Abstract: A sensor including a sensor element for acquiring a measuring signal, the measuring signal including at least one useful signal component in a useful signal frequency range and at least one interference signal component in an interference signal frequency range, and a readout circuit for converting the measuring signal into an analog electrical sensor signal. A feedback circuit is provided, which feeds back the output signal of the readout circuit to the input of the readout circuit at which the measuring signal is applied, and the total transmission function H(s) of the readout circuit and feedback circuit induces an attenuation of the analog sensor signal in the interference signal frequency range, while the analog sensor signal in the useful signal frequency range is not attenuated.

Abstract: A processing system including an amplifier configured to generate, from multiple spatial-common-mode-processed signals, a spatial common mode estimate and multiple feedback signals. The processing system includes multiple charge integrators configured to obtain resulting signals from the capacitive sensor electrodes, each of the resulting signals including a spatial common mode component and a residual noise component. The charge integrators generate multiple spatial-common-mode-processed signals by mitigating the spatial common mode component and the residual noise component in the resulting signals using the feedback signals. The processing system includes a programmable gain amplifier configured to determine the spatial common mode estimate.

Abstract: A device for testing a group of radio-frequency (RF) chip modules and a method for using the same is disclosed. The device includes a signal analyzer, a power divider, control ICs, a signal controller, and a power combiner. The power divider receives an RF signal and transmits RF input signals to the RF chip modules and the control ICs in response to the RF signal. The signal controller controls each control IC to adjust at least one of the power and the phase of the corresponding RF input signal, thereby generating an RF output signal. The power combiner receives the RF output signal from each control IC to generate a test signal. The signal analyzer receives the test signal and obtains RF properties corresponding to at least one of the power and the phase of each RF output signal.

Abstract: A method for determining a pre-equalization matrix to be used for testing is provided. A radio communication tester is provided that has a base station emulator and a channel emulator. A device under test is provided that has at least two branches. A N×M multiple-input multiple-output (MIMO) connection is established between the radio communication tester and the device under test. The N×M MIMO connection includes at least two channels. Reference signal received power per branch measurement values are continuously forwarded from the device under test to the radio communication tester. A pre-equalization matrix is determined by the radio communication tester, wherein the reference signal received power per branch measurement values and presence of additive white Gaussian noise (AWGN) are taken into account when calculating the pre-equalization matrix.

Abstract: A method for measuring (and controlling) a characteristic performance parameter ?s of a device under test (DUT) having an input port (at the minimum). The method involves connecting the input port of the DUT to a signal generator, subjecting the DUT to a large signal input test signal, and executing a first measurement of the incident wave and reflected wave at a DUT input reference plane. The method further involves subjecting the DUT to a perturbation signal combined with the large signal input test signal, and executing a second measurement of the incident wave and reflected wave at the DUT input reference plane, and determining the characteristic performance parameter from the first measurement and the second measurement.

Abstract: Provided is a physical quantity measurement device capable of reducing a frequency analysis error of a gas flow rate as compared with the related art. A physical quantity measurement device 20 includes a flow rate sensor 205 and a signal processing unit 260. The signal processing unit 260 has a buffer 261, an offset adjustment unit 262, a gain calculation unit 263, a correction calculation unit 264, and a frequency analysis unit 265. The buffer 261 stores a flow rate data based on an output signal of the flow rate sensor 205 for a predetermined period. The offset adjustment unit 262 adjusts the zero point of the flow rate waveform. The gain calculation unit 263 calculates a correction gain of the flow rate waveform whose zero point has been adjusted. The correction calculation unit 264 performs the correction by multiplying the flow rate waveform whose zero point has been adjusted by the correction gain.

