Using Thermionic Emissions Patents (Class 324/462)
  • Patent number: 11569077
    Abstract: The disclosure includes an outer electrode and an inner electrode. The outer electrode defines an inner volume and is configured to receive injected electrons through at least one aperture. The inner electrode positioned in the inner volume. The outer electrode and inner electrode are configured to confine the received electrons in orbits around the inner electrode in response to an electric potential between the outer electrode and the inner electrode. The apparatus does not include a component configured to generate an electron-confining magnetic field.
    Type: Grant
    Filed: July 11, 2018
    Date of Patent: January 31, 2023
    Assignee: SRI INTERNATIONAL
    Inventors: Sterling Eduardo McBride, Joey J. Michalchuk, Christopher E. Holland, Ashish Chaudhary, Winston K. Chan
  • Patent number: 8928329
    Abstract: A fast response output signal circuit (10) for a cold cathode gauge is provided to produce a fast response output signal (48) in addition to a voltage output signal (40) that is representative of the pressure in the cold cathode gauge. The fast response output signal (48) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: January 6, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: Bert Downing, Donghua Gu, Neil T. Peacock
  • Patent number: 8587319
    Abstract: A method for maintaining one or more operating conditions within a battery operated flame ionization detector (BOFID). The method includes receiving one or more desired values that correspond to the operating conditions and receiving one or more measured values from one or more sensors configured to monitor the operating conditions. After receiving the desired values and the measured values, the method sends one or more commands to a controller disposed inside the BOFID to achieve the desired values based on the measured values.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: November 19, 2013
    Assignee: LDARtools, Inc.
    Inventors: Jeremy Bolinger, Kevin Moses
  • Patent number: 8288715
    Abstract: An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.
    Type: Grant
    Filed: March 16, 2010
    Date of Patent: October 16, 2012
    Assignee: Ulvac, Inc.
    Inventors: Toyoaki Nakajima, Takeshi Miyashita, Yasushi Nagata, Yasufumi Uchida, Hideki Yoshizawa
  • Patent number: 8077909
    Abstract: An apparatus for testing infrared cameras includes: a cover plate which has a plurality of holes formed therethrough and arranged in line in a horizontal direction at a regular interval, the cover plate being adapted to emit an amount of infrared light; and an emission source which is disposed in parallel to and behind the cover plate as viewed from infrared cameras to be tested, the emission source being adapted to emit a different amount of infrared light when compared with the cover plate.
    Type: Grant
    Filed: April 9, 2008
    Date of Patent: December 13, 2011
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Masahito Watanabe, Takayuki Tsuji, Hiroshi Hattori, Nobuharu Nagaoka, Izumi Takatsudo, Masakazu Saka
  • Patent number: 8018234
    Abstract: A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.
    Type: Grant
    Filed: November 23, 2007
    Date of Patent: September 13, 2011
    Assignee: Inficon GmbH
    Inventors: Wolfram Knapp, Martin Wüest
  • Patent number: 7755363
    Abstract: An ionization vacuum gauge includes a cathode electrode, a gate electrode, and an ion collector. The gate electrode is disposed adjacent to the cathode electrode with a distance therebetween. The ion collector is disposed adjacent to the gate electrode also with a distance therebetween. The cathode electrode includes a base and a field emission film disposed thereon facing the ion collector.
    Type: Grant
    Filed: December 29, 2007
    Date of Patent: July 13, 2010
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Yuan-Chao Yang, Jie Tang, Li Qian, Pi-Jin Chen, Liang Liu, Shou-Shan Fan
  • Patent number: 7741852
    Abstract: An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.
    Type: Grant
    Filed: May 8, 2006
    Date of Patent: June 22, 2010
    Assignee: Mori Patent Office
    Inventors: Fumio Watanabe, Reiki Watanabe
  • Publication number: 20100066380
    Abstract: A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.
    Type: Application
    Filed: November 23, 2007
    Publication date: March 18, 2010
    Inventors: Wolfram Knapp, Martin Wüest
  • Patent number: 7609067
    Abstract: Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement. In one embodiment, an ion gauge substrate is formed. The electronic portion of the MEMs ion gauge is assembled by coupling a plurality of ion collectors with the ion gauge substrate, wherein the coupling of the plurality of ion collectors with the ion gauge substrate further comprises performing an operation that causes the plurality of ion collectors to be bowed out of plane to form a three dimensional arrangement.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: October 27, 2009
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chien-Hua Chen, James McKinnell
  • Publication number: 20090096460
    Abstract: An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.
