Abstract: An ionization gauge includes an anode, a cathode, and an electromagnetic wave source. The cathode includes a first cathode plate having a through hole through which the anode passes, a storage portion configured to store the electromagnetic wave source, and a passage arranged between the storage portion and the through hole and configured to pass an electromagnetic wave generated by the electromagnetic wave source.

Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).

Abstract: A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

Abstract: A fast response output signal circuit (10) for a cold cathode gauge is provided to produce a fast response output signal (48) in addition to a voltage output signal (40) that is representative of the pressure in the cold cathode gauge. The fast response output signal (48) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.

Abstract: The present application discloses an integrated circuit comprising a circuit portion (100) coupled between first and second power supply lines (110; 120); a first switch (115, 135) coupled between the first power supply line (110, 120) and the circuit portion (100) for disconnecting the circuit portion from the first power supply line during an inactive mode of the circuit portion; and an arrangement (315, 335, 410) for, during said inactive mode, providing the circuit portion (100) with a fraction of its active mode power supply at least when averaged over said inactive mode to prevent the circuit portion voltage to drop below a threshold value. The present application further discloses a method for controlling such an integrated circuit.

Abstract: In a particle beam therapy system which scans a particle beam and irradiates the particle beam to an irradiation position of an irradiation subject and has a dose monitoring device for measuring a dose of the particle beam and an ionization chamber smaller than the dose monitoring device, the ionization chamber measuring a dose of a particle beam passing through the dose monitoring device, the dose of the particle beam irradiated by the dose monitoring device is measured; the dose of the particle beam passing through the dose monitoring device is measured by the small ionization chamber; and a correction coefficient of the dose measured by the dose monitoring device corresponding to the irradiation position is found based on the dose of the particle beam measured by the small ionization chamber.

Abstract: Methods and systems for detecting and/or collecting particles are disclosed. At least some of the particles are electrically charged by a charger (122). At least some of the charged particles are collected by a collector (140). Information indicating the number of the detected/collected particles based on measured electrical charges of the charged particles is obtained by a processor (170).

Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).

Abstract: A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.

Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.

Abstract: An ionization vacuum device measures a pressure in a vacuum vessel, and has: an anode provided inside the vacuum vessel; a cathode provided inside the vacuum vessel; a power source for discharge that supplies electric power for discharge between the anode and the cathode; a power source for cathode-heating that supplies power for heating to the cathode, means for forming a magnetic field in a space between the anode and the cathode; control means for controlling so as to heat said cathode by said power source for cathode-heating while discharge of gas inside said vacuum vessel is caused, and so as to maintain the temperature of said cathode within a temperature range where thermonic electrons are not emitted from said cathode.

Abstract: The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential.

Abstract: To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode 2, a measuring element enclosure (cathode) 1 arranged to surround the anode, and a magnet 3 disposed on the outer periphery of the cathode 1. A discharge trigger supporting electrode 5 having a projection 21 directed toward the center axis of the anode 2 is disposed in a discharge space 9 of the cathode 1. The discharge trigger supporting electrode 5 is removably disposed on the cathode 1, and the distance between the tip of the projection 21 of the discharge trigger supporting electrode 5 and the anode 2 is equal to or more than 0.3 mm.

Abstract: A system for measuring gas density in a vacuum includes a gauge, a housing for containing the gauge, and a magnet secured to an exterior surface of the housing. The magnet is a flexible magnetic strips, and positioned around the exterior surface of the housing. The gauge includes grid insulator posts extending longitudinally along a tubular section of the housing, and the magnet is secured to the exterior surface of the housing adjacent to the grid insulator posts, and oriented transversely to the grid insulator posts. The magnet is a flexible magnetic strip, and a clamp secures the magnet to the exterior surface of the housing.

Abstract: A method and a device for measuring ultrahigh vacuum are disclosed. The method includes providing a vacuum cold cathode pressure gauge and varying a voltage on an anode of the pressure cell with pressure in such a way that an ion current flow is maintained substantially at its maximum value at all times. A voltage-controlled source either (1) preliminarily scans a whole voltage range, for example, between 1 kV and 12 kV, in a relatively short time, and subsequently sets the source to the voltage, at which the current is substantially at its maximum value or (2) based on a calibration of the gauge, sets the voltage, for a given pressure, to the value that has been previously stored as substantially optimal. The device operates at a voltage that varies with pressure in such a way that the ion current is maintained substantially at its maximum value at all times.

Abstract: An electronic component includes a semiconductor chip with a chip topside, an integrated circuit, and a chip backside. The chip backside includes a magnetic layer. The electronic component further includes a chip carrier with a magnetic layer on its carrier topside. At least one of the two magnetic layers is permanently magnetic such that the semiconductor chip is magnetically fixed on the chip carrier.

Abstract: A cold cathode ionization manometer operating according to the inverse magnetron principle to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10?2 Pa and 1 Pa). To reduce the contamination and thus to extend the service life the measuring tube is provided with two separately controlled and axially displaced cathodes and a coaxially arranged common anode within a vacuum-proof housing.

