Abstract: According to one embodiment, a sensor module includes a sensor and a diagnosis circuit. The sensor includes piezoelectric transducers and switches. The piezoelectric transducers have different resonance frequencies. The switches are provided to correspond to the piezoelectric transducers, respectively. Each of the switches outputs an output signal corresponding to a voltage generated by an inverse piezoelectric effect of a corresponding piezoelectric transducer of the piezoelectric transducers. The diagnosis circuit diagnoses, based on a difference in pattern of the output signal, whether vibration has newly occurred in the sensor, and switch an output destination of the output signal of the sensor according to a result of the diagnosis.

Abstract: A system is provided to analyze cross-modulation distortion in audio devices, which may include testing with audio frequencies. One or more distortion signals from the audio device may be measured for an amplitude, phase, and or frequency modulation effect. In another embodiment a musical signal may be used as a test signal. Providing additional test signals to the audio device can induce a time varying cross-modulation distortion signal from an output of the audio device. Also utilizing at least one additional filter, filter bank, demodulator and or frequency converter and or frequency multiplier provides extra examination of distortion. Also frequency and or phase response can be measured with the presence of a de-sensing signal and or another signal that induce near slew rate limiting or near overload condition of the device under test.

Abstract: A radio frequency circuit for processing a radio frequency signal. The circuit comprises a variable frequency oscillator system and a radio frequency signal processing circuit arranged to process a radio frequency signal using the output of the variable frequency oscillator system. A digitiser is arranged to receive the output of the radio frequency signal processing circuit and generate a digitised signal. A phase noise capture circuit is arranged to capture the phase noise in the output of the variable frequency oscillator system. The radio frequency circuit is arranged to compensate for the effect of the phase noise in the output of the variable frequency oscillator system on the output of the radio frequency signal processing circuit, by digitally processing the digitised signal generated by the digitiser using the output of the phase noise capture circuit.

Abstract: A Frequency Position Modulation system for encoding signals for transmission. A signal's discrete frequency support is used to represent symbols. The signal can be non-uniformly spread over many GHz of instantaneous bandwidth, resulting in a communications system that is resilient to interference and difficult to intercept. The FPM symbols are recovered using adaptive projections that use an analog polynomial nonlinearity paired with an analog-to-digital converter that is sampling at a rate at that is only a fraction of the instantaneous bandwidth of the signal. In the presence of partial band interference, nonlinearities generated by the transmitter are exploited by the receiver to help unambiguously recover tones that could otherwise be lost. The nonlinearities are generated by driving the power amplifier of the transmitter into saturation to induce distortions at a desired level.

Abstract: A Frequency Position Modulation system for encoding signals for transmission. A signal's discrete frequency support is used to represent symbols. The signal can be non-uniformly spread over many GHz of instantaneous bandwidth, resulting in a communications system that is resilient to interference and difficult to intercept. The FPM symbols are recovered using adaptive projections that use an analog polynomial nonlinearity paired with an analog-to-digital converter that is sampling at a rate at that is only a fraction of the instantaneous bandwidth of the signal. In the presence of partial band interference, nonlinearities generated by the transmitter of are exploited by the receiver to help unambiguously recover tones that could otherwise be lost. The nonlinearities are generated by driving the power amplifier of the transmitter into saturation to induce distortions at a desired level.

Abstract: A testing method or apparatus utilizes multiple frequencies applied to a device under test for measuring newly discovered frequency modulation effects. An embodiment may include a lower frequency signal with a smaller amplitude higher frequency signal to test a dynamic change in frequency response, gain, and or phase. This dynamic test can reveal frequency modulation effects. Another embodiment may include the use of a multiple frequency signal to dynamically induce a time varying phase or frequency distortion for the device that has differential phase distortion. The device's output is then measured with an FM detector or spectrum analysis system to measure a shift in one of the frequencies used in the test signal or to measure frequency modulation effects of any signals, including distortion products, from the device.