Abstract: A processing system is disclosed. The processing system includes an amplifier configured to generate a feedback signal including a spatial common mode estimate from spatial-common-mode-processed signals. The processing system further includes charge integrators configured to obtain resulting signals from capacitive sensor electrodes, the resulting signals including a spatial common mode, and generate the spatial-common-mode-processed signals by mitigating the spatial common mode in the resulting signals using the feedback signal. The processing system also includes a controller including a programmable gain amplifier capturing the spatial common mode estimate over a summing resistor of the amplifier and a demodulator configured to remove a modulation voltage from the spatial common mode estimate.

Abstract: A smoke detector includes a laser light source to provide incident light. The smoke detector also includes a Fabry-Perot etalon to transmit some incoming light, which is produced from the incident light, as transmitted light. Smoke particles in a cavity of the Fabry-Perot etalon affect an intensity of one or more wavelengths of the transmitted light.

Abstract: In a measurement device, a reception sensitivity test control unit includes drop determination means for determining whether or not a measured throughput is in a dropped state to a preset proportion in a steep drop region in which the throughput drops steeply, and output level setting means 18e for performing a setting process of setting an output level of the test signal to be different from a previous output level according to a comparison result indicating whether a throughput measurement result exceeds a predetermined threshold value and a determination result indicating whether the measured throughput is in the dropped state by the drop determination means, the setting process including a process of performing level down or level up on the output level of the test signal with respect to the previous output level in units of an error tolerance level EL when it is determined to be the dropped state.

Abstract: A method for testing a receiver in a code division multiple access (CDMA) communications system. Frequency spectrums for each of a plurality of provided CDMA code patterns (31) are generated (35) and phase shifted (36), before being combined (37) to generate a constellation spectrum. The constellation spectrum is converted 38 to a time domain constellation signal which can be injected (33) into a CDMA receiver under test. The method allows for fast and cost-effective synthetic generation of constellation signals that are particularly suited to testing global navigation satellite system (GNSS) receivers. Also relates to apparatus for providing the same.

Abstract: The invention concerns devices and methods for calibrating an Automated Test Equipment for automated testing of a Device Under Test. The method includes providing two digital channel signals by two different channels of the Automated Test Equipment, wherein the digital channel signals include an identical or a complementary pattern with respect to their edges. The method further includes sum-combining or difference-combining the two digital channel signals in order to obtain a combined residual signal. The step of combining is performed such that combining provides a combined residual signal without a time-variant component if the two digital channel signals have a predetermined time shift or a predetermined phase shift relative to each other, or such that the combined residual signal includes a time variant component if the two digital channel signals have a time shift different from the predetermined time shift or a phase shift different from the predetermined phase shift.

Abstract: The present disclosure relates to a method of reducing a noise induced signal drift. The method comprises: receiving an input signal; recording a waveform of the input signal; and determining an antiderivative of the waveform by optimizing a derivative of the antiderivative to be determined and an absolute deviation of the antiderivative to be determined. Further, the present disclosure relates to a test instrument for analyzing an input signal.

Abstract: A method of determining group delay between periodic radio frequency (RF) signals received at a narrow-band coherent receivers includes receiving a first periodic RF signal at a first coherent receiver in the frequency domain, receiving a second periodic RF signal at a second coherent receiver in the frequency domain, which is delayed with respect to the first periodic RF signal, the first and second periodic signals having the same period and carrier frequency; determining a cross-spectrum signal of the first and second periodic RF signals in the frequency domain, the cross-spectrum signal including amplitudes and phases versus frequency; calculating a slope of phase of the cross-spectrum signal at frequencies over at least a portion of a bandwidth of the cross-spectrum signal; and determining a group delay between the first and second periodic RF signals to be the slope of phase of the cross-spectrum signal.

Abstract: A jitter decomposition method for decomposing several jitter and noise components contained in an input signal, wherein the input signal is generated by a signal source, is disclosed. The jitter decomposition method comprises: receiving the input signal; at least one of determining and receiving a reconstructed data dependent jitter signal; at least one of determining and receiving an impulse response, the impulse response being associated with at least the signal source; and determining at least a first statistical parameter being associated with a first jitter component or a first noise component in the input signal and a second statistical parameter being associated with a second jitter component or a second noise component in the input signal, the second jitter component or the second noise component being different from the first jitter component or the first noise component, respectively.