    Type: Application
    Filed: May 8, 2006
    Publication date: April 16, 2009
    Inventors: Fumio Watanabe, Reiki Watanabe
  • Patent number: 6756785
    Abstract: A method operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power level is increased and decreased in steps, and the gauge pressure monitored following each increase and decrease. In another embodiment the rate of change in the gauge pressure is monitored while the degas power level is increased. If it is determined from the monitored rate of change that the gauge pressure may exceed the upper limit, the degas power increases can be stopped or the degas power decreased. These operation are continued until predetermined final degas conditions are met. A display can be activated following the successful completion of the degas operation.
    Type: Grant
    Filed: July 25, 2002
    Date of Patent: June 29, 2004
    Assignee: MKS Instruments, Inc.
    Inventors: Neil T. Peacock, Stacy W. Wade
  • Patent number: 6198105
    Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: March 6, 2001
    Assignee: Helix Technology Corporation
    Inventor: Daniel Granville Bills
  • Patent number: 6081121
    Abstract: Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, an ion collector electrode. Circuitry is provided (a) for providing an electron emission current from the electron source (b) for measuring the heating power W.sub.X of the electron source to obtain a measured value of the heating power at an unknown pressure P.sub.X and (c) measuring the ion current to the collector electrode to obtain a measured value of the positive ion current i.sub.+X at the unknown pressure. A memory is also provided for storing at least one equation for pressure, the pressure equation being obtained from a reference gauge by measuring the current i.sub.+cal to the positive ion collector electrode, the electron emission current i.sub.-cal from the electron source and the heating power W.sub.cal of the electron source of the reference gauge at selected calibration pressures P.sub.cal and selected heating powers W.sub.
    Type: Grant
    Filed: January 21, 1998
    Date of Patent: June 27, 2000
    Assignee: Helix Technology Corporation
    Inventor: Daniel Granville Bills
  • Patent number: 6046456
    Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.
    Type: Grant
    Filed: March 26, 1999
    Date of Patent: April 4, 2000
    Assignee: Helix Technology Corporation
    Inventor: Daniel Granville Bills
  • Patent number: 6025723
    Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.
    Type: Grant
    Filed: August 27, 1997
    Date of Patent: February 15, 2000
    Assignee: Granville-Phillips Company
    Inventor: Daniel Granville Bills
  • Patent number: 5801535
    Abstract: Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, an ion collector electrode. Circuitry is provided (a) for providing an electron emission current from the electron source (b) for measuring the heating power W.sub.X of the electron source to obtain a measured value of the heating power at an unknown pressure P.sub.X and (c) measuring the ion current to the collector electrode to obtain a measured value of the positive ion current i.sub.+X at the unknown pressure. A memory is also provided for storing at least one equation for pressure, the pressure equation being obtained from a reference gauge by measuring the current i.sub.+cal to the positive ion collector electrode, the electron emission current i.sub.-cal from the electron source and the heating power W.sub.cal of the electron source of the reference gauge at selected calibration pressures P.sub.cal and selected heating powers W.sub.
    Type: Grant
    Filed: November 12, 1996
    Date of Patent: September 1, 1998
    Assignee: Granville-Phillips Company
    Inventor: Daniel Granville Bills
  • Patent number: 5422573
    Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.
    Type: Grant
    Filed: December 10, 1993
    Date of Patent: June 6, 1995
    Assignee: Granville-Phillips Company
    Inventors: Daniel G. Bills, Michael D. Borenstein, Paul C. Arnold
  • Patent number: 5373240
    Abstract: A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:a) a thermionic cathode filament which has a central active part and lateral support parts;b) an essentially flat, diaphragm-like control electrode,c) an essentially flat apertured acceleration electrode andd) an essentially flat ion collector electrode,and with a base plate on which the control electrode, the acceleration electrode and ion collector electrode are mounted, in each case via support means running at right angles to the main part of the relevant electrode and via a support bolt connected to the support means.
