Abstract: A probe for measurement of an electrically conductive surface covered by an insulating cover layer has a pair of electrically conductive pads for capacitive coupling to the conductive surface. The pads may be formed by photolithography as part of a disk of a metallic layer disposed on a substrate of low dielectric material such as fibrous glass in an epoxy binder, the pads being separated by a relatively narrow gap. Included within the probe is an electrically insulating holder for supporting the substrate and the pads, the holder being configured to facilitate manual manipulation of the probe. The probe connects with a signal analyzer which provides a test signal coupled to the pads via a coaxial transmission line. During a sliding of the pads along the cover layer, electrical characteristics of a signal coupled capacitively via the pads to the conductive surface are analyzed by the analyzer to provide information on electrical continuity and resistivity of the surface.

Abstract: A soil moisture sensor using sensor electrodes each designed with a larger capacitance for reduced sensitivity to soil resistance and increased sensitivity to soil moisture surrounding the electrode. The soil moisture sensor is provided as a pair of cylindrical rods each coated with a thin layer of dielectric material, which are buried in the soil or other medium and are connected to a conversion circuit in which the electrodes act as a variable capacitance. The capacitance developed by each of the sensor electrodes is related to the moisture contained in the soil particles surrounding the electrodes. An effective conducting area is developed by the soil particles in contact with the electrodes and this determines the value of the variable capacitance presented to the conversion circuit. The conversion circuit is a multivibrator in which the variable capacitance determines the output frequency, and this provides a measurement of soil moisture.

Abstract: A sensor for measuring the mixture ratio of liquids, particularly of fuel mixtures, comprises a measuring cell, which has a cavity with one inlet and one outlet. The liquid is directed through the cavity, whereby regions of the inner wall of the cavity are electrically conductive and, together with at least one additional electrically conductive surface, form a capacitor, which is a component of an evaluation circuit. The measuring cell is manufactured from at least two ceramic carriers, which are connected by way of at least one connection layer to form a layer arrangement. The cavity is produced between the ceramic carriers as the result of the lack of at least one connection layer in certain regions. In each case, at least one electrode is applied, in the vicinity of the cavity, to the ceramic carrier delimiting the cavity using thick-film technology.

Abstract: A capacitive position transducer with reduced sensitivity to particulate and fluid contaminants. The electrodes of the position transducer are provided with a relatively thick coating of dielectric material so that the series impedance of the dielectric coatings is at least equal to the maximum capacitive impedance between the coatings whether or not there are any contaminants positioned therebetween. In one embodiment, the coatings are spaced-apart from each other to create an air gap while in another embodiment the coatings are resiliently biased toward each other so that the coatings slide along each other.

Abstract: A sensor for measuring dielectric constant or resistivity of a flowing liquid, and especially of fuel mixtures for determining alcohol content, includes an inner tube through which the liquid flows, an outer sleeve about the inner tube in coaxial relation, holes in the inner tube to provide fluid communication at two locations to the space between the tube and the sleeve, and a partial restriction in the tube to divert some of the fluid flow into the space between the tube and the sleeve. The tube forms the inner electrode of a capacitor and the sleeve forms the outer electrode of the capacitor to measure dielectric constant. The ends of the sleeve are sealed in liquid tight fashion.

Abstract: A capactive sensor contains a bridge circuit (1,2,3,4) which is comprised of an electrode surface (21) and a reference electrode surface (24) with the electrode surfaces located on the opposite sides of a plate. The bridge circuit is constructed as a multi-layered printed circuit board. The feed areas (23) which are opposite the electrode areas (21, 24) on one or two inner layers serve as feed capacitors (1, 2) in the bridge circuit (1, 2, 3, 4).

Abstract: A capacitive moisture sensor includes insulator means; capacitance means including a sensing capacitor having a plurality of spaced capacitive sensor conductors mounted with the insulator means for exposure to the atmosphere; and first and second electrodes mounted with the insulator means remote from the spaced capacitive sensor conductors; means for applying a periodic input current across the first and second electrodes; and means for detecting a change in capacitance between the first and second electrodes indicative of moisture bridging at least two of the capacitive sensor conductors.

Abstract: A meter for measuring the moisture content of wood in the center of a stack of wood has a probe with an electromagnetic wave sensor mounted near a forward end and a meter mounted at an opposite end. An extendable member is also mounted at the forward end of the probe. The extendable member is pivoted by a slide handle at the opposite end of the probe between reclined and extended positions. The forward end of the probe is inserted into a stack of wood between layers of the stack. The extendable member is extended to press the sensor against wood in the center of the stack. The meter then registers the moisture content of the wood.