Abstract: A testing method or apparatus utilizes multiple frequencies applied to a device under test for measuring newly discovered frequency modulation effects. An embodiment may include a lower frequency signal with a smaller amplitude higher frequency signal to test a dynamic change in frequency response, gain, and or phase. This dynamic test can reveal frequency modulation effects. Another embodiment may include the use of a multiple frequency signal to dynamically induce a time varying phase or frequency distortion for the device that has differential phase distortion. The device's output is then measured with an FM detector to measure a shift in one of the frequencies used in the test signal or to measure frequency modulation effects of any signals, including distortion products, from the device.

Abstract: Embodiments of a time-to-digital converter are provided, comprising a delay stage matrix and a measurement circuit. The delay stage matrix comprises a first and a second delay lines coupled thereto, and is arranged to propagate a transition signal from a starting delay stage in the first and a second delay lines, wherein each of the first and second delay lines comprises a same number of delay stages coupled in series, each delay stage in one of the first and second delay lines is coupled to a corresponding delay stage in the other delay line and operative to generate a delayed signal. The measurement circuit is arranged to determine a time of the transition signal propagating along the delay stages by sampling the delayed signals using a measurement signal to generate and hold a digital representation of the time.

Abstract: There is provided a clock generating apparatus for generating a recovered clock by recovering a clock from an edge of a received signal, including a recovered clock generating section that generates the recovered clock, a multi-strobe generating section that generates a plurality of strobes with different phases, in accordance with a pulse of the recovered clock, a detecting section that detects a position of an edge of the received signal relative to the strobes, by referring to values of the received signal obtained at respective timings of the strobes, and an adjusting section that adjusts a phase of the recovered clock, in accordance with the position of the edge of the received signal.

Abstract: A calibration method for inertial drive actuator of driving a target moving body among a plurality of moving bodies to move by inertia between a first movement limit position and a second movement limit position in relation to an oscillating plate that is moved to reciprocate by a moving member, and detecting positions of the moving bodies based on electrostatic capacitances includes detecting electrostatic capacitances of opposing parts of a moving body side electrode provided in a target moving body and an oscillating plate electrode provided in the oscillating plate is detected at the first movement limit position and the second movement limit position, respectively; and calculating a ratio of a difference between the electrostatic capacitances at the first movement limit position and the second movement limit position to a movement limit distance that is a distance between the first movement limit position and the second movement limit position.

Abstract: Monitoring system in real time of the state of capacitance graded bushings of power transformers, powers reactors, current transformers, circuit breakers and similar, it is applied preferentially by power transformers; power reactors; chain transformers, circuit breakers and similar, being the system passible of accomplish the monitoring in real time of capacitance graded bushings (1), each one resulted from a capacitive “tap” to which connects a “tap” adapter (3) that, then, connects to a measuring module (4) which receives signals coming from capacitive “tap” (2) of three graded bushings (1) which form a triphase group. One or more measuring modules (4) can, if connect to an only interface man-machine module (5), by means of a serial communication (6), forming a modular system.

Abstract: An electronic circuit includes several (at least two) oscillating and/or resonant devices. The circuit uses a measuring device to measure the phase noise of one of the two oscillating/resonant devices. This measuring device is integrated on a chip on which the oscillating/resonant device to be measured is also integrated. The circuits and methods described find application in the area of radiofrequency/high frequency electronics RF/HF, in particular adapted to general public applications in mobile communication systems and/or to metrology.

Abstract: A testing method or apparatus utilizes multiple frequencies applied to a device under test for measuring newly discovered frequency modulation effects. An embodiment may include a lower frequency signal with a smaller amplitude higher frequency signal to test a dynamic change in frequency response, gain, and or phase. This dynamic test can reveal frequency modulation effects. Another embodiment may include the use of a multiple frequency signal to dynamically induce a time varying phase or frequency distortion for the device that has differential phase distortion. The device's output is then measured with an FM detector to measure a shift in one of the frequencies used in the test signal or to measure frequency modulation effects of any signals, including distortion products, from the device.

