For Monitoring Pressure Patents (Class 324/460)
  • Patent number: 11092506
    Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. The cathode includes a first cathode plate including a through hole through which the anode extends, and a storage portion configured to store the electromagnetic wave source, a second cathode plate arranged separately from the first cathode plate, a third cathode plate arranged between the first cathode plate and the second cathode plate to be in contact with the first cathode plate, and a member configured to surround the first cathode plate, the second cathode plate, and the third cathode plate.
    Type: Grant
    Filed: January 6, 2021
    Date of Patent: August 17, 2021
    Assignee: CANON ANELVA CORPORATION
    Inventor: Yohsuke Kawasaki
  • Patent number: 10928265
    Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: February 23, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney, Clinton L. Percy
  • Patent number: 10914649
    Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. A shape of the through hole on a section along an axial direction of the anode includes a concave portion sandwiched between two convex portions.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: February 9, 2021
    Assignee: CANON ANELVA CORPORATION
    Inventor: Yohsuke Kawasaki
  • Patent number: 10352811
    Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: July 16, 2019
    Assignee: MKS Instruments, Inc.
    Inventors: Gerardo A. Brucker, Timothy C. Swinney, Brandon J. Kelly, Alfred A. Funari, Michael N. Schott, Kristian S. Schartau
  • Patent number: 10222287
    Abstract: Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: March 5, 2019
    Assignee: CANON ANELVA CORPORATION
    Inventors: Yohsuke Kawasaki, Itaru Enomoto, Isao Mochizuki
  • Patent number: 9726566
    Abstract: A vacuum pressure gauge is described herein. One apparatus includes an ion trap configured to trap antimatter therein in a vacuum chamber, and a controller configured to determine a lifetime of the antimatter trapped in the ion trap and determine a pressure in the vacuum chamber based, at least in part, on the determined lifetime of the antimatter.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: August 8, 2017
    Assignee: Honeywell International Inc.
    Inventor: Joshua Dorr
  • Patent number: 9316555
    Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: April 19, 2016
    Assignee: Canon Anelva Corporation
    Inventors: Itaru Enomoto, Hideo Mano
  • Patent number: 9105428
    Abstract: The present invention relates to a method of extinguishing an electric arc, which occurs in low or high voltage switchgears, by pulse discharge. The electric arc is cut like a “fuse” by connecting a condenser (201) to both ends of the electric arc at the moment when it occurs and discharging the condenser (201) through the electric arc. The condenser is charged using a resistor (202) and a diode (203), and its discharge is adjusted by some auxiliary contacts.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: August 11, 2015
    Inventors: Chol Min Pak, Sang Hwan Kwon
  • Publication number: 20150108993
    Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
    Type: Application
    Filed: December 24, 2014
    Publication date: April 23, 2015
    Inventors: Larry K. Carmichael, Jesse A. Weber, John H. Henry, Michael N. Schott, Gerardo A. Brucker
  • Publication number: 20150091579
    Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
    Type: Application
    Filed: September 29, 2014
    Publication date: April 2, 2015
    Inventors: Gerardo A. Brucker, Timothy C. Swinney, Brandon J. Kelly
  • Patent number: 8947098
    Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: February 3, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: Larry K. Carmichael, Jesse A. Weber, John H. Henry, Michael N. Schott, Gerardo A. Brucker, Kenneth D. Van Antwerp, Jr.
  • Patent number: 8928329
    Abstract: A fast response output signal circuit (10) for a cold cathode gauge is provided to produce a fast response output signal (48) in addition to a voltage output signal (40) that is representative of the pressure in the cold cathode gauge. The fast response output signal (48) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: January 6, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: Bert Downing, Donghua Gu, Neil T. Peacock
  • Publication number: 20140368210
    Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
    Type: Application
    Filed: April 24, 2014
    Publication date: December 18, 2014
    Applicant: CANON ANELVA CORPORATION
    Inventors: ITARU ENOMOTO, HIDEO MANO
  • Patent number: 8773138
    Abstract: A discharge ionization current detector using a low-frequency barrier discharge is provided to improve the linearity of detection sensitivity with respect to a sample introduction amount. From a lower end of a lower gas passage connected to a lower end of an upper gas passage, a dilution gas is supplied upward against a downward flow of a plasma gas. A gas discharge passage for discharging a plasma gas, the dilution gas and a sample gas is arranged between an ion-collecting electrode and a bias voltage application electrode. The sample gas introduced through a capillary tube is mixed with the plasma gas and the dilution gas due to a disturbed flow generated by collision of the plasma gas and the dilution gas. The sample component is efficiently ionized by light from the plasma without undergoing light-shielding effect of concentrated sample components.