Abstract: The assembly comprises an electrically insulated linear array of a plurality of active plates working in conjunction with common return plate means to provide a line of capacitors. The electrically insulated active plate array and common return plate means extend through a column of multi-phase fluid. A discrete oscillator circuit is positioned adjacent to and is permanently connected to each active plate for charging and discharging it. Means are provided for sequentially enabling the oscillator circuits to produce signals which are each indicative of the dielectric constant of the thin horizontal slice of fluid extending between the active plate and the return plate means. The signals are collected by a microprocessor which analyzes them to provide a dielectric constant profile of the fluid column. Interfaces of phases can be located from the profile and the composition of the fluid phases can be determined.

Abstract: An improved capacitance level probe is shown which can be positioned within the return vapor passage of a coaxial vapor recovery refueling system for detecting changes in liquid level within an underground fuel storage tank. The level probe has an outer conductor, a spaced inner conductor, a closed upper end and a lower end with an end opening which allows liquid to enter and leave the interior of the probe as liquid level changes within the underground tank being monitored. A tubular impact vent is located at the upper end of the outer conductor and collects tank vapors from the return vapor passage in order to conduct such vapor pressure to the open interior of the outer conductor above the level of liquid within the outer conductor. This action prevents sudden pressure drops within the outer conductor as the level of fuel changes within the underground storage tank, thereby eliminating inaccuracies in the sensed capacitance of the unit.

Abstract: A particulate moisture measurement gauge of the type using a resonant electric circuit connected to a diode detector and to an AC signal generator having a frequency near the resonant frequency of the resonant circuit and in which the resonant circuit is electrically coupled to the particulate by a capacitor having the particulate as its dielectric. A probe is formed as a transmission line having a length which is approximately an integral number of one quarter wave lengths long. One end of the transmission line is connected to the circuitry and its opposite, moisture sensing end is immersed in the particulate. Preferably the probe is a rigid, conductive tube with a central rod having a ceramic insulator sealing its moisture sensing end and the circuitry housed in its opposite end.

Abstract: A capacitive position sensor has a scale (10), having hollow or raised topographical features, and a cursor (20) having an electrode array comprising at least two transmitting electrodes (21a, 21b) and at least one receiving electrode (21c) separated by shielding electrodes (21g). The coupling capacitances (Cac, Cbc) between transmitting and receiving cursor (20) electrodes are modified as a function of the position (x) of the scale topographic feature (11) relative to the cursor, the evaluation of the variation of the signals picked up by the receiving electrode permitting a precise measurement of the relative displacement between scale and cursor.

Abstract: The fuel character judging system has an electrical capacitance type sensor which outputs a first detection signal representative of a first character of a fuel mixture. A resistance type sensor outputs a second detection signal representative of a second character of the fuel mixture. A control unit stores first and second maps for a known fuel mixture having known first, second and third numbers corresponding to components of the known fuel mixture. The first map has a plurality of first characteristic lines which respectively correspond to a plurality of values of the first detection signal from the electrical capacitance type sensor. The second characteristic lines are plotted in accordance with the second signal from the resistance type sensor upon changing the known first number. One of the second characteristic lines in the second map is selected in accordance with the first detection signal from the electrical capacitance type sensor.

Abstract: A dual sensitivity stud sensor senses studs through both thick and thin surfaces. Studs are sensed by detecting a change in the capacitive loading of plates as they are moved along a surface and into proximity with a stud. The sensor informs the operator when the sensor has (incorrectly) been calibrated over a stud. The sensor also informs the operator if the sensor is placed against a surface either too thick or too thin for stud detection. Through use of a digital register, the sensor remains calibrated indefinitely while the sensor is powered on.

Abstract: A cable length indicating arrangement which utilizes the capacitance of a two wire cable (10) to determine its length. The arrangement includes an oscillator stage (14) having a frequency setting capacitor (16) across which the cable is connected. The frequency of oscillation is converted into a voltage which is provided as the input to a comparator network (70, 72, 74, 76, 78, 80) which compares this voltage against voltages derived from a voltage divider network (96, 98, 100, 102, 104, 106, 108). The comparator network includes a "ladder" of comparators each having their non-inverting inputs coupled to receive the frequency dependent voltage and their inverting inputs each connected to a respective point in a resistive divider string. The outputs of the comparators are connected to respective light emitting diodes (82, 84, 86, 88, 90, 92).