Abstract: A method for tracking a variable resonance condition in a plasma coil during creation of plasma from a gas flowing in a plasma torch adjacent to the plasma coil comprises: providing a radio-frequency (RF) power source comprising a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency; providing a high-voltage ignition charge from said RF power source to the gas in plasma torch so as to create an electrical discharge through said gas so as to create a test sample comprising a partial plasma state within said plasma torch; and applying an RF power signal from said plasma coil to said test sample in said plasma torch, wherein said adjustable operating frequency of said power amplifier tracks said variable resonance condition of said plasma coil such that said test sample in the plasma torch achieves a full plasma state.

Abstract: A system and method are disclosed for implementing a power source including a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency. The power amplifier also generates a reference phase signal that is derived from the radio-frequency power signal. An impedance match provides the radio-frequency power signal to a plasma coil that has a variable resonance condition. A phase probe is positioned adjacent to the plasma coil to generate a coil phase signal corresponding to the adjustable operating frequency. A phase-locked loop then generates an RF drive signal that is based upon a phase relationship between the reference phase signal and the coil phase signal. The phase-locked loop provides the RF drive signal to the power amplifier to control the adjustable operating frequency, so that the adjustable operating frequency then tracks the variable resonance condition.

Abstract: A testing method or apparatus utilizes multiple frequencies applied to a device under test for measuring newly discovered frequency modulation effects. An embodiment may include a lower frequency signal with a smaller amplitude higher frequency signal to test a dynamic change in frequency response, gain, and or phase. This dynamic test can reveal frequency modulation effects. Another embodiment may include the use of a multiple frequency signal to dynamically induce a time varying phase or frequency distortion for the device that has differential phase distortion. The device's output is then measured with an FM detector or spectrum analysis system to measure a shift in one of the frequencies used in the test signal or to measure frequency modulation effects of any signals, including distortion products, from the device.

Abstract: An HDMI cable carries high speed encoded data which are transmitted differentially over data channels, along with a clock. High-frequency loss and differential skew within a differential signal may be compensated by analog circuits embedded in the cable. These embedded circuits are tuned at production for best performance by observing the quality of the recovered analog signal. The embedded circuits are powered by a combination of power sources, both carried within the cable, and harvested from the high-speed signals themselves. Corresponding method and system for calibrating the cable are also provided.

Abstract: Disclosed is a method of measuring frequency distortions characteristics of a device under test, the device configured convert an input signal in an input frequency range to an output signal in a different output frequency range. The method includes, for each test frequency fi, where i=1, . . . , N and N a positive integer, in a selected frequency range, providing a corresponding test signal with multiple frequency components having a measurement component with a frequency fi, a first reference component with a frequency fA, and a second reference component with a frequency fB; inputting the test signals into the device under test; measuring output test signals at the output of the device under test corresponding to the input test signals; and determining, for each test frequency fi, information representative of frequency distortions based on the corresponding input test signal and the corresponding output test signal.

Abstract: The invention measures the X-parameters (or large-signal S and T scattering functions, sometimes called linearized scattering functions, which are the correct way to define “large-signal S-parameters”) with only two distinct phases for small-signals on a frequency grid established by intermodulation frequencies and harmonics of the large-tones, with guaranteed well-conditioned data from which the X-parameter functions can be solved explicitly, without the need for regression, and not limited by performance limits of the reference generator or phase-noise.

Abstract: There is provided a phase measurement apparatus for measuring a phase of a signal under measurement. The phase measurement apparatus includes a sampling section that samples the signal under measurement at timings indicated by a sampling clock supplied thereto, a jitter injecting section that injects jitter to at least one of the signal under measurement which is to be input into the sampling section and the sampling clock, and a phase calculating section that calculates the phase of the signal under measurement based on a result of the sampling performed by the sampling section.

Abstract: Parametric measurement of first- and second-generation telecommunications equipment has been relatively straightforward. The evolution to more complex transmission schemes such as those proposed for third-generation (3G) telecommunications devices can employ the subject methods and apparatus and apply AM-PM test procedures to a multicarrier amplifier RF environment to properly characterize the parametric performance of these transmission systems, particularly those operating in a multicarrier environment.

