Abstract: An apparatus for mapping and accuracy-testing an electromagnetic navigation system includes a sensor sensing electromagnetic vectors of an electromagnetic field, a carriage moving the sensor along a first direction and a second direction different from the first direction, a first position detector operatively associated with the sensor and detecting a first position of the sensor along the first direction, a second position detector operatively associated with the sensor and detecting a second position of the sensor along the second direction, and a controller operatively associated with the sensor and controlling movements of the carriage along the first and second directions and mapping the electromagnetic field based on the sensed electromagnetic vectors at predetermined positions in a coordinate system defined by the first direction, the second direction, and a third direction perpendicular to a plane defined by the first and second directions.

Abstract: The invention generally relates to detecting target molecules.

Abstract: In some embodiments, a positioning system is configured to position a plurality of antennas about a device under test (DUT). According to one embodiment, a positioning system includes a first positioner configured to hold a DUT and to provide motion of the DUT about a first axis, and a second positioner configured to hold a first antenna and to provide motion of the first antenna about a second axis.

Abstract: Disclosed is an ultra high frequency antenna device for use with an identification tag for attachment to an animal. The antenna device comprises: a meander line antenna; and a substrate. The antenna device is operable to use the body of the animal to which it is attached as part of the tuning circuit of said antenna device. Also disclosed is an ultra-high frequency identification tag comprising such an antenna device, and a method of manufacturing such an ultra-high frequency identification tag.

Abstract: A corrosion sensor system includes one or more corrosion sensors embedded in a coating material such as an anti-corrosion coating material. Each corrosion sensor may include a resonator disposed on a dielectric substrate, and has a resonant frequency in a radio frequency (RF) range or an infrared (IR) range, and is configured for interacting with an RF or IR excitation signal to produce an RF or IR measurement signal. The corrosion sensor system may be applied to an object for which corrosion is to be monitored. A corrosion detection system includes a data acquisition system that transmits the excitation signal to the corrosion sensor, and receives the measurement signal from the corrosion sensor for analysis to determine whether corrosion has occurred.

Abstract: An integrated hybrid (active-passive) harmonic impedance tuner uses a fixed and an adjustable directional coupler (wave-probe) and a number of independent wideband tuning probes, all mounted inside the same slabline and housing. The tuning probes are inserted between the fixed and the mobile wave-probes. The fixed wave-probe samples a portion of the forward travelling signal at the fundamental frequency, injects it into a power amplifier and the mobile wave-probe adjusts the phase and amplitude of the amplified signal and injects it back into the slabline towards the DUT. The mobile carriages and tuning probes are automated. The mobile wave-probe is either fully or partially (horizontal only) automated or fully manually controlled. Feedback signal phase and amplitude control is obtained through the horizontal and vertical movement of the mobile wave-probe.

Abstract: A radio device includes a transmitter and a receiver. The transmitter transmits rotationally polarized radio waves in a plurality of transmission propagation directions using a plurality of antennas. The receiver receives rotationally polarized radio waves in a plurality of reception propagation directions using a plurality of antennas. The receiver measures changes in rotational loci of polarizations of the radio waves received in the plurality of reception propagation directions corresponding to radio waves transmitted in a plurality of transmission propagation directions. The transmitter performs transmission using a reception propagation direction at which the changes measured by the receiver in the rotational loci of the polarizations of the received radio waves stop.

Abstract: A method to determine an electronic signature characteristic of a fluid medium comprises making a reception surface for receiving the fluid medium on at least one face of the substrate, putting the fluid medium into contact with the reception surface in order to make an interface between the substrate and the fluid medium, lighting at least one zone of the interface through the fluid medium with a pulsed light beam in order to create photogenerated electric charges, using a microwave reflectometer to measure the lifetime durations of the photogenerated electric charges, which durations have respective values that depend on the recombination rate at the interface between the substrate and the fluid medium, creating a matrix of measured lifetime duration values for the photogenerated electric charges, and using the matrix to determine the electronic signature characteristic of the fluid medium.

Abstract: A scattering tomography method includes: radiating waves to an object from a plurality of transmitting antenna elements aligned on a side surface of a case; receiving scattered waves by a plurality of receiving antenna elements aligned on the side surface of the case; and reconstructing an image relating to information on an interior of the object using scattered wave data representing the scattered waves. In the reconstructing, a reconstruction function for reconstructing the image relating to the information on the interior of the object is set in advance for a three-dimensional space having the same shape as the case, a scattering field equation which the reconstruction function satisfies is constructed, a visualization function that is obtained by solving the scattering field equation is derived from the scattered wave data, and the image relating to the information on the interior of the object is reconstructed using the visualization function.