Abstract: A probe apparatus for measuring electrical characteristics of chips arranged on a wafer comprises a probe card having probe needles and a rotary chuck for supporting the wafer. The chuck is supported on an XY stage. A stationary alignment bridge is provided with a stationary camera and a capacitance sensor. The stage is provided with a movable camera. A transparent plate on which a target is formed is attached to the chuck. The target and its peripheral portion are formed of transparent thin films. The target is used for positioning and focusing of the cameras. The thin films are used for height detection by use of the capacitance sensor.

Abstract: A plurality of sensor circuits each including an oscillator circuit, a detection electrode, and a ceramic resonator for changing a resonance frequency in accordance with a change in small electrostatic capacitance detected by the detector electrode and outputting a detection signal corresponding to a change in resonance frequency are formed on a circuit board. Detector electrode surfaces A.sub.1 to A.sub.4, B.sub.1 to B.sub.4, and C.sub.1 to C.sub.4 of the first to third sensor circuits are formed on the upper surface of the circuit board in a divisional manner. The detection surfaces of the respective sensor circuits are arranged to have codes in the scanning direction of an object to be detected. The fixed capacitances of the detection surfaces are decreased, and a change of state of the object can thus be detected at a high resolution.

Abstract: A dosimeter with reproducible changes in .epsilon.', .epsilon.'', or their equivalent two parameter circuit representations, under a given treatment regime that correlate directly with changes in physical attributes of a material or fluid, such as strength, modulus or viscosity, is used to monitor the deterioration of the physical attributes of the material or fluid.

Abstract: A non-contact, omni-directional capacitive probe for use in dimensional gauging includes an electrically conductive spherical sensing tip that forms a capacitor with a workpiece, the capacitance of the capacitor being indicative of the distance between the spherical sensing tip and the workpiece.

Abstract: A water drop sensor comprises a pair of electrodes disposed in association with a portion of a surface of a vehicle window within a wipe pattern and having edges defining an extended insulating gap between the electrodes. The electrodes define a gap which varies in width over the range of diameters of drops to be sensed. The result is that the sensor shows more sensitivity to larger drops than to smaller drops as compared with a similar sensor having a constant gap width. The variation in gap width may be continuous or stepwise over the total range of drop diameters.

Abstract: A capacitive position sensor has a scale (10), having hollow or raised topographical features, and a cursor (20) having an electrode array comprising at least two transmitting electrodes (21a, 21b) and at least one receiving electrode (21c) separated by shielding electrodes (21g). The coupling capacitances (Cac, Cbc) between transmitting and receiving cursor (20) electrodes are modified as a function of the position (x) of the scale topographic feature (11) relative to the cursor, the evaluation of the variation of the signals picked up by the receiving electrode permitting a precise measurement of the relative displacement between scale and cursor.

Abstract: A flexible fuel dielectric-effect sensor is disclosed wherein three capacitors, immersed in the fuel flow, are connected to define a pi filter.

Abstract: A capacitive probe for inspecting and measuring the diameter of a bore and thus the amount of wear in the bore formed of an electrically insulated housing containing two levels of conductive plates to measure distance between the plates and the rifling grooves and lands of a bore.

Abstract: The invention is a capacitively coupled probe which can be used for non-contact acquisition of both analog and digital signals. The probe includes a shielded probe tip, a probe body which is mechanically coupled to the probe tip, and an amplifier circuit disposed within the probe body. The amplifier circuit receives a capacitively sensed signal from the probe tip and produces an amplified signal in response thereto. The amplifier has a large bandwidth to accommodate high-frequency digital signals. Further, the amplifier has a very low input capacitance and a high input resistance to reduce signal attenuation and loading of the circuit being probed. The amplifier circuit is disposed in the probe body closely adjacent to the probe tip in order to reduce stray and distributed capacitances. A reconstruction circuit reconstructs digital signals from the amplified capacitively sensed signal.

Abstract: A capacitance sensing probe is disclosed for taking measurements of features on a workpiece surface. The probe has two electrodes (E.sub.1, E.sub.2) spaced apart in the direction of movement of the probe with the electrodes being disposed in an attitude normal to the surface. Only the edge of the electrodes are exposed to the surface and an electric circuit (EC) is provided for determining the effect of the surface on the fringe field capacitance between the electrodes. Guard electrodes are used to reduce the stray capacitance being measured. Various embodiments are shown with different numbers and arrangements of electrodes.