Abstract: Embodiments of apparatuses of a synchronized noise measurement system and methods for using the same are disclosed. In one embodiment, a method of performing noise measurement includes setting up a plurality of device under tests (DUTs), performing noise measurement of the plurality of DUTs synchronously using programmable testing parameters to generate a noise measurement data, collecting the noise measurement data from the plurality of DUTs in parallel, and analyzing the noise measurement data collected to identify deviations in noise performance caused by manufacturing process variations or environmental variations for the plurality of DUTs.

Abstract: The present disclosure provides an apparatus for processing signals for a plurality of energy regions, and a system and method for detecting radiation of a plurality of energy regions. The apparatus for processing signals for a plurality of energy regions may comprise: a first processor, configured to receive a signal from a detector and process the received signal to generate a gated signal, wherein a turn-on period of the gated signal represents magnitude of the received signal; and a second processor, configured to receive the gated signal from the first processor, and determine one of the plurality of energy regions to which the received signal belongs according to the turn-on period of the gated signal, so as to count signals within the determined energy region.

Abstract: A measuring system for calibrating an antenna array is provided. A parameter setting unit modifies an input signal of a first antenna or a first antenna group, using operating parameters. A signal generator generates a first measuring signal and provides it to the parameter setting unit and to a second antenna or a second antenna group of the antenna array. A measuring antenna receives a second measuring signal composed of a signal emitted by the first antenna or first antenna group and a signal emitted by the second antenna or second antenna group. A power meter measures the power of the second measuring signal. An evaluation device determines a measured interference signal from the measured power of the second measuring signal, and preferably also determines the operating parameters used by the parameter setting unit based upon the measured interference signal and position information.

Abstract: A method for filtering an amplitude-modulated radio signal, the radio signal having a bandwidth, the method including: transforming the radio signal into baseband, determining a frequency range close to the center frequency, measuring the level of the radio signal, by frequency steps, in the frequency range, determining a standardized modulation level in the radio signal, corresponding to the sum of the level measurements by frequency steps, in the frequency range under consideration, divided by the measurement of the level of the radio signal in baseband calculated around the center frequency, comparing the standardized noise level thus determined with a predetermined threshold, on the basis of the comparison, choosing a first filter applied to the amplitude-modulated radio signal.

Abstract: The present invention relates to an input/output signal synchronization method by a radio frequency unit. The input/output signal synchronization method according to the present invention comprises the steps of: generating a transmitter (Tx) input signal by adding, to a baseband signal, a test signal located at a frequency out of an operation frequency range of the radio frequency unit; collecting the Tx input signal and a Tx output signal obtained by outputting the input signal through a Tx function block; and synchronizing the Tx input signal and the Tx output signals, based on a result obtained by the collecting.

Abstract: A method for operating a data processing system to compute the response of a DUT to a modulated input signal is disclosed. The method includes determining a set of parameters for a first model of the DUT from a plurality of measurements of output values from the DUT, each output value includes a measurement of a gain and phase shift provided by the DUT when the DUT is stimulated with a single tone input signal having a frequency in a frequency range determined by the modulated signal. The method also determines a second model that characterizes noise generated by the DUT at the single tone input signals. A performance parameter for an output signal that would be obtained by applying the modulated input signal to an input of the DUT, and receiving the output of the DUT is then determined from the first and second models.

Abstract: A device and method of testing the dual-frequency nonlinear vector network parameters. In view of the challenge of the nonlinear behavioral model characterization of the microwave device components, and the current situation of the nonlinear vector network parameter testing, the disclosed device and method of testing the dual-frequency nonlinear vector network parameters redefines the nonlinear model parameters of the nonlinear device components, gives the definition of the test parameter (W-parameter), solves the challenges of the dual-frequency nonlinear behavioral model characterization and testing for the microwave device components, and makes it more convenient to measure the nonlinear characteristics of the mixer, amplifier and passive device components.