Abstract: The present invention relates to a system used for inspecting the position of a compressor rotor within a compressor rotor case. A compressor rotor blade is moved about the rotor blade path of the compressor rotor case, a probe holder attached to the rotor blade has a scanning device as part of the holder used for gathering information relative to the compressor rotor case. A fixture attached to the compressor rotor gathers information about the position of the compressor rotor with respect to the compressor rotor case to determine the relative position of both the compressor rotor in relation to the compressor rotor case.

Abstract: A testing method or apparatus utilizes multiple frequencies applied to a device under test for measuring newly discovered frequency modulation effects. An embodiment may include a lower frequency signal with a smaller amplitude higher frequency signal to test a dynamic change in frequency response, gain, and or phase. This dynamic test can reveal frequency modulation effects. Another embodiment may include the use of a multiple frequency signal to dynamically induce a time varying phase or frequency distortion for the device that has differential phase distortion. The device's output is then measured with an FM detector to measure a shift in one of the frequencies used in the test signal or to measure frequency modulation effects of any signals, including distortion products, from the device.

Abstract: An electronic circuit includes several (at least two) oscillating and/or resonant devices. The circuit uses a measuring device to measure the phase noise of one of the two oscillating/resonant devices. This measuring device is integrated on a chip on which said oscillating/resonant device to be measured is also integrated. The circuits and methods described find application in the area of radiofrequency/high frequency electronics RF/HF, in particular adapted to general public applications in mobile communication systems and/or to metrology.

Abstract: A phase measurement device measures an output of an amplifier when an input signal having input frequency components is fed to the amplifier, and includes multipliers for orthogonally transforming the output of the amplifier a phase acquisition section for acquiring phases ?1 and ?2 of the input frequency components in the output of the multipliers, and ?3 and ?4 (third distortion), and ?5 and ?6 (fifth distortion) of the distortion components, a match time/phase measurement section for measuring a match time point ?t when ?1 and ?2 match each other and a distortion component phase measurement section for measuring phases ?3 to ?6 at the match time point ?t. The phase acquisition section acquires at least one of ?1 and ?2, and ?3 and ?5 (with the frequencies higher than those of ?1 and ?2) or ?4 and ?6 (with the frequencies lower than those of ?1 and ?2).

Abstract: A system and method are disclosed for implementing a power source including a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency. The power amplifier also generates a reference phase signal that is derived from the radio-frequency power signal. An impedance match provides the radio-frequency power signal to a plasma coil that has a variable resonance condition. A phase probe is positioned adjacent to the plasma coil to generate a coil phase signal corresponding to the adjustable operating frequency. A phase-locked loop then generates an RF drive signal that is based upon a phase relationship between the reference phase signal and the coil phase signal. The phase-locked loop provides the RF drive signal to the power amplifier to control the adjustable operating frequency, so that the adjustable operating frequency then tracks the variable resonance condition.

Abstract: In order to provide a phase detector and a method of phase detection which are distinguished by greater sensitivity and simple implementability, at least one differential signal of two input signals (Ua; Ub) may be formed over at least one predefined period by means of a first subtracter (12), at least one maximum value of the at least one differential signal may be detected by means of a first peak detector (16) and at least one minimum value of the at least one differential signal may be detected by means of a second peak detector (18) and at least one further differential signal (Uout) may be formed from the at least one maximum value and the at least one minimum value by means of a second subtracter (14).

Abstract: When a signal having two or more frequency components is fed to a circuit to be measured, a phase of the signal output from the circuit to be measured is measured. A phase measurement device measures an output when an input signal having two input frequency components ?10 and ?20 is fed to an amplifier (circuit to be measured). The phase measurement device includes an orthogonal converter that subjects the output of the amplifier to an orthogonal conversion using an average frequency ?0, which is an average of ?10 and ?20. A phase acquisitioner acquires phases ?1 and ?2 of the input frequency components in the output of the orthogonal converter and a phase ?3 of a distortion component. A match time/phase measurer measures a match time ?t during which phase ?1 is matched with phase ?2, and measures phase ?1 (?t) during that time. A distortion component phase measurer measures phase ?3 (?t) of the distortion component in the match time ?t. A display then displays ?1 (?t) and ?3 (?t).