Abstract: The present disclosure relates to a method for determining a water cut value of a composition comprising a hydrocarbon. In some embodiments, the disclosure relates to an apparatus for determining the water cut value of the composition that comprises one or more of a capacitance probe, a temperature probe, a salinity probe, and a computer.

Abstract: A method and apparatus for remotely detecting, locating, and identifying chemicals and chemical compounds through optically opaque materials. Electromagnetic radiation in the Terahertz range emitted from an antenna array is modulated to excite target molecules. The apparatus then stops the excitation energy and the molecules emit an electromagnetic signature detectable by the device at standoff distances.

Abstract: Provided is an apparatus for reconstructing an image using a microwave. The apparatus includes: a microwave measurement unit configured to obtain a microwave measurement value for a microwave measurement object; and an image reconstruction unit configured to perform an image reconstruction by using the microwave measurement value and shape boundary information of the object.

Abstract: A chip may be programmed to emit and/or augment energy tuned to interact with bodily functions through transdermal contact. The chip may be programmed by using a pair of Tesla pancake coils, each coupled to a spherical electrode and driven to create an energetic field between the electrodes. Embodiments may include systems that include the programmed chip in a fabric body. The systems may be wearable so that the effects of the programmed chip may be applied to selected areas of the human body. Some embodiments may be useful for augmenting healing of ailments.

Abstract: A fluid sensor (10) comprises a core (27) defining a fluid flow path (21) and a cavity member (30) located externally of the core. The cavity member (30) comprises an electrically-conductive composite material including a matrix and one or more reinforcing elements embedded within the matrix. The cavity member (30) is configured so as to provide confinement for an electromagnetic field and the core (27) is configured so as to permit transmission therethrough of electromagnetic radiation at a frequency of the electromagnetic field. The electromagnetic field may be a radiofrequency (RF) electromagnetic field. The fluid sensor (10) may be used in the measurement of the composition and/or flow characteristics of fluid in the fluid flow path (21).

Abstract: A probe (14) of a material level measuring apparatus (10) inserts into a container (20). The material level measuring apparatus (10) transmits an electromagnetic wave signal. When the electromagnetic wave signal touches a surface of a material (30), a first reflected signal is generated. When the electromagnetic wave signal touches a bottom of the probe (14), a second reflected signal is generated. According to the first reflected signal and the second reflected signal, a first time-passing difference value (t1) and a second time-passing difference value (t2) are obtained. According to the first time-passing difference value (t1), the second time-passing difference value (t2) and a predetermined empty container time-passing difference value (t3), a first material level and a second material level are obtained. According to the first material level and the second material level, a third material level is obtained.

Abstract: A system, method and hydrocarbon processing facility for determining at least one parameter of a multiphase fluid (1) comprising hydrocarbons flowing in a conduit (2) of a hydrocarbon processing facility, which system comprises: said conduit; at least one coaxial measurement probe (3), which comprises at least one probe conductor, a probe shield (7) arranged outside of the at least one probe conductor, which at least one measurement probe is mounted to the conduit for measuring signals indicative of at least one physical property of the fluid- and comprises a first, open-ended terminal (8) where the at least one probe conductor and the probe shield are exposed to the flowing fluid when the system is in operation; and a signal processor (4) for interpreting the signals to determine the at least one parameter.

Abstract: An electromagnetic tomography system for gathering measurement data pertaining to a human head includes an image chamber unit, a control system, and a housing. The image chamber unit includes an antenna assembly defining a horizontally-oriented imaging chamber and including an array of antennas arranged around the imaging chamber. The antennas include at least some transmitting antennas and some receiving antennas. The control system causes the transmitting antennas to transmit a low power electromagnetic field that is received by the receiving antennas after passing through a patient's head in the imaging chamber. A data tensor is produced that may be inversed to reconstruct a 3D distribution of dielectric properties within the head and to create an image. The housing at least partially contains the antenna assembly and has a front entry opening into the imaging chamber. The head is inserted horizontally through the front entry opening and into the imaging chamber.

