September 21, 1999
    Date of Patent: January 28, 2003
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: William E. Kinne, Albert P. Ross
  • Publication number: 20030011375
    Abstract: A connector assembly for removing static electricity generated in high-speed communication cable as a result of tribocharging is described. Damage to components such as integrated circuits which are sensitive to electrostatic discharge is thereby prevented. The invention is realized with a typical high-speed cable having a connector with one or more conductive first terminals, each of which terminates a conducting wire in the cable. The connector is provided with one or more conductive and a dissipative medium which electrically connects the first terminals and pads. Static electricity on the jacket material of the cable induces a charge in the cable wires, which is bled from the first terminals to the pads via the dissipative medium.
    Type: Application
    Filed: July 16, 2001
    Publication date: January 16, 2003
    Inventors: Edward W. Deleu, Min-Chung Jon, Vito Palazzo
  • Publication number: 20030006776
    Abstract: To test the ESD resistance of a semiconductor component (1), for example of a NOS transistor, which can be used as an PSD protective element in a chip (2), a direct current characteristic of the semiconductor component (1) is monitored and the ESD resistance of the respective semiconductor component (1) is inferred depending on this. In particular, the direct current failure threshold of the semiconductor component (1) at which an increased leakage current occurs in the non-conducting direction of the semiconductor component (1) can be monitored in operation of the semiconductor coponent (1) using an applied direct current (Io) and the ESD resistance of the semiconductor component (1) inferred depending on a change in this direct current failure threshold.
    Type: Application
    Filed: May 31, 2002
    Publication date: January 9, 2003
    Applicant: Infineon Technologies AG, Germany
    Inventors: Martin Wendel, Richard Owen, Harald Gossner, Wolfgang Stadler, Philipp Riess, Martin Streibl, Kai Esmark
  • Publication number: 20030006777
    Abstract: A electrostatic sensing device for sensing a voltage from a electrostatic device, includes a first actuator having a first membrane and a first electrode, the first membrane being moveable and a second actuator having a second membrane and a second electrode, the second membrane being moveable. Additionally, a control device controls the first actuator and the second actuator to alternatively charge the first actuator with a first charge and the second actuator with a second charge, and a circuit outputs a first voltage linearly based on the first charge and a second voltage linearly based on the second charge.
    Type: Application
    Filed: June 13, 2002
    Publication date: January 9, 2003
    Inventor: Terence J. Murphy
  • Patent number: 6504375
    Abstract: An electrostatic voltmeter modulator for measuring an electrostatic field between the electrostatic voltmeter modulator and a surface includes a shield, a sensing electrode, and a layer disposed between the shield and sensing electrode. The antistatic coating substantially eliminates the accumulation of electrostatic charge on the layer such that the electrostatic field measured by electrostatic voltmeter modulator substantially equals the electrostatic field corresponding to electrostatic charge on the surface. The electrostatic voltmeter modulator can be used in electrostatic imaging apparatus.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: January 7, 2003
    Assignee: Xerox Corporation
    Inventors: Alan J. Werner, Jr., Bing R. Hsieh
  • Patent number: 6504376
    Abstract: Method and apparatus for modulating the vibrations of an object with a constant amplitude has a sensor, e.g., a piezoelectric transducer, for sensing the vibrations. A light source, e.g., an LED, receives the sensed signal and illuminates a light dependent resistor (LED) In turn, a control circuit controls the vibration amplitude in accordance with the LDR resistance. A full wave bridge rectifier can be used between the sensor and the LED.
    Type: Grant
    Filed: November 29, 2000
    Date of Patent: January 7, 2003
    Assignee: Xerox Corporation
    Inventor: Alan J. Werner, Jr.
  • Publication number: 20030001582
    Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.
    Type: Application
    Filed: June 6, 2001
    Publication date: January 2, 2003
    Inventor: Vladimir Kraz
  • Publication number: 20030001583
    Abstract: In a CCD sensor in which electric charges derived from a plurality of detecting elements 2 are outputted from a signal output portion 9, two diffusion portions 22A and 22B are provided in a parallel manner to each other in the signal output portion 9, and electric charges outputted from a designated detecting element 2 are accumulated into one diffusion portions 22A so as to output the accumulated electric charges. Even in such a case that signal levels derived from detecting elements are low, such a CCD sensor capable of performing a high-precision measuring operation is provided, while a dynamic range of the CCD sensor is widened.
    Type: Application
    Filed: June 27, 2002
    Publication date: January 2, 2003
    Applicant: HORIBA, LTD.