Abstract: A connector is provided, for making electrical connections to a replaceable circuit card. A shielded connection is provided by the connector, maintaining high signal integrity without degradation of S/N ratio by loss of signal or introduction of external noise as a result of connection characteristics without noise across the connection. The circuit card includes only features which are inexpensive to produce, resulting in a low circuit card replacement cost.

Abstract: A capacitance monitor for monitoring the moisture content of soil is disclosed in which a capacitance sensing probe having a generally cylindrical probe body and an elongate tubular handle is inserted into an access tube to measure the capacitance of the soil and to thereby determine the moisture content of the soil. The cylindrical probe body has aluminum electrodes separated by a polypropylene dielectric spacer and two sets of circumferentially spaced apart spring biased stainless steel plungers that extend radially outwardly from the probe body to engage the side wall of the access tube and to center the probe body within the access tube. The two sets of plungers are located at opposite ends of the probe body.

Abstract: A device for detecting a coagulation in a mixed phase container, such as a fluidized bed type olefin polymerization reactor, includes at least one coagulation detecting part mounted on an inner surface of the reactor, and a coagulation detecting circuit for outputting an electrical signal in response to a change in capacitance between a main electrode of the coagulation detecting part and the surrounding inner surface of the reactor. When any coagulation is attached on the inner surface of the mixed phase container, the state of production of the coagulation can be obtained from a change in output signal from the coagulation detecting circuit connected to the coagulation detecting part.

Abstract: A coating thickness gauge includes a measurement transducer and a particularly advantageous probe arrangement. The probe arrangement includes a probe assembly and a probe housing that encircles the probe assembly. The probe assembly may include an inductor that forms a part of an LC oscillator. The gauge is able to measure the thickness of coatings on magnetic and non-magnetic substrates through use of the same probe assembly. Alternatively, the probe assembly can include a capacitor forming a part of an LC or an RC oscillator. The bottom surface of the probe housing has two oppositely positioned V-shaped grooves formed therein for facilitating the measurement of coating thicknesses on convex surfaces. The outer peripheral surface of the probe housing includes two spaced apart flat surfaces connected together by two arcuate surfaces for stabilizing the gauge during measurement of coating thicknesses on concave surfaces.

Abstract: A fuel composition sensor provides to a voltage divider comprising sensor and reference capacitors a voltage which oscillates between two voltages at a comparatively low frequency, such as 6 KHz, for lower power dissipation, but which switches fast to produce periodic fast voltage changes across the voltage divider to produce voltage spikes at the junction of the capacitors indicative of the capacitance ratio and thus of fuel composition.

Abstract: A rotatable capacitance sensor preferably constructed of a generally cylindrical body mounted on bearings to a carriage assembly. The body has a number of parallel, spaced apart conductive plates having edges extending through the exterior body surface, and alternate ones of the plates are connected via a bearing to a conductor in one part of the carriage assembly, and the remaining ones of the plates are connected via a bearing to a second conductor in another part of the carriage assembly.

Abstract: Apparatus and methods for measuring the properties of a material by employing a driven electrode, a sensing electrode and a shunting electrode. The shunting electrode is disposed in proximity to the driven and sensing electrodes and functions to increase the sensitivity of electrical measurements made between the driven and sensing electrodes by influencing the coupling of the imposed electric field to the sensing electrode to a degree related to the properties of the material under test.

Abstract: An apparatus and method employing a liquid level detection conductance probe mounted in a container to sense resistive differences between the probe and container depending upon the presence or absence of liquid therebetween. A sensing circuit senses probe signal variations and stores a probe signal. A comparator compares the stored probe signal to current probe signals and switches means connected to the comparator depending upon the presence or absence of liquid between the probe and container. The sensing circuit has sufficient sensitivity to differentiate between liquid between the probe and container and foam or scale deposits therebetween.

Abstract: A capacative probe is provided which has reduced effective stray capacitance and is thus able to accurately detect probe contact with a conducting fluid with small fluid volumes. Effective stray capacitance is reduced by dividing stray capacitance sources into two or more sources, by reducing the capacitance value of each of the divided stray capacitance sources to a value which is substantially less than the capacitance difference which occurs as a result of probe contact with the fluid and by connecting at least selected ones of the divided stray capacitance sources in series to further reduce effective stray capacitance.