Abstract: A method for determining a phase composition of a multiphase mixture flowing through a pipe is presented. The method includes exciting one or more patch antennas configured to operate over the range of frequencies. Further, the method includes acquiring at least one of a transmitted signal and a reflected signal over the range of frequencies from the one or more patch antennas. Moreover, the method includes estimating the phase composition of the multiphase mixture based on a group delay determined from at least one of the transmitted signal and the reflected signal. A system for determining a phase composition of a multiphase mixture flowing through a pipe is also presented.

Abstract: Apparatus, method, and computer-accessible medium embodiments for a noninvasive mapping of electrical properties of tissues or materials. For example, it is possible to apply a plurality of stimulations to a target. It is possible to receive at least one signal from the target in response to the applied stimulations. Further, it is possible to process the at least one signal to determine electromagnetic-field-related quantities associated with the stimulations and the target response. Also, it is possible to supply the electromagnetic-field-related quantities to a system of equations relating these quantities to a plurality of electrical property values and residual field-related unknown values of the at least one target. It is also possible to determine a solution to the system of equations, including determining at least one electrical property of the at least one target.

Abstract: A harmonic load pull system uses a number of synchronized signal sources to inject harmonic power into the output of a power transistor. The mismatch between the signal sources and the transistor internal impedance is reduced by using multi-harmonic tuners, which pre-match the impedance of the signal sources to the internal impedance of the transistor at each harmonic frequency independently. Actual tuning is electronic by changing the amplitude and phase of the injected signals. The transmitted and reflected waves are measured and optimized through bi-directional couplers connected between the transistor and the tuner and a wideband harmonic receiver.

Abstract: A multi-frequency programmable and remotely controllable variable attenuator and phase shifter (MF-VAPS) network utilizes wideband three port circulators, power combiners, high-low pass filters and a calibrated multi-harmonic tuner to control the amplitude and phase of the transmission factor (A21) at up to three user defined frequencies individually. The harmonic signal components are divided in frequency bands and injected into the circulator's port 1 and extracted from port 3, whereas the tuner is connected to port 2 and terminated with Zo. When the tuner is initialized (S11=0) the transmission factor of the network is zero; when the tuner is at maximum reflection at any frequency the transmission factor is also maximum. Changing the reflection phase of the tuner controls the transmission phase <A21 by the same amount, up to 360°.

Abstract: A wireless mobile device is used with the wireless mobile device mounted on a body of a user and includes a first wireless processor that performs wireless signal processing on a signal for a data communication in a first wireless system, a second wireless processor that performs wireless signal processing on a signal for a voice call in a second wireless system having a higher priority than a priority of the first wireless system, and a controller that, when a data communication in the first wireless system and a voice call in the second wireless system occurred at the same time, in a close-to-head state in which the wireless mobile device is brought close to a head of a user, reduces transmission power with which the first wireless processor outputs a transmission signal.

Abstract: Disclosed is an improved system and method to treat an edge of a material for determining a property of such material through measurements of electromagnetic waves. The system and method are operative to mitigate the adverse effects caused by the interaction between an electromagnetic wave and an edge of a sample of a material under test. The system and method define a configuration to block and significantly attenuate the propagation of electromagnetic waves that may reach an edge of the sample being evaluated. This configuration reduces the undesired effects caused by edge-diffraction that may interfere with the measurement of desired electromagnetic waves for material evaluation. As a result, a property of a material under test can be measured more accurately, especially near the edges of such material. In addition, the system and method enable the evaluation of a small-size sample of a material.

Abstract: An imager for obtaining an image of an object includes a substrate including a plurality of electrical emitting units for emitting electromagnetic waves and a plurality of electrical detecting units for detecting the electromagnetic waves reflected by the object. Each emitting unit includes an electrical emitter, a first antenna, a first metallic reflector, and a first dielectric element between the first antenna and the first metallic reflector. Each detecting unit includes an electrical detector, a second antenna, a second metallic reflector, and a second dielectric element between the second antenna and the second metallic reflector.

Abstract: Systems, devices, admixtures, and methods are described including transponder devices (e.g., a palatable transponder, an edible transponder, a palatable radio frequency identification (RFID) tag, an edible RFID tag, etc.) for admixing with a food product.

Abstract: A method for determining the flow rates of a fluid comprising a multi-component mixture of a gas and at least one liquid in a pipe, the method comprising the following steps: a. The temperature and pressure of the multi-component mixture is determined, b. the fractions of the multi-component mixture is determined based on at least two measured physical properties of the multi-components mixture and knowledge of the same physical property of the individual components of the multi-component mixture, c. the velocity of the multi component mixture is determined, d. based on the result from step a-c, the flow rate of the individual component of the fluid is determined, characterized by a method for determining the physical properties of at least one of the components of the multi-component mixture where e. an electromagnetic loss or phase measurement is performed, f. a statistical parameter related to the electromagnetic measurement is calculated, g.