    Inventor: Hiroyuki Ebi
  • Patent number: 6498493
    Abstract: A control circuit 10 inputs a maximum value, which is read out of a resistor 22, to one of the input terminals of a comparator 14 by providing the maximum value to a D/A convertor 18 through a latch 16. The electric potential V, which is an object to be tested, is input to another input terminal of the comparator 14 through a hold circuit 12. The comparator 14 judges the magnitude of the value of the electric potential V by referring to the maximum value and outputs to the control circuit 10. The same operation is also performed for the minimum value. The pass/fail judgement is performed for judging whether the value of the electric potential V is within an allowable range by the comparison with the maximum value and the minimum value. Furthermore, the control circuit 10 performs an A/D conversion of the electric potential V by reading out data D1-Dn from the resistor 20 one after another to gradually change the reference of a comparison.
    Type: Grant
    Filed: January 4, 2001
    Date of Patent: December 24, 2002
    Assignee: Advantest Corporation
    Inventor: Shunsuke Kato
  • Patent number: 6496114
    Abstract: A method and apparatus for locating various entities, including animate human beings and animals, as well as inanimate objects, such as, for example, certain types of plastics, observes and detects a force and subsequent resulting torque, acceleration, vibration or other measurable quantifiable manifestation of the force created by the non-uniform three-dimensional electric field spatial gradient pattern exhibited uniquely by the entity or object. Incorporation of laser energy enhances detection. Specifically, the inclusion of laser radiation enhances a dielectrokinetic effect by creating a localized region of significantly higher dielectric constant via absorption of the laser radiation by the air, and other properties which in turn significantly increases the dielectrophoretic force and resulting torque, and lowers the response time by preferentially directionally orienting or channeling the non-uniformity of the electric field line generated by the entity or object target towards the laser beam region.
    Type: Grant
    Filed: September 21, 2000
    Date of Patent: December 17, 2002
    Assignee: DKL International, Inc.
    Inventor: Thomas L. Afilani
  • Publication number: 20020186016
    Abstract: In an electrification quantity measurement apparatus including a probe for coming in contact with a measurement subject, a first resistor connected at a first terminal thereof to the probe, and a capacitor connected between a second terminal of the first resistor and ground, there is provided an offset current cancel means for canceling an offset current of the capacitor generated by an ionizer in order to measure an electrification quantity of the measurement subject placed in an ionizer environment.
    Type: Application
    Filed: June 4, 2002
    Publication date: December 12, 2002
    Inventor: Noriyuki Kodama
  • Publication number: 20020171431
    Abstract: The present invention relates to a method which introduce a parasitic series resistance for solving electrostatic discharge voltages by using transmission line pulse method and least square error solution method. In present invention, we introduce a parasitic series resistance, Rs, into the equation which presents the correlation between the transmission line pulse method and human body model.
    Type: Application
    Filed: April 6, 2001
    Publication date: November 21, 2002
    Inventors: Ming-Tsan Lee, Chuan-Hsi Liu
  • Patent number: 6472835
    Abstract: A simple and cheap opening and closing motion control device is provided for avoiding pinching of an object by a window glass with high accuracy. The device includes a flexible weather strip arranged along a contact portion of a window frame, the contact portion being touched by the window glass when it is closed, a linear electrostatic-capacity detecting sensor embedded in the weather strip, for detecting an electrostatic capacity in the circumference of the sensor, a control micro-computer for judging whether or not the object is pinched by the closing motion of the window glass, on the basis of the detection of the sensor, and a motor drive circuit for allowing a motor to either stop or open the window glass when the micro-computer judges that the object is on the point of being pinched.
    Type: Grant
    Filed: December 15, 1999
    Date of Patent: October 29, 2002
    Assignee: Yazaki Corporation
    Inventor: Kazuyoshi Ogasawara
  • Publication number: 20020145431
    Abstract: A positionable holder assembly for an electrostatic discharge plate includes a commercially available photographic-type tripod having a geared lateral arm. A non-conductive plate holder is attached to the lateral arm through a non-conductive intermediate support member so that no conductive material is horizontally closer to the plate than the electronic equipment being tested.
    Type: Application
    Filed: April 9, 2001
    Publication date: October 10, 2002
    Inventor: Glenn M. Brady
  • Patent number: 6462552
    Abstract: The electrometer includes an external electrical conductor, a surface electrometer, an inner electrical conductor, an amplifier circuit, and a control section. The external electrical conductor has a first section for probing an electric potential of an object of interest and a second section adapted for contacting said object. The surface electrometer detects a potential of the first section. The inner electrical conductor is isolated from the external electrical conductor, supports the surface electrometer and shields it from an external electric field. The amplifier circuit converts the output of the surface electrometer into a low-impedance signal and amplifies it. The control section computes the electrical potential of the object based on the output of the amplifier circuit. The first section is configured to adapt to a measurement by the surface electrometer.