Abstract: The invention is related to a smart testing apparatus and preferably a method for testing at least a first DUT and a second DUT using a mobile communications testing device. The method comprises the steps of determining, whether a first RF test signal from/to the first DUT interferes with a second RF test signal from/to the second DUT. It determines, whether the second RF test signal from/to second DUT interferes with the first RF test signal from/to the first DUT. It predetermines, whether at least measuring the first measuring result obtained by applying the first RF test signal is disturbed above a first disturbance threshold value. It predetermines, whether at least a second measuring result obtained by applying the second RF test signal is disturbed above a second disturbance threshold value.

Abstract: A method of analyzing a transient response of an electronic circuit is includes: forming a model of a retimer that includes a data clocked latch; providing a latch input signal at the input of the model; forming an output signal based on the latch input signal with the voltage controlled voltage source, wherein the voltage controlled voltage source provides a high output when the latch input signal passes through a low to high transition value and continues to provide the high output until the latch input signal passes through a high to low transition value.

Abstract: In certain embodiments, a method includes wirelessly receiving, by an electrode of a stylus, a signal sent from a touch sensor of a computing device. The received signal includes a data bit and is based on a predefined code sequence. The method also includes producing, by the electrode of the stylus, a derivative signal from the received signal, the derivative signal corresponding to a derivative with respect to time of the received signal. The method further includes performing, by the stylus, a cross-correlation of the derivative signal and an expected-signal pattern, the expected-signal pattern based on a derivative with respect to time of the predefined code sequence, where the cross-correlation produces a cross-correlation signal including one or more cross-correlation pulses. The method also includes determining, by the stylus, based on the cross-correlation signal, that the received signal is associated with the predefined code sequence.

Abstract: A method for obtaining improved resolution pulsed radio frequency (RF) measurements with phase coherence for a device under test (DUT) using a vector network analyzer (VNA) includes generating a pulsed RF test signal, transmitting the pulsed RF test signal to the DUT and receiving a signal from the DUT at the VNA in response to the pulsed RF test signal. An intermediate frequency (IF) signal is generated using a local oscillator (LO) signal. A phase of the LO signal is shifted by a prescribed amount while generating the IF signal. The IF signal is then sampled over multiple pulses and measurements are constructed from the measurements. A discrete Fourier transform (DFT) is then applied to the constructed measurements.

Abstract: Calibration apparatus including a pressure cap and a pressure base that define a pressure chamber that is fillable with a liquid. A reference sensor and a sensor under test are exposed to acoustic pressures in the liquid, and responses measured. The sensor under test is secured through one of the pressure cap or base, and responses measured at acoustic frequencies as low as 0.001 Hz and at hydrostatic pressures of at least 5000 psi.

Abstract: A method of controlling sound reproduction may include applying an audio signal to a voice coil of the electrodynamic loudspeaker to produce sound, detecting one of an impedance and admittance of the loudspeaker across a predetermined audio frequency range based on a detected voice coil current and voice coil voltage and determining a fundamental resonance frequency of the loudspeaker based on the detected impedance or admittance. The fundamental resonance frequency of the loudspeaker may be compared with a nominal fundamental resonance frequency of the loudspeaker representing a nominal acoustic operating condition of the loudspeaker. A change of operating condition of the loudspeaker may be detected based on a frequency deviation between the determined fundamental resonance frequency and a nominal fundamental resonance frequency of the loudspeaker. The level of the audio signal may be attenuated in response to the frequency deviation meets a predetermined frequency error criterion.