Abstract: A phase discriminating capacitive sensor array system which provides multiple sensor elements which are maintained at a phase and amplitude based on a frequency reference provided by a single frequency stabilized oscillator. Sensor signals provided by the multiple sensor elements are controlled by multiple phase control units, which correspond to the multiple sensor elements, to adjust the sensor signals from the multiple sensor elements based on the frequency reference. The adjustment made to the sensor signals is indicated by output signals which indicate the proximity of the object. The output signals may also indicate the closing speed of the object based on the rate of change of the adjustment made, and the edges of the object based on a sudden decrease in the adjustment made.

Abstract: A rotatable capacitance sensor preferably constructed of a generally cylindrical body mounted on bearings to a carriage assembly. The body has a number of parallel, spaced apart conductive plates having edges extending through the exterior body surface, and alternate ones of the plates are connected via a bearing to a conductor in one part of the carriage assembly, and the remaining ones of the plates are connected via a bearing to a second conductor in another part of the carriage assembly.

Abstract: A sensor which allows dielectric measurements to be made on a high temperature product such as a molten plastic flowing in a conduit. It comprises a ceramic cylinder with an interdigitated electrode capacitor patterned into the inside wall. Uses of the sensor include continuous determination of copolymer composition and polymer viscosity (molecular weight) in a completely non-obstructive manner.

Abstract: An apparatus for testing an alcohol concentration sensor used in measuring an alcohol concentration of a fluid containing alcohol. The alcohol concentration sensor includes a capacitive probe having a capacity dependent upon the alcohol concentration of the fluid, and a circuit sensitive to the capacity of the capacitive probe for producing an output signal indicative of a sensed alcohol concentration. The apparatus comprises a plurality of capacitors having different capacities each corresponding to a predetermined alcohol concentration. A selected one of the capacitors is connected in parallel with the capacitive probe. When the selected capacitor is connected with the capacitive probe, the output signal is read.

Abstract: The invention is an apparatus for measuring the volume of water intrusion underwater cables without dissecting the cables. The apparatus comprises a novel arrangement of a capacitive test fixture and an electrical impedance analyzer to provide measurement of the volume of water in a cable based on cable capacitance. The capacitive test fixture measures the electrical capacitance along the cable as the cable is fed through the test fixture.

Abstract: A fuel sensor for sensing methanol in methanol-mixed fuel, which comprises a structure which defines a fuel passage through which the mixed fuel flows, an electrode assembly including a pair of probe portions which are exposed to the fuel passage, and an electric circuit causing the paired probe portions to exhibit positive and negative characteristics respectively in the mixed fuel. At least the positive probe portion is intimately covered with an electrically insulating film.

Abstract: A probe assembly and method is disclosed which includes a plurality of sensors for respectively mreasuring predetermined attributes of a fluid. The probe assembly comprises a first sensor for measuring the quantity of the fluid. The first sensor includes a capacitive reference cell and a capacitive product measurement cell, each of the cells being characterized by respective associated capacitances. In particular, the capacitance associated with the capacitive product measurement cell varies in accordance with the quantity of the fluid so that the quantity of the fluid is indicated by the quantitative relationship between the magnitude of the capacitance associated with the capacitive reference cell and the magnitude of the capacitance associated with the capacitive product measurement cell.

Abstract: A capacitive liquid level sensor utilizes capacitive principles to sense the level of a liquid contained within a receptacle. As a liquid rises and falls in the container, the dielectric effect of the liquid changes the effective capacitance of a sensing capacitor which is detected by electronic circuitry coupled to the sensor. One plate of the sensor capacitor is a probe disposed within a receptacle while a grounded conductive portion of the receptacle is a second plate of the capacitor. The liquid within the receptacle acts as a dielectric between the plates.

Abstract: An apparatus for ascertaining the alcohol content or the calorific value of a mixture containing alcohol and gasoline includes an electrically conductive housing through which the mixture flows and in which at least one physical parameter of the mixture is measured to produce a measurement. An electronic measuring circuit is disposed in the housing for evaluating the measurement. The housing has a wall with a part of the wall forming a first electrode of a capacitor. An intermediate plate is associated with the housing. An electrically conductive sensor element is secured in the intermediate plate and partly surrounded by the mixture. The electrically conductive sensor element forms a second electrode of the capacitor and forms an electrical connection between the second electrode and the measuring circuit.