    Type: Grant
    Filed: October 18, 2000
    Date of Patent: October 8, 2002
    Assignee: NEC Corporation
    Inventor: Kouichi Suzuki
  • Patent number: 6452398
    Abstract: An apparatus for performing non-contacting measurements of the voltage of a conductor includes a conducting membrane coupled to a transducer. The membrane is driven with an A.C. reference voltage, creating alternating attractive and repulsive electrostatic forces caused by the difference in potential between the membrane and the conductor. The transducer generates a signal having the same frequencies as the forces on the membrane, and the amplitudes of the A.C. components are proportional to the unknown voltage on the conductor. By dividing the amplitude of the A.C. components, an accurate determination of the unknown voltage is calculated A plurality of membranes and transducers may be arrayed to provide an image of multiple voltage readings. In addition, it is also possible to measure A.C. and D.C. voltage on the center conductor of an insulated wire without the need to pierce the insulation.
    Type: Grant
    Filed: November 8, 2000
    Date of Patent: September 17, 2002
    Inventors: Joel Libove, Steven Chacko, Jerome Singer
  • Patent number: 6449563
    Abstract: A “coupled phase model” is used to characterize the motion induced by a sound wave of a particle relative to its dispersion medium. A Kuvabara cell model is used to describe the hydrodynamic effects, whereas a Shilov-Zharkikh cell model is used to characterize electrokinetic effects. A different approach for interpreting the experimental data is described in which the electroacoustic sensor is treated as a transmission line with various energy losses due to the reflection and sound attenuation. The experimental output is also expressed as a loss, namely the ratio of the Colloid Vibration Current to the gradient in the acoustic pressure, and is computed by subtracting all other known losses from the total loss of the electroacoustic sensor. These other energy losses can be either calculated or measured directly using reflected pulses.
    Type: Grant
    Filed: October 12, 1999
    Date of Patent: September 10, 2002
    Assignee: Dispersion Technology, INC
    Inventors: Andrei Dukhin, Philip J. Goetz
  • Patent number: 6426630
    Abstract: An electrostatic voltmeter (ESV) and a method thereof provides an electrical signal proportional to an electrostatic potential. The ESV includes a high voltage input section that receives a high voltage signal representative of an electrostatic potential. The high voltage signal input section then generates a current signal representative of the electrostatic potential. The current signal is applied to a control and sensing circuit. A high voltage current source is connected between the high voltage input section and a high voltage potential. The high voltage current source acts as an active load for the control and sensing circuit. A voltage level determining section is connected to a node between the high voltage input section and the high voltage current source for providing an electrical signal proportional to the electrostatic potential. The EVS disclosed herein is particularly useful in measuring electrostatic potential of a photoreceptor to control imaging in an electrophotographic imaging system.
    Type: Grant
    Filed: November 29, 2000
    Date of Patent: July 30, 2002
    Assignee: Xerox Corporation
    Inventor: Alan J. Werner, Jr.
  • Patent number: 6411099
    Abstract: A composition of matter utilizes a pre-polarized (“poled” or previously subjected to a strong DC voltage with or without an external elevated temperature) step converting the matter into an electret state with long-lasting polarization (weeks/months/years) or into a ferroelectric state with permanent polarization. The dielectric replicate matching reference material is used to make a detection device component that triggers and maximizes, when the poled, pre-polarized material/component is subject to externally initiated spinning (set in rotary motion by the detection device's human operator), a dielectrokinesis (phoresis)-like phenomena (force, torque) in exactly the opposite manifestation of the operative mode of dielectrokinesis (phoresis) compared to that which occurs when the component and material are not pre-polarized (poled), both of which can be used to detect the presence of specific entities of a predetermined type that contain as a major component the matching dielectric material.
    Type: Grant
    Filed: March 29, 2000
    Date of Patent: June 25, 2002
    Assignee: DKL International, Inc.
    Inventor: Thomas L. Afilani
  • Publication number: 20020075006
    Abstract: A method is disclosed for processing, optimization, calibration, and display of measured dielectrometry signals. A property estimator is coupled by way of instrumentation to an electrode structure and translates sensed electromagnetic responses into estimates of one or more preselected properties or dimensions of the material, such as dielectric permittivity and ohmic conductivity, layer thickness, or other physical properties that affect dielectric properties, or presence of other lossy dielectric or metallic objects. A dielectrometry sensor is disclosed which can be connected in various ways to have different effective penetration depths of electric fields but with all configurations having the same air-gap, fluid gap, or shim lift-off height, thereby greatly improving the performance of the property estimators by decreasing the number of unknowns.
    Type: Application
    Filed: January 7, 2002
    Publication date: June 20, 2002
    Applicant: JENTEK Sensors, Inc.
    Inventors: Neil J. Goldfine, Markus Zahn, Alexander V. Mamishev, Darrell E. Schlicker, Andrew P. Washabaugh