Abstract: A reduced random telegraph signal (RTS)-noise CMOS image sensor includes a pixel and a correlated double sampling (CDS) circuit electrically connected to the pixel. The CDS circuit is characterized by a CDS period that includes a reference sample period and an image data sample period. The image sensor also includes a bitline, a bitline connection switch between the pixel and a readout circuit connected to the pixel, and a bitline switch controller. The bitline transmits a transfer gate signal as a bitline signal having a non-zero value during a first time period entirely between the reference sample period and the image data sample period. The bitline switch controller is electrically connected to and configured to control the bitline connection switch such that the bitline connection switch is closed during the entire CDS period except for a single continuous open period that includes the first time period.

Abstract: A method of detecting enclosure leakage of an electrodynamic loudspeaker mounted in an enclosure or box may include applying an audio signal to a voice coil of the electrodynamic loudspeaker through an output amplifier and detecting a voice coil current flowing into the voice coil. A voltage across the voice coil may be detected and an impedance or admittance of the loudspeaker across a predetermined audio frequency range may be detected based on the detected voice coil current and voice coil voltage. A fundamental resonance frequency of the loudspeaker may be determined based on the detected impedance or admittance and compared with a nominal fundamental resonance frequency of the loudspeaker representing a sealed state of the enclosure. Acoustic leakage of the enclosure may be detected based on a deviation between the determined the fundamental resonance frequency and the nominal fundamental resonance frequency of the electrodynamic loudspeaker.

Abstract: An integrated circuit including a plurality of sensors configured to sense variations in supply voltage levels at points within the integrated circuit is disclosed. The plurality of sensors are distributed across the integrated circuit and have transistor devices such that process variations in the transistor devices within the sensors are such that a sensing result will have a random voltage offset that has a predetermined probability of lying within a pre-defined voltage offset range. The integrated circuit is configured to transmit results from multiple ones of the plurality of sensors to processing circuitry such that the variations in the supply voltage levels can be determined with a voltage offset range that is reduced compared to the pre-defined voltage offset range.

Abstract: Provided are a converter circuit and a method of driving the same. The converter circuit includes: an input unit receiving a conversion target signal; a detection unit receiving a conversion target signal for each interval from the input unit, sampling the conversion target signal for each interval according to a plurality of timings to calculate an average value for each interval, and outputting a comparison unit input signal by using the average value for each interval; and a comparison unit comparing the comparison unit input signal with a predetermined reference signal to output a comparison result value.

Abstract: A monitor for monitoring isolation resistance, impedance, or other isolation reflective conditions between vehicle systems as contemplated. The monitor may be useful in assessing insulation resistance between a high-voltage power net and a low-voltage power net. The monitor may be configured to assess a sufficiency of the insulation resistance based on a frequency response of the high-voltage power net.

Abstract: A system and method of measuring a self bias DC voltage on a semiconductor wafer in a plasma chamber includes generating a plasma between a top electrode and a top surface of an electrostatic chuck in a plasma chamber including applying one or more RF signals to one or both of the top electrode and electrostatic chuck. The wafer is supported on the top surface of an electrostatic chuck. The self bias DC voltage is developed on the wafer. A vibrating electrode is oscillated to produce a variable capacitance, the vibrating electrode is located in the electrostatic chuck. An electrical current is developed in a sensor circuit. An output voltage is measured across a sampling resistor in the sensor circuit, a second DC potential is applied to the vibrating electrode to nullify the output voltage. The second DC potential is equal to the self bias DC voltage on the wafer.

Abstract: Application of open and short structures may result in improved accuracy in determination of ABCD parameters of a substantially symmetric two-port network for purposes of bisect de-embedding. Either one or both of the open and/or short techniques may be used to improve results of an ABCD optimization algorithm. Bisect de-embedding may then be performed to determine the ABCD parameters of a device under test based on the ABCD parameters of the substantially symmetric two-port network and measured s-parameters of the substantially symmetric two-port network and the embedded device under test.

Abstract: An integrated system is provided. The integrated system includes a control system and a signal analysis circuit configured to provide a test signal having a frequency to the control system, receive a feedback signal from the control system, and analyze the test signal and the feedback signal to generate a transfer function of the control system.