    Type: Grant
    Filed: June 23, 2011
    Date of Patent: July 8, 2014
    Assignee: Shimadzu Corporation
    Inventors: Kei Shinada, Shigeyoshi Horiike, Takahiro Nishimoto
  • Publication number: 20140152320
    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
    Type: Application
    Filed: February 6, 2014
    Publication date: June 5, 2014
    Applicant: Brooks Automation, Inc.
    Inventor: Gerardo A. Brucker
  • Patent number: 8729465
    Abstract: A vacuum measurement device includes a grid (10) and an electron source (20) provided inside a vacuum vessel, and an ion beam (100) extracted outside the grid is captured by an ion collector (40) and is converted into a current signal. The grid (10) is a grid-shaped cylinder, and an ion outlet (11) is opened and elongated in the longitudinal direction along the side surface of the grid (10). The vacuum measurement device includes a primary ion collector (40) capturing specific ions and a secondary ion collector (50) capturing other ions. The gas molecule density of the ion source is obtained from a total current of the primary and secondary ion collectors, and a ratio of the gas molecule density of the specific ions relative to the gas molecule density is obtained from a ratio of the current of the primary ion collector (40) relative to the total current.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: May 20, 2014
    Assignee: Vaclab Inc.
    Inventor: Fumio Watanabe
  • Patent number: 8686733
    Abstract: An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
    Type: Grant
    Filed: December 17, 2008
    Date of Patent: April 1, 2014
    Assignee: Brooks Automation, Inc.
    Inventor: Gerardo A. Brucker
  • Patent number: 8648604
    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: February 11, 2014
    Assignee: Brooks Automation, Inc.
    Inventor: Gerardo A. Brucker
  • Patent number: 8638106
    Abstract: A microdischarge-based pressure sensor that includes an anode, two cathodes, a drive circuit connected to the electrodes, and a measurement circuit that permits sensing of transient current pulses flowing through at least one of the electrodes. One of the cathodes is interposed between the anode and other cathode, and it includes a central opening which permits a microdischarge to occur between the anode and each cathode in response to applied voltage pulses from the drive circuit. Changes in relative current between the two cathodes are indicative of changes in ambient pressure in the microdischarge chamber. In other embodiments, a sealed chamber can be used with one of the electrodes acting as a diaphragm which deflects based on external pressure and changes its inter-electrode spacing, thereby altering the relative cathode currents.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: January 28, 2014
    Assignee: The Regents of the University of Michigan
    Inventors: Yogesh B. Gianchandani, Scott Andrew Wright
  • Patent number: 8614581
    Abstract: A vacuum ionization gauge includes a cold cathode, a shield electrode, an anode ring, and a collector. The shield electrode includes a receiving space. The anode ring is located in the receiving space of the shield electrode. The cold cathode includes a field emission unit and a grid electrode corresponding to the field emission unit. The field emission unit includes at least one emitter. Each of the at least one emitter includes a carbon nanotube pipe. The carbon nanotube pipe has a first end, a second end, and a main body connecting to the first end and the second end. The second end has a plurality of carbon nanotube peaks.
    Type: Grant
    Filed: April 21, 2011
    Date of Patent: December 24, 2013
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Yang Wei, Shou-Shan Fan
  • Patent number: 8587319
    Abstract: A method for maintaining one or more operating conditions within a battery operated flame ionization detector (BOFID). The method includes receiving one or more desired values that correspond to the operating conditions and receiving one or more measured values from one or more sensors configured to monitor the operating conditions. After receiving the desired values and the measured values, the method sends one or more commands to a controller disposed inside the BOFID to achieve the desired values based on the measured values.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: November 19, 2013
    Assignee: LDARtools, Inc.
    Inventors: Jeremy Bolinger, Kevin Moses
  • Publication number: 20130249563
    Abstract: A fast response output signal circuit (10) for a cold cathode gauge is provided to produce a fast response output signal (48) in addition to a voltage output signal (40) that is representative of the pressure in the cold cathode gauge. The fast response output signal (48) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.