Abstract: A microwave resonator apparatus (35) includes a microwave resonant cavity (36) in fluid communication chamber (38) are dimensioned to ensure high attenuation of resonant electromagnetic fields without impeding fluid flow. The resonant properties of the cavity (36) are therefore completely insensitive to variations in the volume of the pressure chamber (38). The resonator has a specialised reentrant geometry. Consequently, two of the cavity's resonant modes depend sensitively upon the formation and volume of any liquid phase present in the cavity. The apparatus and the method are suitable for measuring dielectric properties and phase envelope of fluid mixtures (such as a gas condensate fluid). The apparatus can be used for making several phase envelope measurements without risk of contamination.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: A processing system for processing a substrate with a plasma comprises a processing chamber configured for containing a plasma and a substrate support. Electrodes are coupled to the substrate support and an RF power source is coupled to each of the electrodes for biasing the electrodes to create a DC bias on a substrate positioned on the supporting surface. Multiple voltage measurement circuits are electrically coupled to the RF power source and the electrodes to measure voltages at multiple points. A precursor determines the DC bias levels of the electrodes based on the multiple measurement points.

Abstract: A diagnostic method and apparatus includes a pressure gauge member having an enclosed housing, an anode plate, a pair of cathode plates sandwiching the anode plate, an anode connector at an external surface of the gauge, and a lead connecting the anode plate to the anode connector. Each of the anode plate, pair of cathode plates, and lead are confined within the gauge housing. A power supply is provided for supplying power to the anode connector, the power supply including a positive terminal and a negative terminal. A resistor is connected to each of the positive terminal of the power supply and the anode connector of the gauge member. A pair of electromagnets are positioned adjacent the gauge member, each electromagnet having a pole piece formed therein for completing a magnetic circuit outside of the gauge.

Abstract: The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.

Abstract: A vacuum switch 1 includes a grounded vacuum vessel 2. The reliability of monitoring and measuring the vacuum pressure is improved by providing a vacuum pressure measuring terminal 30 at a side plane of the vacuum vessel 2 such that a main circuit 13 and the measuring terminal 30 are electrically separated from each other.

Abstract: A penning type gauge head with an electrode system comprising an anode and a cathode disposed in the magnetic field of a permanent magnet, including an ignition aid for the electrode system. In order to provide rapid and reliable ignition, the ignition aid consists of a least one metal strip attached on the anode, and the free end of the ignition aid extends in the direction toward the cathode.

Abstract: A cold cathode ionization gauge includes a first and second electrode spaced apart and insulated from one another and having a common axis. A magnetic field generator surrounds the gauge and applies a non-time varying magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets adjacent each other. In one embodiment of the invention a non-magnetic annular spacer is placed between the opposed magnets. The magnet arrangement minimizes magnetic flux outside of the gauge while increasing the strength of the magnetic flux inside of the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.

Abstract: A vacuum guage of the ionisation type having a guage head comprising a substantially cylindrical cathode sleeve with an inlet at one end for communication with the vacuum with an anode positioned co-axially within the cathode sleeve; the head also has a guard ring interposed between the cathode sleeve and the anode and a vacuum feed through arrangement in which the anode and the guard ring are held substantially concentrically within the cathode sleeve.

Abstract: A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at at least the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. A member is also provided for removably positioning the glow lamp within the vacuum space whereby the lamp can be removed during bake out and then subsequent thereto, be inserted within the vacuum space to thus enhance longevity of the lamp.

Abstract: A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at least at the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. Various techniques for supplying power to the lamp are also disclosed.

Abstract: A cold-cathode ionization or Penning vacuum meter with an ignition system to increase the meter's usefulness at very low pressures. The ignition system comprises an additional anode and at least one additional cathode mounted adjacent to the primary, measuring, cathode and anode and within the same magnetic field as the primary cathode and anode. The at least one additional cathode and the anode are substantially smaller than the measuring cathode and the anode and serve to ignite or start the ionization of the atomosphere whose pressure needs to be measured.

Abstract: A device for measuring the internal pressure of an operationally built-in vacuum switch which comprises a vacuum switching tube having a switching chamber and switch contacts as well as an associated drive for the contacts. For the measurement of the pressure, a cold-cathode discharge (so-called Penning effect) having crossed electric and magnetic fields is used, wherein the electric field is applied, for instance, between at least one of the switch contacts and a metallic wall of the switching chamber or a condensation shield disposed in the chamber and permanent magnets are used for generating the magnetic field. The permanent magnets are realized in the form of rods and have pole pieces formed such that the pole pieces encircle the switching chamber. A magnetic field is formed which is applied directly in the longitudinal direction to a circumferential section of the cylindrical switching chamber.

Abstract: There is provided a novel vacuum detection means utilizing a high frequency, high voltage device to excite an electrical discharge in a vacuum whose characteristics are dependent on the level of the vacuum contained therein. This discharge current allows the degree of vacuum to be continuously monitored.

Abstract: A device for measuring the amount of oxygen in combustion gas including succesively, a channel bordered by two plates between which exists a magnetic field, a central electrode divided in two, longitudinally, a gas discharge path, and finally a mechanism for measuring the current or ionization potential in each of the paths. This device is, accordingly, applicable to the automobile industry and automation and regulation of the operation of boilers of all kinds.