Abstract: A reflectometer for use in measuring scattering (S-)parameters for a device under test (DUT) includes a test port, a radio frequency (RF) output signal source, and a local oscillator (LO) signal. The LO signal is used to downconvert the RF output signal to an incident IF signal. The reflectometer is useable as a first reflectometer with a second reflectometer such that the first and second reflectometers are phase synchronized by a synchronization signal. Phase and magnitude of transmission S-parameters of the DUT are measurable when the first reflectometer is used with the second reflectometer. The roles of the first and second reflectometers are reversible to allow for measurement of forward and reverse parameters. Further, the synchronization signal can be provided by one reflectometer to the other (or both can receive a separately generated synchronization signal) via a wire or fiber optic cable, for example, or via a wireless connection.

Abstract: Immediately after airway placement and/or following any patient transfer, an automated program may be activated in a CO2 monitoring device to provide an airway device placement check. The automated program needs time to determine if the airway placement has been successful or not. During analysis of CO2 respiration data by the program, real-time feedback is displayed to the user as soon as the airway check program is activated until the time that a final decision on the success of airway placement is made. The real-time feedback displays one or more indicators of the progress of the program toward a determination of a successful or failed placement.

Abstract: A measurement system and method for conducting measurements on a device-under-test (DUT). The system includes, in one embodiment, a passive impedance controlling tuner, and a signal transmission line, the tuner including a signal transmission line segment as at least part of the signal transmission line. A signal coupling device is coupled in a non-contacting relationship to the signal transmission line between a signal port of the DUT and the tuner for sampling signals propagating between the passive impedance controlling tuner and the DUT to allow measurement of an actual impedance presented to the DUT with the DUT in place in the measurement system during measurement of DUT characteristics. Measurement system equipment receives response signals from the signal coupler. The measurement system is configured to conduct measurement of DUT characteristics without pre-characterizing the impedance controlling tuner.

Abstract: Microwave imaging apparatus and method for completely imaging the human body (or portions thereof) in sufficient detail to render a timely and accurate medical diagnosis by trained medical professionals. The data conversion processes presented will not require physicians and radiologists to learn to use image data in a format they are not familiar with. Hounsfield encoded and/or MRI intensity encoded medical images in the DICOM format are provided from reconstructed dielectric images obtained from raw scattering data. This allows for the exchange of information created from microwave imaging techniques to be implemented with existing diagnostic tools and analysis techniques. Furthermore, methods are presented for converting image data with Hounsfield encoded units to an image with dielectric encoded units.

Abstract: A system and method to facilitate wireless testing of a radio frequency (RF) signal transceiver device under test (DUT). With the DUT operating in a controlled electromagnetic environment, the tester exchanges multiple test signals wirelessly with the DUT. Signal phases of the respective test signals are controlled in accordance with feedback signals from the DUT and test equipment. Magnitudes of the respective test signals can also be controlled in accordance with such feedback signals, thereby enabling minimizing of apparent signal path loss between the tester and DUT to effectively simulate an electrically conductive signal path.

Abstract: RF front end circuitry includes primary transceiver circuitry associated with a primary antenna and secondary receiver circuitry associated with a secondary antenna. Generally, the primary transceiver circuitry and the primary antenna are located on one end of a mobile communications device, while the secondary receiver circuitry and the secondary antenna are located at an opposite end of the device. Cross-coupling connection lines run between the antenna switching circuitry for the primary antenna and the secondary antenna, and are reused to send a portion of primary RF transmit signals from the primary transceiver circuitry to the secondary receiver circuitry so that primary RF transmit signals coupled into the secondary receiver path via antenna-to-antenna coupling can be reduced.

Abstract: A detection system for detecting a residential pest, the detection system may include a trigger module that is configured to generate triggering signals for inducing a residential pest to increase an acoustic-detectable activity of the residential pest; and a sensor that is configured sense signals responsive to a generation of the triggering signals.

Abstract: The present invention provides for an improved scanning process with a stationary X-ray source arranged to generate X-rays from a plurality of X-ray source positions around a scanning region, a first set of detectors arranged to detect X-rays transmitted through the scanning region, and at least one processor arranged to process outputs from the first set of detectors to generate tomographic image data. The X-ray screening system is used in combination with other screening technologies, such as NQR-based screening, X-ray diffraction based screening, X-ray back-scatter based screening, or Trace Detection based screening.