    Type: Grant
    Filed: February 1, 1994
    Date of Patent: December 13, 1994
    Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
    Inventor: Haas Guenter
  • Patent number: 5300890
    Abstract: A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:(a) a thermionic cathode filament which has a central active part and lateral support parts;(b) an essentially flat, diaphragm-like control electrode,(c) an essentially flat apertured acceleration electrode and(d) an essentially flat ion collector electrode,(e) a base plate on which the filament, the control electrode, the acceleration electrode and ion collector electrode are mounted,wherein the base plate consists of a ceramic material and has a plurality of through holes, and each of said control, acceleration and ion collector electrodes comprises a support member having essentially a shape of an inverted "U" with first and second legs, one of said legs of each electrode support member extending through a corresponding hole of said base plate and being fixed therein.
    Type: Grant
    Filed: April 10, 1992
    Date of Patent: April 5, 1994
    Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
    Inventor: Guenter Haas
  • Patent number: 5296817
    Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.
    Type: Grant
    Filed: June 30, 1992
    Date of Patent: March 22, 1994
    Assignee: Granville-Phillips Company
    Inventors: Daniel G. Bills, Michael D. Borenstein, Paul C. Arnold
  • Patent number: 5250906
    Abstract: Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, and an ion collector electrode, including storing a plurality of calibration data sets for at least collector electrode currents and gauge sensitivities obtained with at least one reference gauge at representative values of known pressures; and calculating the gauge sensitivity corresponding to an unknown pressure in response to at least one of the data sets together with a measured value of the ion collector current. The data sets may also include representative values of the heating powers of the electron source so that the calculated sensitivity may also be compensated for variations in the electron source heating power.
    Type: Grant
    Filed: October 17, 1991
    Date of Patent: October 5, 1993
    Assignee: Granville-Phillips Company
    Inventors: Daniel G. Bills, Michael D. Borenstein
  • Patent number: 5191799
    Abstract: The invention relates to a measured value pickup for vacuum measurements, with the pickup including a sensor as well as electronic circuits for supplying the sensor with voltage, and a signal processing device. In order to be able to employ the measure value pickup independently of the location of the measured value processing system, it is proposed to configure it as a transmitter.
    Type: Grant
    Filed: June 27, 1990
    Date of Patent: March 9, 1993
    Assignee: Leybold AG
    Inventors: Anno Schoroth, Theo Koopmann
  • Patent number: 5128617
    Abstract: An ionization gauge and controller therefor where the gauge has a sensitivity which is reproducible gauge to gauge and stable over time in the same gauge. An ionization gauge with a very much lower and a somewhat higher pressure limit than prior art gauges is also disclosed. Elements are also described for launching all electrons in a tight beam in Bayard-Alpert type geometry, so that all the conditions for reproducible and stable sensitivity are satisfied. Elements are also described for collecting all electrons at low energy so that soft X-ray production is negligible.
    Type: Grant
    Filed: April 11, 1990
    Date of Patent: July 7, 1992
    Assignee: Granville-Phillips Company
    Inventor: Daniel G. Bills
  • Patent number: 5051748
    Abstract: A transmitting antenna radiates a micro-wave field through an opening in the form of a rectangular wave-guide applied against the separation surface between a first medium, in which it is located, and a second medium, in which an object is buried. The micro-wave radiation reflected by the object is collected through the opening of a receiving antenna, also in the form of a rectangular wave-guide, applied against the radiating opening of the transmitting antenna. The collected radiation is measured at a series of points by means of pinpoint antennae located in the collecting opening. Thanks to the antennae arrangement, the collected radiation can be used as such, without having to subtract therefrom the result of a reference measurement. The invention can be used particularly to obtain, non destructively, images of metal bars buried in reinforced concrete.
    Type: Grant
    Filed: August 3, 1989
    Date of Patent: September 24, 1991
    Assignees: Centre National de la Recherche Scientifique, Etat-Francais-Laboratoire Central Ponts et Chaussees
    Inventors: Christian Pichot, Luc Chommeloux, Dominique Picard, Jean-Charles Bolomey
  • Patent number: 4902977
    Abstract: A gas ionization type vacuum gauge for testing the internal vacuum levels to below 10.sup.-6 torr is disclosed which uses a multipactor discharge means as the source for the electron current used to ionize residual gas molecules. The invention comprises an RF field enhancing cavity which can be constructed of high-vacuum-compatible materials, able to withstand bake-out microwave temperatures and a negatively biased ion collection wave, wire, or grid. A simple ceramic RF feed-through permits simple and noninvasive pressure measurements. The device can be made much smaller than conventional gauges.