    Type: Application
    Filed: July 26, 2012
    Publication date: September 26, 2013
    Inventors: Bert Downing, Donghua Gu, Neil T. Peacock
  • Patent number: 8493184
    Abstract: System for remote measuring a physical variable comprising an RF transceiver arranged for transmitting an RF signal and for receiving a reflection signal derived from the transmitted signal. An RF transponder comprises a dielectric material having a dielectric property which is dependent on the physical variable according to a first function. The dielectric material is exposed to the physical variable to be measured. The transponder is arranged to receive the signal transmitted by the transceiver and to reflect a reflection signal, or the second and/or higher harmonics of it, which is dependent on the actual dielectric property. Processing means are provided for comparing the signal transmitted by the transceiver and the reflection signal received from the transponder and for converting the comparison result, e.g. the phase shift, into a value which is representative for the physical variable to be measured. The transponder may be e.g. a patch antenna.
    Type: Grant
    Filed: August 22, 2008
    Date of Patent: July 23, 2013
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventor: Johannes Adrianus Cornelis Theeuwes
  • Patent number: 8456167
    Abstract: A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.
    Type: Grant
    Filed: October 7, 2008
    Date of Patent: June 4, 2013
    Assignee: Edwards Limited
    Inventor: Matthew Key
  • Publication number: 20130106431
    Abstract: An ionization vacuum gauge includes a cathode, an anode and an ion collector. The ion collector component is located at one side of the anode component and spaced from the anode component. The cathode component is located at another side of the anode component and includes an electron emitter, which extends toward the anode component from the cathode component. The electron emitter includes at least one carbon nanotube wire.
    Type: Application
    Filed: October 25, 2012
    Publication date: May 2, 2013
    Inventors: PENG LIU, DUAN-LIANG ZHOU, CHUN-HAI ZHANG, JING QI, PI-JIN CHEN, SHOU-SHAN FAN
  • Patent number: 8384391
    Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: February 26, 2013
    Assignee: Canon Anelva Corporation
    Inventors: Yohsuke Kawasaki, Hideo Mano
  • Patent number: 8350572
    Abstract: An ionization vacuum device measures a pressure in a vacuum vessel, and has: an anode provided inside the vacuum vessel; a cathode provided inside the vacuum vessel; a power source for discharge that supplies electric power for discharge between the anode and the cathode; a power source for cathode-heating that supplies power for heating to the cathode, means for forming a magnetic field in a space between the anode and the cathode; control means for controlling so as to heat said cathode by said power source for cathode-heating while discharge of gas inside said vacuum vessel is caused, and so as to maintain the temperature of said cathode within a temperature range where thermonic electrons are not emitted from said cathode.
    Type: Grant
    Filed: September 9, 2008
    Date of Patent: January 8, 2013
    Assignee: Ampere Inc.
    Inventor: Fumio Watanabe
  • Patent number: 8324904
    Abstract: The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential.
    Type: Grant
    Filed: May 24, 2010
    Date of Patent: December 4, 2012
    Assignee: Canon Anelva Corporation
    Inventor: Yohsuke Kawasaki
  • Patent number: 8242783
    Abstract: An ionization vacuum gauge includes a cathode electrode, a gate electrode, and an ion collector. The cathode electrode includes a base and a field emission film disposed thereon. The gate electrode is disposed adjacent to the cathode electrode with a distance therebetween. The ion collector is disposed adjacent to the gate electrode with a distance therebetween. The field emission film of the cathode electrode includes carbon nanotubes, a low-melting-point glass, and conductive particles.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: August 14, 2012
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Yuan-Chao Yang, Jie Tang, Li Qian, Pi-Jin Chen, Liang Liu, Shou-Shan Fan
  • Patent number: 8169223
    Abstract: An ionization vacuum gauge includes a cathode, an anode and an ion collector. The anode is surrounding the cathode. The ion collector is surrounding the anode. The cathode, the anode and the ion collector are concentrically aligned and arranged in that order. The anode comprises a carbon nanotube structure including a plurality of carbon nanotubes.
    Type: Grant
    Filed: April 30, 2009
    Date of Patent: May 1, 2012
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Lin Xiao, Liang Liu, Kai-Li Jiang, Shou-Shan Fan
  • Patent number: 8120366
    Abstract: To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode 2, a measuring element enclosure (cathode) 1 arranged to surround the anode, and a magnet 3 disposed on the outer periphery of the cathode 1. A discharge trigger supporting electrode 5 having a projection 21 directed toward the center axis of the anode 2 is disposed in a discharge space 9 of the cathode 1. The discharge trigger supporting electrode 5 is removably disposed on the cathode 1, and the distance between the tip of the projection 21 of the discharge trigger supporting electrode 5 and the anode 2 is equal to or more than 0.3 mm.