Abstract: Disclosed herein are a microwave probe capable of precisely detecting a plasma state in a plasma process, a plasma monitoring system including the probe, and a method of fabricating a semiconductor device using the system. The microwave probe includes a body extending in one direction and a head which is connected to one end of the body and has a flat plate shape. In addition, in the plasma process, the microwave probe is non-invasively coupled to a chamber such that a surface of the head contacts an outer surface of a viewport of the chamber, and the microwave probe applies a microwave into the chamber through the head and receives signals generated inside the chamber through the head.

Abstract: A transmitting antenna level sensor of a magnetic resonance imaging system and a magnetic resonance imaging system is provided. A first detection channel is used for detecting a first power of a first radio frequency signal source, and a second detection channel is used for detecting a second power of the first radio frequency signal source. A control unit is used for comparing the first power with the second power to obtain a first comparison result, and a first notification message is sent according to the first comparison result.

Abstract: A high-performance, broad-band antenna that is small enough to be used in an array for biomedical imaging, yet has an aperture large enough to allow operations in the 1 GHz to 2.7 GHz frequency range. The present antenna advantageously uses a Vivaldi antenna with unique lobe designs to provide a small antenna that provides excellent near field imaging. The ends of each lobe have a tilted half-disc shape that increases the aperture of the antenna without increasing overall size. Other unique features of the lobes include exponential structures and an impedance matching design. Multiple units of the present antipodal Vivaldi antenna can be used in an array of antennas. Such an array, or stack or multiple arrays, can be used in many microwave applications for biomedical imaging.

Abstract: An imaging system for an object such as human or animal tissue applies acoustic vibrations localized in two or three dimensions and simultaneously illuminates the object with an illuminating electromagnetic wave. The acoustic vibration comprises a carrier wave that is amplitude modulated by an AM waveform. The carrier wave is selected to provide the localization of the acoustic vibration, whereas the AM waveform includes a frequency component selected to provide a vibration of the object of greater magnitude than the carrier wave. To detect a Doppler component shifted by the frequency of said frequency component of the AM waveform, a signal processing apparatus comprises a phase locked-loop locked to the EM frequency, producing a frequency-demodulated signal comprising the set of the Doppler components, and a lock-in amplifier configured to extract a signal at a reference frequency equal to the frequency of a frequency component of the AM waveform.

Abstract: Disclosed is an improved system and method to evaluate the status of a material. The system and method are operative to identify flaws and measure the erosion profile and thickness of different materials, including refractory materials, using electromagnetic waves. The system is designed to reduce a plurality of reflections, associated with the propagation of electromagnetic waves launched into the material under evaluation, by a sufficient extent so as to enable detection of electromagnetic waves of interest reflected from remote discontinuities of the material. Furthermore, the system and method utilize a configuration and signal processing techniques that reduce clutter and enable the isolation of electromagnetic waves of interest. Moreover, the launcher is impedance matched to the material under evaluation, and the feeding mechanism is designed to mitigate multiple reflection effects to further suppress clutter.

Abstract: An open-ended waveguide probe including a finite flange extending outwardly and functioning as an infinite flange. A signal source provides a microwave signal to the waveguide, which in turn transmits microwave electromagnetic energy incident upon an object to be tested. The finite flange at the waveguide's aperture is shaped to reduce scattering of the electromagnetic field reflected from the object and received by the aperture. The probe is adapted for coupling to a receiver for sampling the reflected electromagnetic field received by the aperture and the receiver is adapted for coupling to a processor for determining at least one material characteristic of the object based on sampled electromagnetic field reflected from the object.

Abstract: Provided is a power transmitting device, a power feeding system, and a power feeding method in which power loss is cut by increasing power use efficiency and power can be supplied to a power feeding user (a power receiving device) with high power transmission efficiency. Depending on a power feeding state (e.g., resonant frequency of a power transmitting resonance coil is not the same as that of a power receiving resonance coil, or the influence of their positional relation), power transmitted from a power source portion of the power transmitting device is reflected to the power transmitting coil side by the power transmitting resonance coil. Further, a power recovering function (circulation function) for power reflected to the power transmitting device is provided to recover the power reflected to the power transmitting coil side and to reuse it for power transmission.