Abstract: The present invention relates to a method and an arrangement based on two-port network (TPN) theory that allows analytically estimating the loop transfer function from open and short-circuited input impedance measurements, e.g. single ended line transmission (SELT) measurements, by utilizing the fact that the line under test (LUT) can be considered reciprocal and by assuming that the LUT is symmetric. Hence, by using the present invention and an estimation of the noise on the line, the attainable bit rate at the customer premises can be determined by means of SELT measurements at the CO. The transfer function of a telephone copper-loop is estimated regardless of its topology by impedance measurements from the CO side. Specifically, such estimation is carried out from the calculation of the transmission parameters of loop, which are expressed only in terms of open and short-circuited input impedance measurements at the CO when reciprocity and symmetry is assumed.

Abstract: A method and apparatus measure transistor bandwidth of a device under test in-line and on-wafer. The method includes disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer, and obtaining an amplitude gain based on the measurement circuit for the corresponding frequency.

Abstract: A method for detecting a signal activity on a bus comprises measuring a current on the bus, and determining a signal activity based on the measured current.

Abstract: A method of analyzing patching among a first port of a first panel and ports of one or more other panels, comprising obtaining with respect to the first port of the first panel an indication of multiple concurrent patchings between the first port and each of two or more different ports of other panels, the two or more different ports including at least a second port and a third port; injecting a scan signal between the first port and the second port and sensing for a corresponding returned signal between the second and the third ports; determining that an indication of a patching between the first port and the second port is false when a returned signal corresponding to the scan signal is detected between the second and the third ports.

Abstract: A system for testing a motherboard performance includes a control device, a voltage processing circuit, a voltage regulating circuit and a voltage feedback circuit. The control device stores a plurality of predetermined voltage values and outputs control signals according to the plurality of predetermined voltage values. The voltage processing circuit receives the control signal and outputs a plurality of PWM signals according to the control signal. The voltage regulating circuit receives the plurality of PWM signal and outputs a plurality of DC voltage to a plurality of voltage input terminals of the motherboard. The voltage feedback circuit collects voltage signals at the plurality of voltage input terminals of the motherboard.

Abstract: A new address transition detection (ATD) circuit for use on an address bus having a plurality of address signal lines comprises a first circuit for each address signal line and a second circuit. The first circuit has a first input, a second input and an output. The first input is coupled to an address signal line. The second input is coupled to an ATD signal. The first circuit saves the current level of the first input in response to an ATD pulse on the ATD signal and generates a change signal at its output by comparing the current level and the saved level of the first input. The second circuit has an input and an output. The second circuit receives on its input the change signal from the first circuit. In response, the second circuit generates the ATD pulse on the ATD signal at its output.

Abstract: A system and method for measurement of parameters of radio-frequency transmission devices is introduced. The system includes a digital signal processing (DSP) unit and RF transmitter and receiver modules. The transmitter generates Gaussian white noise and transmits it to the device under test (DUT) input. The output of the DUT is connected to the receiver. Using DSP analysis on the output response of the DUT to white noise, the DUT transfer function is estimated using iterative LMS method. From the estimated transfer function all the parameters which are used to describe the device can be calculated such as: gain, flatness, phase and group delay, phase and group delay variations, frequency response, filters rejection etc.

Abstract: A method of estimating response of a medical lead to an electromagnetic field includes providing a medical lead having a proximal end, a distal end, a plurality of electrodes disposed along the distal end, a plurality of terminals disposed along the proximal end, and a plurality of conductors extending along the medical lead and electrically coupling the electrodes to the terminals; individually applying a test field at each of a plurality of test positions along the medical lead using at least one excitation probe; for each application of the test field, determining a response to the application of the test field at one or more of the electrodes or terminals; generating a transfer function using a combination of the responses determined for the applications of the test field; and using the transfer function to estimate a response of the medical lead to an electromagnetic field.