Abstract: A two axis sensor is provided for detecting angular movement relative to either of two mutually perpendicular axes. The device includes a two-axis sensor comprising an upwardly directed, spherically shaped common electrode, an upwardly directed spherically shaped insulating member uniformly spaced from the common electrode to form a cavity therebetween, the common electrode and the insulating member being sealed to each other about respective peripheries thereof, with a dielectric fluid contained in the cavity, a plurality of detecting electrodes provided on an underside of the insulating member, the detecting electrodes formed by a selectively applied conductive surface coating on the underside, and means for detecting variations in capacitance proportional to movement of the sensor relative to each of two mutually perpendicular axes by reason of movement of the dielectric fluid within the cavity.

Abstract: Particular non-metallic materials are detected by a recognition of the way in which their electrical properties vary with the frequency of an applied alternating electric field. In one method a body being tested is subjected to electromagnetic radiation at each of a plurality of different frequencies, the pattern of variation of the body's reflectivity is evaluated and compared with stored information on the conductivity/frequency characteristic of the non-metallic material to be deleted. In another method a body being tested is subjected to a burst of electromagnetic energy and a measurement is made of the time taken for the body to retransmit energy absorbed from the burst.

Abstract: A liquid presence detector and method of using the same for a gas fluid pipe includes a helically wound insulated wire positioned inside the pipe such that an outer periphery of the wire contacts an inner surface of the pipe along an axial portion thereof. The pipe and wire form two plates of a capacitor with the pipe being connected to electrical ground for electromagnetic shielding and shock protection. The wire plate of the capacitor contacts liquid particles that travel along the pipe wall. A circuit is provided to measure capacitance between the wire and the pipe to detect liquid contacting the wire and pipe.

Abstract: A hot gas turbine engine capacitive probe clearanceometer is employed to measure the clearance gap or distance between blade tips on a rotor wheel and its confining casing under operating conditions. A braze sealed tip of the probe carries a capacitor electrode which is electrically connected to an electrical inductor within the probe which is inserted into a turbine casing to position its electrode at the inner surface of the casing. Electrical power is supplied through a voltage controlled variable frequency oscillator having a tuned circuit in which the probe is a component. The oscillator signal is modulated by a change in electrical capacitance between the probe electrode and a passing blade tip surface while an automatic feedback correction circuit corrects oscillator signal drift. A change in distance between a blade tip and the probe electrode is a change in capacitance therebetween which frequency modulates the oscillator signal.

Abstract: A liquid presence detector and method of using the same for a gas fluid conduit is provided by a capacitor that is placed inside the conduit and that is formed of two interwoven wire grids with one of the grids being insulated and the other grid being uninsulated. In one embodiment, the capacitor is generally planar and is oriented generally transverse a longitudinal axis of the conduit with a peripheral portion lying in a generally axial orientation along an inner surface of the conduit. A circuit is provided that measures capacitance between the two wire grids. The conduit is electrically grounded. Liquid particles entrained in the gas fluid or traveling along the conduit wall contact the capacitor and changes the capacitance thereof. In another embodiment, the capacitor is formed as a generally open cylinder positioned coaxially within the conduit.

Abstract: A method for measuring the gap between a roller and an adjacent member in an electrophotographic printing machine is disclosed wherein a flexible sensor is provided and passed into the developer sump area in the printing machine. The flexible sensor is passed between the roller and adjacent member for measuring the distance therebetween. The flexible sensor is comprised of a capacitance sensor and a metal laminate. As the sensor is passed between the roller and adjacent member, the sensor is magnetically attracted to the roller and conforms to the circumference of the roller. The adjacent member can be a trim bar within the developer sump.

Abstract: A capacitance-type measuring apparatus includes first and second support members which are movable with respect to one another along a measurement axis; a first electrode array and a second electrode disposed on the first support member; and a third electrode array disposed on the second support member and capacitively coupling the first electrode array and second electrode for transmission of a signal between the first electrode array and second electrode through the third electrode array. One of the first electrode array or the second electrode is formed to have end portions configured such that the degree of coupling between the first electrode array and second electrode through the third electrode array decreases linearly along the extent of each end portion relative to the measurement axis. This configuration permits improved measurement accuracies by reducing the effects of tilt between the first and second support members which changes the spacing between such members along the axis of measurement.