Abstract: A hand-carriable measurement module of a virtual vector network analyzer including a housing; a test port mounted to the housing; a power and communication interface mounted to the housing; and a circuit disposed within the housing and coupled to the test port and the power and communication interface. The circuit is configured to transmit and receive test signals through the test port for measurement of a device under test; and transmit digitized signals representing the test signals through the power and communication interface to a user interface separate from the housing for presentation to a user.

Abstract: An automatic microwave load pull slide screw tuner uses two RF probes, either independently movable or linked together, in order to generate high VSWR; precise alignment of two RF probes inside the same slabline is critical, since they must glide seamlessly inside the slabline slot, very closely to the center conductor over large horizontal displacements; a self-alignment mounting joint for the probes is described, which allows one or both of them to be mounted on the tuner's vertical axis held by a flexible steel blade, which allows sidewise movement and tilting and self-alignment of the probe, but also ensures unyielding movement in vertical and horizontal directions, as required for exact re-positioning of the probe during measurement. In case of double probes mounted on the same tuner axis the steel blade provides for a number of probe spacings, which allow the frequency range of the tuner to be switched for various applications.

Abstract: A resonator system for electron spin resonance (ESR) is disclosed. The resonator system comprises: a generally planar resonator layer defining an open-loop gapped by a non-conductive gap in the layer, and a microwave feed, positioned configured for transmitting microwave to the resonator layer such as to concentrate, with a quality factor of at least 100, a magnetic field within an effective volume of less than 1 nL above the layer.

Abstract: The present invention provides for an improved scanning process with a stationary X-ray source arranged to generate X-rays from a plurality of X-ray source positions around a scanning region, a first set of detectors arranged to detect X-rays transmitted through the scanning region, and at least one processor arranged to process outputs from the first set of detectors to generate tomographic image data. The X-ray screening system is used in combination with other screening technologies, such as NQR-based screening, X-ray diffraction based screening, X-ray back-scatter based screening, or Trace Detection based screening.

Abstract: An impedance tuner having an RF transmission line, with a single lead screw extending along the RF transmission line. A plurality of movable carriages are engaged with the lead screw, wherein each of the plurality of movable carriages is configured for independent movement relative to other carriages. A motorized drive system drives the plurality of movable carriages independently along the lead screw.

Abstract: The present invention discloses a method for determining a Voltage Standing Wave Ratio (VSWR) in downlink period of a radio communication, comprising: coupling a forward signal into a Transmitter Observation Receiver (TOR) via a Radio Frequency (RF) switch; feeding a reversed signal in a reversed path from a third port of a circulator into the TOR via the RF switch; making down conversion, filtering and converting the forward signal and the reversed signal from an analog signal into digital baseband signal respectively; measuring and storing power levels of the forward signal and the reversed signal in form of digital baseband; and calculating VSWR or Return Loss (RL) value from the stored power levels of the forward signal and the reversed signal. A corresponding apparatus and radio communication system are also provided. This provides an improved VSWR detection method with low complexity and low cost, etc.

Abstract: A system for measuring properties of a surface under test with surface waves includes a surface wave network including a dielectric substrate, a reactive grid of a plurality of metallic patches on a first surface of the dielectric substrate, a plurality of electronic nodes on the first surface of the dielectric substrate, and a ground plane on a second surface of the dielectric substrate permeable to RF fields of the surface waves, and a controller configured for causing a respective one of the electronic nodes to transmit at least one surface wave and configured for collecting data for signals received by at least one other of the plurality of electronic nodes.

Abstract: Provided is a device for performing at least one of detection and emission of electromagnetic waves, including a plurality of antennas, in which a first antenna includes a first radiating element and a first electronic element electrically connected to the first radiating element, and is sensitive to a first frequency band, and in which a second antenna includes a second radiating element and a second electronic element electrically connected to the second radiating element, and is sensitive to a second frequency band. At least a part of the second radiating element is arranged inside the first radiating element.

Abstract: The present invention relates, in general, to an apparatus for determining the presence of abnormality of a heater for a semiconductor thin film deposition apparatus, such as an aluminum or ceramic heater and, more particularly, to a technique for monitoring a phenomenon occurring in an apparatus during a semiconductor thin film deposition process and a phenomenon occurring in a heater, thereby determining the presence of abnormality of the heater. The present invention also relates to a technique for measuring, in real time, a thickness of a thin film deposited by driving of a heater during a thin film deposition process in a chamber, thereby determining the presence of abnormality of a wafer and the presence of abnormality of the heater, based on the measurement result.