Abstract: A circuit breaker for locating an arc fault for a protected circuit includes separable contacts interrupting the protected circuit and an arc fault detector determining an arc fault in the protected circuit. An analog to digital converter circuit measures a value of peak arc current at the arc fault detector. Another analog to digital converter circuit provides a peak line-to-neutral voltage. A memory provides an arc voltage operatively associated with the value of peak current. A microprocessor determines a distance from the arc fault detector to the arc fault from the value of peak arc current, a wire resistance per unit length or a wire conductance per unit length, the peak line-to-neutral voltage and the arc voltage.

Abstract: An orthogonal signal generating unit converts a signal to be measured into two orthogonal signals which are two signals whose phases are orthogonal to one another. An instantaneous phase calculating unit calculates an instantaneous phase based on the two orthogonal signals within a range between a lower limit phase value set in advance and an upper limit phase value set in advance. A differential value detecting unit detects a differential value of the instantaneous phase. A differential value correcting unit corrects the differential value, and outputs a corrected differential value when the differential value of the instantaneous phase is over the range dependent on the lower limit phase value and the upper limit phase value.

Abstract: A method and circuit for measurement of jitter in which a reference clock (404) runs at a frequency offset to the incoming signal (I) so that the phase of the two clocks drift over time, enabling detection of jitter in the input signal by measurement of the difference in the number of clock cycles it takes for this drift to occur. This design provides the following advantages: It does not require analogue circuitry and, because the frequency offset can be large and still function, the reference frequency can be produced by a programmable oscillator. With the exception of the programmable oscillator the entire design can be implemented within an FPGA. It requires no parts (such as a jitter attenuator or phase locked loop) designed to operate at a specific frequency and therefore this design can operate over an extremely wide frequency range.

Abstract: An impedance analyzer includes a reference signal, a first converter a first coupler, a second converter, a second coupler, a modification circuit, a reference signal detector, and a reflected signal detector. The first coupler couples the reference signal to the first converter. The first converter produces a reference intermediate frequency signal. The second coupler couples a reflected signal to the second converter. The second converter produces a reflected intermediate frequency signal. A reflection coefficient for a device under test is determined by using a reflected value detected by the reflected signal detector and a reference value detected by the reference signal detector. In a first operating mode of the impedance analyzer, the reflected intermediate frequency signal is forwarded directly to the reflected signal detector.

Abstract: A method and apparatus for characterizing a non-linear device stimulates the device with a repetitive digital signal and uses relative phase measurements made with a vector network analyzer to measure the device response to the digital stimulus.

Abstract: A method and apparatus compensates for phase noise added by a spectrum analyzer from phase noise measurements of a signal under test (SUT) taken by the spectrum analyzer. The method comprises the steps of measuring the phase noise of the SUT, determining the added phase noise of the spectrum analyzer, and applying a mathematical correction to the measured phase noise. A spectrum analyzer apparatus that compensates for added phase noise comprises a controller portion, a memory portion, a signal conversion and detection portion, and a compensation algorithm stored in the memory portion. A system that compensates for added phase noise comprises a controller having a control algorithm and a spectrum analyzer. The compensation and control algorithms are computer programs that implement the method of the present invention.

Abstract: A method of measuring jitter includes generating a jitter pulse having a width corresponding to an amount of jitter. The jitter pulse is provided to a plurality (M) of latches serially coupled to successively trim the pulse as it propagates through the serially coupled latches. Each latch, li, provides an output bi indicative of receipt of an edge of the jitter pulse.

Abstract: There is provided a jitter estimating apparatus for calculating phase noise waveform of an input signal and for estimating a peak value, a peak-to-peak value and a worst value of jitter of the input signal, and probability to generate jitter based on the phase noise waveform. Timing jitter sequence, period jitter sequence, and cycle to cycle period jitter sequence of the input signal are calculated and the peak value and the peak to peak value for each jitter, as well as probability to generate jitter may be estimated.

Abstract: A system and method compensate for phase noise of a spectrum analyzer based on an established model of the phase noise that accommodates a variety of operating states of the spectrum analyzer. The model is used to form an array that is applied to extract an output signal from measurement traces that are acquired by the spectrum analyzer.