Abstract: A measurement system is provided for measuring a complex transfer function of a system under test. The measurement system comprises a signal source for generating an input signal to be applied to the system under test, a signal detection device for detecting a response signal of the system under test in response to the input signal; and a signal analyzing system for determining the gain and phase shift of the system under test by comparing the response signal to the input signal. The signal analyzing system includes phase adjustment means to adjust a relative phase difference of the detected response signal and input signal; and curve fitting means to identify a phase difference adjustment of the phase adjustment means which gives the best fit of the response signal to the input signal. The phase measurement of the response signal is determined from the best fit phase difference adjustment.

Abstract: An output circuit of a charge mode sensor includes a second resistor and an operational amplifier. The second resistor connects an output portion of the charge mode sensor and a ground. The operational amplifier is configured to output a detection signal that varies in accordance with an amount of charge kept in the charge mode sensor. The operational amplifier includes an inverting input portion, a non-inverting input portion, and an output portion. The inverting input portion is connected to the output portion of the charge mode sensor via a sensor cable. The non-inverting input portion is connected to a reference voltage. The output portion is connected to the inverting input portion via a first resistor.

Abstract: A non-linear kerf monitor, methods of manufacture and design structures are provided. The structure includes a coplanar waveguide provided in a kerf of a wafer between a first chip and a second chip. The structure further includes a shunt switch and a series switch coupled to the coplanar waveguide.

Abstract: Measurement arrangement and method for active load pull measurements of a device under test (1). A wideband analog-to-digital conversion block (3) is provided for obtaining measurement data. First and second injection signal generators (7, 8) are connected to a source side and a load side of the device under test (1). This set up allows to create predetermined reflection coefficients at reference planes of the device under test (1). Injection signal parameters as determined are converted into the injection signals at the source and load side by digital-to-analog conversion. The wideband analog-to-digital conversion block (3) is further arranged for analog-to-digital conversion of the intermediate frequency signals to obtain the actual measured reflection coefficient versus frequency functions with a first frequency resolution. The first frequency resolution applied in the analog-to-digital conversion is equal to or better than a second frequency resolution applied in the digital-to-analog conversion.

Abstract: Since known detection devices include detectors of the same number as that of samples, the system configuration is complicated. According to the present invention, therefore, a plurality of electromagnetic-wave-transmission lines with different propagation-delay times and a coupled-transmission line coupling the electromagnetic-wave-transmission lines with each other are provided, and an electromagnetic wave is detected by the same electromagnetic-wave-detection unit. Subsequently, a detection device including at least one electromagnetic-wave detector of a number smaller than that of samples can be provided, which decreases the system complexity.

Abstract: A system and method of measuring a self bias DC voltage on a semiconductor wafer in a plasma chamber includes generating a plasma between a top electrode and a top surface of an electrostatic chuck in a plasma chamber including applying one or more RF signals to one or both of the top electrode and electrostatic chuck. The wafer is supported on the top surface of an electrostatic chuck. The self bias DC voltage is developed on the wafer. A vibrating electrode is oscillated to produce a variable capacitance, the vibrating electrode is located in the electrostatic chuck. An electrical current is developed in a sensor circuit. An output voltage is measured across a sampling resistor in the sensor circuit, a second DC potential is applied to the vibrating electrode to nullify the output voltage. The second DC potential is equal to the self bias DC voltage on the wafer.

Abstract: An embodiment is a method for de-embedding. The method comprises forming a primary structure in a semiconductor chip and forming an auxiliary structure in the semiconductor chip. The auxiliary structure replicates a first portion of the primary structure. The method further comprises determining a transmission matrix for each of the primary structure and the auxiliary structure based on measurements and extracting a transmission matrix of a first component of the primary structure by determining a product of the transmission matrix of the primary structure and an inverse of the transmission matrix of the auxiliary structure.