    Type: Grant
    Filed: May 22, 2009
    Date of Patent: February 21, 2012
    Assignee: Canon Anelva Corporation
    Inventor: Yohsuke Kawasaki
  • Publication number: 20110279127
    Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.
    Type: Application
    Filed: May 12, 2011
    Publication date: November 17, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: YOHSUKE KAWASAKI, HIDEO MANO
  • Publication number: 20110234233
    Abstract: An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
    Type: Application
    Filed: December 17, 2008
    Publication date: September 29, 2011
    Inventor: Gerardo A. Brucker
  • Patent number: 8018234
    Abstract: A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.
    Type: Grant
    Filed: November 23, 2007
    Date of Patent: September 13, 2011
    Assignee: Inficon GmbH
    Inventors: Wolfram Knapp, Martin Wüest
  • Publication number: 20110163754
    Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
    Type: Application
    Filed: March 18, 2011
    Publication date: July 7, 2011
    Applicant: Brooks Automation, Inc.
    Inventors: Larry K. Carmichael, Jesse A. Weber, John H. Henry, Michael N. Schott, Gerardo A. Brucker, Kenneth D. Van Antwerp, JR.
  • Publication number: 20110128010
    Abstract: A microdischarge-based pressure sensor that includes an anode, two cathodes, a drive circuit connected to the electrodes, and a measurement circuit that permits sensing of transient current pulses flowing through at least one of the electrodes. One of the cathodes is interposed between the anode and other cathode, and it includes a central opening which permits a microdischarge to occur between the anode and each cathode in response to applied voltage pulses from the drive circuit. Changes in relative current between the two cathodes are indicative of changes in ambient pressure in the microdischarge chamber. In other embodiments, a sealed chamber can be used with one of the electrodes acting as a diaphragm which deflects based on external pressure and changes its inter-electrode spacing, thereby altering the relative cathode currents.
    Type: Application
    Filed: May 28, 2010
    Publication date: June 2, 2011
    Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Yogesh Gianchandani, Scott Wright
  • Publication number: 20110101988
    Abstract: A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.
    Type: Application
    Filed: October 7, 2008
    Publication date: May 5, 2011
    Inventor: Matthew Key
  • Patent number: 7918139
    Abstract: A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: April 5, 2011
    Assignee: Canon Anelva Corporation
    Inventor: Yohsuke Kawasaki
  • Publication number: 20110062961
    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
    Type: Application
    Filed: August 20, 2010
    Publication date: March 17, 2011
    Applicant: Brooks Automation, Inc..
    Inventor: Gerardo A. Brucker
  • Patent number: 7906971
    Abstract: A system for measuring gas density in a vacuum includes a gauge, a housing for containing the gauge, and a magnet secured to an exterior surface of the housing. The magnet is a flexible magnetic strips, and positioned around the exterior surface of the housing. The gauge includes grid insulator posts extending longitudinally along a tubular section of the housing, and the magnet is secured to the exterior surface of the housing adjacent to the grid insulator posts, and oriented transversely to the grid insulator posts. The magnet is a flexible magnetic strip, and a clamp secures the magnet to the exterior surface of the housing.
    Type: Grant
    Filed: October 14, 2008
    Date of Patent: March 15, 2011
    Assignee: ITT Manufacturing Enterprises, Inc.
    Inventors: Benjamin Aaron Boardwine, Derrick Lamont Journiette
  • Patent number: 7847559
    Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.
    Type: Grant
    Filed: November 24, 2008
    Date of Patent: December 7, 2010
    Assignee: Brooks Automation, Inc.
    Inventor: Richard A. Knott
  • Publication number: 20100301869
    Abstract: The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential.
    Type: Application
    Filed: May 24, 2010
    Publication date: December 2, 2010
    Applicant: CANON ANELVA CORPORATION
    Inventor: Yohsuke Kawasaki
  • Publication number: 20100259273
    Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even in the case of use over a long period of time without needing a complicated apparatus. It has the structure in which a rod-like anode is located in an internal part of a measuring element container (cathode) having a discharge space with one end thereof which is sealed, and a discharge starting auxiliary electrode is mounted on this anode. The discharge starting auxiliary electrode triggers the discharge in a short time by the formation of a carbon nanotube layer on a discharge starting auxiliary electrode plate.