Abstract: A method compensates for phase differences between sampled values of first and second AC waveforms. The method employs a phase angle compensation factor and sequentially samples a plurality of values of each of the waveforms. For a positive compensation factor, second sampled values are adjusted to correspond with first sampled values by employing, for a corresponding second sampled value, a preceding second sampled value plus the product of: (i) the compensation factor and (ii) the difference between the corresponding second sampled value and the preceding second sampled value. Alternatively, for a negative compensation factor, the second sampled values are adjusted by employing, for the corresponding second sampled value, the preceding second sampled value minus the product of: (i) the sum of one plus the compensation factor and (ii) the difference between the preceding second sampled value and the second sampled value preceding the preceding second sampled value.

Abstract: A method for controlling the non-uniformities of plasma-processed semiconductor wafers by supplying the plasma with two electrical signals: a primary electrical signal that is used to excite the plasma, and a supplemental electrical signal. The supplemental signal may be composed of a plurality of electrical signals, each with a frequency harmonic to that of the primary signal. The phase of the supplemental signal is controlled with respect to the phase of the primary signal. By adjusting the parameters of the supplemental signal with respect to the primary signal, the user can control the parameters of the resultant plasma and, therefore, control the non-uniformities induced in the semiconductor wafer.

Abstract: A test apparatus and method of measuring pulling of the frequency of an oscillator. The apparatus includes a bias tee, a power supply, a spectrum analyzer, a second power supply, a symmetrical resistive power splitter, a power meter and a synthesized signal generator. The method includes sweeping the synthesized signal generator frequency from the nominal frequency down to a first frequency. The first frequency is recorded when the oscillator goes out of frequency lock as a first pulling frequency. The synthesized signal generator frequency is then sweet from the nominal frequency up to a second frequency and the second pulling frequency is recorded when the oscillator goes out of frequency lock. The difference between the first and second pulling frequencies is the peak to peak pulling value.

Abstract: A method and system for determining and compensating for phase and time errors in an optical receiver. The method and system includes use of a measurement and reference signal; deriving phase and time errors; and providing compensation values to the optical receiver. The operating frequency and/or other operating parameters associated with phase and time errors are determined and recorded to allow for proper compensation to the optical receiver.

Abstract: A distortion measurement method uses alternative measurements to determine the distortion of a DUT, depending on the ratio of the distortion at an output of the DUT to distortion of a source stimulating the DUT. The method includes calibrating the VNA at a distortion frequency, measuring a first gain of the DUT with the source and the receivers of the VNA set to the distortion frequency, and measuring a second gain of the DUT with the source of the VNA set to a fundamental frequency and the receivers of the VNA set to the distortion frequency. When the second gain is less than a predesignated threshold, a match-corrected source signal is acquired and used with the first gain and the second gain to determine the distortion of the DUT. When the second gain is not less than the predesignated threshold, a match-corrected DUT output signal is measured and used with the first gain and the second gain to determine the distortion of the DUT.

Abstract: An integrated circuit for testing a PLL circuit that includes a phase error generator to receive a signal gained by dividing an oscillated signal from a voltage controlled oscillator and a reference signal so as to detect a phase error signal between the both, an integrating circuit to integrate error signals outputted by the phase error generation circuit, a reference voltage generator to generate a predetermined reference voltage, and a comparator configured to compare an integration result voltage outputted from the integrating circuit with a reference voltage generated by the reference voltage generation circuit, wherein the reference voltage generator and the comparison circuit is configured electrically outside of a loop in the PLL circuit.

Abstract: A phase noise measurement module (PNMM), system and method for measuring phase noise improve accuracy of phase noise measurements of a signal under test (SUT) using a spectrum analyzer. The PNMM includes an RF to hF frequency converter and a selectable frequency divider. The system includes the PNMM connected to the spectrum analyzer and employs an LO signal from a tunable LO in the spectrum analyzer. The method includes directly converting an input SUT to an IF signal having either a second or a third IF frequency that is applied to a corresponding frequency conversion stage of the spectrum analyzer before the phase noise is measured. The present invention bypasses a first conversion stage, and typically a second conversion stage as well, of the spectrum analyzer and directly converts the SUT to either the second or third IF frequency, thereby reducing phase noise added to the SUT.