    Type: Grant
    Filed: January 10, 1989
    Date of Patent: February 20, 1990
    Assignee: University of Utah
    Inventors: Michael B. Kenny, Larry R. Barnett, Richard W. Grow, J. Mark Baird
  • Patent number: 4792763
    Abstract: A hot cathode ionization gauge with which neutral gas densities in the ra 10.sup.17 to 10.sup.21 m.sup.-3 can be measured, in particular under the conditions typical of fusion-orientated plasma experiments (magnetic field strength from 0 to more than 3 tesla, magnetic field direction varying by up to +/-20 degrees or more and strong plasma-induced noise background), and which is of robust design, reliable in operation and very compact and has a high sensitivity which depends in a reproducible manner on the magnetic field strength and is independent, in a certain degree which is predetermined and can be influenced by the construction, of the field direction and, within a wide range, of the gas density comprises the following electrodes arranged in mutually spaced relationship in the stated order along an axis: a cathode consisting of a tungsten wire at least 0.
    Type: Grant
    Filed: July 13, 1987
    Date of Patent: December 20, 1988
    Assignee: Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften e.V.
    Inventor: G/u/ nther Haas
  • Patent number: 4471661
    Abstract: In electronic devices for measuring pressures in vacuum systems, the metal elements which undergo thermal deterioration are made readily replaceable by making them parts of a simple plug-in unit. Thus, in ionization gauges, the filament and grid or electron collector are mounted on the novel plug-in unit. In thermocouple pressure gauges, the heater and attached thermocouple are mounted on the plug-in unit. Plug-in units have been designed to function, alternatively, as ionization gauge and as thermocouple gauge, thus providing new gauges capable of measuring broader pressure ranges than is possible with either an ionization gauge or a thermocouple gauge.
    Type: Grant
    Filed: May 5, 1982
    Date of Patent: September 18, 1984
    Inventor: David Edwards, Jr.
  • Patent number: 4314205
    Abstract: The operating range of an ionization tube vacuum gauge is increased by applying at least two different bias voltages to the tube and measuring ion current for the two bias voltages. The ratio of the ion currents indicates vacuum pressure in the range of 10.sup.-1 to above 2 Torr. An ionization tube vacuum gauge provides a pressure read-out by the linear ion current response of an ionization tube between 10.sup.-10 Torr and 10.sup.-2 Torr. The non-linearity of the ion current response between 10.sup.-2 Torr and 10.sup.-1 Torr is compensated by a non-linear amplifier. Above 10.sup.-1 Torr the ratio of ion currents is utilized for determining pressure.
    Type: Grant
    Filed: November 19, 1979
    Date of Patent: February 2, 1982
    Inventors: Ronald M. Paitich, Donald D. Briglia
  • Patent number: 4307323
    Abstract: A hot filament ionization gauge is provided with a very small diameter and/or very short collector to limit interception of X-ray flux. Suitable gauge sensitivity is achieved by additionally collecting ions at the collector support, which is shielded from the X-ray flux by a shield. Collection of ions by the shield is avoided by maintaining the shield at grid potential.
    Type: Grant
    Filed: April 4, 1980
    Date of Patent: December 22, 1981
    Assignee: Granville-Phillips Company
    Inventors: Daniel G. Bills, Paul C. Arnold
  • Patent number: 4270091
    Abstract: A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such spectral line, and the current drawn from the excitation source provides a measure of the total pressure. A calibration technique based upon comparing the emitted light intensity with the ion currents associated with the excitation process yields an accurate measure of the relative partial pressure. Use of a filter to selectively pass radiation from a known constituent in known proportion in ambient gas provides an indication of the presence of a leak without the need for probing with a test gas. Provision for passing an evaporant stream through the excitation region permits accurate monitoring of the evaporant flux from which deposition rate is determined.
    Type: Grant
    Filed: November 17, 1978
    Date of Patent: May 26, 1981
    Assignee: Varian Associates, Inc.
    Inventor: Joseph K. Mann