    Type: Application
    Filed: March 16, 2010
    Publication date: October 14, 2010
    Applicant: CANON ANELVA CORPORATION
    Inventors: Yohsuke Kawasaki, Toshio Kikuchi
  • Publication number: 20100237874
    Abstract: An ionization vacuum gauge includes a cathode electrode, a gate electrode, and an ion collector. The cathode electrode includes a base and a field emission film disposed thereon. The gate electrode is disposed adjacent to the cathode electrode with a distance therebetween. The ion collector is disposed adjacent to the gate electrode with a distance therebetween. The field emission film of the cathode electrode includes carbon nanotubes, a low-melting-point glass, and conductive particles.
    Type: Application
    Filed: June 4, 2010
    Publication date: September 23, 2010
    Applicants: TSINGHUA UNIVERSITY, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: YUAN-CHAO YANG, JIE TANG, LI QIAN, PI-JIN CHEN, LIANG LIU, SHOU-SHAN FAN
  • Patent number: 7800376
    Abstract: A method and a device for measuring ultrahigh vacuum are disclosed. The method includes providing a vacuum cold cathode pressure gauge and varying a voltage on an anode of the pressure cell with pressure in such a way that an ion current flow is maintained substantially at its maximum value at all times. A voltage-controlled source either (1) preliminarily scans a whole voltage range, for example, between 1 kV and 12 kV, in a relatively short time, and subsequently sets the source to the voltage, at which the current is substantially at its maximum value or (2) based on a calibration of the gauge, sets the voltage, for a given pressure, to the value that has been previously stored as substantially optimal. The device operates at a voltage that varies with pressure in such a way that the ion current is maintained substantially at its maximum value at all times.
    Type: Grant
    Filed: January 26, 2005
    Date of Patent: September 21, 2010
    Assignee: Institut “Jozef Stefan”
    Inventors: Alenka Vesel, Miran Mozetic
  • Patent number: 7795876
    Abstract: A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.
    Type: Grant
    Filed: March 2, 2006
    Date of Patent: September 14, 2010
    Assignee: Inficon GmbH
    Inventors: Daniel Wetzig, Ludolf Gerdau
  • Patent number: 7793534
    Abstract: A selective gas sensor is for determining the presence of a test gas, for example, helium includes an evacuated housing, sealed by a selectively gas-permeable membrane. The membrane is part of a sight glass, whereby the glass pane is provided with a hole, sealed by the membrane made from a silicon material. The frame of the membrane wall is connected to the housing by means of a high-vacuum soft-metal seal. The housing can also form one of the electrodes of the gas pressure sensor.
    Type: Grant
    Filed: November 29, 2005
    Date of Patent: September 14, 2010
    Assignee: Inficon GmbH
    Inventor: Werner Grosse Bley
  • Patent number: 7791350
    Abstract: An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to outer, in that order. The linear cathode includes a linear base and a field emission film deposited coating on the linear base. The ionization vacuum gauge with low power consumption can be used in a high vacuum system and/or some special vacuum system that is sensitive to heat and light. Such a gauge can be used to determine, simply yet accurately, pressures at relatively high vacuum levels.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: September 7, 2010
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Lin Xiao, Pi-Jin Chen, Zhao-Fu Hu, Yang Wei, Liang Liu, Shou-Shan Fan
  • Patent number: 7768267
    Abstract: An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.
    Type: Grant
    Filed: July 11, 2007
    Date of Patent: August 3, 2010
    Assignee: Brooks Automation, Inc.
    Inventors: Richard A. Knott, Gerardo A. Brucker, Paul C. Arnold
  • Patent number: 7756566
    Abstract: MRI echo data is acquired by performing selective-excitation on regions composed of multi-slices of an object, while the object is moved continuously. The positions of the multi-slices are moved within a predetermined imaging range fixedly determined by an MRI system, according to object movement. This allows positions of the multi-slices to be changed in compliance with the moved object, so that the multi-slices positionally track with the object within the imaging range. Accordingly, a multi-slice imaging technique can be provided, which is executable during even continuous movement of the object.
    Type: Grant
    Filed: January 30, 2006
    Date of Patent: July 13, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yoshio Machida