Abstract: A method and apparatus for monitoring one or more parameters of a variable physical structure, such as liquid level, is disclosed. The method and apparatus includes an electrodynamic element placed in proximity to a monitored structure and exciting within said element an alternating electromagnetic field. The electromagnetic field should be at a frequency at which the electromagnetic field penetrates into the monitored structure and then variations of the electromagnetic field parameters are measured for the element caused by a variation in the structure. The exciting of the electrodynamic element is by an electromagnetic field in the form of at least one slowed electromagnetic wave having suitable energy distribution of the electric and magnetic fields for the measuring of the electromagnetic field parameters.

Abstract: A distortion reduction system uses upstream signal information from carrier frequencies in a signal to be amplified, to determine at least one frequency for the distortion generated by an amplifier amplifying the signal. A sample of an output is taken, and a distortion detection circuitry is used to detect the amplitude of the distortion at least at the one frequency. In response to the amplitude of the distortion at the one frequency, the processing circuitry provides gain and/or phase control signal(s) to adjust the relative phase and/or gain between combining distortion products to reduce the amplitude of the distortion.

Abstract: A system and method for monitoring the conditions in a gas plasma processing system while varying or modulating the RF power supplied to the system, so that resulting signals of the electrical circuits of the system provide information regarding operational parameters of the system or the state of a process. Significant improvements in sensitivity and accuracy over conventional techniques are thereby achieved. In addition, the plasma processing system can be thoroughly tested and characterized before delivery, to allow more accurate monitoring of and greater control over a process, thereby improving quality control/assurance of substrates being produced by the system. The information obtained by the modulation technique can be displayed on a monitor screen, in order to allow an operator to accurately monitor the system/process and diagnose any problems with the system/process.

Abstract: A voltage (V1) and a current (A1), input from input terminals (T1) and (T2), are A/D converted to 1-bit output data by delta modulators and 1-bit output data of the delta modulator is delayed, using a phase-shifting circuit implemented by either a RAM (semiconductor memory) or shift registers, by an amount equivalent to 90° of the input voltage (V1), before a subsequent circuit performs a calculation of a reactive power. This circuit configuration reduces analog circuitry and enables a compact, low-cost implementation, even for use in an LSI.

Abstract: An input clock signal is transformed into a complex analytic signal zc(t) by an analytic signal transforming means 13 and an instantaneous phase of its real part xc(t) is estimated using the analytic signal zc(t). A linear phase is removed from the instantaneous phase to obtain a phase noise waveform &Dgr;&phgr;(t). A peak value &Dgr;&phgr;max of absolute values of the &Dgr;&phgr;(t) is obtained, and 4&Dgr;&phgr;max is defined as the worst value of period jitter of the input signal. The &Dgr;&phgr;(t) is sampled at a timing close to a zero-crossing point of the xc(t) to extract the sample value. A differential between adjacent samples is obtained in the sequential order to calculate a root-mean-square value of the differentials (period jitters). An exp(−(2&Dgr;&phgr;max)2/(2&sgr;j2)) is calculated from the mean-square value &sgr;j and 2&Dgr;&phgr;max, and the calculated value is defined as a probability that a period jitter exceeds 2&Dgr;&phgr;max.

Abstract: Absolute delay of a FTD is characterized by applying a stimulus signal to a first port of the FTD. A second port of the FTD is coupled to a delay element having a known delay and a reflective termination. A drive signal is applied to a third port of the FTD. A time domain reflection response to the stimulus signal is obtained and a signal peak within the response that corresponds to a return signal from the reflective termination is identified. Absolute delay of the frequency translation device is then extracted based on the known delay of the delay element and a time that corresponds to the occurrence of the identified signal peak. Delay versus frequency is characterized by isolating a segment of the obtained time domain reflection response that corresponds to a return signal from the reflective termination. Inverse frequency transforming the isolated segment of the time domain reflection response provides delay characteristics of the FTD versus frequency.