Abstract: Provided is a semiconductor device capable of performing fault detection on a circuit executing an AD conversion operation during the AD conversion operation. The semiconductor device includes an analog to digital conversion unit that converts a second analog signal into a first digital signal, in which the second analog signal is obtained by adding a first analog signal and an offset signal with a signal band different from the first analog signal, a signal extraction unit that extracts from the first digital signal a second digital signal corresponding to the signal band of the offset signal, and a fault detection unit that detects a fault in the analog to digital conversion unit based on the second digital signal and a setting value that is set upon generating the offset signal.
Abstract: A calibrator apparatus for calibrating the performance of partial discharge measurements at electrical components, such as high voltage cables or transformators, comprises a housing (1) and an external electrode (4) to be mounted at the housing (1). A control unit (2) generates a defined charge pulse (QS) depending on a stray capacitance (CS) of the external electrode (4) against ground, which is supplied to the electrical component.
Abstract: A probe apparatus configured to measure a set of electrical characteristics in a plasma processing chamber, the plasma processing chamber including a set of plasma chamber surfaces configured to be exposed to a plasma is disclosed. The probe apparatus includes a collection disk structure configured to be exposed to the plasma, whereby the collection disk structure is coplanar with at least one of the set of plasma chamber surfaces. The probe apparatus also includes a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers, wherein the set of electrical characteristics is generated by an ion flux of the plasma. The probe apparatus further includes an insulation barrier configured to substantially electrically separate the collection disk and the conductive path from the set of plasma chamber surfaces.
Type:
Grant
Filed:
June 29, 2005
Date of Patent:
January 15, 2008
Assignee:
Lam Research Corporation
Inventors:
Christopher Kimball, Eric Hudson, Douglas Keil, Alexei Marakhtanov
Abstract: A method for triggering a partial discharge acquisition from an energy generating device is described. The method includes generating a power source sensed signal by sensing electromagnetic energy output from the energy generating device, producing an present flux density trace from the power source sensed signal, and determining a lack of variation in timing from at least one of the present flux density trace and a comparison between the present flux density trace and at least one prior flux density trace.
Type:
Grant
Filed:
September 20, 2005
Date of Patent:
October 16, 2007
Assignee:
General Electric Company
Inventors:
Gregory John Goodrich, James Clark Powzyk, Steven Glenn Ostrander, Kotesh Kummamuri Rao
Abstract: A partial discharge measurement system is provided which comprises a digital peak detection circuit. The partial discharge measurement system digitizes and detects both positive and negative slopes of a signal from an electrical device being tested. The partial discharge measurement system controls the shape of pulse capture windows in accordance with different modes of operation, and controls the timing of pulse data capture depending on the mode of operation and the polarity of the signal.
Abstract: A breakdown voltage measurement system is provided which employs a digital peak detection circuit for peak voltage measurement. The breakdown voltage measurement system employs a voltage memory device for storing successive peak values obtained from the digital peak detection circuit. The breakdown voltage measurement system is programmable to commence searching of stored peak values following breakdown of a sample electrical device being tested to determine a voltage measurement immediately before the breakdown occurred.